JP6814024B2 - Guide plate for probe card - Google Patents

Description

The present invention relates to a probe card guide plate, and more particularly, to an improvement of a probe card guide plate in which a large number of guide holes are arranged in a grid pattern.

Generally, a probe card is configured by erection of a large number of contact probes on a wiring board, and is used in an inspection process of a semiconductor integrated circuit. The inspection of the semiconductor integrated circuit is performed by bringing the contact probe into contact with the electrode pad of the semiconductor integrated circuit formed on the semiconductor wafer and conducting the semiconductor integrated circuit and the external device.

Some conventional probe cards are provided with a guide plate for positioning the probe (for example, Patent Document 1). A large number of guide holes through which the probe is inserted are formed in the guide plate, and the probe is positioned in a horizontal plane by supporting the probe so as to be vertically movable.

The shape of the guide hole, that is, the shape of the guide hole penetrating from the main surface to the back surface of the guide plate when viewed from the vertical direction is formed so as to correspond to the cross-sectional shape of the probe. Recent fine probes are formed using MEMS (Micro Electro Mechanical Systems) technology and have a substantially rectangular cross-sectional shape, so that the guide holes are also formed to be substantially rectangular.

However, the shape of the guide hole is formed by photolithography technology and is limited by the pattern processing accuracy. Therefore, the vertices of the rectangle have a gentle R shape, and the curvature thereof is much smaller than the vertices of the rectangular cross section of the probe. Therefore, the ridge line on the outer peripheral surface of the probe may come into contact with the inner surface of the guide hole, and the probe or the guide hole may be damaged or cutting chips may be generated.

Therefore, a technique for preventing contact between the ridgeline of the probe and the inner surface of the guide hole has been proposed (for example, Patent Document 2). In the guide plate described in Patent Document 2, a groove is provided at each of the abutting portions of the four wall surfaces of the through hole main body to prevent the corner portion of the probe from coming into contact with the inner surface of the guide hole.

Japanese Unexamined Patent Publication No. 2012-93127 Japanese Unexamined Patent Publication No. 2014-181910

In the conventional guide plate described above, grooves are formed at each apex of the guide hole. Therefore, if the probes are arranged at a narrow pitch, there is a problem that the grooves of the adjacent guide holes are too close to each other, the width of the member separating the guide holes is narrowed, and the mechanical strength of the guide plate is lowered. .. Further, in order to secure the mechanical strength of the guide plate, there is a problem that the probes cannot be arranged at a narrow pitch.

Further, it is considered that if the depth of the groove is made shallow, the distance between the adjacent guide holes can be lengthened. However, since the groove is also restricted by the pattern processing accuracy by the photolithography technique, there is a problem that there is a limit in making the groove shallow while preventing the ridgeline of the probe from contacting the inner surface of the guide hole.

The present invention has been made in view of the above circumstances, and an object of the present invention is to apply a probe card guide plate capable of ensuring the mechanical strength of the guide plate. Another object of the present invention is to provide a guide plate for a probe card capable of narrowing the pitch of guide holes.

The guide plate for a probe card according to the first aspect of the present invention includes a large number of guide holes arranged in a grid pattern so as to be aligned in the first direction and the second direction, which are substantially orthogonal to each other. It is provided with a rectangular probe insertion portion surrounded by sides extending in the first direction and the second direction, and four groove portions each containing four virtual vertices corresponding to the four vertices of the probe insertion portion. Of the two opposing groove portions belonging to at least two guide holes adjacent to each other in the first direction, one of the groove portions has a depth of the first direction with respect to the probe insertion portion of the depth of the second direction. The other groove portion is shallower in the second direction with respect to the probe insertion portion than in the first direction.

By providing the guide hole with a rectangular probe insertion portion and four groove portions each containing the four virtual vertices of the probe insertion portion, the ridge line on the outer peripheral surface of the probe comes into contact with the inner peripheral surface of the guide hole. , The probe or guide hole can be prevented from being damaged, or cutting chips can be prevented from being generated.

Further, of the two opposing groove portions belonging to the two guide holes adjacent to each other in the first direction, the depth of one groove portion is shallower than the depth of the second direction, and the other groove portion is , The depth in the second direction is shallower than the depth in the first direction. Therefore, while these grooves reliably include the virtual apex of the probe insertion portion, it is possible to secure a longer distance between the grooves than the conventional guide plate.

In addition to the above configuration, the probe card guide plate according to the second aspect of the present invention has two groove portions facing the other of the two guide holes among the four groove portions belonging to one of the two guide holes. One has a depth in the first direction with respect to the probe insertion portion shallower than the depth in the second direction, and the other of the two grooves has a depth in the second direction with respect to the probe insertion portion in the first direction. Shallower than the depth. Further, the groove portion belonging to the other of the two guide holes and facing the one of the two groove portions has a depth in the second direction with respect to the probe insertion portion shallower than the depth in the first direction. The groove portion belonging to the other side of the guide hole and facing the other side of the two groove portions has a depth in the first direction with respect to the probe insertion portion shallower than the depth in the second direction.

By adopting the above configuration, the four grooves reliably contain the virtual vertices of the probe insertion portion, while the shortest distance between the guide holes adjacent to each other in the first direction is longer than that of the conventional guide plate. Can be secured.

In addition to the above configuration, the probe card guide plate according to the third aspect of the present invention has two groove portions facing the other of the two guide holes among the four groove portions belonging to one of the two guide holes. In each case, the depth in the first direction with respect to the probe insertion portion is shallower than the depth in the second direction. Further, each of the two groove portions belonging to the other of the two guide holes and facing the two groove portions has a depth in the second direction with respect to the probe insertion portion shallower than the depth in the first direction.

By adopting the above configuration, the four grooves reliably contain the virtual vertices of the probe insertion portion, while the shortest distance between the guide holes adjacent to each other in the first direction is longer than that of the conventional guide plate. Can be secured.

In addition to the above configuration, the probe card guide plate according to the fourth aspect of the present invention has two aligned guide holes in each of the first direction and the second direction, and is different from the at least four guide holes adjacent to each other. One of the two arbitrary groove portions belonging to the above and facing each other in the first direction or the second direction has a depth in the first direction with respect to the probe insertion portion shallower than the depth in the second arrangement direction. The other of the two arbitrary grooves has a depth in the second direction with respect to the probe insertion portion shallower than the depth in the first arrangement direction.

By adopting the above configuration, it is possible to secure a longer distance than the conventional guide plate as the shortest distance between the guide holes adjacent to each other in both the first direction and the second direction.

In the probe card guide plate according to the fifth aspect of the present invention, in addition to the above configuration, the outer edge of the groove is a part of the outer edge of an arc or an ellipse.

In the probe card guide plate according to the present invention, two grooves facing each other are arranged so as to be biased in different directions, so that a longer distance can be secured between adjacent guide holes as compared with the prior art. it can. Therefore, the mechanical strength of the guide plate can be ensured. In addition, the guide holes can be narrowed in pitch.

It is sectional drawing which showed one structural example of the probe card 100 including the guide plate 105 by Embodiment 1 of this invention. It is a top view which showed one structural example of the guide plate 105 of FIG. It is sectional drawing which showed the cut surface when the guide plate 105 of FIG. 2 was cut by the AA cutting line. It is an enlarged perspective view which showed the guide hole 10 of FIG. It is a figure which showed an example of the detailed structure of the shape of the guide hole 10 of FIG. It is a figure which showed an example of the arrangement of the guide hole 10 of FIG. It is a figure which showed the conventional guide plate 105'as a comparative example. An example of the shape of the guide hole 10 according to the second embodiment of the present invention is shown. It is a figure which showed an example of the arrangement of the guide hole 10 by Embodiment 2 of this invention. An example of the shape of the guide hole 10 according to the third embodiment of the present invention is shown. It is a figure which showed an example of the arrangement of the guide hole 10 by Embodiment 3 of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the present specification, for convenience, the guide plates 105 are arranged in the horizontal direction, and the directions in which they intersect each other in the horizontal plane are described as the horizontal direction and the vertical direction, but the posture when the guide plate 105 according to the present invention is used is limited. It's not something to do. Further, the shape of the guide hole means a shape seen from the vertical direction.

Embodiment 1.
<Probe card 100>
FIG. 1 is a cross-sectional view showing a configuration example of the probe card 100 including the guide plate 105 according to the first embodiment of the present invention, and shows a cut surface obtained by cutting the probe card 100 by a vertical plane.

The probe card 100 is an inspection device that electrically connects to an inspection object (not shown) such as a semiconductor wafer, and a large number of probes 106 that come into contact with a large number of electrode terminals on the inspection object correspond to the electrodes. It is arranged so as to. The illustrated probe card 100 is composed of a main substrate 101, a reinforcing plate 102, an ST (space transformer) substrate 103, a spacer 104, a guide plate 105, and two or more probes 106.

The main board 101 is a wiring board that is detachably attached to a probe device (not shown), and for example, a disk-shaped printed circuit board can be used. The main board 101 is arranged substantially horizontally, and a reinforcing plate 102 is attached to the upper surface thereof. The reinforcing plate 102 is a reinforcing member for suppressing distortion of the main substrate 101, and for example, a metal block can be used. Further, two or more external electrodes Te to which the signal terminals of the tester device (not shown) are connected are provided outside the reinforcing plate 102, that is, on the outer peripheral edge of the upper surface of the main substrate 101.

The ST board 103 is a wiring board that converts the arrangement pitch of the electrodes, and is attached to the lower surface of the main board 101. Two or more probe electrodes Tp to which the probe 106 is connected are arranged on the lower surface of the ST substrate 103. The probe electrodes Tp are arranged at a pitch corresponding to the probe 106, and are electrically connected to the external electrodes Te arranged at a wider pitch through the wiring patterns and through holes of the ST substrate 103 and the main substrate 101. There is.

The guide plate 105 is a support member that supports the probe 106 so as to be vertically movable. For example, a substantially flat silicon substrate can be used. The guide plate 105 is fixed to the main substrate 101, the reinforcing plate 102, or the ST substrate 103 via the spacer 104, and is arranged substantially horizontally at a distance from the ST substrate 103.

The probe 106 is made of a conductive material having an elongated shape, the upper end of which is connected to the probe electrode Tp, and the lower end of which contacts the electrode terminals on the inspection object. Further, the probe 106 is elastically deformed by an overdrive that brings the inspection object in contact with the probe 106 closer to the probe card 100, and the lower end moves up and down. As such a probe 106, for example, a vertical probe having a shape extending in the vertical direction and buckling deformation due to overdrive can be used.

The probe 106 is made, for example, using MEMS technology. MEMS is a technique for producing a fine three-dimensional structure by utilizing a photolithography technique and a sacrificial layer etching technique. The photolithography technique is a technique for processing a fine pattern using a photosensitive resist used in a semiconductor manufacturing process or the like. Further, in the sacrificial layer etching technology, a lower layer called a sacrificial layer is formed, one or more layers constituting the structure are further formed on the lower layer, and then only the sacrificial layer is etched to form a three-dimensional structure. It is a technique to form.

Considering the manufacturing cost, one or more layers constituting the probe 106 are arranged in the thickness direction (horizontal direction) of the probe 106 so that the laminated surface is parallel to the longitudinal direction (vertical direction) of the probe 106. It is desirable that it is formed by deposition. In this case, four ridges extending in the longitudinal direction are formed on the outer peripheral surface of the probe 106. These ridges are formed as lines where the processed surface and the laminated surface by the photolithography technique intersect. Therefore, the cross section of the probe 106 is substantially rectangular, and its four vertices have a much larger curvature than the vertices of the rectangular pattern formed by the photolithography technique.

<Guide plate 105>
FIG. 2 is a plan view showing a configuration example of the guide plate 105 of FIG. The guide plate 105 is made of a substantially rectangular flat plate, and a large number of guide holes 10 corresponding to the probe 106 are arranged on the main surface thereof. The guide holes 10 are arranged in a grid pattern by arranging them in the horizontal direction D1 and the vertical direction D2, respectively. The horizontal direction D1 and the vertical direction D2 are substantially orthogonal to each other, and the guide holes 10 are arranged in the horizontal direction D1 at regular intervals and also in the vertical direction D2 at regular intervals. It is desirable that the intervals of the guide holes 10 in the horizontal direction D1 and the vertical direction D2 are the same.

FIG. 3 is a cross-sectional view showing a cut surface when the guide plate 105 of FIG. 2 is cut along the AA cutting line. The guide hole 10 is a through hole that penetrates the guide plate 105 arranged in the horizontal direction in the vertical direction, and by inserting the probe 106 into the guide hole 10, the guide plate 105 supports the probe 106 so as to be vertically movable. To do.

The guide plate 105 is manufactured by the following method. First, a photosensitive resist is applied onto the silicon substrate, and then the resist film is patterned to form a plurality of openings corresponding to the guide holes 10 in the resist film. Next, the guide plate 105 is completed by forming the guide holes 10 in the silicon substrate by etching the silicon substrate after the patterning of the resist film and then removing the resist film.

When the guide plate 105 is manufactured by such a method, the shape of the guide hole 10 is restricted by the pattern processing accuracy by the photolithography technique. For example, if the shape of the guide hole 10 is rectangular, its vertices have a gentle R shape, and its curvature is much smaller than the curvature of each vertex in the cross section of the probe 106. Therefore, if the shape of the guide hole 10 is rectangular, the ridge line on the side surface of the probe 106 may come into contact with the inner surface of the guide hole 10, and the probe 106 or the guide hole 10 may be damaged or cutting chips may be generated. Therefore, a groove facing the ridgeline of the probe 106 is formed on the inner surface of the guide hole 10.

<Rough configuration of guide hole 10>
FIG. 4 is an enlarged perspective view of the guide hole 10 of FIG. In the guide hole 10, four flat surfaces 11 facing the side surface of the probe 106 and four grooves 12 facing the ridgeline of the probe 106 are provided.

The four planes 11 guide the vertical movement of the probe 106 and position the probe 106 in the horizontal direction. When the probe 106 moves up and down with respect to the guide plate 105, the side surface of the probe 106 slides on the plane 11 of the guide hole 10, so that the probe 106 is supported by the plane 11 so as to be vertically movable. Further, by surrounding the probe 106 with four planes 11, the horizontal movement of the probe 106 is restricted, and the probe 106 is positioned.

The groove 12 is a recess formed on the inner surface of the guide hole 10 and has an elongated shape extending in the vertical direction. The inner peripheral surface of the groove 12 is formed of a part of a cylindrical surface. By providing the groove 12, the ridgeline of the probe 106 does not come into contact with the inner surface of the guide hole 10, and it is possible to prevent the probe 106 or the guide hole 10 from being damaged or cutting chips being generated.

<Shape of guide hole 10>
FIG. 5 is a diagram showing an example of a detailed configuration of the shape of the guide hole 10 of FIG. The shape of the guide hole 10 is composed of one probe insertion portion 20 and four groove portions 30.

The probe insertion portion 20 is an area where the probe 106 is arranged, and is composed of a rectangle surrounded by four sides 21. The four sides 21 constituting the probe insertion portion 20 correspond to the four planes 11, respectively, and extend in the horizontal direction D1 or the vertical direction D2, respectively.

The groove portion 30 is a region formed by projecting a part of the outer edge of the probe insertion portion 20 outward so that the outer edge has an arc shape and includes a virtual apex 22 which is the apex of the probe insertion portion 20. Be placed. The first to fourth groove portions 301 to 304 are shown by distinguishing the four groove portions 30 belonging to the same guide hole 10.

The groove portion 30 is provided corresponding to the virtual apex 22, but is arranged so as to be biased to either the horizontal direction D1 or the vertical direction D2 with respect to the diagonal line of the probe insertion portion 20. Due to such an eccentric arrangement, the depth d1 in the horizontal direction and the depth d2 in the vertical direction of the groove portion 30 are made different. The lateral depth d1 of the groove portion 30 means the depth of the lateral direction D1 with respect to the probe insertion portion 20, that is, the maximum depth from the side 21 extending in the vertical direction D2. Similarly, the vertical depth d2 of the groove portion 30 means the depth of the vertical direction D2 with respect to the probe insertion portion 20, that is, the maximum depth from the side 21 extending in the horizontal direction D1.

In the present embodiment, the center 31 of the groove portion 30 is arranged on the outer edge of the probe insertion portion 20 and separated from the virtual apex 22 in the clockwise direction by the radius r of the groove portion 30. Therefore, the guide hole 10 has a rotationally symmetric shape with 90 ° symmetry. Further, the outer edge of the groove portion 30 passes through the virtual apex 22, and the groove portion 30 has only a depth of either the horizontal direction D1 or the vertical direction D2.

Specifically, the first groove portion 301 is eccentrically arranged in the lateral direction D1 (right side) with respect to the virtual apex 22 on the upper left, and has a depth d1 = 0 and a depth d2 = r. The second groove portion 302 is eccentrically arranged in the vertical direction D2 (downward) from the virtual apex 22 on the upper right, and has a depth d1 = r and a depth d2 = 0. The third groove portion 303 is eccentrically arranged in the lateral direction D1 (left side) with respect to the virtual apex 22 at the lower right, and has a depth d1 = 0 and a depth d2 = r. The fourth groove portion 304 is eccentrically arranged in the vertical direction D2 (upper side) with respect to the virtual apex 22 at the lower left, and has a depth d1 = r and a depth d2 = 0.

The groove portion 30 is formed by the same process as the probe insertion portion 20, and is subject to the same restrictions on pattern processing accuracy. Therefore, in order to prevent the ridgeline of the probe 106 from contacting the outer edge of the groove portion 30, it is desirable that the radius r of the groove portion 30 is equal to or greater than the radius of curvature of the virtual apex 22.

<Arrangement of guide holes 10>
FIG. 6 is a diagram showing an example of the arrangement of the guide holes 10 in FIG. 2, and the first to fourth guide holes 10A to 10D are shown. The first to fourth guide holes 10A to 10D are arranged in a grid pattern so as to be aligned in the horizontal direction D1 and the vertical direction D2, respectively. These guide holes 10A to 10D are all guide holes 10 shown in FIG. 5, and have the same shape. Further, the guide holes 10A to 10D are arranged so that the side 21 of the probe insertion portion 20 is parallel to the horizontal direction D1 or the vertical direction D2, respectively.

Two groove portions 30 belonging to the two guide holes 10 arranged adjacent to each other and facing each other are arranged eccentrically in the horizontal direction D1 and eccentrically in the vertical direction D2. That is, between the two adjacent guide holes 10, the two groove portions 30 facing each other are eccentrically arranged in different directions. By adopting such a configuration, it is possible to secure a longer distance than before as the shortest distances L1 and L2 between the guide holes 10.

For example, the first guide hole 10A and the second guide hole 10B are arranged adjacent to each other in the lateral direction D1, and the upper right groove portion 30 _RU of the first guide hole 10A and the upper left groove portion 30 _LU of the second guide hole 10B are mutually arranged. opposite. The upper right groove portion 30 _RU of the first guide hole 10A is eccentrically arranged in the vertical direction D2, while the upper left groove portion 30 _LU of the second guide hole 10B is eccentrically arranged in the horizontal direction D1. Similarly, the lower right groove portion 30 _RB of the first guide hole 10A and the lower left groove portion 30 _LB of the second guide hole 10B face each other, and the lower right groove portion 30 _RB of the first guide hole 10A is in the lateral direction D1. While the second guide hole 10B is eccentrically arranged, the lower left groove portion 30 _LB of the second guide hole 10B is eccentrically arranged in the vertical direction D2.

Therefore, the lateral depth d1 of the two groove portions 30 facing each other in the lateral direction D1 is r on one side and zero on the other side. As a result, the shortest distance L1 between the two adjacent guide holes 10A and 10B in the lateral direction D1 becomes (L-r), which is longer than the conventional shortest distance (L-2r).

The same applies not only to the horizontal direction D1 but also to the vertical direction D2. For example, the second guide hole 10B and the third guide hole 10C are arranged adjacent to the vertical direction D2, and the lower right groove portion 30 _RB of the second guide hole 10B and the upper right groove portion 30 _RU of the third guide hole 10C are Facing each other. The lower right groove portion 30 _RB of the second guide hole 10B is eccentrically arranged in the lateral direction D1, while the upper right groove portion 30 _RU of the third guide hole 10C is eccentrically arranged in the vertical direction D2. Similarly, the lower left groove portion 30 _LB of the second guide hole 10B and the upper left groove portion 30 _LU of the third guide hole 10C face each other. The lower left groove portion 30 _LB of the second guide hole 10B is eccentrically arranged in the vertical direction D2, while the upper left groove portion 30 _LU of the third guide hole 10C is eccentrically arranged in the horizontal direction D1. Therefore, the shortest distance L2 between the two adjacent guide holes 10B and 10C in the vertical direction D2 is (L-r), which is longer than the conventional shortest distance (L-2r).

Further, in the two groove portions 30 belonging to one of the two guide holes 10 adjacent to each other and facing the other, one groove portion 30 is eccentrically arranged in the lateral direction D1 and the other groove portion 30 is eccentric in the vertical direction D2. Be placed. That is, the two groove portions 30 corresponding to both ends of the side 21 of the probe insertion portion 20 are eccentrically arranged in different directions. By adopting such a configuration, if the guide holes 10 having the same shape are arranged in a grid pattern in the same direction, they are adjacent to each other regardless of whether they are in the horizontal direction D1 or the vertical direction D2. The shortest distances L1 and L2 described above can be secured between the adjacent arbitrary guide holes 10.

For example, in the lateral direction, the upper right groove portion 30 _RU and the lower right groove portion 30 _RB of the first guide hole 10A both face the second guide hole 10B. The upper right groove portion 30 _RU is eccentrically arranged in the vertical direction D2, while the lower right groove portion 30 _RB is eccentrically arranged in the horizontal direction D1. Similarly, in the vertical direction, the lower right groove portion 30 _RB and the lower left groove portion 30 _LB of the second guide hole 10B both face the third guide hole 10C. The lower right groove portion 30 _RB is eccentrically arranged in the horizontal direction D1, while the lower left groove portion 30 _LB is eccentrically arranged in the vertical direction D2. With the above configuration, the shortest distances L1 and L2 described above can be secured between the arbitrary guide holes 10 adjacent to each other.

<Comparison example>
FIG. 7 is a diagram showing a conventional guide plate 105'as a comparative example, and the shapes and arrangements of the four guide holes 10 are shown in the same manner as in FIG. The guide hole 10 is composed of a rectangular probe insertion portion 20 and four groove portions 30, and the center 31 of the four groove portions 30 coincides with the four virtual vertices 22 of the probe insertion portion 20. That is, the groove portion 30 is arranged without being biased in either the horizontal direction D1 or the vertical direction D2, and the horizontal depth d1 and the vertical depth d2 both coincide with the radius r of the groove portion 30.

Therefore, the shortest distance L1 between the adjacent guide holes 10A and 10B in the lateral direction D1 is (L-2r). Similarly, the shortest distance L2 between the adjacent guide holes 10B and 10C in the vertical direction D2 is also (L-2r). That is, the conventional guide plate 105'has shorter shortest distances L1 and L2 than the guide plate 105 according to the present embodiment.

Therefore, when the distance between the sides 21 of the adjacent guide holes 10 (the pitch of the guide holes 10) is the same as that of the conventional guide plate 105', the guide plates 105 according to the present embodiment are adjacent to each other. Since the width of the member that separates the grooves 30 of 10 can be made wider, higher mechanical strength can be ensured. Further, in the guide plate 105 according to the present embodiment, when the width of the member separating the grooves 30 of the guide holes 10 adjacent to each other is the same as that of the conventional guide plate 105', the pitch of the guide holes 10 is made smaller. can do. For example, if the shortest distance between the guide holes 10 is 1 and the radius r of the groove 30 is 0.5, the distance between the probe insertion portions 20 is 1.5 in the guide plate 105 according to the present embodiment. On the other hand, the conventional guide plate 105'is 2.0.

The guide plate 105 according to the present embodiment includes a large number of guide holes 10 arranged in a grid pattern so as to be aligned in the horizontal direction D1 and the vertical direction D2 which are substantially orthogonal to each other, and the guide holes 10 include the horizontal direction D1 and the guide holes 10. It includes a rectangular probe insertion portion 20 surrounded by sides 21 extending in the vertical direction D2, and four groove portions 30 each containing four virtual vertices 22 corresponding to the four vertices of the probe insertion portion 20. By adopting such a configuration, a groove 12 facing the ridge line on the outer peripheral surface of the probe can be formed in the guide hole 10. Therefore, it is possible to prevent the ridge line of the probe 106 from coming into contact with the inner peripheral surface of the guide hole 10 and damage the probe 106 or the guide hole 10 or generate cutting chips.

Further, in the guide plate 105 according to the present embodiment, the two groove portions 30 belonging to the two guide holes 10 adjacent to each other and facing each other are arranged unevenly in different directions in the horizontal direction D1 and the vertical direction D2. One groove 30 has only a lateral depth d1 and the other groove 30 has only a vertical depth d2. Therefore, the shortest distances L1 and L2 between the two guide holes 10 can be lengthened as compared with the conventional guide plate 105'in which these groove portions 30 are arranged without bias, and the strength of the guide plate 105 is improved. Can be made to. Further, if the shortest distances L1 and L2 between the guide holes 10 are the same, the pitch of the guide holes 10 can be further narrowed.

Embodiment 2.
In the first embodiment, an example in which the groove portion 30 has only the depths d1 and d2 in either the horizontal direction D1 or the vertical direction D2 has been described. On the other hand, in the present embodiment, the case where the groove portions 30 have different lateral depths d1 and vertical depths d2 will be described.

<Shape of guide hole 10>
FIG. 8 is a diagram showing a main part of the guide plate 105 according to the second embodiment of the present invention, and shows an example of the shape of the guide hole 10. The guide hole 10 of FIG. 8 is the same as the guide hole 10 of FIG. 5 (Embodiment 1) except that the distance from the virtual apex 22 to the center 31 of the groove 30 is different. Therefore, the duplicate description will be omitted.

The center 31 of the groove portion 30 is located on the outer edge of the probe insertion portion 20 and is arranged at a distance s in the clockwise direction from the virtual apex 22. Therefore, the guide hole 10 has a rotationally symmetric shape with 90 ° symmetry. The distance s is a value larger than zero and smaller than the radius r of the groove (0 <s <r). Therefore, the groove portion 30 has a depth d1 in the horizontal direction and a depth d2 in the vertical direction, and the values thereof are different from each other.

Specifically, the first groove portion 301 is eccentrically arranged in the lateral direction D1 (right side) with respect to the virtual apex 22 on the upper left, and has a depth d1 = r−s and a depth d2 = r. The second groove portion 302 is eccentrically arranged in the vertical direction D2 (downward) from the virtual apex 22 on the upper right, and has a depth d1 = r and a depth d2 = r−s. The third groove portion 303 is eccentrically arranged in the lateral direction D1 (leftward) with respect to the virtual apex 22 at the lower right, and has a depth d1 = r−s and a depth d2 = r. The fourth groove portion 304 is eccentrically arranged in the vertical direction D2 (upper side) from the virtual apex 22 at the lower left, and has a depth d1 = r and a depth d2 = r−s.

The guide hole 10 (Embodiment 1) in FIG. 5 corresponds to the case where the distance s = r, that is, the case where the shallower one of the depths d1 and d2 becomes zero.

<Arrangement of guide holes 10>
FIG. 9 is a diagram showing an example of the arrangement of the guide holes 10 according to the second embodiment of the present invention, and the first to fourth guide holes 10A to 10D are shown. The first to fourth guide holes 10A to 10D are all guide holes 10 shown in FIG. Compared with FIG. 6 (Embodiment 1), the shape of the guide holes 10 is different, but since the arrangement of the guide holes 10 is the same, overlapping description will be omitted.

Two groove portions 30 belonging to the two guide holes 10 arranged adjacent to each other and facing each other are arranged eccentrically in the horizontal direction D1 and eccentrically in the vertical direction D2. Therefore, the depth d1 in the horizontal direction of one groove portion 30 is shallower than the depth d2 in the vertical direction, and the depth d2 in the vertical direction of the other groove portion 30 is smaller than the depth d1 in the horizontal direction. It becomes shallow. Therefore, by adopting such a configuration, it is possible to secure a longer distance than before as the shortest distances L1 and L2 between the guide holes 10.

For example, the first guide hole 10A and the second guide hole 10B are arranged adjacent to each other in the lateral direction D1, and the upper right groove portion 30 _RU of the first guide hole 10A and the upper left groove portion 30 _LU of the second guide hole 10B are mutually arranged. opposite. The upper right groove portion 30 _RU of the first guide hole 10A is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r. On the other hand, the upper left groove portion 30 _LU of the second guide hole 10B is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. Similarly, the lower right groove portion 30 _RB of the first guide hole 10A and the lower left groove portion 30 _LB of the second guide hole 10B face each other. The lower right groove portion 30 _RB of the first guide hole 10A is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. On the other hand, the lower left groove portion 30 _LB of the second guide hole 10B is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r.

Therefore, in the lateral depth d1 of the two groove portions 30 facing each other between the adjacent first guide hole 10A and the second guide hole 10B in the lateral direction D1, one groove portion 30 becomes r and the other groove portion 30. 30 becomes (rs). Therefore, the shortest distance L1 between the first guide hole 10A and the second guide hole 10B is approximately (L-2r + s), which is longer than the conventional shortest distance (L-2r).

The same applies not only to the horizontal direction D1 but also to the vertical direction D2. For example, the second guide hole 10B and the third guide hole 10C are arranged adjacent to the vertical direction D2, and the lower right groove portion 30 _RB of the second guide hole 10B and the upper right groove portion 30 _RU of the third guide hole 10C are They are facing each other. The lower right groove portion 30 _RB of the second guide hole 10B is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. On the other hand, the upper right groove portion 30 _RU of the third guide hole 10C is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r. Similarly, the lower left groove portion 30 _LB of the second guide hole 10B and the upper left groove portion 30 _LU of the third guide hole 10C face each other. The lower left groove portion 30 _LB of the second guide hole 10B is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r. On the other hand, the upper left groove portion 30 _LU of the third guide hole 10C is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r.

Therefore, in the vertical depth d2 of the two groove portions 30 facing each other between the second guide hole 10B and the third guide hole 10C adjacent to each other in the vertical direction D2, one groove portion 30 becomes r and the other groove portion 30. 30 becomes (rs). Therefore, the shortest distance L2 between the second guide hole 10B and the third guide hole 10C is approximately (L-2r + s), which is longer than the conventional shortest distance (L-2r).

Further, in the two groove portions 30 belonging to one of the two guide holes 10 adjacent to each other and facing the other, one groove portion 30 is eccentrically arranged in the lateral direction D1 and the other groove portion 30 is eccentric in the vertical direction D2. Be placed. That is, in one groove portion 30, the depth d1 in the horizontal direction is shallower than the depth d2 in the vertical direction, and in the other groove portion 30, the depth d2 in the vertical direction is shallower than the depth d1 in the horizontal direction. Become. By adopting such a configuration, if the guide holes 10 having the same shape are arranged in a grid pattern, any guides adjacent to each other can be arranged regardless of whether the adjacent directions are the horizontal direction D1 or the vertical direction D2. The shortest distances L1 and L2 described above can be secured between the holes 10.

For example, the upper right groove portion 30 _RU and the lower right groove portion 30 _RB of the first guide hole 10A both face the second guide hole 10B. The upper right groove portion 30 _RU of the first guide hole 10A is eccentrically arranged in the vertical direction D2, and the depth d2 is shallower than the depth d1. On the other hand, the lower right groove portion 30 _RB is eccentrically arranged in the lateral direction D1, and the depth d1 is shallower than the depth d2. Similarly, the lower right groove portion 30 _RB and the lower left groove portion 30 _LB of the second guide hole 10B both face the third guide hole 10C. The lower right groove portion 30 _RB is eccentrically arranged in the lateral direction D1, and the depth d1 is shallower than the depth d2. On the other hand, the lower left groove portion 30 _LB is eccentrically arranged in the vertical direction D2, and the depth d2 is shallower than the depth d1.

In the guide plate 105 according to the present embodiment, of the two groove portions 30 that belong to the two guide holes 10A and 10B that are adjacent to each other in the lateral direction D1 and that face each other, one of the groove portions 30 is in the lateral direction with respect to the probe insertion portion 20. The depth d1 of the above is shallower than the depth d2 in the vertical direction (d1 <d2), and the depth d2 in the vertical direction with respect to the probe insertion portion 20 is shallower than the depth d1 in the horizontal direction (d2 <d2). It is configured to be d1).

By adopting such a configuration, the shortest distance L1 between the two guide holes 10 adjacent to the lateral direction D1 can be made longer than that of the conventional guide plate 105'arranged without biasing the groove portion 30. It is possible to improve the mechanical strength of the guide plate 105. Further, if the shortest distance L1 between the guide holes 10 is the same, the pitch of the guide holes 10 in the lateral direction D1 can be further narrowed.

Further, the guide plate 105 according to the present embodiment also has two groove portions 30 that belong to two guide holes 10B and 10C that are adjacent to each other in the vertical direction D2 and that face each other, and one of the groove portions 30 is for the probe insertion portion 20. The horizontal depth d1 is shallower than the vertical depth d2 (d1 <d2), and the other groove 30 has a vertical depth d2 with respect to the probe insertion portion 20 that is shallower than the horizontal depth d1 (d1 <d2). It is configured so that d2 <d1).

By adopting such a configuration, the shortest distance L2 between the two guide holes 10 adjacent to the vertical direction D2 can be made longer than that of the conventional guide plate 105'arranged without biasing the groove portion 30. It is possible to improve the mechanical strength of the guide plate 105. Further, if the shortest distance L2 between the guide holes 10 is the same, the pitch of the guide holes 10 in the vertical direction D2 can be further narrowed.

Further, the guide plate 105 according to the present embodiment has two groove portions 30 belonging to one of the two guide holes 10 adjacent to each other in the lateral direction D1 and facing the other guide hole 10. These groove portions 30 are eccentrically arranged in different directions in the horizontal direction D1 and the vertical direction D2. Therefore, in one groove portion 30, the horizontal depth d1 is shallower than the vertical depth d2 (d1 <d2), and in the other groove portion 30, the vertical depth d2 is the horizontal depth d1. It is configured to be shallower (d2 <d1).

Further, the guide plate 105 according to the present embodiment has two groove portions 30 belonging to one of the two guide holes 10 adjacent to each other in the vertical direction D2 and facing the other guide hole 10. These groove portions 30 are eccentrically arranged in different directions in the horizontal direction D1 and the vertical direction D2. Therefore, in one groove portion 30, the horizontal depth d1 is shallower than the vertical depth d2 (d1 <d2), and in the other groove portion 30, the vertical depth d2 is the horizontal depth d1. It is configured to be shallower (d2 <d1).

By adopting such a configuration, when a large number of guide holes 10 are arranged in a grid pattern, a good shortest distance L1 and L2 can be secured between all two adjacent guide holes 10. That is, a good shortest distance L1 can be secured between all the guide holes 10 adjacent to the lateral direction D1, and a good shortest distance L2 can be secured between all the guide holes 10 adjacent to the vertical direction D2. Can be done.

Embodiment 3.
In the first and second embodiments, an example of the guide plate 105 in which the guide hole 10 has a rotationally symmetric shape has been described. On the other hand, in the present embodiment, the guide plate 105 in which the guide holes 10 have a line-symmetrical shape will be described.

<Shape of guide hole 10>
FIG. 10 is a diagram showing a main part of the guide plate 105 according to the third embodiment of the present invention, and shows an example of the shape of the guide hole 10. As in the case of FIGS. 5 and 8, the guide hole 10 is composed of one probe insertion portion 20 and four groove portions 30.

The center 31 of the groove portion 30 is located on the outer edge of the probe insertion portion 20 and is arranged at a distance s from the virtual apex 22. The distance s is a value larger than zero and smaller than the radius r of the groove (0 <s <r). Therefore, the groove portion 30 has a different depth d1 in the horizontal direction and a depth d2 in the vertical direction.

The guide holes 10 of FIGS. 5 and 8 have a rotationally symmetric shape in which all the grooves 30 are eccentrically arranged in the clockwise direction. Therefore, the two groove portions 30 adjacent to each other are eccentrically arranged in the lateral direction D1 or the vertical direction D2 in different directions. On the other hand, in the guide hole 10 of FIG. 10, the two adjacent groove portions 301 and 302 are both biased in the lateral direction D1, while the remaining two groove portions 303 and 304 are both biased in the vertical direction D2. It will be placed. Therefore, the guide hole 10 has a shape that is line-symmetrical with respect to the central axis 40.

Specifically, the first groove portion 301 is eccentrically arranged in the lateral direction D1 (right side) with respect to the virtual apex 22 on the upper left, and has a depth d1 = r−s and a depth d2 = r. The second groove portion 302 is eccentrically arranged in the lateral direction D1 (left side) with respect to the virtual apex 22 on the upper right, and has a depth d1 = r−s and a depth d2 = r. The third groove portion 303 is eccentrically arranged in the vertical direction D2 (upper side) with respect to the virtual apex 22 at the lower right, and has a depth d1 = r and a depth d2 = r−s. The fourth groove portion 304 is eccentrically arranged in the vertical direction D2 (upper side) from the virtual apex 22 at the lower left, and has a depth d1 = r and a depth d2 = r−s.

<Arrangement of guide holes 10>
FIG. 11 is a diagram showing an example of the arrangement of the guide holes 10 according to the third embodiment of the present invention, and the first to fourth guide holes 10A to 10D are shown. The first to fourth guide holes 10A to 10D are all guide holes 10 shown in FIG.

The guide holes 10 adjacent to the vertical direction D2 are arranged in the same direction, whereas the guide holes 10 adjacent to the horizontal direction D1 are arranged so as to be upside down or rotated by 180 ° so as to be opposite to each other. ing. As a result, the two groove portions 30 belonging to the two guide holes 10 arranged adjacent to each other and facing each other are eccentrically arranged on one side in the lateral direction D1 and eccentrically arranged on the other side in the vertical direction D2. .. Therefore, the depth d1 in the horizontal direction of one groove portion 30 is shallower than the depth d2 in the vertical direction, and the depth d2 in the vertical direction of the other groove portion 30 is smaller than the depth d1 in the horizontal direction. It becomes shallow. Therefore, by adopting such a configuration, it is possible to secure a longer distance than before as the shortest distances L1 and L2 between the guide holes 10.

For example, the first guide hole 10A and the second guide hole 10B are arranged adjacent to each other in the lateral direction D1, and the upper right groove portion 30 _RU of the first guide hole 10A and the upper left groove portion 30 _LU of the second guide hole 10B are mutually arranged. opposite. The upper right groove portion 30 _RU of the first guide hole 10A is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. On the other hand, the upper left groove portion 30 _LU of the second guide hole 10B is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r. Similarly, the lower right groove portion 30 _RB of the first guide hole 10A and the lower left groove portion 30 _LB of the second guide hole 10B face each other. The lower right groove portion 30 _RB of the first guide hole 10A is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r. On the other hand, the lower left groove portion 30 _LB of the second guide hole 10B is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. That is, in the lateral depth d1 of the two groove portions 30 facing each other between the first guide hole 10A and the second guide hole 10B adjacent to each other in the lateral direction D1, one groove portion 30 becomes r and the other groove portion 30. 30 is (rs). Therefore, the shortest distance L1 between the first guide hole 10A and the second guide hole 10B is approximately (L-2r + s), which is longer than the conventional shortest distance (L-2r).

The same applies not only to the horizontal direction D1 but also to the vertical direction D2. For example, the second guide hole 10B and the third guide hole 10C are arranged adjacent to the vertical direction D2, and the lower right groove portion 30 _RB of the second guide hole 10B and the upper right groove portion 30 _RU of the third guide hole 10C are They are facing each other. The lower right groove portion 30 _RB of the second guide hole 10B is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. On the other hand, the upper right groove portion 30 _RU of the third guide hole 10C is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r. Similarly, the lower left groove portion 30 _LB of the second guide hole 10B and the upper left groove portion 30 _LU of the third guide hole 10C face each other. The lower left groove portion 30 _LB of the second guide hole 10B is eccentrically arranged in the lateral direction D1, and its depth d1 = r−s is shallower than the depth d2 = r. On the other hand, the upper left groove portion 30 _LU of the third guide hole 10C is eccentrically arranged in the vertical direction D2, and its depth d2 = r−s is shallower than the depth d1 = r.

Therefore, in the vertical depth d2 of the two groove portions 30 facing each other between the second guide hole 10B and the third guide hole 10C adjacent to each other in the vertical direction D2, one groove portion 30 becomes r and the other groove portion 30. 30 becomes (rs). Therefore, the shortest distance L2 between the second guide hole 10B and the third guide hole 10C is approximately (L-2r + s), which is longer than the conventional shortest distance (L-2r).

Further, the guide plate 105 according to the present embodiment has two groove portions 30 belonging to one of the two guide holes 10 adjacent to each other in the lateral direction D1 and facing the other guide hole 10. These groove portions 30 are eccentrically arranged in different directions in the horizontal direction D1 and the vertical direction D2. Therefore, in one groove portion 30, the horizontal depth d1 is shallower than the vertical depth d2 (d1 <d2), and in the other groove portion 30, the vertical depth d2 is the horizontal depth d1. It is configured to be shallower (d2 <d1).

Further, the guide plate 105 according to the present embodiment has two groove portions 30 belonging to one of the two guide holes 10 adjacent to each other in the vertical direction D2 and facing the other guide hole 10. These groove portions 30 are eccentrically arranged in the lateral direction D1 or the vertical direction D2 in the directions corresponding to each other. Therefore, in both of the two groove portions 30, the depth d1 in the horizontal direction is shallower than the depth d2 in the vertical direction (d1 <d2), or the depth d2 in the vertical direction is smaller than the depth d1 in the horizontal direction. It is configured to be shallow (d2 <d1).

By adopting such a configuration, when a large number of guide holes 10 are arranged in a grid pattern, the guide holes 10 adjacent to each other in the lateral direction are alternately turned upside down so that the guide holes 10 are arranged between all the two adjacent guide holes 10. A good shortest distance L1 and L2 can be secured. That is, a good shortest distance L1 can be secured between all the guide holes 10 adjacent to the lateral direction D1, and a good shortest distance L2 can be secured between all the guide holes 10 adjacent to the vertical direction D2. Can be done.

In the above embodiment, an example in which the center of the groove portion 30 is arranged on the outer edge of the probe insertion portion 20 has been described, but the present invention is not limited to such a configuration. For example, the center of the groove portion 30 may be arranged in the probe insertion portion 20.

Further, in the above embodiment, the case where the outer edge of the groove portion 30 has an arc shape has been described, but the present invention is not limited to such a configuration. For example, the outer edge of the groove 30 may be a part of the outer edge of an ellipse, or may be a part of the outer edge of a polygon such as a triangle or a quadrangle.

Further, it is desirable that all of the large number of guide holes 10 formed on the guide plate 105 have the above-described configuration, but the present invention is not limited to such a guide plate 105. For example, at least two guide holes 10 adjacent to each other may have the above-described configuration. Further, it is sufficient that at least four guide holes 10 arranged in a grid pattern so as to be aligned in two in the horizontal direction D1 and two in the vertical direction D2 have the above-described configuration.

D1 Horizontal direction D2 Vertical direction L1 Horizontal shortest distance L2 Vertical shortest distance Te External electrode Tp Probe electrode r Radius s Distance 30,301-304 Groove 10,10A-10D Guide hole 11 Flat surface 12 Groove 20 Probe insertion part 21 Side 22 Virtual apex 30 Groove 30 _{LB Lower} left groove 30 _LU Upper left groove 30 _RB Lower right groove 30 _RU Upper right groove 31 Center 40 Central axis 100 Probe card 101 Main board 102 Reinforcing board 103 ST board 104 Spacer 105 Guide plate 106 Probe

Claims (5)

It has a large number of guide holes arranged in a grid pattern so as to be aligned in the first direction and the second direction, which are substantially orthogonal to each other.
The shape of the guide hole is formed by projecting a rectangular probe insertion portion surrounded by sides extending in the first direction and the second direction, and a part of the outer edge of the probe insertion portion to the outside. It is composed of four grooves each containing four virtual vertices corresponding to the four vertices of the probe insertion part.
Of the two opposing groove portions belonging to at least two guide holes adjacent to each other in the first direction, one of the groove portions has a depth in the first direction with respect to the probe insertion portion in the second direction. A guide plate for a probe card, which is shallower than the other, and the other groove portion has a depth in the second direction with respect to the probe insertion portion shallower than the depth in the first direction. Of the four groove portions belonging to one of the two guide holes, one of the two groove portions facing the other of the two guide holes has a depth in the first direction with respect to the probe insertion portion in the second direction. Shallower than the depth, the other of the two grooves has a depth in the second direction with respect to the probe insertion portion that is shallower than the depth in the first direction.
The groove portion belonging to the other of the two guide holes and facing the one of the two groove portions has a depth in the second direction with respect to the probe insertion portion shallower than the depth in the first direction.
A claim that belongs to the other of the two guide holes and faces the other of the two grooves so that the depth in the first direction with respect to the probe insertion portion is shallower than the depth in the second direction. Item 2. The probe card guide plate according to item 1. Of the four groove portions belonging to one of the two guide holes, the two groove portions facing the other of the two guide holes all have a depth in the first direction with respect to the probe insertion portion in the second direction. Shallower than the depth,
The two groove portions belonging to the other of the two guide holes and facing each of the two groove portions are characterized in that the depth in the second direction with respect to the probe insertion portion is shallower than the depth in the first direction. The probe card guide plate according to claim 1. Any two of the at least four guide holes that are aligned in each of the first and second directions and are adjacent to each other, belong to different guide holes, and face each other in the first or second direction. One of the two grooves has a depth in the first direction with respect to the probe insertion portion shallower than the depth in the second direction , and the other of the two arbitrary grooves has a depth in the second direction with respect to the probe insertion portion. The guide plate for a probe card according to claim 2 or 3, wherein the depth is shallower than the depth in the first direction . The probe card guide plate according to any one of claims 1 to 4, wherein the outer edge of the groove is a part of the outer edge of an arc or an ellipse.

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