JP2008503745A - スケール読み取り装置 - Google Patents
スケール読み取り装置 Download PDFInfo
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- JP2008503745A JP2008503745A JP2007517439A JP2007517439A JP2008503745A JP 2008503745 A JP2008503745 A JP 2008503745A JP 2007517439 A JP2007517439 A JP 2007517439A JP 2007517439 A JP2007517439 A JP 2007517439A JP 2008503745 A JP2008503745 A JP 2008503745A
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- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 238000003384 imaging method Methods 0.000 claims abstract description 24
- 230000000737 periodic effect Effects 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 17
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 230000000873 masking effect Effects 0.000 claims description 2
- 230000004044 response Effects 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012864 cross contamination Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
一方の前記部材にあって、インクリメンタルパターンと、このインクリメンタルパターンに組み込まれた少なくとも1つの基準マークとを形成する周期的スケール目盛を持つスケールと、
他方の前記部材に設けられた読み取りヘッドと、
この読み取りヘッドに設けられ、前記スケールのインクリメンタルパターンによって変調する光パターンと相互作用し、前記変位に応じて前記読み取りヘッドに対して移動する干渉縞を生ずる周期的回折手段と、
前記干渉縞の移動を検出するための第1の検出手段と、
前記読み取りヘッドに設けられて前記基準マークを結像させるための結像手段と、
前記基準マークの画像を検出するための第2の検出手段と
を具え、前記結像手段が前記スケールと前記第2の検出手段との間に配されている。
Claims (12)
- 2つの部材間の変位を測定するための装置であって、
一方の前記部材にあって、インクリメンタルパターンと、このインクリメンタルパターンに組み込まれた少なくとも1つの基準マークとを形成する周期的スケール目盛を持つスケールと、
他方の前記部材に設けられた読み取りヘッドと、
この読み取りヘッドに設けられ、前記スケールのインクリメンタルパターンによって変調する光パターンと相互作用し、前記変位に応じて前記読み取りヘッドに対して移動する干渉縞を生ずる周期的回折手段と、
前記干渉縞の移動を検出するための第1の検出手段と、
前記読み取りヘッドに設けられて前記基準マークを結像させるための結像手段と、
前記基準マークの画像を検出するための第2の検出手段と
を具え、前記結像手段が前記スケールと前記第2の検出手段との間に配されていることを特徴とする装置。 - 前記周期的回折手段および前記結像手段が単一のユニットとして設けられていることを特徴とする請求項1に記載の装置。
- 前記結像手段がレンズを具えていることを特徴とする請求項1または請求項2に記載の装置。
- 前記レンズがシリンドリカルレンズを具えていることを特徴とする請求項3に記載の装置。
- 前記結像手段がフレネルゾーンプレートを具えていることを特徴とする請求項1または請求項2に記載の装置。
- 前記結像手段の少なくとも一部が前記周期的回折手段に組み込まれていることを特徴とする請求項2から請求項5の何れかに記載の装置。
- 前記結像手段と前記周期的回折手段との間にマスキング領域が設けられていることを特徴とする請求項2から請求項6の何れかに記載の装置。
- 前記第1および第2の検出手段が単一の検出ユニットとして設けられていることを特徴とする請求項1から請求項7の何れかに記載の装置。
- 前記第2の検出手段の少なくとも一部が前記第1の検出手段に組み込まれていることを特徴とする請求項8に記載の装置。
- 単一の光源が前記インクリメンタルパターンおよび基準マークのために用いられることを特徴とする請求項1から請求項9の何れかに記載の装置。
- 前記結像手段,周期的回折手段,第1および第2の検出手段ならびに光源が単一の平面内に配されていることを特徴とする請求項1から請求項10の何れかに記載の装置。
- 前記平面が前記スケールの方向と直交していることを特徴とする請求項11に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0413710.5 | 2004-06-21 | ||
GBGB0413710.5A GB0413710D0 (en) | 2004-06-21 | 2004-06-21 | Scale reading apparatus |
PCT/GB2005/002421 WO2005124282A2 (en) | 2004-06-21 | 2005-06-21 | Scale reading apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008503745A true JP2008503745A (ja) | 2008-02-07 |
JP4932706B2 JP4932706B2 (ja) | 2012-05-16 |
Family
ID=32750195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007517439A Active JP4932706B2 (ja) | 2004-06-21 | 2005-06-21 | スケール読み取り装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7659992B2 (ja) |
EP (1) | EP1766334B2 (ja) |
JP (1) | JP4932706B2 (ja) |
CN (1) | CN100543424C (ja) |
GB (1) | GB0413710D0 (ja) |
WO (1) | WO2005124282A2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009042323A1 (de) | 2008-09-19 | 2010-04-01 | Mitutoyo Corp. | Optischer Kodierer |
JP2011059055A (ja) * | 2009-09-14 | 2011-03-24 | Mitsutoyo Corp | 光電式エンコーダ |
EP2369304A1 (en) | 2010-03-18 | 2011-09-28 | Mitutoyo Corporation | Photoelectric encoder |
JP2012523557A (ja) * | 2009-04-08 | 2012-10-04 | レニショウ パブリック リミテッド カンパニー | ポジションエンコーダ装置 |
JP2014535061A (ja) * | 2011-11-09 | 2014-12-25 | ザイゴ コーポレーションZygo Corporation | 干渉方式エンコーダシステムのための小型エンコーダヘッド |
KR20150097738A (ko) * | 2012-12-20 | 2015-08-26 | 레니쇼우 피엘씨 | 광학 소자 |
DE102015016780A1 (de) | 2015-01-21 | 2016-07-21 | Mitutoyo Corporation | Codierer |
JP2017142203A (ja) * | 2016-02-12 | 2017-08-17 | 株式会社東京精密 | 光学式エンコーダ及びその原点決定方法 |
US9746348B2 (en) | 2011-11-09 | 2017-08-29 | Zygo Corporation | Double pass interferometric encoder system |
Families Citing this family (21)
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JP2008520997A (ja) * | 2004-11-22 | 2008-06-19 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 物体の動きを検出する光学システム |
JP4843556B2 (ja) * | 2006-08-29 | 2011-12-21 | シャープ株式会社 | 光学式エンコーダ |
US20090310215A1 (en) | 2007-01-11 | 2009-12-17 | Renishaw Plc | Sample positioning apparatus |
GB0807242D0 (en) | 2008-04-21 | 2008-05-28 | Renishaw Plc | Metrological scale |
GB0811076D0 (en) | 2008-06-17 | 2008-07-23 | Renishaw Plc | Scale track |
GB0906258D0 (en) | 2009-04-08 | 2009-05-20 | Renishaw Plc | Position encoder apparatus |
EP2729427A1 (en) | 2011-07-06 | 2014-05-14 | Renishaw PLC | Method of manufacture and apparatus therefor |
WO2015049175A1 (en) | 2013-10-01 | 2015-04-09 | Renishaw Plc | Method of manufacturing an electronic component |
ES2882114T3 (es) | 2013-10-01 | 2021-12-01 | Renishaw Plc | Disposición del detector de marca de referencia |
CN106104212A (zh) | 2013-10-01 | 2016-11-09 | 瑞尼斯豪公司 | 位置测量编码器 |
CN105814408B (zh) | 2013-10-01 | 2018-06-12 | 瑞尼斯豪公司 | 编码器设备和编码器读头 |
JP6818550B2 (ja) | 2013-11-05 | 2021-01-20 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | 位置測定エンコーダキャリブレーション |
WO2015078860A1 (en) | 2013-11-26 | 2015-06-04 | Renishaw Plc | Metrological scale |
EP3623769A1 (en) | 2018-09-12 | 2020-03-18 | Renishaw PLC | Measurement device |
EP3663723A1 (en) | 2018-12-04 | 2020-06-10 | Renishaw PLC | Encoder apparatus |
GB201916662D0 (en) | 2019-11-15 | 2020-01-01 | Renishaw Plc | Encoder apparatus |
GB201916641D0 (en) | 2019-11-15 | 2020-01-01 | Renishaw Plc | Position measurement device |
DE102020134604B4 (de) | 2020-12-22 | 2022-07-14 | Smaract Gmbh | Vorrichtung und Verfahren zur Positionsbestimmung |
US20240085219A1 (en) | 2021-02-09 | 2024-03-14 | Renishaw Plc | Rotary encoder |
EP4134633A1 (en) | 2021-08-12 | 2023-02-15 | Renishaw PLC | Position encoder apparatus |
KR20240042465A (ko) | 2021-08-12 | 2024-04-02 | 레니쇼우 피엘씨 | 위치 인코더 장치 |
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JPH11142114A (ja) * | 1997-08-07 | 1999-05-28 | Dr Johannes Heidenhain Gmbh | 光学位置測定装置用の走査ユニット |
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JP3089055B2 (ja) * | 1991-08-14 | 2000-09-18 | 日本電産コパル株式会社 | 光学式変位検出装置 |
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JP3005131B2 (ja) * | 1992-12-28 | 2000-01-31 | キヤノン株式会社 | 変位検出装置 |
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GB0103582D0 (en) * | 2001-02-14 | 2001-03-28 | Renishaw Plc | Position determination system |
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2004
- 2004-06-21 GB GBGB0413710.5A patent/GB0413710D0/en not_active Ceased
-
2005
- 2005-06-21 EP EP05758458.3A patent/EP1766334B2/en active Active
- 2005-06-21 CN CNB2005800204099A patent/CN100543424C/zh active Active
- 2005-06-21 US US11/629,853 patent/US7659992B2/en active Active
- 2005-06-21 JP JP2007517439A patent/JP4932706B2/ja active Active
- 2005-06-21 WO PCT/GB2005/002421 patent/WO2005124282A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS61503051A (ja) * | 1984-12-22 | 1986-12-25 | レニシヨウ パブリツク リミテツド カンパニ− | 光↓−電子式目盛↓−読取装置 |
JPH0389113A (ja) * | 1989-08-31 | 1991-04-15 | Copal Co Ltd | 光学式変位検出装置 |
JPH11142114A (ja) * | 1997-08-07 | 1999-05-28 | Dr Johannes Heidenhain Gmbh | 光学位置測定装置用の走査ユニット |
Cited By (18)
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US8173951B2 (en) | 2008-09-19 | 2012-05-08 | Mitutoyo Corporation | Optical encoder comprising a main and reference light receiving portions with a three-phase signal generation for detecting displacement and direction of displacement of an incremental grating track |
DE102009042323A1 (de) | 2008-09-19 | 2010-04-01 | Mitutoyo Corp. | Optischer Kodierer |
JP2012523557A (ja) * | 2009-04-08 | 2012-10-04 | レニショウ パブリック リミテッド カンパニー | ポジションエンコーダ装置 |
JP2011059055A (ja) * | 2009-09-14 | 2011-03-24 | Mitsutoyo Corp | 光電式エンコーダ |
EP2369304A1 (en) | 2010-03-18 | 2011-09-28 | Mitutoyo Corporation | Photoelectric encoder |
JP2011196780A (ja) * | 2010-03-18 | 2011-10-06 | Mitsutoyo Corp | 光電式エンコーダ |
US8666261B2 (en) | 2010-03-18 | 2014-03-04 | Mitutoyo Corporation | Photoelectric encoder |
US9746348B2 (en) | 2011-11-09 | 2017-08-29 | Zygo Corporation | Double pass interferometric encoder system |
JP2014535061A (ja) * | 2011-11-09 | 2014-12-25 | ザイゴ コーポレーションZygo Corporation | 干渉方式エンコーダシステムのための小型エンコーダヘッド |
US9201313B2 (en) | 2011-11-09 | 2015-12-01 | Zygo Corporation | Compact encoder head for interferometric encoder system |
KR20150097738A (ko) * | 2012-12-20 | 2015-08-26 | 레니쇼우 피엘씨 | 광학 소자 |
JP2016506516A (ja) * | 2012-12-20 | 2016-03-03 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | 光学要素 |
US9952068B2 (en) | 2012-12-20 | 2018-04-24 | Renishaw Plc | Optical element |
KR102128135B1 (ko) * | 2012-12-20 | 2020-06-29 | 레니쇼우 피엘씨 | 광학 소자 |
US10768026B2 (en) | 2012-12-20 | 2020-09-08 | Renishaw Plc | Optical element |
DE102015016780A1 (de) | 2015-01-21 | 2016-07-21 | Mitutoyo Corporation | Codierer |
US9759584B2 (en) | 2015-01-21 | 2017-09-12 | Mitutoyo Corporation | Encoder having a detection head with a reference detection receiving grating and a phase compensation receiving grating |
JP2017142203A (ja) * | 2016-02-12 | 2017-08-17 | 株式会社東京精密 | 光学式エンコーダ及びその原点決定方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2005124282A3 (en) | 2006-03-23 |
GB0413710D0 (en) | 2004-07-21 |
WO2005124282A2 (en) | 2005-12-29 |
EP1766334B1 (en) | 2014-07-02 |
CN1973185A (zh) | 2007-05-30 |
CN100543424C (zh) | 2009-09-23 |
US7659992B2 (en) | 2010-02-09 |
EP1766334A2 (en) | 2007-03-28 |
US20080013105A1 (en) | 2008-01-17 |
EP1766334B2 (en) | 2021-10-06 |
JP4932706B2 (ja) | 2012-05-16 |
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