JP2008302458A - Polishing device and polishing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing device uniformly correcting and polishing a local irregular part of a polishing object, and also to provide a polishing method to polish the local irregular part by using this polishing device. <P>SOLUTION: This polishing device is constituted to polish a protruded part A of a glass pane 2 by positioning a chuck Y axis movable carriage 34 and a chuck X axis movable carriage 35 so that a top point of the protruded part A of the glass pane 2 and a rotation axis of a chuck rotation axis 32 are overlapped on each other by respectively moving the chuck Y axis movable carriage 34 and the chuck X axis movable carriage 35 by driving mechanisms D8, D9, rotating the glass pane 2 with the chuck Y axis movable carriage 34 and chuck X axis movable carriage 35 provided on a chuck rotating base 33, by rotating the chuck rotating base 33 and a vacuum chuck 36 around the top point of the protruded part A as their center, and by pressurizing a polishing surface of an auxiliary polishing pad 25 on the protruded part A of the glass pane 2 by prescribed contact pressure in a state where a rotation axis of an auxiliary polishing head rotation axis 21 and the rotation axis of the chuck rotation axis 32 match with each other. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a polishing apparatus for polishing a surface of an object to be polished such as a glass plate and a polishing method thereof.

  In a CMP apparatus (chemical mechanical polishing apparatus) that polishes the surface of an object to be polished such as a glass plate, uniform polishing along a large period of irregularities (waviness) of the object to be polished (this is called global polishing). And the modified polishing for flattening the local irregularities remaining on the polished surface of the object to be polished after this global polishing (referred to as local polishing) is required. Yes.

  Conventionally, when correction polishing (local polishing) of a surface to be polished having local uneven portions of an object to be polished is performed, rotation of a polishing tool to which a small-diameter polishing pad suitable for polishing the uneven portions is attached. The polishing tool is rotated and reciprocated (oscillated) in one direction by rotating the polishing tool so that the shaft is parallel to the normal line of the surface to be polished and the uneven part is positioned on the extended line of the rotating shaft of the polishing tool. Meanwhile, the uneven portion is selectively polished by pressing the polishing tool against the uneven portion of the polishing object that is not rotating (see, for example, Patent Document 1).

International Publication No. 04/075276 Pamphlet

  By the way, the amount of polishing by such a polishing tool is proportional to the relative speed between the polishing pad and the surface to be polished of the object to be polished, and therefore the polishing amount is at a position near the rotation center of the polishing pad (position where the rotation speed is low). The polishing amount varies such that the polishing amount increases at a small position away from the center of rotation (position where the rotation speed is high). For this reason, in the conventional correction polishing, it is possible to uniformly polish the local irregularities on the surface to be polished in the swinging direction of the polishing tool, but in a direction different from the swinging direction (particularly perpendicular to the swinging direction). In the direction), the amount of polishing varies, and the uneven portion cannot be polished uniformly, and the surface to be polished cannot be finished to the target surface shape with high accuracy.

  The present invention has been made in view of such problems, and a polishing apparatus capable of uniformly correcting and polishing a local uneven portion of an object to be polished, and a local uneven portion using the polishing apparatus. It aims at providing the grinding | polishing method which grind | polishes.

  In order to solve the above problems and achieve the object, a polishing apparatus according to a first aspect of the present invention is a holding member that holds an object to be polished and a surface to be polished of the object to be polished held by the holding member. And a polishing pad having a small-diameter polishing surface suitable for local polishing of the polishing target surface, and the polishing surface is applied to the polishing target portion of the polishing target surface while rotating and reciprocating the polishing pad. A polishing mechanism that contacts and polishes the portion to be polished, a rotating member that supports the holding member and is rotatable, and a rotation member that is provided so that a rotation axis thereof substantially intersects with a reciprocating locus of the polishing pad; A holding member moving mechanism that moves the holding member in a plane perpendicular to the rotation axis with respect to the rotating member, and the holding member moving mechanism moves the holding member on the rotating member to hold the holding member. By material The polishing target portion of the held polishing object is positioned so as to overlap the rotation shaft of the rotating member, the rotating member is rotated, the holding member and the polishing object are rotated about the rotating shaft, and the polishing is performed. While the pad is rotated and reciprocated, the polishing target portion is brought into contact with the polishing target surface of the polishing target and the polishing target portion is polished.

  In the polishing apparatus, it is preferable that the polishing mechanism reciprocates the polishing pad with a reciprocating stroke not less than 0.4 times the outer diameter of the polishing pad.

The second aspect of the present invention is a polishing method in which the object to be polished is a rectangular glass plate made of SiO ₂ and the polishing target portion of the glass plate is polished using the polishing apparatus.

  According to the polishing apparatus according to the present invention, the holding member moving mechanism moves the holding member on the rotating member, and the polishing target portion of the polishing object held by the holding member is positioned so as to overlap the rotating shaft of the rotating member, The holding member and the polishing object are rotated about the rotation axis by rotating the rotating member, and the polishing pad is rotated and reciprocated to contact the polishing object surface of the polishing object to polish the polishing object portion. Configured as follows. For this reason, the polishing object itself can be rotated together with the rotation and reciprocation of the polishing pad to perform local polishing of the polishing object, and the amount of polishing varies due to the relative speed difference between the polishing pad and the polishing object. Thus, the local polishing target portion of the object to be polished can be uniformly corrected and polished to finish the target surface shape.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic configuration of a CMP apparatus 1 which is a typical example of a polishing apparatus according to the present invention. This CMP apparatus 1 includes a polishing apparatus 10 that performs overall polishing (global polishing) on a surface to be polished of a rectangular glass plate 2 made of SiO ₂ that is an object to be polished, and a local area on the surface to be polished of the glass plate 2. And a glass plate holding device 30 for holding the glass plate 2 so that the surface to be polished of the glass plate 2 faces the polishing device 10 and the sub polishing device 20. Configured.

  The polishing apparatus 10, the auxiliary polishing apparatus 20, and the glass plate holding apparatus 30 are supported by a support frame 40. The support frame 40 has a horizontal base 41 and a rail (not shown) provided on the base 41 so as to extend in the Y direction (the direction perpendicular to the paper surface is the front-rear direction). A first stage 42 that is movably provided in the vertical direction, a vertical frame 43 that is provided so as to extend vertically (Z direction; vertical direction in the drawing) from the first stage 42, and the vertical frame 43 on the Z direction. A second stage 44 provided movably, a horizontal frame 45 provided so as to extend horizontally from the second stage 44 (X direction; left and right direction on the paper surface), and moved on the horizontal frame 45 in the X direction. It has a third stage 46 and a fourth stage 47 that are freely provided.

  A first drive mechanism D1 using an electric motor or the like as a drive source is provided in the first stage 42, and the first stage 42 can be moved in the Y direction along the rail by the first drive mechanism D1. it can. In addition, a second drive mechanism D2 is provided in the second stage 44, and the second stage 44 can be moved in the Z direction along the vertical frame 43 by the second drive mechanism D2. Further, a third drive mechanism D3 and a fourth drive mechanism D4 are provided in the third stage 46 and the fourth stage 47, respectively, and the third stage 46 and the fourth stage 47 are horizontally moved by the drive mechanisms D3 and D4. It can be moved in the X direction along the frame 45. For this reason, the third stage 46 and the fourth stage 47 are moved to an arbitrary XY position (horizontal position) above the glass plate holding device 30 by performing drive control of the drive mechanisms D1, D3, and D4 and combining the respective operations. It is possible to move. Further, by performing drive control of the second drive mechanism D2, the third stage 46 and the fourth stage 47 can be moved to any Z position (a height position above the glass plate holding device 30). The drive mechanisms D2, D3, and D4 are configured using an electric motor or the like as a drive source, similarly to the first drive mechanism D1.

  The polishing apparatus 10 includes a polishing head rotating shaft 11 provided so as to extend downward from the third stage 46, and a polishing head 12 attached to a lower end portion of the polishing head rotating shaft 11. On the lower surface of the polishing head 12, a disk-like support plate 13 having a polishing pad 15 attached to the lower surface using a double-sided adhesive tape or the like is attached by vacuum suction. For this reason, the vacuum suction is released, and the polishing pad 15 can be removed from the polishing head 12 together with the support plate 13 and replaced.

  The polishing head rotating shaft 11 is rotated by a fifth drive mechanism D5 that uses an electric motor or the like provided in the third stage 46 as a drive source, whereby the polishing head 12 is rotated and the polishing surface (glass) of the polishing pad 15 is rotated. The surface that contacts the surface of the plate 2 and is polished can be rotated within the XY plane (horizontal plane). The third stage 46 includes an air cylinder (not shown), and the polishing head 12 is moved up and down via the polishing head rotating shaft 11 by the air cylinder so that the polishing surface of the polishing pad 15 is made of glass. The surface to be polished of the plate 2 can be pressed with a predetermined contact pressure.

  The polishing pad 15 is formed in a disk shape having substantially the same outer diameter as the support plate 13 using a foam resin material such as foaming polyurethane, or a thin donut shape having a hole in the center. In this embodiment, the polishing pad 15 is a thin donut shape. On the polishing surface of the polishing pad 15, lattice-like grooves are formed at substantially equal intervals in the vertical and horizontal directions, and the diffusion of the abrasive (slurry) is promoted during the polishing process.

  The sub-polishing apparatus 20 includes a sub-polishing head rotating shaft 21 that extends downward from the fourth stage 47 and a sub-polishing head 22 that is attached to the lower end of the sub-polishing head rotating shaft 21. . On the lower surface of the sub-polishing head 22, a disk-shaped sub-support plate 23 having a sub-polishing pad 25 attached to the lower surface using a double-sided adhesive tape or the like is attached by vacuum suction. For this reason, the vacuum suction is released, and the auxiliary polishing pad 25 is detached from the auxiliary polishing head 22 together with the auxiliary support plate 23 and can be replaced.

  The secondary polishing head rotating shaft 21 is rotated by a sixth drive mechanism D6 that uses an electric motor or the like provided in the fourth stage 47 as a drive source, thereby rotating the secondary polishing head 22 to polish the secondary polishing pad 25. The surface (the surface on which the surface of the glass plate 2 is abutted and polished) can be rotated within the XY plane (horizontal plane). Further, the fourth stage 47 incorporates an air cylinder (not shown), and the auxiliary polishing head 22 is moved up and down by the air cylinder via the auxiliary polishing head rotating shaft 21 to polish the auxiliary polishing pad 25. The surface can be pressed against the surface to be polished of the glass plate 2 with a predetermined contact pressure.

  The secondary polishing pad 25 is formed in a disk shape having the same outer diameter as the secondary support plate 23 using a foam resin material such as foamable polyurethane, or a thin donut shape having a hole in the center. . In this embodiment, the auxiliary polishing pad 25 is a thin donut shape. On the polishing surface of the secondary polishing pad 25, lattice-like grooves are formed at substantially equal intervals in the vertical and horizontal directions, so that the diffusion of the abrasive (slurry) is promoted during the polishing process. The sub-polishing pad 25 has a smaller diameter than the polishing pad 15 described above, and can locally polish the surface of the glass plate 2 as compared with the polishing head 12 (polishing apparatus 10).

  The glass plate holding device 30 includes a turntable support portion 31 provided on a base 41, a chuck rotation shaft 32 provided vertically extending from the turntable support portion 31, and an upper end portion of the chuck rotation shaft 32. A chuck turntable 33 horizontally mounted on the chuck turntable 33, a chuck Y axis move stand 34 provided on the chuck turntable 33 and moving in the Y axis direction along the upper surface of the chuck turntable 33, and a chuck Y axis move stand 34. A chuck X-axis moving table 35 that moves in the X direction along the upper surface of the chuck Y-axis moving table 34 and a vacuum that is provided on the chuck X-axis moving table 35 and holds the glass plate 2 on the upper surface side. And a chuck 36.

  A vacuum suction chuck mechanism (not shown) is provided in the vacuum chuck 36, and the glass plate 2 is detachably sucked and held by the vacuum suction chuck mechanism. A seventh drive mechanism D7 having an electric motor or the like as a drive source is provided in the turntable support portion 31, and a chuck rotation shaft 32 provided extending from the turntable support portion 31 is provided with the seventh drive mechanism D7. Thus, the chuck turntable 33 can be rotated.

  As shown in FIG. 2, a pair of rails 37, 37 extending in the Y direction are provided on the chuck turntable 33. An eighth drive mechanism D8 using an electric motor or the like as a drive source is provided in the chuck Y-axis moving table 34. The chuck Y-axis moving table 34 is provided on the chuck rotating table 33 by the eighth drive mechanism D8. It can be moved in the Y-axis direction along the rails 37, 37. A pair of rails 38, 38 extending in the X direction are provided on the chuck Y-axis moving table 34. A ninth drive mechanism D9 using an electric motor or the like as a drive source is provided in the chuck X-axis moving table 35. The chuck X-axis moving table 35 is placed on the chuck Y-axis moving table 34 by the ninth drive mechanism D9. Can be moved in the X-axis direction along rails 38, 38 provided on the X-axis. Therefore, by controlling the driving mechanisms D8 and D9 to combine the operations of the chuck Y-axis moving table 34 and the chuck X-axis moving table 35, the vacuum chuck 36 provided on the chuck X-axis moving table 35 and this The glass plate 2 sucked and held on the upper surface of the vacuum chuck 36 can be moved to an arbitrary XY position (horizontal position).

  Next, in the CMP apparatus 1 configured as described above, the overall polishing of the polished surface of the glass plate 2 (global polishing) and the local polishing of the polished surface of the glass plate 2 (local polishing) are performed. A polishing method will be described.

  In order to perform overall polishing (global polishing) of the surface to be polished of the glass plate 2 using the polishing apparatus 10, first, the glass plate 2 to be polished is adsorbed on the upper surface of the vacuum chuck 36 in the glass plate holding apparatus 30. And attach. Next, the chuck Y-axis moving table 34 and the chuck X-axis moving table 35 are moved by the driving mechanisms D8 and D9, respectively, so that the approximate center of the glass plate 2 and the rotating shaft of the chuck rotating shaft 32 overlap each other. The vacuum chuck 36 provided on the moving table 35 and the glass plate 2 held on the upper surface of the vacuum chuck 36 are moved in the XY plane. Then, the chuck rotating base 33 is rotated by the seventh drive mechanism D7 via the chuck rotating shaft 32. In other words, the chuck rotating base 33 is rotated by the seventh drive mechanism D 7, and the glass Y 2 is moved together with the chuck Y-axis moving base 34, the chuck X-axis moving base 35 and the vacuum chuck 36 provided on the chuck rotating base 33. The glass plate 2 is rotated in a state where the center and the rotation shaft of the chuck rotation shaft 32 overlap.

  Subsequently, the third stage 46 is moved by the driving mechanisms D1 and D3 so that the polishing head 12 is positioned above the glass plate 2, and the polishing head 12 is rotated via the polishing head rotating shaft 11 by the fifth driving mechanism D5. . Next, the second stage 44 is moved in the Z direction by the second drive mechanism D2 so that the polishing surface of the polishing pad 15 is positioned close to the surface to be polished of the glass plate 2, and is incorporated in the third stage 46. The polishing head 12 is lowered using an air cylinder (not shown), and the polishing surface of the polishing pad 15 is pressed against the surface to be polished of the glass plate 2 with a predetermined contact pressure. Then, the third stage 46 is reciprocated along the horizontal frame 45 by the third drive mechanism D3, that is, the polishing head 12 (the polishing surface of the polishing pad 15) is reciprocated in the X direction. At this time, the polishing agent is pumped from a polishing agent supply device (not shown) to supply the polishing agent to the lower side of the polishing surface of the polishing pad 15. Thus, the surface to be polished of the glass plate 2 is entirely polished by the rotational movement of the glass plate 2 itself and the rotation and reciprocation of the polishing head 12 (polishing pad 15) while being supplied with the abrasive.

  In this way, when the entire surface to be polished (global polishing) of the glass plate 2 is polished using the polishing apparatus 10, local uneven portions may remain on the surface to be polished of the glass plate 2, In order to correct the uneven portion, local polishing (local polishing) of the surface to be polished of the glass plate 2 is performed using the sub polishing apparatus 20. The local polishing by the sub polishing apparatus 20 is not limited to the case where the local polishing is performed after the global polishing by the polishing apparatus 10 but is performed to correct a local uneven portion caused by some factor. In the present embodiment, the local polishing by the sub polishing apparatus 20 will be described with reference to the correction polishing of the convex portion A which is a local portion existing on the surface to be polished of the glass plate 2 shown in FIG.

  In local polishing (local polishing) of the surface to be polished of the glass plate 2 using the sub-polishing apparatus 20, first, as shown in FIG. 2, the chuck Y-axis moving table 34, the chuck X-axis are driven by the drive mechanisms D8 and D9. The moving table 35 is moved, and the vacuum chuck 36 and the vacuum chuck 36 provided on the chuck X-axis moving table 35 so that the apex of the convex portion A of the glass plate 2 and the rotating shaft of the chuck rotating shaft 32 overlap each other. The glass plate 2 held on the upper surface is moved in the XY plane. Next, the chuck rotating base 33 is rotated via the chuck rotating shaft 32 by the seventh drive mechanism D7. That is, the chuck rotating base 33 is rotated by the seventh drive mechanism D 7, and the convexity of the glass plate 2 is brought together with the chuck Y-axis moving base 34, the chuck X-axis moving base 35 and the vacuum chuck 36 provided on the chuck rotating base 33. The glass plate 2 is rotated in a state where the apex of the part A and the rotation shaft of the chuck rotation shaft 32 overlap. At this time, the glass plate 2 is rotated around the apex of the convex portion A of the glass plate 2 (the position of the surface to be polished that should be most actively polished using the sub polishing apparatus 20).

  Subsequently, the fourth stage 47 is moved to the glass plate by the driving mechanisms D1 and D4 so that the sub-polishing head 22 (the polishing surface of the sub-polishing pad 25) of the sub-polishing apparatus 20 faces the convex portion A of the glass plate 2 vertically. 2 above. At this time, the rotation axis of the auxiliary polishing head rotation shaft 21 and the rotation shaft of the chuck rotation shaft 32 coincide with each other, that is, the rotation axis where both coincide with each other overlaps the apex of the convex portion A of the glass plate 2. Then, the auxiliary polishing head 22 is rotated by the sixth drive mechanism D6 via the auxiliary polishing head rotating shaft 21.

  Next, the second stage 44 is moved in the Z direction by the second drive mechanism D2 so that the polishing surface of the sub-polishing pad 25 is positioned so as to be close to the convex portion A of the glass plate 2, and is incorporated in the fourth stage 47. The secondary polishing head 22 is lowered using an air cylinder (not shown), and the polishing surface of the secondary polishing pad 25 is pressed against the convex portion A of the glass plate 2 with a predetermined contact pressure. Then, the fourth stage 47 is reciprocated along the horizontal frame 45 by the fourth drive mechanism D4. That is, the auxiliary polishing head 22 (the polishing surface of the auxiliary polishing pad 25) is reciprocated in the X direction so that the position where the rotation axis of the auxiliary polishing head rotating shaft 21 and the apex of the convex portion A overlap is one end of the reciprocating stroke. Move. At this time, the polishing agent is pumped from a polishing agent supply device (not shown) to supply the polishing agent to the lower side of the polishing surface of the auxiliary polishing pad 25. Thereby, the convex part A of the glass plate 2 is polished by the rotational movement of the glass plate 2 itself together with the rotation and reciprocation of the sub-polishing head 22 (sub-polishing pad 25) while being supplied with the abrasive.

  FIG. 3 shows the distribution of the polishing amount every time the reciprocating stroke of the secondary polishing head 22 is changed when local polishing (local polishing) of the surface to be polished of the glass plate 2 is performed using the secondary polishing apparatus 20. Is the simulation data calculated. FIG. 3 shows the position in the X direction (reciprocating direction of the sub-polishing head 22) on the glass plate 2 where the apex of the convex portion A is 0 on the horizontal axis, and the amount of polishing on the vertical axis. It is the graph which plotted distribution of the polish amount in the to-be-polished surface of the glass plate 2 whenever it makes it. The polishing conditions are such that the shape of the auxiliary polishing pad 25 is an outer diameter of 36 mm and an inner diameter of 5 mm, and the rotation speed of the auxiliary polishing pad 25 and the glass plate 2 is 150 rpm / 11 rpm. The reciprocating stroke ST of the sub-polishing head 22 is calculated by ST = 36 mm (outer diameter of the sub-polishing pad 25) × K (coefficient), and is varied in the range of K = 0.1 to 0.8. The sub-polishing pad 22 reciprocates in the X direction so that the position where the center of the sub-polishing pad 22 and the apex of the protrusion A (the position of 0 on the horizontal axis in FIG. 3) overlap is one end of the reciprocating stroke ST. The glass plate 2 moves around the vertex of the convex portion A. Therefore, the polishing range on the glass plate 2 by the sub-polishing apparatus 20 is a radius R (R = reciprocating stroke ST + 18 mm (sub-polishing pad 22) centered on the apex of the convex portion A (position 0 on the horizontal axis in FIG. 3). The outer diameter x 1/2)).

  Comparing these calculated simulation data, when the coefficient K = 0.1 to 0.3 (reciprocating stroke ST = 3.6 to 10.8 mm), the portion where the polishing amount extremely decreases in the vicinity of the apex of the convex portion A of the glass plate 2 ( A singular point in the graph of FIG. 3 is seen. That is, when the coefficient K = 0.1 to 0.3, the apex of the convex portion A of the glass plate 2 to be polished most is not actively polished. However, when the coefficient K = 0.4 to 0.8 (reciprocating stroke ST = 14.4 to 28.8 mm), the portion where the polishing amount near the apex of the convex portion A of the glass plate 2 is extremely reduced (singular point in the graph of FIG. 3). Almost disappear. Therefore, in local polishing (local polishing) of the surface to be polished of the glass plate 2 using the sub-polishing apparatus 20, a reciprocating stroke ST having a coefficient K = 0.4 or more, that is, 0.4 times or more of the outer diameter of the sub-polishing pad 25. It is preferable to reciprocate the auxiliary polishing head 22.

  The position of the convex portion A of the glass plate 2 can be detected by scanning the surface to be polished of the glass plate 2 with an optical detector. For example, as described in Patent Document 1, a cavity is formed in the center of the secondary polishing head rotating shaft 21, the secondary polishing head 22, the secondary support plate 23, and the secondary polishing pad 25 constituting the secondary polishing apparatus 20, An optical fiber connected to an optical detector is provided in this cavity. By moving the auxiliary polishing apparatus 20 in the XY plane above the glass plate 2 by the driving mechanisms D1 and D4, the surface to be polished of the glass plate 2 is scanned by the optical detector, and the surface of the glass plate 2 to be polished is scanned. The position where the convex part A exists can be detected. Thus, according to the case where the sub-polishing apparatus 20 is provided with the optical detector, when the convex portion A is detected on the surface to be polished of the glass plate 2, there is an advantage that the convex portion A can be immediately polished and flattened. The optical detector may be provided separately from the sub polishing apparatus 20. In that case, it is necessary to detect the projection A on the entire surface to be polished of the glass plate 2 and store the position where the projection A exists.

  As described above, in the CMP apparatus 1, the chuck Y-axis moving table 34 and the chuck X-axis moving table are driven by the driving mechanisms D8 and D9 when the local projection A of the glass plate 2 is polished (local polishing). 35 can be moved so that the apex of the convex portion A of the glass plate 2 and the rotation shaft of the chuck rotation shaft 32 overlap each other. For this reason, the auxiliary polishing head rotating shaft 21 and the chuck rotating shaft 32 are in a state in which the rotating shaft coincides with the rotating shaft of the chuck rotating shaft 32, that is, in a state in which the rotating shaft that coincides with the apex of the convex portion A of the glass plate 2. As the head 22 (sub-polishing pad 25) rotates and reciprocates, the glass plate 2 itself can be rotated about the apex of the convex portion A to polish the convex portion A of the glass plate 2, so that the sub-polishing head 22 (sub-polishing pad 25) and the influence of the variation in polishing amount due to the difference in relative speed between the glass plate 2 is reduced, and the local convex portion A of the glass plate 2 is uniformly polished to the target surface shape. Can be finished.

  Further, in the local polishing (local polishing) of the convex portion A of the glass plate 2 using the auxiliary polishing apparatus 20, the auxiliary polishing head 22 is reciprocated with a reciprocating stroke ST of 0.4 times or more the outer diameter of the auxiliary polishing pad 25. By moving, it can be avoided that the polishing amount is extremely reduced in the vicinity of the apex of the convex portion A of the glass plate 2, and the local convex portion A of the glass plate 2 is uniformly polished to obtain the desired surface shape. Can be finished.

It is a front view which shows the CMP apparatus which is an example of the grinding | polishing apparatus which concerns on this invention. It is a figure explaining the local grinding | polishing using the subpolishing apparatus which comprises the said CMP apparatus. It is the simulation data which calculated distribution of the polishing amount in the to-be-polished surface of a glass plate every time the reciprocation stroke of the sub-polishing head which comprises the said sub-polishing apparatus is changed.

Explanation of symbols

A Convex (polishing target)
1 CMP equipment (polishing equipment)
2 Glass plate (object to be polished)
20 Sub-polishing device (polishing mechanism)
21 Sub-polishing head rotating shaft 25 Polishing pad (polishing pad)
32 Chuck rotating shaft 33 Chuck rotating base (rotating member)
34 Chuck Y-axis moving table (holding member moving mechanism)
35 Chuck X-axis moving table (holding member moving mechanism)
36 Vacuum chuck (holding member)

Claims (3)

A holding member for holding an object to be polished;
A polishing pad having a small-diameter polishing surface suitable for performing local polishing of the polishing target surface while facing the polishing target surface of the polishing target held by the holding member; and rotating and reciprocating the polishing pad A polishing mechanism for polishing the polishing target part by bringing the polishing surface into contact with the polishing target part of the polishing target surface while moving;
A rotating member that is rotatable so as to support the holding member and whose rotation axis substantially intersects the reciprocating locus of the polishing pad;
A holding member moving mechanism for moving the holding member in a plane perpendicular to the rotation axis with respect to the rotating member;
The holding member is moved on the rotating member by the holding member moving mechanism, the polishing target portion of the polishing object held by the holding member is positioned so as to overlap the rotation axis of the rotating member, and the rotating member is rotated. The holding member and the polishing object are rotated about the rotation axis, and the polishing pad is brought into contact with the polishing object surface of the polishing object while rotating and reciprocating, thereby polishing the polishing object part. Polishing apparatus characterized by performing.   The polishing apparatus according to claim 1, wherein the polishing mechanism reciprocates the polishing pad with a reciprocating stroke of 0.4 times or more the outer diameter of the polishing pad. It said polishing object has a rectangular shape glass plate made of SiO _2,
The grinding | polishing method which grind | polishes the grinding | polishing object part of the said glass plate using the grinding | polishing apparatus of Claim 1 or Claim 2.

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