JP2008519695A5 - - Google Patents

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Publication number
JP2008519695A5
JP2008519695A5 JP2007540350A JP2007540350A JP2008519695A5 JP 2008519695 A5 JP2008519695 A5 JP 2008519695A5 JP 2007540350 A JP2007540350 A JP 2007540350A JP 2007540350 A JP2007540350 A JP 2007540350A JP 2008519695 A5 JP2008519695 A5 JP 2008519695A5
Authority
JP
Japan
Prior art keywords
suspension spring
substrate
sacrificial layer
suspension
release
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007540350A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008519695A (ja
Filing date
Publication date
Priority claimed from US10/985,530 external-priority patent/US7273762B2/en
Application filed filed Critical
Publication of JP2008519695A publication Critical patent/JP2008519695A/ja
Publication of JP2008519695A5 publication Critical patent/JP2008519695A5/ja
Pending legal-status Critical Current

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JP2007540350A 2004-11-09 2005-10-25 ばね解放ブリッジを備えたマイクロ電気機械（ｍｅｍ）装置およびその製造方法 Pending JP2008519695A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/985,530 US7273762B2 (en) 2004-11-09 2004-11-09 Microelectromechanical (MEM) device including a spring release bridge and method of making the same
PCT/US2005/038848 WO2006052472A2 (en) 2004-11-09 2005-10-25 Microelectromechanical (mem) device including a spring release bridge and method of making the same

Publications (2)

Publication Number Publication Date
JP2008519695A JP2008519695A (ja) 2008-06-12
JP2008519695A5 true JP2008519695A5 (enExample) 2008-12-18

Family

ID=36314958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007540350A Pending JP2008519695A (ja) 2004-11-09 2005-10-25 ばね解放ブリッジを備えたマイクロ電気機械（ｍｅｍ）装置およびその製造方法

Country Status (4)

Country Link
US (1) US7273762B2 (enExample)
JP (1) JP2008519695A (enExample)
TW (1) TWI358389B (enExample)
WO (1) WO2006052472A2 (enExample)

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US8136383B2 (en) * 2007-08-28 2012-03-20 Westerngeco L.L.C. Calibrating an accelerometer
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US9010170B2 (en) 2010-08-16 2015-04-21 Westerngeco L.L.C. Method and apparatus to test an accelerometer
US9217805B2 (en) 2010-10-01 2015-12-22 Westerngeco L.L.C. Monitoring the quality of particle motion data during a seismic acquisition
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FR3005045A1 (fr) 2013-04-25 2014-10-31 Commissariat Energie Atomique Structure microelectromecanique et/ou nanoelectromecanique a facteur de qualite ajustable
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