JP2009021773A - 圧電振動子の製造方法 - Google Patents
圧電振動子の製造方法 Download PDFInfo
- Publication number
- JP2009021773A JP2009021773A JP2007182203A JP2007182203A JP2009021773A JP 2009021773 A JP2009021773 A JP 2009021773A JP 2007182203 A JP2007182203 A JP 2007182203A JP 2007182203 A JP2007182203 A JP 2007182203A JP 2009021773 A JP2009021773 A JP 2009021773A
- Authority
- JP
- Japan
- Prior art keywords
- internal space
- piezoelectric vibrator
- manufacturing
- piezoelectric
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title abstract description 35
- 229910052751 metal Inorganic materials 0.000 claims abstract description 42
- 239000002184 metal Substances 0.000 claims abstract description 42
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 25
- 239000001301 oxygen Substances 0.000 claims abstract description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000004140 cleaning Methods 0.000 claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 239000007789 gas Substances 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000006866 deterioration Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 26
- 238000010586 diagram Methods 0.000 description 13
- 239000005416 organic matter Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 235000002918 Fraxinus excelsior Nutrition 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000002956 ash Substances 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007182203A JP2009021773A (ja) | 2007-07-11 | 2007-07-11 | 圧電振動子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007182203A JP2009021773A (ja) | 2007-07-11 | 2007-07-11 | 圧電振動子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009021773A true JP2009021773A (ja) | 2009-01-29 |
| JP2009021773A5 JP2009021773A5 (enExample) | 2010-08-12 |
Family
ID=40361018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007182203A Withdrawn JP2009021773A (ja) | 2007-07-11 | 2007-07-11 | 圧電振動子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009021773A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011014652A (ja) * | 2009-06-30 | 2011-01-20 | Panasonic Electric Works Co Ltd | 機能性デバイスの製造方法および、それにより製造された機能性デバイスを用いた半導体装置の製造方法 |
| JP2011199332A (ja) * | 2010-03-17 | 2011-10-06 | Seiko Epson Corp | 圧電振動片および圧電デバイス |
| JP2022003823A (ja) * | 2018-06-11 | 2022-01-11 | リバーエレテック株式会社 | 水晶デバイスの周波数調整方法 |
-
2007
- 2007-07-11 JP JP2007182203A patent/JP2009021773A/ja not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011014652A (ja) * | 2009-06-30 | 2011-01-20 | Panasonic Electric Works Co Ltd | 機能性デバイスの製造方法および、それにより製造された機能性デバイスを用いた半導体装置の製造方法 |
| JP2011199332A (ja) * | 2010-03-17 | 2011-10-06 | Seiko Epson Corp | 圧電振動片および圧電デバイス |
| JP2022003823A (ja) * | 2018-06-11 | 2022-01-11 | リバーエレテック株式会社 | 水晶デバイスの周波数調整方法 |
| JP7071772B2 (ja) | 2018-06-11 | 2022-05-19 | リバーエレテック株式会社 | 水晶デバイスの周波数調整方法 |
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Legal Events
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| A521 | Written amendment |
Effective date: 20100630 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110819 |
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| A761 | Written withdrawal of application |
Effective date: 20111220 Free format text: JAPANESE INTERMEDIATE CODE: A761 |