JP2009000713A - Diffusion bonding article and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a diffusion bonding article, in which it can be simply and exactly confirmed whether many sheet members, each having a pattern formed by etching, are laminated in a correct order, correct front and back sides, and a correct angle, and a manufacturing method, therefor. <P>SOLUTION: The diffusion bonding article 1 is formed by laminating and diffusion-bonding a plurality of sheet members 10, each having a pattern 11 formed by etching. In an outer edge portion of each sheet member 10, a notch 12 indicating an order, front and back sides, and an angle in the laminating direction of the sheet members is provided. Since the notches thus exist on the side of the laminated sheet in this constitution, it can be judged after lamination whether the sheet members are correctly laminated in the order, the front and back sides, and the angle, by observing the positions of the notches 12 and inspecting whether they are rightly positioned. The notches 12 are formed in an etching process for forming the patterns 11 (half etching), which eliminates the need for another process for forming the notches. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a diffusion bonded product in which a large number of sheet-like members are stacked and diffusion bonded, and a method for manufacturing the diffusion bonded product. In particular, the present invention relates to a diffusion bonded product devised so that it can be easily and accurately determined whether a large number of sheet-like members having patterns formed by etching are laminated in the correct order, front, back, and angle, and a method for manufacturing the diffusion bonded product.

  Various precision parts can be manufactured by laminating and bonding a large number of sheet-like members having patterns formed by etching. Depending on the shape and arrangement of the pattern, it is possible to provide a flow path and a hollow portion inside, or to produce a fine hole and a concave portion with high accuracy. Examples of such diffusion bonding products include heat exchanger related parts, inkjet nozzles, fuel cell related parts, and the like.

  In such a diffusion bonded product, many of the sheet-like members having the same outer dimensions are laminated, so that the sheet-like members may not be laminated in the correct order, front, back, and angle. In addition, when the sheet-like member is displaced in the horizontal direction when laminated, it can be determined by the outer shape, and can be correctly laminated before joining. Further, the outermost sheet-like member and the outermost sheet-like member can be visually determined. However, especially in products with a flow path or hollow part inside, the position of the sheet-like member between the outermost surface and the outermost surface cannot be judged from the appearance, so cut and confirm the product diffusion bonded after lamination Or X-ray inspection or non-destructive inspection. However, such an inspection method takes time and cost. Furthermore, when cutting, the reliability of other things cannot be obtained. In addition, if a defect is found after diffusion bonding, the product must be discarded, and material costs and costs required for diffusion bonding are wasted.

  The present invention has been made in view of the above problems, and it is possible to easily and accurately confirm whether a large number of sheet-like members having patterns formed by etching are laminated in the correct order, front, back, and angle. An object of the present invention is to provide a diffusion bonded product devised as described above and a method for manufacturing the same.

  The method for manufacturing a diffusion bonded product of the present invention is a method for manufacturing a diffusion bonded product in which a pattern is formed by etching on a plurality of sheet-shaped materials, and a plurality of sheet-shaped members after pattern formation are laminated and diffusion bonded. In the etching step, the sheet-like member is provided with notches indicating the order, front, back, and angle in the stacking direction of the sheet-like member in the outer edge portion of the sheet-like member, and the position of the notch is inspected. It is characterized by confirming whether or not the stacking order, front / back, and angle are correct.

  Here, in a narrow sense, the “sheet-like member” means a part that becomes a product after lamination and joining. However, in a broad sense, it also includes a frame portion that is cut off after stacking outside a product portion. The cutout for inspection can be provided on the sheet-like member and / or the frame.

  According to the present invention, since the cutout exists on the side surface of the laminated sheet, the position of the cutout can be observed after the lamination. The position of the notch indicates the order (position), front, back, and angle in the stacking direction of the sheet-like member. By checking whether the position of the notch is correct, the stacking order of the sheet-like member after stacking You can judge whether the front / back / angle is correct. Since this notch is formed at the same time as etching to form a pattern on a sheet-like member, it is only necessary to provide a notch pattern on the photomask, and there is no need for a separate process for forming the notch. Become. In addition, the outer edge part of a sheet-like member is a part which does not interfere with a pattern, and it is not necessary to process this notch after lamination | stacking.

  In the present invention, if the notch is a non-penetrating recess formed by half-etching, even if the final product is point-symmetric such as a circle or a square, the order of the sheet-like members・ The angle and front / back orientation can be judged.

In the present invention, a key that engages with a groove formed by the notch after stacking is provided, and the stacking order, front, back, and angle of the sheet-like member are inspected based on whether the key engages with the groove. More preferably.
In this case, the inspection can be performed by a simple operation of engaging the key with the groove. The grooves can be enlarged and projected and compared with a predetermined shape, or can be compared by image processing or the like.

In addition, in this invention, it is preferable that the said notch differs in a position and / or a width | variety for every kind of said sheet-like member.
In this case, a notch can be formed simultaneously with etching for forming a pattern, and one photomask can be used for each type of pattern.

Moreover, in this invention, it is preferable that the said notch is formed by the fixed rule in the lamination direction.
For example, it is easy to confirm the order if the notch is formed in a certain rule such that the position of the notch is inclined in the stacking direction or the width is increased in order from the top.

  The diffusion bonded product of the present invention is a diffusion bonded product in which a plurality of sheet-like members having patterns formed by etching are laminated and diffusion-bonded, and the stacking direction of the sheet-like members is arranged on the outer edge of the sheet-like member. Cutouts indicating the order, front, back, and angle are provided, and the cutouts are formed in a half-etching step for forming the pattern.

  As is clear from the above description, according to the present invention, since the notch is present on the side surface of the laminated product of the sheet-like member, the position of the notch can be observed after the lamination. The position of the notch indicates the order, front, back, and angle in the stacking direction of the sheet-like member. By checking whether the position of the notch is correct, the stacking order, front, back, and angle of the sheet-like member after stacking Can determine if is correct.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a view for explaining a diffusion bonded product according to a first embodiment of the present invention, FIG. 1 (A) is a plan view of a sheet-like member, and FIG. 1 (B) is a side view of the diffusion bonded product. It is.
In this example, a diffusion bonded product 1 (see FIG. 1B) in which the sheet-like members 10 shown in FIG. The sheet-like member 10 has the same outer dimensions, is made of metal (for example, SUS, nickel alloy, copper alloy, etc.), and has a thickness of, for example, 0.05 to 1.0 mm. The diffusion bonded product 1 is formed by stacking a plurality of (for example, 3 to 100) such sheet-like members 10 and performing diffusion bonding.

  The sheet-like member 10 is a sheet-like material provided with a pattern by etching. As shown to FIG. 1 (A), the sheet-like members 10-1 and 10-2 are the same types, and the same patterns 11-1 and 11-2 are formed. In the sheet-like member 10-3, a pattern 11-3 different from the sheet-like members 10-1 and 10-2 is formed. Similarly, the sheet-like member 10-n has a pattern 11-n different from the above-described sheet-like members 10-1, 10-2, and 10-3. In this example, it is assumed that the sheet-like member 10-1 shown at the top of FIG. 1A is the top and the sheet-like member 10-n shown at the bottom is the bottom, and the layers are sequentially stacked.

  Cutouts 12-1 and 12-2 are formed at the same position on the outer edges of the same type (pattern) of sheet-like members 10-1 and 10-2. Moreover, the notch 12-3 is formed also in the outer edge of another kind of sheet-like member 10-3. The positions of the notches 12-3 are different from the positions of the sheet-like members 10-1 and 10-2, and the positions of the notches 12-1 and 12-2 of the sheet-like members 10-1 and 10-2 are notched. It is formed at a position shifted to the left by the width of. Further, a notch 12-n is also formed at the outer edge of the sheet-like member 10-n on the backmost surface. The position of the notch 12-n is formed at a position further shifted to the left than the position of the notch 12-3 of the sheet-like member 10-3. In this example, the notches 12 are all rectangles having the same width and depth. Note that the width of the notch 12 may be different for each type of sheet-like member.

  The notch 12 is formed by half etching during pattern formation (in this example, half etching from the surface). That is, the cutout pattern 12 may be provided on the photomask on which the pattern 11 is formed. Thereby, the same photomask can be used for every kind of pattern.

  In the product 1 in which such sheet-like members are laminated and diffusion-bonded, as shown in FIG. 1 (B), notches 12 appear on the side surfaces of the product 1, and recesses 13 (grooves, (Shown by hatching in the figure). By comparing the shape of the recessed portion 13 with the shape of the recessed portion of the product laminated in advance in the correct order, angle, and front and back, it can be determined whether or not the position of the notch 12 is correct. That is, if the shape of the recess 13 is different, the position of the notch 12 is not correct, and it can be determined that the stacking order / angle / front and back are not correct. In this example, the position of the notch 12 is formed so as to be shifted to the left in order from the top. Therefore, when the position of the notch 12 does not apply to this rule, it can be determined that the stacking order is incorrect. Moreover, since the notch 12 is produced by half etching, the notch 12 appears on the surface side of the sheet-like member 10 on the side surface. And the recessed part 13 of a side surface becomes what the notch 12 lined up alternately in the lamination direction. Therefore, for example, when the notch 12 is continuous, it can be determined that the front and back of the sheet-like member 10 are incorrect at that location.

FIG. 2 is a side view showing a diffusion bonded product according to the second embodiment of the present invention.
As in FIG. 1, the diffusion bonded product 1 ′ in this example is provided with notches 12 </ b> A, 12 </ b> B, and 12 </ b> C by half etching at the same position for each type of sheet members 10 </ b> A, 10 </ b> B, and 10 </ b> C. However, in this example, the same type of sheet-like member is used repeatedly in a stacking direction. In this case, if the positions of the notches 12 are the same for each type of the sheet-like member 10, it can be determined that the layers are stacked in the correct order. Moreover, if the notches 12 appear alternately on the side surface, it can be determined that the layers are correctly laminated.

FIG. 3 is a side view showing another example of the shape of the recess formed by the notches appearing on the side surface of the diffusion bonded product.
In this example, unlike the example of FIGS. 1 and 2, the notch 12 is formed by through etching instead of half etching.
FIG. 3A shows two sheet members 10A of type A, one sheet member 10B of type B, three sheet members 10C of type C, and one sheet member 10D of type D. , Two sheet members 10E of type E and one sheet member 10F of type F are stacked in order from the top. In this example, a notch is formed at the same position for each type of sheet-like member, and the position of the notch 12 is shifted rightward from the type A to the type F by the width of the notch 12. ing. For this reason, in the product, if the concave portion 13 is formed continuously downward from the top, it can be determined that the stacking order is correct.

  FIG. 3B is a diagram in which different types of sheet-like members (type A to type J) 10A to 10J are laminated in order from above, and the notches 12A to 12J of each sheet-like member 10 are from the top (type A). The width of the cutouts 12 is the same, but the positions of the left ends of the cutouts 12 are the same. Also in this diffusion bonded product, if the width of the notch is increased in order from the top and the shape of the recess 13 is a substantially right triangle, it can be determined that the stacking order is correct.

  In these examples, as shown in FIG. 3A, the position of the notch 12 is provided avoiding the central portion in the width direction of the sheet-like member 10, or as shown in FIG. It is preferable that the width-direction center is different from the width-direction center of the sheet-like member 10 so that the width of the side portion of the left-side sheet-like member of the notch 12 is clearly different from the width of the right-side side portion. Thereby, it can be judged whether the front and back of the sheet-like member 10 are correct.

4A and 4B are diagrams for explaining a diffusion bonded product according to the third embodiment of the present invention. FIG. 4A is a plan view of a sheet-like member, and FIG. 4B is a side view of the diffusion bonded product. It is.
In general, a sheet-like member 10 as a product is supported by a bridge 16 on a frame-like frame 15. Then, after the sheet-like member 10 is laminated together with the frame 15 and diffusion bonded, the frame 15 is separated from the bonded product by the bridge 16. Therefore, in this example, a notch 17 is formed on the outer edge of the frame 15 by half-etching from the surface as in FIG.

  That is, the notches 17-1 and 17-2 are formed on the outer edges of the frames 15-1 and 15-2 of the sheet members 10-1 and 10-2 of the same type (pattern). Further, a notch 17-3 is also formed on the outer edge of the frame 15-3 of another type of sheet-like member 10-3. A notch 17-n is also formed on the outer edge of the frame 15-n of the sheet-like member 10-n on the rearmost surface. The positions of these notches 17 are shifted to the left in order from the top as in FIG.

  In a product in which such sheet-like members 10 are laminated and diffusion-bonded, as shown in FIG. 4B, a recess (groove) 18 is formed on the side surface of the frame 15 by the notch 17. By comparing the shape of the concave portion 18 with the shape of the concave portion of the product laminated in advance in the correct order, front, back, and angle, it can be determined whether or not the position of the notch is correct. That is, if the shape of the recess is different, the position of the notch is not correct, and it can be determined that the stacking order / front / back / angle is not correct.

  In this example, since the frame 15 is cut off from the product 1 after lamination, the recess 18 due to the notch does not remain in the product itself. For this reason, it is suitable for the case where there is a problem if there is a recess on the side surface of the product 1.

FIG. 5 is a view for explaining a diffusion bonded product according to the fourth embodiment of the present invention.
In this example, as in FIG. 1, a key 20 is prepared in advance so as to engage the recess 13 formed on the side surface of the diffusion bonded product 1 in which the sheet-like member 10 provided with the notches 12 is produced in the correct stacking order. deep. The key 20 includes, for example, protrusions 22-1 to 2-3 having the same shape as the notches at positions facing the notches 12-1 to 12-3 on the surface facing the recess 13 of the plate 21. can do. Then, the plate 20 is applied to the side surface of the laminated sheet-like member 10, and the protrusions 22-1 to 3-3 of the plate 20 are notched 12-1 to 3-3 (recessed portion 13) on the side surface of the laminated sheet-like member 10. ) And the surface of the plate 21 and the side surface of the stacked sheet-like member 10 come into contact with each other, it can be determined that the layers are stacked in the correct order, front, back, and angle.

  In general, etching is performed from the front and back surfaces of a sheet-like material. And the etching part to the thickness direction center of the sheet-like material from the front surface side and the etching part to the thickness direction center of the sheet-like material from the back surface are connected to form a penetration part. At this time, a fine projection (burr) is formed at the boundary between the two etched portions (the center in the thickness direction of the sheet-like material). For this reason, for example, when the etching side surface is visually observed in order to count the number of stacked layers, this protrusion may appear as a boundary line between the sheet-like materials (sheet-like members), and the count number may be wrong. However, if notches are formed by half-etching, the notches appear alternately as described above, so that such counting errors can be reduced. Furthermore, by providing a key as shown in FIG. 5, it is possible to definitely determine the stacking order, front / back, and angle of a large number of stacked products.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the diffusion bonding goods which concern on the 1st Embodiment of this invention, FIG. 1 (A) is a top view of a sheet-like member, FIG.1 (B) is a side view of a diffusion bonding goods. It is a side view which shows the diffusion bonding goods which concern on the 2nd Embodiment of this invention. It is a side view which shows the other example of the form of the recessed part comprised by the notch which appears on the side surface of a diffusion bonding article. FIG. 4A is a plan view of a sheet-like member, and FIG. 4B is a side view of a diffusion-bonded product, illustrating a diffusion-bonded product according to a third embodiment of the present invention. It is a figure for demonstrating the diffusion bonding goods which concern on the 4th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Diffusion bonding article 10 Sheet-like member 11 Pattern 12, 17 Notch 13, 18 Recessed part 15 Frame 16 Bridge 20 Key 21 Plate 22 Projection

Claims (4)

A method of manufacturing a diffusion bonded product in which a pattern is formed by etching on a plurality of sheet-shaped materials, and a plurality of sheet-shaped members after pattern formation are laminated and diffusion-bonded,
In the etching step, the outer edge portion of the sheet-like member is provided with notches indicating the order, angle, front and back in the stacking direction of the sheet-like member,
A method of manufacturing a diffusion bonded product, wherein the position of the notch is inspected to confirm whether the stacking order, angle, and front / back of the sheet-like member are correct.   The method for manufacturing a diffusion bonded product according to claim 1, wherein the notch is a non-penetrating recess formed by half etching. A key that engages with a groove formed by the notch after lamination,
The method for manufacturing a diffusion bonded article according to claim 1 or 2, wherein the stacking order, front / back, and angle of the sheet-like member are inspected depending on whether or not the key engages with the groove. A diffusion bonded product in which a plurality of sheet-like members having a pattern formed by etching are laminated and diffusion bonded,
The outer edge portion of the sheet-like member is provided with notches that indicate the order, front and back, and angle in the stacking direction of the sheet-like member,
A diffusion bonded product, wherein the notch is formed by a half-etching process for forming the pattern.

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