WO2008146778A1 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

Info

Publication number
WO2008146778A1
WO2008146778A1 PCT/JP2008/059631 JP2008059631W WO2008146778A1 WO 2008146778 A1 WO2008146778 A1 WO 2008146778A1 JP 2008059631 W JP2008059631 W JP 2008059631W WO 2008146778 A1 WO2008146778 A1 WO 2008146778A1
Authority
WO
WIPO (PCT)
Prior art keywords
corners
control apparatus
fluid control
members
joint
Prior art date
Application number
PCT/JP2008/059631
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Tomohiro Nakata
Tsutomu Shinohara
Michio Yamaji
Wataru Okase
Shuji Moriya
Original Assignee
Fujikin Incorporated
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Incorporated, Tokyo Electron Limited filed Critical Fujikin Incorporated
Priority to TW097119845A priority Critical patent/TW200916677A/zh
Publication of WO2008146778A1 publication Critical patent/WO2008146778A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Chemical Vapour Deposition (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
PCT/JP2008/059631 2007-05-31 2008-05-26 流体制御装置 WO2008146778A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097119845A TW200916677A (en) 2007-05-31 2008-05-29 Fluid control device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-144919 2007-05-31
JP2007144919A JP2008298177A (ja) 2007-05-31 2007-05-31 流体制御装置

Publications (1)

Publication Number Publication Date
WO2008146778A1 true WO2008146778A1 (ja) 2008-12-04

Family

ID=40075019

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059631 WO2008146778A1 (ja) 2007-05-31 2008-05-26 流体制御装置

Country Status (3)

Country Link
JP (1) JP2008298177A (enrdf_load_stackoverflow)
TW (1) TW200916677A (enrdf_load_stackoverflow)
WO (1) WO2008146778A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017221893A1 (ja) * 2016-06-21 2019-04-11 株式会社フジキン 流体制御装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6938034B2 (ja) * 2016-09-12 2021-09-22 株式会社フジキン 流体制御装置、これに用いるベースブロックおよび流体制御装置の製造方法
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
JP7045089B2 (ja) 2017-08-31 2022-03-31 株式会社フジキン 継手ブロックおよびその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (enrdf_load_stackoverflow) * 1966-09-14 1971-01-11
JPS5086322U (enrdf_load_stackoverflow) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (enrdf_load_stackoverflow) * 1966-09-14 1971-01-11
JPS5086322U (enrdf_load_stackoverflow) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017221893A1 (ja) * 2016-06-21 2019-04-11 株式会社フジキン 流体制御装置
JP2020115040A (ja) * 2016-06-21 2020-07-30 株式会社フジキン 流体制御装置
JP7015071B2 (ja) 2016-06-21 2022-02-02 株式会社フジキン 流体制御装置

Also Published As

Publication number Publication date
TW200916677A (en) 2009-04-16
JP2008298177A (ja) 2008-12-11

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