JP2008298177A - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP2008298177A
JP2008298177A JP2007144919A JP2007144919A JP2008298177A JP 2008298177 A JP2008298177 A JP 2008298177A JP 2007144919 A JP2007144919 A JP 2007144919A JP 2007144919 A JP2007144919 A JP 2007144919A JP 2008298177 A JP2008298177 A JP 2008298177A
Authority
JP
Japan
Prior art keywords
joint
fluid control
members
control device
joint member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007144919A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008298177A5 (enrdf_load_stackoverflow
Inventor
Tomohiro Nakada
知宏 中田
Tsutomu Shinohara
努 篠原
Michio Yamaji
道雄 山路
Wataru Okase
亘 大加瀬
Shuji Moriya
修司 守谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Priority to JP2007144919A priority Critical patent/JP2008298177A/ja
Priority to PCT/JP2008/059631 priority patent/WO2008146778A1/ja
Priority to TW097119845A priority patent/TW200916677A/zh
Publication of JP2008298177A publication Critical patent/JP2008298177A/ja
Publication of JP2008298177A5 publication Critical patent/JP2008298177A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Chemical Vapour Deposition (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
JP2007144919A 2007-05-31 2007-05-31 流体制御装置 Pending JP2008298177A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007144919A JP2008298177A (ja) 2007-05-31 2007-05-31 流体制御装置
PCT/JP2008/059631 WO2008146778A1 (ja) 2007-05-31 2008-05-26 流体制御装置
TW097119845A TW200916677A (en) 2007-05-31 2008-05-29 Fluid control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007144919A JP2008298177A (ja) 2007-05-31 2007-05-31 流体制御装置

Publications (2)

Publication Number Publication Date
JP2008298177A true JP2008298177A (ja) 2008-12-11
JP2008298177A5 JP2008298177A5 (enrdf_load_stackoverflow) 2010-05-27

Family

ID=40075019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007144919A Pending JP2008298177A (ja) 2007-05-31 2007-05-31 流体制御装置

Country Status (3)

Country Link
JP (1) JP2008298177A (enrdf_load_stackoverflow)
TW (1) TW200916677A (enrdf_load_stackoverflow)
WO (1) WO2008146778A1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018047907A1 (ja) * 2016-09-12 2018-03-15 株式会社フジキン 流体制御装置、これに用いるベースブロックおよび流体制御装置の製造方法
KR20190075100A (ko) 2016-10-24 2019-06-28 가부시키가이샤 후지킨 유체제어장치 및 이 유체제어장치를 사용한 제품 제조방법
KR20200015691A (ko) 2017-08-31 2020-02-12 가부시키가이샤 후지킨 조인트 블록 및 그 제조방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102152822B1 (ko) * 2016-06-21 2020-09-07 가부시키가이샤 후지킨 유체제어장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5086322U (enrdf_load_stackoverflow) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (enrdf_load_stackoverflow) * 1966-09-14 1971-01-11

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5086322U (enrdf_load_stackoverflow) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018047907A1 (ja) * 2016-09-12 2018-03-15 株式会社フジキン 流体制御装置、これに用いるベースブロックおよび流体制御装置の製造方法
KR20190059916A (ko) 2016-09-12 2019-05-31 가부시키가이샤 후지킨 유체제어장치, 이것에 사용하는 베이스 블록 및 유체제어장치의 제조 방법
US10895329B2 (en) 2016-09-12 2021-01-19 Fujikin Incorporated Fluid control system, base block used for same, and method for manufacturing fluid control system
KR20190075100A (ko) 2016-10-24 2019-06-28 가부시키가이샤 후지킨 유체제어장치 및 이 유체제어장치를 사용한 제품 제조방법
JPWO2018079288A1 (ja) * 2016-10-24 2019-09-12 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
KR20200015691A (ko) 2017-08-31 2020-02-12 가부시키가이샤 후지킨 조인트 블록 및 그 제조방법

Also Published As

Publication number Publication date
TW200916677A (en) 2009-04-16
WO2008146778A1 (ja) 2008-12-04

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