JP2008297197A - 分岐型カーボンナノチューブの成長方法 - Google Patents
分岐型カーボンナノチューブの成長方法 Download PDFInfo
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- JP2008297197A JP2008297197A JP2008141721A JP2008141721A JP2008297197A JP 2008297197 A JP2008297197 A JP 2008297197A JP 2008141721 A JP2008141721 A JP 2008141721A JP 2008141721 A JP2008141721 A JP 2008141721A JP 2008297197 A JP2008297197 A JP 2008297197A
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- JP
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- Prior art keywords
- carbon nanotubes
- buffer layer
- branched carbon
- substrate
- catalyst layer
- Prior art date
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 65
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 39
- 239000003054 catalyst Substances 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 239000011133 lead Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 description 18
- 239000007789 gas Substances 0.000 description 12
- 229910052799 carbon Inorganic materials 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000000313 electron-beam-induced deposition Methods 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001017 electron-beam sputter deposition Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 238000001241 arc-discharge method Methods 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000006181 electrochemical material Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
- Y10S977/843—Gas phase catalytic growth, i.e. chemical vapor deposition
Abstract
【解決手段】本発明に係る分岐型カーボンナノチューブの成長方法は、基板を準備して、該基板の一側の表面にバッファ層を設置する第一ステップと、前記バッファ層に触媒層を堆積させる第二ステップと、前記触媒層及び前記バッファ層を有する前記基板を、反応装置に設置する第三ステップと、化学気相堆積法により、前記バッファ層の表面に分岐型カーボンナノチューブを成長させる第四ステップと、を含む。ここで、前記触媒層及び前記バッファ層は、それぞれ相互に浸透しない材料からなる。
【選択図】図1
Description
12 バッファ層
14 触媒層
Claims (5)
- 基板を準備して、該基板の一側の表面にバッファ層を設置する第一ステップと、
前記バッファ層に触媒層を堆積させる第二ステップと、
前記触媒層及び前記バッファ層を有する前記基板を、反応装置に設置する第三ステップと、
化学気相堆積法により、前記バッファ層の表面に分岐型カーボンナノチューブを成長させる第四ステップと、を含み、
前記触媒層及び前記バッファ層は、それぞれ相互に浸透しない材料からなることを特徴とする分岐型カーボンナノチューブの成長方法。 - 前記バッファ層は、酸化アルミニウム又は/及び二酸化ケイ素からなることを特徴とする、請求項1に記載の分岐型カーボンナノチューブの成長方法。
- 前記触媒層は、金、銀、銅、白金、ニッケルまたは鉛のいずれか一種からなることを特徴とする、請求項1に記載の分岐型カーボンナノチューブの成長方法。
- 前記バッファ層の厚さは1nm以上であり、前記触媒層の厚さは0.5〜1.5nmであることを特徴とする、請求項1に記載の分岐型カーボンナノチューブの成長方法。
- 前記分岐型カーボンナノチューブは前記バッファ層に沿って成長されることを特徴とする、請求項1に記載の分岐型カーボンナノチューブの成長方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710074810.1 | 2007-06-01 | ||
CN2007100748101A CN101314465B (zh) | 2007-06-01 | 2007-06-01 | 分支型碳纳米管的制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008297197A true JP2008297197A (ja) | 2008-12-11 |
JP4880644B2 JP4880644B2 (ja) | 2012-02-22 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008141721A Active JP4880644B2 (ja) | 2007-06-01 | 2008-05-29 | 分岐型カーボンナノチューブの成長方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8821975B2 (ja) |
JP (1) | JP4880644B2 (ja) |
CN (1) | CN101314465B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010136369A (ja) * | 2008-12-05 | 2010-06-17 | Qinghua Univ | 熱音響装置 |
JP2011084436A (ja) * | 2009-10-16 | 2011-04-28 | Hitachi Zosen Corp | カーボンナノチューブ生成用基板 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9111658B2 (en) * | 2009-04-24 | 2015-08-18 | Applied Nanostructured Solutions, Llc | CNS-shielded wires |
CN102461361A (zh) | 2009-04-24 | 2012-05-16 | 应用纳米结构方案公司 | 并入cnt的emi屏蔽复合材料和涂层 |
JP5374354B2 (ja) | 2009-12-25 | 2013-12-25 | 日東電工株式会社 | カーボンナノチューブ複合構造体および粘着部材 |
US9167736B2 (en) | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
CN101880035A (zh) | 2010-06-29 | 2010-11-10 | 清华大学 | 碳纳米管结构 |
BR112012017246A2 (pt) | 2010-09-23 | 2016-03-22 | Applied Nanostructured Solutins Llc | fibra infundida por cnt como um fio autoblindado para linha de transmissão de energia aprimorada |
US9085464B2 (en) | 2012-03-07 | 2015-07-21 | Applied Nanostructured Solutions, Llc | Resistance measurement system and method of using the same |
WO2016101982A1 (en) * | 2014-12-22 | 2016-06-30 | Sht Smart High-Tech Aktiebolag | Multi-functionalized carbon nanotubes |
CN109898054A (zh) * | 2019-03-25 | 2019-06-18 | 杭州英希捷科技有限责任公司 | 一种基于碳纳米管阵列的新型芯片热界面材料的制备方法 |
CN110534384B (zh) * | 2019-07-26 | 2020-07-17 | 宁波工程学院 | 一种Au纳米颗粒修饰枝状TiO2纳米棒阵列作为场发射阴极材料的应用 |
JP2022020433A (ja) * | 2020-07-20 | 2022-02-01 | Eneos株式会社 | 導電性熱可塑性エラストマー組成物 |
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JP2002329723A (ja) * | 2001-05-02 | 2002-11-15 | Fujitsu Ltd | 集積回路装置及び集積回路装置製造方法 |
JP2003238123A (ja) * | 2002-02-08 | 2003-08-27 | Nec Corp | ナノグラファイト構造体の作製方法 |
JP2004059428A (ja) * | 2002-07-29 | 2004-02-26 | Samsung Sdi Co Ltd | 燃料電池用炭素ナノチューブ、その製造法及びそれを採用した燃料電池 |
JP2007515364A (ja) * | 2003-10-16 | 2007-06-14 | ザ ユニバーシティ オブ アクロン | カーボンナノファイバ基板上のカーボンナノチューブ |
JP2007175205A (ja) * | 2005-12-27 | 2007-07-12 | Ogasaka Sukii Seisakusho:Kk | 雪上滑走ボード用滑走面材および雪上滑走ボード |
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US6325909B1 (en) | 1999-09-24 | 2001-12-04 | The Governing Council Of The University Of Toronto | Method of growth of branched carbon nanotubes and devices produced from the branched nanotubes |
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KR101001744B1 (ko) | 2004-12-27 | 2010-12-15 | 삼성전자주식회사 | 탄소 나노 튜브를 이용한 광전 변환 전극 및 이를 구비한태양 전지 |
US7871591B2 (en) * | 2005-01-11 | 2011-01-18 | Honda Motor Co., Ltd. | Methods for growing long carbon single-walled nanotubes |
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2007
- 2007-06-01 CN CN2007100748101A patent/CN101314465B/zh active Active
- 2007-10-26 US US11/978,071 patent/US8821975B2/en active Active
-
2008
- 2008-05-29 JP JP2008141721A patent/JP4880644B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002329723A (ja) * | 2001-05-02 | 2002-11-15 | Fujitsu Ltd | 集積回路装置及び集積回路装置製造方法 |
JP2003238123A (ja) * | 2002-02-08 | 2003-08-27 | Nec Corp | ナノグラファイト構造体の作製方法 |
JP2004059428A (ja) * | 2002-07-29 | 2004-02-26 | Samsung Sdi Co Ltd | 燃料電池用炭素ナノチューブ、その製造法及びそれを採用した燃料電池 |
JP2007515364A (ja) * | 2003-10-16 | 2007-06-14 | ザ ユニバーシティ オブ アクロン | カーボンナノファイバ基板上のカーボンナノチューブ |
JP2007528339A (ja) * | 2004-02-09 | 2007-10-11 | ケイエイチ ケミカルズ カンパニー、リミテッド | Y−分岐型炭素ナノチューブの製造 |
JP2007175205A (ja) * | 2005-12-27 | 2007-07-12 | Ogasaka Sukii Seisakusho:Kk | 雪上滑走ボード用滑走面材および雪上滑走ボード |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010136369A (ja) * | 2008-12-05 | 2010-06-17 | Qinghua Univ | 熱音響装置 |
JP2011084436A (ja) * | 2009-10-16 | 2011-04-28 | Hitachi Zosen Corp | カーボンナノチューブ生成用基板 |
Also Published As
Publication number | Publication date |
---|---|
US20080299308A1 (en) | 2008-12-04 |
CN101314465B (zh) | 2011-03-23 |
US8821975B2 (en) | 2014-09-02 |
CN101314465A (zh) | 2008-12-03 |
JP4880644B2 (ja) | 2012-02-22 |
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