JP2008524634A5 - - Google Patents

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Publication number
JP2008524634A5
JP2008524634A5 JP2007548543A JP2007548543A JP2008524634A5 JP 2008524634 A5 JP2008524634 A5 JP 2008524634A5 JP 2007548543 A JP2007548543 A JP 2007548543A JP 2007548543 A JP2007548543 A JP 2007548543A JP 2008524634 A5 JP2008524634 A5 JP 2008524634A5
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JP
Japan
Prior art keywords
sample
laser beam
detector
aperture
atom probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007548543A
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English (en)
Japanese (ja)
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JP2008524634A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2005/046842 external-priority patent/WO2006101558A2/en
Publication of JP2008524634A publication Critical patent/JP2008524634A/ja
Publication of JP2008524634A5 publication Critical patent/JP2008524634A5/ja
Pending legal-status Critical Current

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JP2007548543A 2004-12-21 2005-12-20 レーザアトムプローブ Pending JP2008524634A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63791204P 2004-12-21 2004-12-21
PCT/US2005/046842 WO2006101558A2 (en) 2004-12-21 2005-12-20 Laser atom probes

Publications (2)

Publication Number Publication Date
JP2008524634A JP2008524634A (ja) 2008-07-10
JP2008524634A5 true JP2008524634A5 (https=) 2010-09-02

Family

ID=37024264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007548543A Pending JP2008524634A (ja) 2004-12-21 2005-12-20 レーザアトムプローブ

Country Status (6)

Country Link
US (1) US20100294928A1 (https=)
EP (1) EP1842221A4 (https=)
JP (1) JP2008524634A (https=)
KR (1) KR20070086445A (https=)
CN (1) CN101088137B (https=)
WO (1) WO2006101558A2 (https=)

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KR20070038089A (ko) * 2004-06-03 2007-04-09 이메이고 사이언티픽 인스트루먼츠 코포레이션 레이저 원자 탐침 방법
JP2006260780A (ja) * 2005-03-15 2006-09-28 Japan Atomic Energy Agency 超短パルスレーザー集光と高電圧印加の併用による針状サンプル表層のイオン化方法、及びこれを使用した針状サンプル表層の分析方法
JP4777088B2 (ja) * 2006-02-24 2011-09-21 富士通株式会社 ３次元微細領域元素分析方法
WO2008109875A1 (en) * 2007-03-08 2008-09-12 Imago Scientific Instruments Corporation Pulsed laser atom probe and associated methods
FR2932319B1 (fr) * 2008-06-10 2016-10-21 Cameca Dispositif generateur d'impulsions laser a large bande spectrale notamment pour sonde atomique tomographique.
FR2938963B1 (fr) * 2008-11-21 2010-11-12 Cameca Sonde atomique tomographique comportant un generateur electro-optique d'impulsions electriques haute tension.
US8279418B2 (en) 2010-03-17 2012-10-02 Microsoft Corporation Raster scanning for depth detection
JP2012073242A (ja) * 2010-09-23 2012-04-12 Imec レーザーアトムプローブおよびレーザーアトムプローブ分析方法
US20120117696A1 (en) * 2010-11-09 2012-05-10 International Business Machines Corporation Integrated metallic microtip coupon structure for atom probe tomographic analysis
US9111736B2 (en) * 2011-03-11 2015-08-18 Shimadzu Corporation Mass spectrometer
DE102011119164B4 (de) * 2011-11-23 2021-01-21 Westfälische Wilhelms-Universität Münster Verfahren und Vorrichung zur Durchführung der Präparation wenigstens einer Probe für die Atomsonden-Tomographie
JP2014053192A (ja) * 2012-09-07 2014-03-20 Toshiba Corp アトムプローブ測定装置およびアトムプローブ測定方法
US20150041652A1 (en) * 2013-08-12 2015-02-12 Kabushiki Kaisha Toshiba Material inspection apparatus
US9287104B2 (en) * 2013-08-14 2016-03-15 Kabushiki Kaisha Toshiba Material inspection apparatus and material inspection method
US10121636B2 (en) 2014-07-01 2018-11-06 Atomnaut Inc. Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens
CN105710368B (zh) * 2016-03-03 2018-11-23 西安铂力特增材技术股份有限公司 用于逐层制造三维物体的扫描路径规划方法及扫描方法
CN108109895B (zh) * 2016-11-24 2019-10-25 台湾积体电路制造股份有限公司 针状试片、其制备方法以及其分析方法
CN110326081B (zh) * 2018-01-31 2021-07-30 可米卡仪器公司 从多角度输入原子探针样本的能量束
CN108490632B (zh) 2018-03-12 2020-01-10 Oppo广东移动通信有限公司 激光投射模组、深度相机和电子装置
CA3090811A1 (en) * 2018-03-14 2019-09-19 Biomerieux, Inc. Methods for aligning a light source of an instrument, and related instruments
US11087956B2 (en) * 2018-06-29 2021-08-10 Taiwan Semiconductor Manufacturing Co., Ltd. Detection systems in semiconductor metrology tools
CN109900929B (zh) * 2019-03-18 2021-09-03 南京理工大学 基于matlab的fib制备三维原子探针样品过程的模拟方法
CN111751576B (zh) * 2019-03-27 2023-07-11 台湾积体电路制造股份有限公司 原子探针分析方法、装置及记录媒体
CN113063967B (zh) * 2021-02-18 2023-02-10 上海大学 可实现三维原子探针微尖阵列样品转动的旋转样品台装置

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US658069A (en) * 1899-10-17 1900-09-18 Frederick H Lewis Method of feeding pulverized fuel.
US4956650A (en) * 1988-08-26 1990-09-11 Ateq Corporation Pattern generation system
US5394741A (en) * 1990-07-11 1995-03-07 Olympus Optical Co., Ltd. Atomic probe microscope
US5061850A (en) * 1990-07-30 1991-10-29 Wisconsin Alumni Research Foundation High-repetition rate position sensitive atom probe
US5440124A (en) * 1994-07-08 1995-08-08 Wisconsin Alumni Research Foundation High mass resolution local-electrode atom probe
US6002127A (en) * 1995-05-19 1999-12-14 Perseptive Biosystems, Inc. Time-of-flight mass spectrometry analysis of biomolecules
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US6970644B2 (en) * 2000-12-21 2005-11-29 Mattson Technology, Inc. Heating configuration for use in thermal processing chambers
US6875981B2 (en) * 2001-03-26 2005-04-05 Kanazawa Institute Of Technology Scanning atom probe and analysis method utilizing scanning atom probe
JP3902925B2 (ja) * 2001-07-31 2007-04-11 エスアイアイ・ナノテクノロジー株式会社 走査型アトムプローブ
EP1735812A4 (en) * 2004-03-24 2010-06-02 Imago Scient Instr Corp LASER ATOM PROBE
KR20070038089A (ko) * 2004-06-03 2007-04-09 이메이고 사이언티픽 인스트루먼츠 코포레이션 레이저 원자 탐침 방법

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