JP2008290357A - マイクロレンズアレイの製造方法 - Google Patents
マイクロレンズアレイの製造方法 Download PDFInfo
- Publication number
- JP2008290357A JP2008290357A JP2007138689A JP2007138689A JP2008290357A JP 2008290357 A JP2008290357 A JP 2008290357A JP 2007138689 A JP2007138689 A JP 2007138689A JP 2007138689 A JP2007138689 A JP 2007138689A JP 2008290357 A JP2008290357 A JP 2008290357A
- Authority
- JP
- Japan
- Prior art keywords
- microlens array
- manufacturing
- resin
- hole
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 74
- 238000000465 moulding Methods 0.000 claims abstract description 64
- 239000011347 resin Substances 0.000 claims abstract description 64
- 229920005989 resin Polymers 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 abstract description 6
- 238000005323 electroforming Methods 0.000 description 12
- 238000005530 etching Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 241000255777 Lepidoptera Species 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007138689A JP2008290357A (ja) | 2007-05-25 | 2007-05-25 | マイクロレンズアレイの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007138689A JP2008290357A (ja) | 2007-05-25 | 2007-05-25 | マイクロレンズアレイの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008290357A true JP2008290357A (ja) | 2008-12-04 |
| JP2008290357A5 JP2008290357A5 (enrdf_load_stackoverflow) | 2010-07-08 |
Family
ID=40165589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007138689A Withdrawn JP2008290357A (ja) | 2007-05-25 | 2007-05-25 | マイクロレンズアレイの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008290357A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7794633B2 (en) * | 2008-11-26 | 2010-09-14 | Aptina Imaging Corporation | Method and apparatus for fabricating lens masters |
| JP2010208156A (ja) * | 2009-03-10 | 2010-09-24 | Toppan Printing Co Ltd | 凹凸形状成形用金型、それを用いて製作された光学シート、バックライト・ユニット及びディスプレイ装置 |
| JPWO2012140853A1 (ja) * | 2011-04-12 | 2014-07-28 | 松浪硝子工業株式会社 | レンズアレイシートの製造方法 |
| JP2021130112A (ja) * | 2017-03-21 | 2021-09-09 | 芝浦メカトロニクス株式会社 | 保護膜形成装置 |
-
2007
- 2007-05-25 JP JP2007138689A patent/JP2008290357A/ja not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7794633B2 (en) * | 2008-11-26 | 2010-09-14 | Aptina Imaging Corporation | Method and apparatus for fabricating lens masters |
| JP2010208156A (ja) * | 2009-03-10 | 2010-09-24 | Toppan Printing Co Ltd | 凹凸形状成形用金型、それを用いて製作された光学シート、バックライト・ユニット及びディスプレイ装置 |
| JPWO2012140853A1 (ja) * | 2011-04-12 | 2014-07-28 | 松浪硝子工業株式会社 | レンズアレイシートの製造方法 |
| US9784890B2 (en) | 2011-04-12 | 2017-10-10 | Matsunami Glass Ind. Ltd. | Lens array sheet having glass base and nanoparticle-containing resin lens array layer without a resin planar layer therebetween |
| JP2021130112A (ja) * | 2017-03-21 | 2021-09-09 | 芝浦メカトロニクス株式会社 | 保護膜形成装置 |
| JP7194228B2 (ja) | 2017-03-21 | 2022-12-21 | 芝浦メカトロニクス株式会社 | 保護膜形成装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100525 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100525 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20110401 |