JP2008292174A - Method for automatically preventing occurrence of film flaw in color filter production and system using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce stopping time of production lines and operational burdens by automatically temporarily halting a production processing devices which is causing film flaws during the production of color filters and to reduce the number of occurrences of defective color filters with film flaws. <P>SOLUTION: In a method for automatically preventing the occurrence of film flaws, the occurrence of film flaws is prevented in the production of color films including the inspection process for detecting film flaws from color filters through the use of an inspecting device. Characteristic points of detected defects are extracted, and the characteristic points are collated with characteristic points of film flaws in a database to determine of film flaws(b2). The film flaws are grouped by convergence by the positions of their occurrences (c2). Passage histories are extracted for every color filter (d). Manufacturing processing devices of common passage are specified, the number of matched color filters is computed, a command of device halting is output; and information on the occurrence of film flaws and occurrence positions is reported to the specified manufacturing processing devices when the computed number has reached a set number (g). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a film flaw automatic generation prevention method and a film flaw automatic generation prevention system using the method in color filter production.

  Conventionally, in color filter production, a single-wafer glass substrate is produced while being conveyed by an automatic conveyance line in the production processing apparatus and between the production processing apparatuses by a production line connecting a plurality of production processing apparatuses.

  In a production line for producing a conventional color filter, in order to form various patterns on a glass substrate, a BM formation manufacturing processing device, an R pixel forming manufacturing processing device, a G pixel forming manufacturing processing device, and a B pixel forming Manufacturing processing apparatuses, manufacturing processes apparatus for forming transparent electrodes, etc., manufacturing processing apparatuses for manufacturing a pattern.

  Generally, the color filter manufacturing method is a manufacturing method using a production line. At the top of the production line, a glass substrate is introduced into the line from a loader (substrate supply port), and an unloader ( The substrate is carried out of the line from the substrate receiving port.

  The production line has a configuration in which a plurality of manufacturing processing apparatuses are connected in a line. In the production line, an in-line array manufacturing processing apparatus connected in the order of manufacturing processing means is arranged. The production line is a line comprising a photo process of a processing means using a photolithography method, for example, a resist coating processing means, an exposure processing means through a photomask, and a resist development processing means. In the production line, a plurality of processing lines are arranged to form various patterns, and the manufacturing processing apparatus is arranged so that the pattern formation is repeatedly performed.

  In the production line, an inspection machine for in-process inspection is arranged in a part of each manufacturing processing equipment, and the inspection result data is monitored and the quality level is monitored while sampling inspection or total inspection of the glass substrate is performed. The production line is in operation.

  In the production line, the glass substrates are stored in a cassette, and are sequentially put into the line from the cassette. In the line, one piece is managed separately for each glass substrate. Conversely, outside the line, the pieces are managed in groups, for example, one cassette or one lot. Therefore, an ID number is attached to each cassette or each glass substrate, and everything from the glass substrate material to the color filter product is managed by the ID number. Production history, quality history, or inspection result data is stored in a database for each ID number of the glass substrate, and trace information such as the current production progress, inventory position, etc. can be tracked with the data information. Thus, it is possible to individually track the quality history and the failure cause analysis including the maintenance and management of quality, the prediction of occurrence of failure or the stoppage of the device, etc. with the inspection result data.

  FIG. 5 is a configuration diagram illustrating an example of a conventional color filter production line.

  In the production line shown in FIG. 5, the glass substrate 11 passes through the apparatus A, one of the apparatuses B1, B2, and B3, one of the apparatuses O1, O2, and O3, and the inspection apparatus. The production history to be registered is registered, and the inspection machine monitors the quality level between the manufacturing processing apparatuses from the apparatus A to the apparatus B group and the apparatus O group. In addition, a glass substrate includes all the substrates conveyed in a production line, and includes a glass substrate and a work-in-progress product.

  6 (a) to 6 (b) are conceptual diagrams illustrating a conventional inspection machine. FIG. 6A shows a color filter inspection machine 1, in which a color filter is formed by a light source 2 disposed immediately below the color filter 10 and an imaging camera 3 directly above the glass substrate while being transported in the transport direction on the transport stage. The imaging device is connected to an image processing unit and detects a defect. Many optical color filter inspection machines 1 are known, and an inspection machine corresponding to the type of defect is selected and arranged for each detection function. For example, the inspection machine of FIG. 6A uses an imaging camera having a transmitted light inspection function, and is used particularly when a transmitted white defect is detected.

  FIG. 6B is a flow for detecting a film flaw defect in the inspection procedure flow of the inspection machine, which uses an imaging camera having a transmitted light inspection function, and is used when a transmitted white defect is detected. It mainly detects defects in curtain scratches. First, in b1, a defect is detected. Next, in b2, a transmitted white image by transmitted light is detected among the defects. Next, in b3, a feature point of a film scratch defect is extracted. Next, in b4, the film is checked against a film scratch database, and if they match, the corresponding defect is determined as a film scratch. Film scratches are detected by the procedures b1 to b4.

  In the manufacture of a conventional color filter, a scratched defect (film scratch) on the pixel formation surface (film surface) of the color filter was found by visual inspection of the screen (hereinafter referred to as a review) from the inspection machine, or It is discovered by visual inspection.

  When a defective product due to a film scratch is found, the production line is temporarily stopped, the cause of occurrence is investigated, the device is examined, the device and its part are identified, and those specific parts are returned to normal, and then re-started. We are responding to the operation.

  In this case, the film flaw is a defect caused by the processing apparatus because an obstacle or the like comes into contact with the color filter substrate to be processed while being transported through the manufacturing processing apparatus, resulting in a scratch.

  Film scratches are characterized by their defects as compared to normal defects (pattern portion missing, foreign matter adhesion, etc.). A film flaw is a large-area defect and is continuously generated at the same position on each substrate. Film scratches are mainly those having a long directionality and length, and cause serious defects. In the present invention, the transmitted white defect is a film scratch. A film scratch is a defect caused by a plurality of manufacturing processing apparatuses when passing through a line. Film scratches tend to be complicated to identify the device or site that causes the defect, and there is a problem that the investigation takes a long time.

  In conventional production lines, the occurrence of film scratches is confirmed during visual inspection and review of the inspection machine, the cause of occurrence is investigated in the manufacturing processing apparatus, and the treatment, for example, the production line is suspended for a long time until the treatment is suspended. There is a problem. The color filter substrate manufactured and processed at that time may have a flaw in the same position and may be damaged by defective color filters.

  In the conventional production line, the cause of the investigation is to check the position of the film scratch on the substrate and the passage route (passage history) of the related device, identify the part of the device, and pause the production line We are dealing with it. In the meantime, workers' workload and production line downtime were spent.

  In the problem of the present invention, as described above, the film scratches pay attention to the feature points of the defects, and particularly focus on the convergence to the same occurrence position in the case of the device origin, and devise the elucidation method in the inspection device. did.

The known literature is described below.
JP-A-9-236512

  During the production of color filters, the production processing equipment that generates film scratches is automatically paused to reduce production line downtime, reduce the work load, and color filter with film defects. It is to reduce the number of occurrences.

The invention according to claim 1 of the present invention is a method for automatically preventing film scratches in color filter production including an inspection step of detecting film scratches from a color filter that forms a plurality of pattern films using an inspection machine,
Means for extracting feature points of detected defects by an inspection machine;
Means for comparing the feature points with the feature points of the film scratch in the database, and determining the defect as a film scratch;
Grouping for each substrate size, extracting the film scratch generation position, converging and grouping the film scratch for each generation position;
Means for grouping each occurrence position and extracting a passage history for each corresponding color filter;
Means for collating the passage history with the corresponding color filter, specifying a common manufacturing processing device that has passed, and calculating the number of color filters that match the manufacturing processing device;
A means for setting an upper limit number of film scratch color filters for each occurrence position in advance, a time when the calculated number reaches the set number, and outputting a device stop command to the specified manufacturing processing device;
And automatically generating information on the occurrence and position of film flaws in the specified manufacturing processing apparatus in accordance with an instruction to stop the apparatus.

  The invention according to claim 2 of the present invention is the method for automatically preventing film scratches in color filter production according to claim 1, wherein the feature points of the film scratches are registered in advance and stored in a database.

  The invention according to claim 3 of the present invention is characterized in that the passage history is registered in advance for each color filter, and is made into a database by a data table of names of passage of manufacturing processing devices and passage order history. Item 3. An automatic film flaw prevention method for producing color filters according to Item 1 or 2.

The invention according to claim 4 of the present invention is an automatic film flaw prevention system in color filter production that includes inspection for detecting film flaws from a color filter that forms a plurality of pattern films using an inspection machine,
An automatic film flaw prevention system in color filter production using the film flaw automatic generation prevention method in color filter production according to any one of claims 1 to 3,
An automatic film flaw prevention system in color filter production, wherein a specified manufacturing processing apparatus is automatically stopped in accordance with an apparatus stop command.

  According to the method for automatically preventing film scratches in color filter production of the present invention, it is possible to extract film scratches from detected defects by the inspection machine and its function, and to specify the manufacturing processing apparatus that causes the defects. Therefore, it becomes unnecessary to investigate the position of the film flaw on the substrate and the passage path of the apparatus, and it becomes possible to detect the occurrence of film flaws at an early stage, thereby reducing the number of color filters with film flaws. .

  According to the method for automatically preventing film scratches in color filter production of the present invention, it is possible to extract film scratches from detected defects by the inspection machine and its function, and to specify the manufacturing processing apparatus that causes the defects. For this reason, it is unnecessary to investigate the position of the film scratch on the substrate and the passage route of the apparatus, and the work load is reduced, so that there is an effect that the stop time of the production line accompanying the reduction of the research load is reduced.

  A method for automatically preventing film scratches in color filter production according to the present invention and a system for preventing film scratches automatically using the method will be described below based on an embodiment.

  FIG. 1 is a flow chart of the procedure of an embodiment of the method for preventing the occurrence of film scratches in the production of color filters of the present invention.

  The film flaw automatic generation prevention method of the present invention is a method for preventing film flaw generation in color filter production including an inspection step of detecting a film flaw from a color filter that forms a plurality of pattern films using an inspection machine. The procedure of the automatic film flaw prevention method in color filter production is shown below.

  The means (a) extracts feature points mainly related to the film kiss among the detection defects detected by the inspection machine. The means (b1) collates the feature point with the feature point of the film scratch in the database. Next, the means (b2) determines that the corresponding defect is a film scratch. The film flaw defect is extracted from the detected defect by the above (a) to (b1) to (b2).

  Next, the procedure of (c1) is grouped for each substrate size, and a film scratch generation position is extracted. Next, in the procedure of (c2), the film flaw is converged to the generation position and grouped. As described above, the color filters are converged for each substrate size or each generation position by (c1) to (c2).

  Next, the means (d) groups for each occurrence position, and extracts a passage history for each corresponding color filter. The passage history is extracted for each color filter converged by (d).

  Next, the means (e1) collates the passage history with the corresponding color filter, and specifies a common manufacturing processing apparatus that has passed. Next, the means (e2) calculates the number of color filters that match the specified manufacturing processing apparatus. From the above (e1) to (e2), the manufacturing processing apparatus due to the occurrence of the film scratch is specified, and the occurrence frequency is calculated.

  Next, the means (f1) sets the upper limit number of film scratch color filters for each occurrence position in advance. Next, the means (f2) monitors the time when the calculated number reaches the set number. Next, the means (f3) outputs a command to stop the apparatus to the specified manufacturing processing apparatus. As described above (f1) to (f2) to (f3), the color filter of the film scratch is monitored to reach the set number, and a command to stop the apparatus is output when it reaches.

  Finally, in the procedure (g), information on film scratches and occurrence positions is automatically issued to the specified manufacturing processing apparatus in accordance with the apparatus stop command.

  In the automatic film flaw prevention method in color filter production of the present invention, the characteristic points of the film flaw are registered in advance and stored in a database (see FIG. 2). The characteristics of the accumulated film scratches in the database were classified and analyzed. The characteristic points of the analyzed film scratch will be described below.

  There is a characteristic point in the defect of the film scratch. The film scratch is a transmission white defect. The film scratch is a large area film. Film scratches are long in directionality and length. Film scratches occur continuously at similar positions. Film scratches are defects caused by the substrate surface coming into contact with the device surface when passing through the line, resulting from a plurality of manufacturing processing devices. At the position where the film flaw is generated, there is a bias for each device or part due to the defect, that is, the film flaw is converged for each occurrence position, so that the device due to the occurrence can be specified. Further, the film scratch becomes a serious defect.

  FIGS. 2A to 2D are plan views for explaining the procedure of an embodiment of the method for preventing the occurrence of automatic film scratches in the production of the color filter of the present invention.

  In FIG. 2A, the film scratch is the transmission white defect 13, and the film scratch 20 has a large area. When the number of pixels included in the defect area exceeds the set value, a large area film scratch 21 is formed, and the large area is a feature point. 2A is a cross-sectional view of a film flaw, and the defective part of the film flaw 20 is that the pattern forming film 12 has dropped off, and is visually a transmissive part, that is, a transmissive white defect 13. Yes. Next, the number of pixels included in the detection defect area is calculated, and the set value E is compared with the magnitude thereof. A pixel is one piece of digital data, and its size (unit: μm) is usually displayed.

  In FIG. 2B, the film scratch has a long directionality and length. When the defect area exceeds the set value in both the X direction and the Y direction, the film flaw 22 has a long side, and the length of the long side becomes a feature point. The width of the detected defect is compared with the set value W and its magnitude.

  In FIG. 2C, a large number of film scratches are generated, and are generated at the same position on each substrate continuously in the apparatus width direction and the substrate traveling direction. If there are many defect occurrence positions in the specific region 24 of the substrate or in the substrate traveling direction or the apparatus width direction, the number of defects is a characteristic point. The total number of detected defects is compared with a set value M for each occurrence position and its magnitude.

  In FIG. 2 (d), the film scratches converge at each occurrence position. In the case of convergence to the converged specific area 25a for each substrate size or the converged specific area 25 for each defect occurrence position, the position of the specific area becomes a feature point. Finally, the defects are grouped for each occurrence position and the relevant defects are converged. The device parts that normally contact the substrate surface are arranged in the device width direction, converge in a specific region in the substrate width direction, and converge at regular intervals in the substrate transport direction. For this reason, the manufacturing process apparatus can be identified by grouping a plurality of color filters and superimposing the film flaw defects.

  FIG. 3 is a block diagram for explaining an embodiment of a color filter production line according to the present invention, and is a partial plan view of a manufacturing process including an inspection process for detecting a film flaw of the color filter. In FIG. 3, the glass substrate 11 is a part of the production line, and the glass substrate 11 passes from the left side to the right side in the manufacturing processing apparatus, for example, the apparatus A, the apparatus B1, B2, B3, the apparatus O1, O2, O3, While being transported to the inspection machine, it is manufactured and processed by a desired apparatus. A part of the production line is provided with a management information computer 31 for controlling and managing the production history and the like, and monitors the movement of the glass substrate and the collection of information such as production instruction or operation to the apparatus.

  In the method for preventing the occurrence of film scratches in color filter production according to the present invention, the passage history is registered in advance for each color filter, and is made into a database based on a data table of the names of the manufacturing processing devices passed and the history of passage order. Features. In FIG. 4, the board ID is described in the vertical direction, the apparatus name is described in the horizontal direction, and the data of the passage history of the apparatus is described in the table. As for the passage history, “1” indicates that there is a passage history, and “0” indicates that there is no passage history. For example, a film scratch color filter of ID / ABCD11 is a history of passing through device A, device B1, and device O3, and this is taken as the device passing history.

  In FIG. 4, all the film scratch color filters have a passing history at O3 of the apparatus, and as a result, in this case, the originating manufacturing processing apparatus specifies O3 of the apparatus. There are various identification methods, and an optimum means is appropriately selected with reference to a quality information database. In the passage history to the apparatus, a defective color filter having film scratches is converged, and the manufacturing processing apparatus having the passage history data “0” is operating normally without worrying about film scratches. For example, the devices O1 and O2 are normal, and the device B1 is a device that enhances monitoring. The relationship between membrane scratches and the causative device increases the accuracy of specifying the device if the accumulation of data increases, and it is extremely difficult to predict the occurrence of membrane scratches due to the characteristics of the location of occurrence and the characteristics of the shape of the membrane scratch. Early information is output.

  The automatic film flaw prevention system for color filter production according to the present invention includes an inspection for detecting film flaws using a testing machine from color filters that form a plurality of pattern films, and the film flaw in color filter production according to the present invention. This is a prevention system using an automatic generation prevention method. In this system, the specified manufacturing processing apparatus is automatically stopped in accordance with an apparatus stop command.

  In the automatic film flaw prevention system of the present invention, the ID code of the color filter, for example, the number of the two-dimensional code, is managed by the management information computer 31 and communicated with each manufacturing processing apparatus via the network 32, and the manufacturing processing apparatus uses the ID code. Collect and control the passing history information. On the other hand, the color filter inspection machine is a system that constantly monitors the occurrence of film flaws while inspecting the passing color filter. When a film flaw is detected, the passage history of the device is extracted from the ID code, a common manufacturing processing device is extracted, and when the number of coincidence reaches the set number, the manufacturing processing device is identified as the originating device and automatically Suspend the device specified in.

  FIG. 4 is a passage history test of a film flaw color filter illustrating Example 1 of the method for preventing automatic film flaw generation in color filter production according to the present invention. In Example 1, it implemented using a part of production line of FIG. Examples of the present invention will be described below.

  In Example 1, ten color filters with the same substrate size and film scratches were prepared in advance. Next, the upper limit number of film scratch color filters was set to 5 for each generation position. Next, the glass substrate was put in, and the color filters were manufactured, and at the same time, the inspection machines were inspected in the order of ID numbers ABCD11, 17, 20, 23, 24, 27. Simultaneously with the end of the inspection of ID number ABCD27, information on the occurrence of film scratches and the position of occurrence was issued to O3 of the apparatus, and O3 of the apparatus was temporarily stopped.

It is a flowchart of the procedure of one Example of the film flaw automatic generation | occurrence | production prevention method in the color filter production of this invention. (A)-(d) is a top view explaining the procedure of one Example of the film | membrane flaw automatic generation | occurrence | production prevention method in the color filter production of this invention. It is a block diagram explaining one Example of the manufacturing process of the color filter of this invention, and is a partial top view including the test | inspection process which detects the film | membrane crack of a color filter. It is the passage history of the color filter of a film | membrane defect explaining one Example of the film flaw automatic generation | occurrence | production prevention method in color filter production of this invention. It is a block diagram explaining an example of the manufacturing process of the conventional color filter, and is a partial top view including the test | inspection process which detects the film | membrane crack of a color filter. It is a conceptual diagram explaining the conventional inspection machine, (a) is a perspective view of an inspection machine, (b) is a flowchart of an inspection procedure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Color filter inspection machine 2 ... Light source 3 ... Imaging camera 4 ... Image processing part 10 ... Color filter 11 ... Glass substrate 12 ... Pattern formation film 13 ... Transmission white defect 20 ... Film scratch 21 ... Large-area film scratch 22 ... Long Side film scratches 23 ... many film scratches 24 ... specific area 25 ... specific area 25a converged for each occurrence position ... specific area 31 converged for each substrate size ... management information computer 32 ... network line

Claims (4)

A method for automatically preventing film scratches in color filter production including an inspection step of detecting film scratches from a color filter forming a plurality of pattern films using an inspection machine,
Means for extracting feature points of detected defects by an inspection machine;
Means for comparing the feature points with the feature points of the film scratch in the database, and determining the defect as a film scratch;
Grouping for each substrate size, extracting the film scratch generation position, converging and grouping the film scratch for each generation position;
Means for grouping each occurrence position and extracting a passage history for each corresponding color filter;
Means for collating the passage history with the corresponding color filter, specifying a common manufacturing processing device that has passed, and calculating the number of color filters that match the manufacturing processing device;
A means for setting an upper limit number of film scratch color filters for each occurrence position in advance, and outputting an apparatus stop command to the specified manufacturing processing apparatus at the time when the calculated number reaches the set number;
A method for preventing the occurrence of film flaws in color filter production, which automatically reports information on the occurrence and position of film flaws to a specified manufacturing processing apparatus in accordance with an instruction to stop the apparatus.   2. The method of preventing film scratches automatically in color filter production according to claim 1, wherein the feature points of the film scratches are registered in advance and stored in a database.   3. The color filter production according to claim 1, wherein the passage history is registered in advance for each color filter, and is made into a database by a data table of a history of the name of the manufacturing processing device that has passed and a passage order. Method for preventing automatic film scratches. A film flaw automatic generation prevention system in color filter production including inspection for detecting film flaws from a color filter forming a plurality of pattern films using an inspection machine,
An automatic film flaw prevention system in color filter production using the film flaw automatic generation prevention method in color filter production according to any one of claims 1 to 3,
An automatic film flaw prevention system in color filter production, characterized in that a specified manufacturing processing apparatus is automatically stopped in accordance with an instruction to stop the apparatus.

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