JP2008529975A - 伝熱流体としてのハイドロフルオロエーテル - Google Patents
伝熱流体としてのハイドロフルオロエーテル Download PDFInfo
- Publication number
- JP2008529975A JP2008529975A JP2007553194A JP2007553194A JP2008529975A JP 2008529975 A JP2008529975 A JP 2008529975A JP 2007553194 A JP2007553194 A JP 2007553194A JP 2007553194 A JP2007553194 A JP 2007553194A JP 2008529975 A JP2008529975 A JP 2008529975A
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- JP
- Japan
- Prior art keywords
- heat transfer
- independently
- compound
- carbon atoms
- transfer fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013529 heat transfer fluid Substances 0.000 title claims abstract description 42
- 238000012546 transfer Methods 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 26
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 14
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 12
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 12
- 150000001875 compounds Chemical class 0.000 claims description 48
- 238000012360 testing method Methods 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 19
- 230000035939 shock Effects 0.000 claims description 11
- 125000001153 fluoro group Chemical group F* 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 8
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000000446 fuel Substances 0.000 claims description 2
- 238000011056 performance test Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 31
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 30
- 239000012530 fluid Substances 0.000 description 26
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 26
- 239000000203 mixture Substances 0.000 description 24
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 18
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 16
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- 239000000047 product Substances 0.000 description 15
- 239000010702 perfluoropolyether Substances 0.000 description 14
- 235000003270 potassium fluoride Nutrition 0.000 description 13
- 239000011698 potassium fluoride Substances 0.000 description 13
- 239000012071 phase Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 125000002947 alkylene group Chemical group 0.000 description 10
- 238000009835 boiling Methods 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000012043 crude product Substances 0.000 description 8
- 239000000523 sample Substances 0.000 description 8
- ODVREDGIWSDQFD-UHFFFAOYSA-N 3-(4-methylphenyl)sulfonyloxypropyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCCCOS(=O)(=O)C1=CC=C(C)C=C1 ODVREDGIWSDQFD-UHFFFAOYSA-N 0.000 description 6
- 125000004122 cyclic group Chemical group 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 6
- 238000004817 gas chromatography Methods 0.000 description 6
- -1 hydrocarbon alcohols Chemical class 0.000 description 6
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 238000005191 phase separation Methods 0.000 description 6
- 229920002545 silicone oil Polymers 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 5
- 231100000053 low toxicity Toxicity 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000010792 warming Methods 0.000 description 5
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 125000005842 heteroatom Chemical group 0.000 description 4
- 229920001774 Perfluoroether Polymers 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- DUJPKTJSPIENAQ-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluoro-4-[3-(1,1,2,2,3,3,4,4,4-nonafluorobutoxy)propoxy]butane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)OCCCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F DUJPKTJSPIENAQ-UHFFFAOYSA-N 0.000 description 2
- ICNLRECSSBFDIE-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluoro-4-[4-(1,1,2,2,3,3,4,4,4-nonafluorobutoxy)butoxy]butane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)OCCCCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F ICNLRECSSBFDIE-UHFFFAOYSA-N 0.000 description 2
- NKAOIVGUASHHQN-UHFFFAOYSA-N 1,1,1,2,2,3,3-heptafluoro-3-[2-(1,1,2,2,3,3,3-heptafluoropropoxy)ethoxy]propane Chemical compound FC(F)(F)C(F)(F)C(F)(F)OCCOC(F)(F)C(F)(F)C(F)(F)F NKAOIVGUASHHQN-UHFFFAOYSA-N 0.000 description 2
- COVZYZSDYWQREU-UHFFFAOYSA-N Busulfan Chemical compound CS(=O)(=O)OCCCCOS(C)(=O)=O COVZYZSDYWQREU-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001256 steam distillation Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- SYSZENVIJHPFNL-UHFFFAOYSA-N (alpha-D-mannosyl)7-beta-D-mannosyl-diacetylchitobiosyl-L-asparagine, isoform B (protein) Chemical compound COC1=CC=C(I)C=C1 SYSZENVIJHPFNL-UHFFFAOYSA-N 0.000 description 1
- RMTQGBWYJWEAAV-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4,5,5-undecafluoro-5-[3-(1,1,2,2,3,3,4,4,5,5,5-undecafluoropentoxy)propoxy]pentane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)OCCCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RMTQGBWYJWEAAV-UHFFFAOYSA-N 0.000 description 1
- WIYWTDXQFVLFTC-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluoro-4-[2-(1,1,2,2,3,3,4,4,4-nonafluorobutoxy)ethoxy]butane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)OCCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F WIYWTDXQFVLFTC-UHFFFAOYSA-N 0.000 description 1
- YOAKUVTUURKAKZ-UHFFFAOYSA-N 1,1,1,2,2,3,3-heptafluoro-3-[3-(1,1,2,2,3,3,3-heptafluoropropoxy)propoxy]propane Chemical compound FC(F)(F)C(F)(F)C(F)(F)OCCCOC(F)(F)C(F)(F)C(F)(F)F YOAKUVTUURKAKZ-UHFFFAOYSA-N 0.000 description 1
- CVJHCELIUGIASN-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluoro-1-[3-[1,1,2,2,3,3-hexafluoro-3-(trifluoromethoxy)propoxy]propoxy]-3-(trifluoromethoxy)propane Chemical compound FC(F)(F)OC(F)(F)C(F)(F)C(F)(F)OCCCOC(F)(F)C(F)(F)C(F)(F)OC(F)(F)F CVJHCELIUGIASN-UHFFFAOYSA-N 0.000 description 1
- VUIIKZTVYDEMCK-UHFFFAOYSA-N 1,2,4-tris(1,1,2,2,3,3,3-heptafluoropropoxy)butane Chemical compound FC(F)(F)C(F)(F)C(F)(F)OCCC(OC(F)(F)C(F)(F)C(F)(F)F)COC(F)(F)C(F)(F)C(F)(F)F VUIIKZTVYDEMCK-UHFFFAOYSA-N 0.000 description 1
- VYVPNTJBGPQTFA-UHFFFAOYSA-N 2-[2-(4-methylphenyl)sulfonyloxyethoxy]ethyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCCOCCOS(=O)(=O)C1=CC=C(C)C=C1 VYVPNTJBGPQTFA-UHFFFAOYSA-N 0.000 description 1
- ZZTGKMKLEJZOIM-UHFFFAOYSA-N 3-[3-[1,1,1,2,2,3,4,5,5,5-decafluoro-4-(trifluoromethyl)pentan-3-yl]oxypropoxy]-1,1,1,2,2,3,4,5,5,5-decafluoro-4-(trifluoromethyl)pentane Chemical compound FC(F)(F)C(F)(F)C(F)(C(F)(C(F)(F)F)C(F)(F)F)OCCCOC(F)(C(F)(F)C(F)(F)F)C(F)(C(F)(F)F)C(F)(F)F ZZTGKMKLEJZOIM-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VMGRQYCCOYJVCB-UHFFFAOYSA-N FC(C(C(OCCOCCOC(C)CC)(F)F)(F)F)(C(F)(F)F)F Chemical compound FC(C(C(OCCOCCOC(C)CC)(F)F)(F)F)(C(F)(F)F)F VMGRQYCCOYJVCB-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229920006926 PFC Polymers 0.000 description 1
- 102000001708 Protein Isoforms Human genes 0.000 description 1
- 108010029485 Protein Isoforms Proteins 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 150000001265 acyl fluorides Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000002168 alkylating agent Substances 0.000 description 1
- 229940100198 alkylating agent Drugs 0.000 description 1
- 230000029936 alkylation Effects 0.000 description 1
- 238000005804 alkylation reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002637 fluid replacement therapy Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007794 irritation Effects 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 239000003880 polar aprotic solvent Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/04—Saturated ethers
- C07C43/12—Saturated ethers containing halogen
- C07C43/126—Saturated ethers containing halogen having more than one ether bond
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F23/00—Features relating to the use of intermediate heat-exchange materials, e.g. selection of compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Materials Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/044,770 US7055579B2 (en) | 2003-12-16 | 2005-01-27 | Hydrofluoroether as a heat-transfer fluid |
| PCT/US2006/002588 WO2006081282A1 (en) | 2005-01-27 | 2006-01-25 | Hydrofluoroether as a heat-transfer fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008529975A true JP2008529975A (ja) | 2008-08-07 |
| JP2008529975A5 JP2008529975A5 (https=) | 2009-03-12 |
Family
ID=36359809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007553194A Withdrawn JP2008529975A (ja) | 2005-01-27 | 2006-01-25 | 伝熱流体としてのハイドロフルオロエーテル |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7055579B2 (https=) |
| EP (1) | EP1841722A1 (https=) |
| JP (1) | JP2008529975A (https=) |
| KR (1) | KR20070104892A (https=) |
| CN (1) | CN101111464A (https=) |
| WO (1) | WO2006081282A1 (https=) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011510157A (ja) * | 2008-01-23 | 2011-03-31 | スリーエム イノベイティブ プロパティズ カンパニー | ヒドロフルオロカーボネートを含む熱伝達装置及び方法 |
| JP2013506729A (ja) * | 2009-10-01 | 2013-02-28 | スリーエム イノベイティブ プロパティズ カンパニー | 高温安定性を有するハイドロフルオロエーテルを含む装置、及びその使用 |
| JP2014509302A (ja) * | 2010-12-21 | 2014-04-17 | ソルヴェイ・スペシャルティ・ポリマーズ・イタリー・エッセ・ピ・ア | フッ素化有機化合物の製造方法 |
| JP2022515612A (ja) * | 2018-12-20 | 2022-02-21 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化化合物を含む伝熱流体を使用する半導体デバイスの製造方法 |
| JP2022541759A (ja) * | 2019-07-18 | 2022-09-27 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化化合物を使用する熱交換方法 |
| JP2023540030A (ja) * | 2020-08-28 | 2023-09-21 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化ビニルエーテルを使用する熱交換方法 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
| US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| US7879200B2 (en) * | 2007-07-05 | 2011-02-01 | Nevada Heat Treating, Inc. | Ultrasonic transducer and horn used in oxidative desulfurization of fossil fuels |
| US7790002B2 (en) | 2007-07-05 | 2010-09-07 | Nevada Heat Treating, Inc. | Ultrasonic transducer and horn used in oxidative desulfurization of fossil fuels |
| US20090176148A1 (en) * | 2008-01-04 | 2009-07-09 | 3M Innovative Properties Company | Thermal management of electrochemical cells |
| EP2271931A4 (en) | 2008-04-25 | 2011-10-12 | Merck Sharp & Dohme | MICRO-RNA BIOMARKERS FOR TISSUE INJURIES |
| US20100263885A1 (en) | 2009-04-21 | 2010-10-21 | 3M Innovative Properties Company | Protection systems and methods for electronic devices |
| US9010318B2 (en) | 2009-09-04 | 2015-04-21 | Wisconsin Alumni Research Foundation | Extended-range heat transfer fluid using variable composition |
| KR102739483B1 (ko) * | 2017-12-13 | 2024-12-05 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 하이드로플루오로올레핀 에테르, 조성물, 장치 및 이의 사용 방법 |
| WO2020127771A1 (en) * | 2018-12-20 | 2020-06-25 | Solvay Specialty Polymers Italy S.P.A. | Heat exchange method using fluorinated compounds having a low gwp |
| JP2020128838A (ja) * | 2019-02-08 | 2020-08-27 | 株式会社デンソー | 熱輸送システム |
| CN113773176B (zh) * | 2021-09-30 | 2024-03-19 | 三明市海斯福化工有限责任公司 | 一种含氟化合物、包含其的冷却剂及用途 |
| CN113773177B (zh) * | 2021-09-30 | 2024-03-12 | 三明市海斯福化工有限责任公司 | 一种含氟氧杂烷烃、包含其的用于半导体制程的冷却剂及用途 |
| CN115260019B (zh) * | 2022-08-04 | 2024-03-26 | 三明市海斯福化工有限责任公司 | 一种高支化全氟酮及其在热传导工作中的应用 |
| CN116063983B (zh) * | 2023-01-09 | 2026-04-07 | 浙江巨化技术中心有限公司 | 一种高热稳定性氢氟醚的应用 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3362180A (en) * | 1965-08-25 | 1968-01-09 | Du Pont | Chemical process |
| US3549711A (en) * | 1967-06-20 | 1970-12-22 | Dow Chemical Co | Haloethers |
| US3646112A (en) * | 1970-01-26 | 1972-02-29 | Du Pont | Perfluoropolyether esters |
| US3739033A (en) * | 1971-03-01 | 1973-06-12 | Allied Chem | Novel fluorinated aliphatic triethers |
| GB1354138A (en) | 1971-10-15 | 1974-06-05 | Ici Ltd | Fluorocarbon surfactants |
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-
2006
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- 2006-01-25 WO PCT/US2006/002588 patent/WO2006081282A1/en not_active Ceased
- 2006-01-25 KR KR1020077017200A patent/KR20070104892A/ko not_active Ceased
- 2006-01-25 EP EP06719444A patent/EP1841722A1/en not_active Withdrawn
- 2006-01-25 JP JP2007553194A patent/JP2008529975A/ja not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011510157A (ja) * | 2008-01-23 | 2011-03-31 | スリーエム イノベイティブ プロパティズ カンパニー | ヒドロフルオロカーボネートを含む熱伝達装置及び方法 |
| JP2013506729A (ja) * | 2009-10-01 | 2013-02-28 | スリーエム イノベイティブ プロパティズ カンパニー | 高温安定性を有するハイドロフルオロエーテルを含む装置、及びその使用 |
| JP2014509302A (ja) * | 2010-12-21 | 2014-04-17 | ソルヴェイ・スペシャルティ・ポリマーズ・イタリー・エッセ・ピ・ア | フッ素化有機化合物の製造方法 |
| JP2022515612A (ja) * | 2018-12-20 | 2022-02-21 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化化合物を含む伝熱流体を使用する半導体デバイスの製造方法 |
| JP7470693B2 (ja) | 2018-12-20 | 2024-04-18 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化化合物を含む伝熱流体を使用する半導体デバイスの製造方法 |
| JP2022541759A (ja) * | 2019-07-18 | 2022-09-27 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化化合物を使用する熱交換方法 |
| JP7546649B2 (ja) | 2019-07-18 | 2024-09-06 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化化合物を使用する熱交換方法 |
| JP2023540030A (ja) * | 2020-08-28 | 2023-09-21 | ソルベイ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化ビニルエーテルを使用する熱交換方法 |
| JP7827703B2 (ja) | 2020-08-28 | 2026-03-10 | サイエンスコ スペシャルティ ポリマーズ イタリー エス．ピー．エー． | 低いｇｗｐを有するフッ素化ビニルエーテルを使用する熱交換方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20050224747A1 (en) | 2005-10-13 |
| WO2006081282A1 (en) | 2006-08-03 |
| US7055579B2 (en) | 2006-06-06 |
| EP1841722A1 (en) | 2007-10-10 |
| CN101111464A (zh) | 2008-01-23 |
| KR20070104892A (ko) | 2007-10-29 |
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