JP2008523392A5 - - Google Patents

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Publication number
JP2008523392A5
JP2008523392A5 JP2007545555A JP2007545555A JP2008523392A5 JP 2008523392 A5 JP2008523392 A5 JP 2008523392A5 JP 2007545555 A JP2007545555 A JP 2007545555A JP 2007545555 A JP2007545555 A JP 2007545555A JP 2008523392 A5 JP2008523392 A5 JP 2008523392A5
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JP
Japan
Prior art keywords
spectroscopic
measurement
diffracted light
angles
sample
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JP2007545555A
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English (en)
Japanese (ja)
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JP2008523392A (ja
JP4879187B2 (ja
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Priority claimed from US11/078,572 external-priority patent/US7483133B2/en
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Publication of JP2008523392A publication Critical patent/JP2008523392A/ja
Publication of JP2008523392A5 publication Critical patent/JP2008523392A5/ja
Application granted granted Critical
Publication of JP4879187B2 publication Critical patent/JP4879187B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007545555A 2004-12-09 2005-12-06 複数入射角分光散乱計システム Expired - Fee Related JP4879187B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US63530504P 2004-12-09 2004-12-09
US60/635,305 2004-12-09
US11/078,572 US7483133B2 (en) 2004-12-09 2005-03-11 Multiple angle of incidence spectroscopic scatterometer system
US11/078,572 2005-03-11
PCT/US2005/044075 WO2006062952A2 (en) 2004-12-09 2005-12-06 Multiple angle of incidence spectroscopic scatterometer system

Publications (3)

Publication Number Publication Date
JP2008523392A JP2008523392A (ja) 2008-07-03
JP2008523392A5 true JP2008523392A5 (enExample) 2011-10-27
JP4879187B2 JP4879187B2 (ja) 2012-02-22

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Family Applications (1)

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JP2007545555A Expired - Fee Related JP4879187B2 (ja) 2004-12-09 2005-12-06 複数入射角分光散乱計システム

Country Status (3)

Country Link
US (1) US7483133B2 (enExample)
JP (1) JP4879187B2 (enExample)
WO (1) WO2006062952A2 (enExample)

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JP6306724B2 (ja) * 2014-01-09 2018-04-04 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 非球面およびその他の非平坦面のトポグラフィの測定
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WO2018213971A1 (zh) * 2017-05-22 2018-11-29 深圳配天智能技术研究院有限公司 一种视觉检测参数的确定方法、视觉检测设备以及视觉检测系统
KR102751649B1 (ko) * 2018-03-12 2025-01-07 오르보테크 엘티디. 자동화된 광학 검사를 위한 광학 시스템
JP7106673B2 (ja) * 2018-11-01 2022-07-26 富士フイルム株式会社 分光測定装置
WO2020090300A1 (ja) * 2018-11-01 2020-05-07 富士フイルム株式会社 分光測定装置
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