JP2008527174A5 - - Google Patents

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Publication number
JP2008527174A5
JP2008527174A5 JP2007550538A JP2007550538A JP2008527174A5 JP 2008527174 A5 JP2008527174 A5 JP 2008527174A5 JP 2007550538 A JP2007550538 A JP 2007550538A JP 2007550538 A JP2007550538 A JP 2007550538A JP 2008527174 A5 JP2008527174 A5 JP 2008527174A5
Authority
JP
Japan
Prior art keywords
boat
heating element
evaporation source
organic material
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007550538A
Other languages
English (en)
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JP2008527174A (ja
JP5080274B2 (ja
Filing date
Publication date
Priority claimed from US11/032,899 external-priority patent/US7166169B2/en
Application filed filed Critical
Publication of JP2008527174A publication Critical patent/JP2008527174A/ja
Publication of JP2008527174A5 publication Critical patent/JP2008527174A5/ja
Application granted granted Critical
Publication of JP5080274B2 publication Critical patent/JP5080274B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (2)

  1. 有機材料を堆積させるための蒸発源であって、
    a）有機材料を収容するキャビティを有するボートと；
    b）互いに離れた複数の開口部を持っていて上記ボートを閉じさせる開口プレートと；
    c）上記キャビティの中にあって上記開口プレートと上記有機材料の間に設けられた加熱素子と；
    d）上記加熱素子と接触していて、その加熱素子からのエネルギーを吸収する少なくとも3つの面を備え、第1の面はエネルギーを上記開口プレートへと向かわせ、第2の面と第3の面はエネルギーを上記ボートの壁部と上記有機材料へと向かわせるバッフル部材とを備える蒸発源。
  2. 有機材料を堆積させるための蒸発源であって、
    a）有機材料を収容するキャビティを有するボートと；
    b）互いに離れた複数の開口部を持っていて上記ボートを閉じさせる開口プレートと；
    c）上記キャビティの中にあって上記開口プレートと上記有機材料の間に設けられた加熱素子と；
    d）上記ボートおよび上記加熱素子から離れていて、この加熱素子との関係が、この加熱素子からの赤外エネルギーを吸収する配置にされており、赤外エネルギーを、上記開口プレートの開口部と、上記ボートの中にある上記有機材料と、そのボートの壁部へと向かわせる構成にされたバッフル部材とを備えていて、このバッフル部材を上記開口プレートから所定の距離離れた位置に設けてこの蒸発源からの有機蒸気のコンダクタンスの変動を小さくすることで、この蒸発源内の圧力変動を小さくしている蒸発源。
JP2007550538A 2005-01-11 2006-01-06 バッフル部材を備える蒸発源 Active JP5080274B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/032,899 US7166169B2 (en) 2005-01-11 2005-01-11 Vaporization source with baffle
US11/032,899 2005-01-11
PCT/US2006/000665 WO2006076287A1 (en) 2005-01-11 2006-01-06 Vaporization source with baffle

Publications (3)

Publication Number Publication Date
JP2008527174A JP2008527174A (ja) 2008-07-24
JP2008527174A5 true JP2008527174A5 (ja) 2009-02-05
JP5080274B2 JP5080274B2 (ja) 2012-11-21

Family

ID=36230767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007550538A Active JP5080274B2 (ja) 2005-01-11 2006-01-06 バッフル部材を備える蒸発源

Country Status (4)

Country Link
US (1) US7166169B2 (ja)
JP (1) JP5080274B2 (ja)
KR (1) KR101200862B1 (ja)
WO (1) WO2006076287A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7364772B2 (en) * 2004-03-22 2008-04-29 Eastman Kodak Company Method for coating an organic layer onto a substrate in a vacuum chamber
US8512806B2 (en) 2008-08-12 2013-08-20 Momentive Performance Materials Inc. Large volume evaporation source
US20110195187A1 (en) * 2010-02-10 2011-08-11 Apple Inc. Direct liquid vaporization for oleophobic coatings
JP2012132049A (ja) * 2010-12-20 2012-07-12 Mitsubishi Heavy Ind Ltd 真空蒸着装置及び真空蒸着方法
US8715779B2 (en) 2011-06-24 2014-05-06 Apple Inc. Enhanced glass impact durability through application of thin films

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US99860A (en) * 1870-02-15 Improved apparatus for generating illuminating-gas
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
US2447789A (en) * 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
JPS5943876A (ja) 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発源
US4551303A (en) * 1982-09-04 1985-11-05 Konishiroku Photo Industry Co., Ltd. Method of using an evaporation source
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
JPH05139882A (ja) * 1991-11-20 1993-06-08 Hitachi Ltd 分子線源
DE4204938C1 (ja) * 1992-02-19 1993-06-24 Leybold Ag, 6450 Hanau, De
JP3502261B2 (ja) * 1998-05-11 2004-03-02 松下電器産業株式会社 樹脂薄膜の製造方法
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
US6202591B1 (en) * 1998-11-12 2001-03-20 Flex Products, Inc. Linear aperture deposition apparatus and coating process
US6237529B1 (en) * 2000-03-03 2001-05-29 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
US20030015140A1 (en) * 2001-04-26 2003-01-23 Eastman Kodak Company Physical vapor deposition of organic layers using tubular sources for making organic light-emitting devices
US7099457B2 (en) * 2001-07-17 2006-08-29 Comverse Ltd. Personal ring tone message indicator
TW519852B (en) 2001-10-18 2003-02-01 Opto Tech Corp Organic light emitting device capable of projecting white light source and its manufacturing method
US20030101937A1 (en) 2001-11-28 2003-06-05 Eastman Kodak Company Thermal physical vapor deposition source for making an organic light-emitting device
KR100467805B1 (ko) 2002-01-22 2005-01-24 학교법인연세대학교 박막두께분포를 조절 가능한 선형 및 평면형 증발원
US20030168013A1 (en) * 2002-03-08 2003-09-11 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
AU2003210049A1 (en) 2002-03-19 2003-09-29 Innovex. Inc. Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire
KR100889758B1 (ko) * 2002-09-03 2009-03-20 삼성모바일디스플레이주식회사 유기박막 형성장치의 가열용기
US6717358B1 (en) * 2002-10-09 2004-04-06 Eastman Kodak Company Cascaded organic electroluminescent devices with improved voltage stability
KR101114899B1 (ko) 2002-12-26 2012-03-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치
US20050051097A1 (en) * 2003-09-08 2005-03-10 Jan Koninckx Covering assembly for crucible used for evaporation of raw materials
US7364772B2 (en) 2004-03-22 2008-04-29 Eastman Kodak Company Method for coating an organic layer onto a substrate in a vacuum chamber
KR101215860B1 (ko) 2004-05-21 2012-12-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 소자 및 그 소자를 사용하는 발광 장치

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