JP2008277743A5 - - Google Patents

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Publication number
JP2008277743A5
JP2008277743A5 JP2008013984A JP2008013984A JP2008277743A5 JP 2008277743 A5 JP2008277743 A5 JP 2008277743A5 JP 2008013984 A JP2008013984 A JP 2008013984A JP 2008013984 A JP2008013984 A JP 2008013984A JP 2008277743 A5 JP2008277743 A5 JP 2008277743A5
Authority
JP
Japan
Prior art keywords
variable
layer
substrate
lower electrode
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008013984A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008277743A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008013984A priority Critical patent/JP2008277743A/ja
Priority claimed from JP2008013984A external-priority patent/JP2008277743A/ja
Priority to US12/052,396 priority patent/US7894205B2/en
Publication of JP2008277743A publication Critical patent/JP2008277743A/ja
Publication of JP2008277743A5 publication Critical patent/JP2008277743A5/ja
Withdrawn legal-status Critical Current

Links

JP2008013984A 2007-04-05 2008-01-24 可変素子回路およびその製造方法 Withdrawn JP2008277743A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008013984A JP2008277743A (ja) 2007-04-05 2008-01-24 可変素子回路およびその製造方法
US12/052,396 US7894205B2 (en) 2007-04-05 2008-03-20 Variable device circuit and method for manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007099104 2007-04-05
JP2008013984A JP2008277743A (ja) 2007-04-05 2008-01-24 可変素子回路およびその製造方法

Publications (2)

Publication Number Publication Date
JP2008277743A JP2008277743A (ja) 2008-11-13
JP2008277743A5 true JP2008277743A5 (cg-RX-API-DMAC10.html) 2010-03-11

Family

ID=40055301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008013984A Withdrawn JP2008277743A (ja) 2007-04-05 2008-01-24 可変素子回路およびその製造方法

Country Status (1)

Country Link
JP (1) JP2008277743A (cg-RX-API-DMAC10.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135614A (ja) * 2008-12-05 2010-06-17 Fujitsu Ltd 可変容量素子
TW201140637A (en) * 2009-11-26 2011-11-16 Taiyo Yuden Kk Mems switch
JP2011159953A (ja) * 2010-01-05 2011-08-18 Fujitsu Ltd 電子回路及び電子機器
JP2012195829A (ja) 2011-03-17 2012-10-11 Seiko Epson Corp 発振回路
JP5681545B2 (ja) * 2011-03-29 2015-03-11 日本信号株式会社 プレーナ型電磁アクチュエータ及びその製造方法
JP2012222718A (ja) 2011-04-13 2012-11-12 Seiko Epson Corp 発振器
JP5831905B2 (ja) * 2012-02-06 2015-12-09 エヌ・ティ・ティ・アドバンステクノロジ株式会社 微細素子およびその製造方法
CN107431477B (zh) * 2015-03-30 2020-09-29 株式会社村田制作所 高频滤波器、前端电路以及通信设备

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