JP2008277395A - Window member for optical element, package for housing optical element and optical module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a window member for an optical element that is reduced in the number of objects sticking to the surface of a light-transmitting member and can transmit an optical signal through the light-transmitting member and keep its inside airtight, and to provide a package for housing an optical element, and an optical module. <P>SOLUTION: In the window member 4 for the optical element, the entire circumference of the outer periphery of a light-transmitting member 4a is covered with a metal layer 4b formed of a silver-copper-titanium alloy, and the metal layer 4b is joined with the light-transmitting window 14 of a package for housing the optical element by means of solder 4c. The metal layer 4b can be provided at a low temperature and scattering matters accompanied by high-temperature processing can be suppressed, reducing objects sticking to the surface of the light-transmitting member. In addition, low-temperature joint by soldering is possible, so that thermal stress generated in the light-transmitting member can be reduced. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical element window member that transmits an optical signal emitted from an optical element, an optical element storage package for storing the optical element, and an optical module.

  2. Description of the Related Art Conventionally, optical modules used for high-speed optical communication and the like and optical element storage packages used for optical modules have through holes formed at locations where optical signals are exchanged between optical elements and optical fibers. A plate-like translucent member made of glass or sapphire is joined by brazing or soldering so as to close the through hole. A metal layer in which a nickel (Ni) plating layer or a gold (Au) plating layer is deposited on a metallization layer such as molybdenum (Mo) -manganese (Mn) is provided on the outer peripheral portion of one main surface of the translucent member. The translucent member is attached to the optical module and the optical element storage package used in the optical module by brazing or soldering the metal layer (for example, the following patent document) 1).

Further, a titanium (Ti) ring is sandwiched between outer peripheral portions of one main surface of the translucent member, and a metal ring such as an iron-cobalt-nickel alloy is joined by silver (Ag) brazing. An optical element storage package and an optical module in which a module is bonded via a low melting point brazing material are known (for example, see Patent Document 2 below).
JP 2003-338656 A JP-A-6-318647

  However, in the above-described conventional optical element storage package and optical module shown in Patent Document 1, when a metallized layer made of Mo-Mn is deposited on a translucent member, Mo, Mn metal powder and an organic solvent The metallized layer is formed by preparing in advance a metal paste made by mixing, printing and applying this metal paste to the outer periphery of one main surface of the translucent member, and firing it in a high-temperature furnace at about 1300 ° C. However, the components contained in the translucent member, the metal paste, etc., especially the glass component, are scattered during firing, and then the components contained in the translucent member, the metal paste, etc. In some cases, the light is reattached to the transmitting portion, and the light transmittance of the translucent member is lowered. Since the metallized layer made of Mo-Mn is fired in a reducing atmosphere furnace, convection is likely to occur in the furnace at the time of firing, and the components contained in the light-transmissive member or metal paste are reattached to the light-transmissive member. It is likely to occur. As a result, there has been a problem that transmission of optical signals is hindered.

  Further, in the conventional optical element storage package and optical module shown in Patent Document 2, in order to join the metal ring by Ag brazing with the Ti ring sandwiched between the outer peripheral portion of one main surface of the translucent member, The Ag brazing material is melted at a high temperature of about 800 to 900 ° C. to join the translucent member and the metal ring, but during the subsequent cooling, a large thermal stress due to the difference in thermal expansion coefficient between the translucent member and the metal ring. As a result, breakage such as cracks is likely to occur in the translucent member due to the thermal stress.

  If breakage such as cracks occurs in the translucent member, the light transmissibility will be reduced at the damaged part, and it will hinder the transmission of optical signals, and the airtightness inside the optical element storage package and the optical module can be maintained. The problem of disappearing will occur.

  The present invention has been devised in view of the above problems, and an object of the present invention is to provide an optical element window member and an optical element that can transmit an optical signal through a translucent member without hindrance and can keep the inside airtight. The object is to provide a storage package and an optical module.

  An optical element window member of the present invention is an optical element window member that is attached to a light transmission window portion of an optical element storage package, and silver-copper-titanium is formed on the entire circumference of the outer peripheral portion of the translucent member. A metal layer made of an alloy is deposited, and the metal layer is bonded to the light transmission window portion via solder.

  In the optical element window member of the present invention, preferably, the translucent member is made of sapphire.

  An optical element storage package according to the present invention includes a container having a placement portion for placing an optical element therein, a lid that is joined to the container and hermetically seals the inside, and faces the optical element. As described above, the light transmitting window portion made of an iron-nickel-cobalt alloy provided on the container or the lid, and the optical element window member having the above-described structure joined to the light transmitting window portion. Features.

  In the optical element storage package of the present invention, preferably, a container having a mounting portion for mounting the optical element therein, and an annular member made of an iron-nickel-cobalt alloy joined to the opening of the container, The optical element window member according to claim 1 or 2 is joined to the lid member.

  In the optical element storage package of the present invention, preferably, the container has a bottom plate having a placement portion for placing the optical element on the upper main surface, and the mounting portion described above on the outer peripheral portion of the upper main surface of the bottom plate. A side wall having a through-hole formed in a side portion and a holding member made of a cylindrical iron-nickel-cobalt alloy that is fitted in the through-hole and holds a translucent member. The optical element window member having the above structure is joined to the holding member.

  An optical module according to the present invention includes an optical element storage package having the above-described configuration, an optical element placed and fixed on the placement portion of the container so as to be optically coupled to the translucent member, and the container. And a lid that is joined.

  In the optical element window member of the present invention, a metal layer made of a silver-copper-titanium alloy is deposited on the entire circumference of the outer peripheral portion of the translucent member, and this metal layer is joined to the light transmitting window portion via solder. Therefore, firing at the time of deposition of a metal layer made of a silver-copper-titanium alloy can be performed at about 800 to 900 ° C., and firing at the time of depositing a conventional metallized layer made of Mo—Mn. It can be fired at a temperature lower than about 1300 ° C. When the firing temperature can be set to about 800 to 900 ° C., components contained in the translucent member, the metal paste, and the like, particularly the glass component, are hardly scattered in the firing furnace during firing.

  Further, since the translucent member and the light transmissive window portion of the optical element storage package are joined via solder, thermal stress acting on the translucent member after joining is reduced, and the translucent member is formed. The occurrence of breakage such as cracks can be prevented.

  Therefore, it is possible to provide an optical element window member that can transmit an optical signal through the translucent member without hindrance and can keep the inside airtight.

  In the optical element window member of the present invention, preferably, when the light-transmitting member is made of sapphire, sapphire has a high bending strength, so that even when thermal stress acts on the light-transmitting member, breakage such as cracks Is unlikely to occur.

  The optical element storage package of the present invention has a container having a placement portion for placing an optical element therein, a lid joined to the container for hermetically sealing the inside, and the optical element so as to face the optical element. Provided with a light transmitting window portion made of an iron-nickel-cobalt alloy and a window member for an optical element having the above structure bonded to the light transmitting window portion. The thermal expansion of the container or the lid can be suppressed to be small and approximate to the thermal expansion of the translucent member, and the thermal stress acting on the translucent member after joining can be reduced. Accordingly, it is possible to provide an optical element housing package that can hardly transmit a light transmissive member due to thermal stress, can transmit an optical signal without hindrance, and can keep the inside airtight.

  Further, the optical element storage package of the present invention includes a container having a placement portion for placing the optical element therein, and an annular member made of an iron-nickel-cobalt alloy joined to the opening of the container. Since the optical element window member having the structure is joined to the lid member, the thermal expansion of the annular member can be reduced when the optical element window member and the annular member are solder-bonded at 400 ° C. or lower. The thermal stress generated in the optical element window member after bonding can be kept small. Accordingly, it is possible to provide an optical element housing package that can hardly transmit a light transmissive member due to thermal stress, can transmit an optical signal without hindrance, and can keep the inside airtight.

  In the optical element storage package according to the present invention, preferably, the container surrounds the mounting portion on the outer peripheral portion of the upper main surface of the bottom plate, and the bottom plate having the mounting portion for mounting the optical element on the upper main surface. And a holding member made of a cylindrical iron-nickel-cobalt alloy that is fitted in the through-hole and holds the translucent member. When the optical element window member having the above-described configuration is joined to the optical element housing member, it is possible to provide an optical element storage package that has good optical signal transmission and high internal hermetic reliability.

  The optical module of the present invention includes an optical element storage package having the above-described configuration, an optical element that is placed and fixed on the placement portion of the container so as to be optically coupled to the translucent member, and a lid that is joined to the container. Since it comprises a body, it becomes a highly reliable optical module using the optical element storage package of the present invention.

  An optical element window member, an optical element storage package (hereinafter also simply referred to as a package) and an optical module according to the present invention will be described in detail below. The optical element storage package and the optical module of the present invention are shown in FIGS. 1A is a cross-sectional view showing an example of an embodiment of an optical element storage package and an optical module according to the present invention, and FIG. 1B is a plan view of the optical element storage package and the optical module shown in FIG. It is. FIG. 2 is a sectional view showing another example of the embodiment of the optical element storage package and the optical module of the present invention. FIG. 3 is a sectional view showing still another example of the embodiment of the optical element storage package and the optical module of the present invention.

  In the optical element window member 4 of the present invention, a metal layer 4b made of a silver-copper-titanium alloy is deposited on the entire outer periphery of the translucent member 4a, and the metal layer 4b is connected to the optical element via the solder 4c. It is joined around the light transmission window 14 of the storage package.

  The optical element storage package of the present invention includes a container 10 made of metal or ceramics having a mounting portion 1a for mounting an optical element 8 therein, and a lid for sealing the inside of the container 10 bonded to the container 10. 3 and a translucent member 4 joined to a light transmissive window 14 provided on the container 10 or the lid 3 so as to face the optical element 8, and the translucent member 4 of the light transmissive window 14. Are made of an iron-nickel-cobalt alloy, and the optical element window member 4 having the above structure is joined to the light transmission window 14 part.

  The optical module of the present invention includes an optical element storage package having the above configuration, an optical element 8 mounted and fixed on the mounting portion 1a of the container 10 so as to be optically coupled to the translucent member 4a, and a container 10. And a lid body joined to each other.

  Hereinafter, the embodiment shown in FIG. 1 will be referred to as the first embodiment of the present invention, the embodiment shown in FIG. 2 as the second embodiment of the present invention, and the embodiment shown in FIG. 3 as the third embodiment of the present invention. Examples of the embodiments of the optical element window member 4, the optical element storage package, and the optical module according to the present invention will be described. The following is an example, and various other forms are possible.

  First, the package according to the first embodiment of the present invention will be described. In the package according to the first embodiment of the present invention, as shown in FIG. 1, the optical element window member 4 of the present invention is made of a silver-copper-titanium alloy over the entire outer periphery of the translucent member 4a. A metal layer 4b is deposited, and the metal layer 4b is bonded to members around the light transmission window 14 via the solder 4c. The optical element window member 4 is joined to an annular member 3a around the light transmission window 14, thereby forming a lid 3 including the optical element window member 4 and the annular member 3a. The package according to the first embodiment includes a lid 3 for hermetically sealing the inside of a container 10 made of metal or ceramics having a placement portion 1a for placing the optical element 8 therein. And the optical element window member 4 is bonded so as to face the optical element 8.

  Here, the container 10 has a bottom plate 1 having a placement portion 1a for placing the optical element 8 on the upper main surface, and side walls provided on the outer peripheral portion of the upper main surface of the bottom plate 1 so as to surround the placement portion 1a. It consists of two. The bottom plate 1 and the side wall 2 form a storage portion 10 a that stores the optical element 8. The bottom plate 1 and the side wall 2 may be manufactured integrally, or may be bonded after being manufactured separately.

The container 10 is made of a metal such as iron (Fe) -nickel (Ni) -cobalt (Co) alloy, stainless steel (SUS), copper (Cu) -tungsten (W) alloy, Cu-molybdenum (Mo) alloy, or alumina. It consists of ceramics such as (Al ₂ O ₃ ) ceramics, aluminum nitride (AlN) ceramics, mullite (3Al ₂ O ₃ .2SiO ₂ ) ceramics. When made of metal, the ingot is produced into a predetermined shape by applying a conventionally known metal processing method such as rolling, punching or cutting.

Further, when the container 10 is made of, for example, Al ₂ O ₃ ceramics, it is manufactured as follows. Add appropriate organic binder, plasticizer, dispersant, solvent, etc. to raw powder such as Al ₂ O ₃ , silicon oxide (SiO ₂ ), calcium oxide (CaO), magnesium oxide (MgO), etc. .

  A plurality of ceramic green sheets are obtained by making this into a sheet by a conventionally known doctor blade method.

  Thereafter, these ceramic green sheets are appropriately punched and laminated, and are fired at a temperature of about 1600 ° C. in a reducing atmosphere.

  On the upper main surface of the bottom plate 1, a mounting portion 1a on which an optical element 8 such as a semiconductor laser (LD), a photodiode (PD) or the like is mounted is formed. The light emitting surface or the light receiving surface is placed and fixed so as to face the optical element window member 4. Only one optical element 8 may be placed, or a plurality of optical elements 8 may be placed. In the case where only one optical element 8 is placed, one optical element 8 provided with a plurality of light input / output units may be placed.

  Here, the lid 3 is composed of an optical element window member 4 and an annular member 3 a joined to the outer peripheral portion of the optical element window member 4 over the entire circumference, and is a translucent member serving as the optical element window member 4. The metal layer 4b is attached to the place where the annular member 3a of 4a is joined, the metal layer 4b and the annular member 3a are joined via the solder 4c having a melting point of 400 ° C. or less, and the optical element window member 4 transmits light. The annular member 3a functioning as the window 14 is attached so as to close the through hole 3b.

  The annular member 3a is made of a Fe—Ni—Co alloy, and a circular plate or a square plate provided with a circular or square through hole 3b for transmitting an optical signal through the optical element window member 4 at the center. An annular member made of The annular member 3a is manufactured in a predetermined shape by applying a conventionally known metal working method such as rolling, punching, and cutting to the ingot that becomes the annular member 3a.

  It is known that the thermal expansion coefficient of Fe—Ni—Co alloys rises rapidly between 400 and 500 ° C. Since the annular member 3a is made of an Fe—Ni—Co alloy, the metal layer 4b of the optical element window member 4 and the annular member 3a made of Fe—Ni—Co alloy are joined via a solder 4c having a melting point of 400 ° C. or less. In this case, the thermal expansion coefficient of the annular member 3a made of Fe—Ni—Co alloy can be kept small. Since the thermal expansion of the annular member 3a at the time of joining is suppressed to be small, it becomes close to the thermal expansion of the optical element window member 4, and the thermal stress acting on the optical element window member 4 after joining can be reduced. Therefore, it is possible to provide the lid 3 in which damage such as cracks does not occur in the optical element window member 4.

  The translucent member 4a has a plate shape such as a disk shape or a square plate shape made of glass or sapphire, a spherical shape, a hemispherical shape, or a lens shape.

  In FIG. 1, the translucent member 4a has a square plate shape as shown in FIG. 1 (b), and the annular member 3a has a square plate shape with a quadrangular through hole 3b.

  A metal layer 4b made of an Ag-Cu-titanium (Ti) alloy is deposited on the outer peripheral portion of one main surface (the lower surface in FIG. 1A) of the translucent member 4a, and the metal layer 4b By joining the annular member 3a via a solder 4c having a melting point of 400 ° C. or lower, the optical element window member 4 is formed and hermetically joined to the annular member 3a.

The metal layer 4b contains Ti as an active metal, and is deposited on the translucent member 4a by an active metal metallization method. The metallized paste of the metal layer 4b made of an Ag-Cu-Ti alloy is formed by mixing Ag powder, Cu powder and titanium hydride (TiH ₂ ) powder with a solvent such as terpineol or butyl carbitol in which ethyl cellulose is dissolved. After the metallized paste is printed and applied to a predetermined portion of the translucent member 4a using a screen printing method or the like, the metal layer 4b is formed by baking at about 800 to 900 ° C. in a vacuum atmosphere.

  The firing temperature when depositing the metal layer 4b on the translucent member 4a is about 800 to 900 ° C., which is lower than the firing temperature of about 1300 ° C. when depositing the conventional metalized layer made of Mo—Mn. is there. When the firing temperature can be set to about 800 to 900 ° C., components contained in the translucent member 4a, the metal paste, and the like in the firing furnace at the time of firing, in particular, glass components are hardly scattered. Further, since the metal layer 4b is fired in a vacuum furnace, there is little convection in the high-temperature furnace at the time of firing, and the scattered component drifts in the air and reattaches to the location where the optical signal of the translucent member 4a is transmitted. There is nothing to do. As a result, the light transmissive property of the translucent member 4a can be improved, and an optical signal can be transmitted accurately without being blocked.

  As the solder 4c having a melting point of 400 ° C. or lower, for example, Au—Sn solder (melting point is 280 ° C.) composed of 80% by mass of Au and 20% by mass of tin (Sn), 88% by mass of Au and germanium ( Solder such as Au-Ge solder, Sn-Ag series solder, Sn-antimony (Sb) series solder, Sn-bismuth (Bi) series solder, Sn-lead (Pb) series solder consisting of 12 mass% of Ge) Can be mentioned.

  Preferably, the solder 4c is made of Au—Sn solder or Au—Ge solder having a relatively high melting point, and the temperature of the package is increased due to heat generated from the optical element 8 during operation of the optical element 8 or temperature rise around the package. Even in the case of the rise, the solder 4c is softened so that the hermetic joint is not broken.

  The lid member 3 is formed by joining the annular member 3a and the translucent member 4a through the metal layer 4b and the solder 4c having a melting point of 400 ° C. or less. The annular member 3a is seam-welded to the upper surface of the container 10. It is possible to hermetically seal the inside of the housing portion 10a in which the optical element 8 is housed, which is hermetically joined by a welding method such as brazing or a brazing joining method using brazing material or solder.

  As a result, the optical element 8 accommodated in the package can be stored in an airtight manner, and the optical element 8 can be operated normally and stably over a long period of time, and the light transmission of the translucent member 4a is good and the optical signal is accurately obtained. The package can be transmitted.

  Preferably, in the optical element window member 3, the translucent member 4a is made of sapphire. Sapphire has a higher bending strength than other translucent materials such as glass, and even when thermal stress or the like acts on the translucent member 4a, breakage such as cracks is unlikely to occur. In addition, since sapphire is formed by growing a single crystal, bubbles or the like are not involved in the translucent member 4a, and the translucency of the translucent member 4a is improved. it can. Accordingly, it is possible to provide the optical element window member 3 that can improve the optical signal transmission characteristics of the translucent member 4a and improve the internal airtightness retention reliability.

  Further, the lid 3 in which the annular member 3a is joined to the optical element housing window member 4 is joined to the opening 10b of the container 10, and components contained in the translucent member 4a, the metal paste, or the like are added to the translucent member 4a. A package that is difficult to reattach and that prevents light transmission of the translucent member 4a from occurring in all locations of the translucent member 4a, so that the light transmission is good and an optical signal can be accurately transmitted; Become. That is, when inputting / outputting optical signals to / from the plurality of optical elements 8, even if there is only one small reattachment on the surface of the translucent member 4a, However, the input / output of the optical signal may not be possible, and the influence due to the reattachment becomes large. However, the lid 3 having such a configuration improves the operation reliability when the plurality of optical elements 8 are mounted. be able to.

  Further, in order to transmit a plurality of optical signals to the translucent member 4a, it is necessary to make the optical signal transmitting surface of the translucent member 4a have a large area. Even if the translucent member 4a becomes large, the difference in thermal expansion from the annular member 3a when the annular member 3a is joined to the translucent member 4a is small, and the thermal stress acting on the translucent member 4a is reduced. It is possible to reduce the damage, and damage such as cracks hardly occurs in the translucent member 4a. As a result, the light transmissive member 4a has a good light transmittance, can transmit an optical signal accurately, and can maintain a hermeticity inside the package.

  Therefore, with this configuration, a plurality of optical elements 8 can be mounted on the mounting portion 1a, and optical signals emitted from the plurality of optical elements 8 can be accurately transmitted to the outside, respectively. The package is suitable for inputting / outputting optical signals emitted from each.

  Preferably, the annular member 3a of the lid 3 is joined to the upper surface of the container 10 by a welding method such as a seam welding method. With this configuration, when the annular member 3a of the lid 3 is joined to the container 10, it is difficult to apply heat to the solder 4c portion that hermetically joins the annular member 3a and the translucent member 4a. Can be prevented from softening. And the airtight reliability in the solder 4c part can be maintained. Moreover, the workability of the operation | work which joins the window member 3 for optical elements to the container 10 can also be improved with a welding method. Further, since the annular member 3a is made of an Fe—Ni—Co alloy, the thermal conductivity of the annular member 3a is moderate and the heat applied during welding is not easily diffused, and only the welded portion is easily heated locally. The weldability with 10 can be made good.

  Further, the surface of the optical element window member 4 is made light such that the joint surface of the annular member 3a with the optical element window member 4 is entirely inclined, or the upper surface of the container 10 is entirely inclined. The optical element window member 4 may be inclined and joined so as not to intersect at right angles to the optical axis of the signal.

  In this case, it is possible to suppress communication noise caused by preventing reflection of light on the surface of the optical element window member 4, particularly regular reflection (reflection due to vertical incidence of light on the light incident surface).

  At this time, the angle formed by the central axis of the optical element window member 4 and the optical axis of the optical element 8 is preferably 1 to 10 °.

  If the angle is less than 1 °, when the optical element 8 is an LD, the light from the optical element 8 is regularly reflected on the surface of the optical element window member 4, and the reflected light returns to the optical element 8. In some cases, the optical element 8 malfunctions, such as the oscillation frequency of 8 is shifted.

  When the optical element 8 is a PD, an optical signal from the outside is specularly reflected on the surface of the optical element window member 4, and the reflected light returns to the incident destination of the optical signal, causing communication noise.

  If it exceeds 10 °, the intensity of the reflected light due to the oblique incidence on the surface of the optical element window member 4 increases, and it becomes difficult to efficiently pass the optical signal through the optical element window member 4.

  Next, a package according to a second embodiment of the present invention will be described. In the package of the second embodiment of the present invention, as shown in FIG. 2, the container 10 has a bottom plate 1 having a placement portion 1 a on which the optical element 8 is placed on the upper principal surface, and an upper principal surface of the bottom plate 1. A side wall 2 having a through-hole 2a formed on the side and a tubular Fe that is fitted in the through-hole 2a and holds the translucent member 4 is provided to surround the mounting portion 1a. A holding member 5 made of a Ni—Co alloy, and a metal layer 4b made of an Ag—Cu—Ti alloy is deposited on the holding member 5 on the entire outer periphery of the translucent member 4a. Has a window member 4 for an optical element having the above-described structure, which is joined via a solder 4c having a melting point of 400 ° C. or lower.

The bottom plate 1 of the package according to the second embodiment of the present invention is made of metal such as Fe—Ni—Co alloy, SUS, Cu—W alloy, Cu—Mo alloy, or Al ₂ O ₃ , AlN, 3Al ₂ O _3. · 2SiO consisting of ₂ or the like of ceramics. When it is made of metal, it is made into a predetermined shape by applying a conventionally known metal processing method. Also, when the bottom plate 1 is made of ceramics, a plurality of ceramic green sheets are produced, these ceramic green sheets are subjected to appropriate punching processing and laminated, and fired at a temperature of about 1600 ° C. in a reducing atmosphere. Produced.

  On the upper main surface of the bottom plate 1, there is formed a mounting portion 1a on which an optical element 8 such as an LD or PD is mounted. The optical element 8 is mounted on the mounting portion 1a such as a circuit board or a subcarrier. It is mounted and fixed via the mounting base 9.

  Further, the outer peripheral portion of the upper main surface of the bottom plate 1 is joined so as to surround the mounting portion 1a, and has a through hole 2a serving as an optical signal input / output portion on one side, and the through hole 2a. The side wall 2 provided with a frame-shaped or cylindrical fixing member 7 for fixing the optical fiber 6 is joined and erected.

  The side wall 2 forms a space for accommodating the optical element 8 inside (inner space) together with the bottom plate 1. The side wall 2 is a frame body having a rectangular shape or a circular shape in plan view, and supports the holding member 5.

Further, the side walls 2, Fe-Ni-Co alloy in the same manner as the bottom plate 1, SUS, Cu-W alloy, a metal such as Cu-Mo alloy or _{Al 2 O 3, AlN, 3Al} 2 O 3 · 2SiO 2 etc., The upper main plate of the bottom plate 1 is made of ceramics and is integrally formed with the bottom plate 1 or brazed to the bottom plate 1 with a brazing material such as Ag-Cu brazing or joined by a welding method such as a seam welding method. It is joined to the outer periphery of the surface.

  Further, a cylindrical holding member 5 made of an Fe—Ni—Co alloy for holding the optical element window member 4 in the through hole 2 a is fitted to the side wall 2. The holding member 5 of the optical element window member 4 is made into a predetermined shape by applying a conventionally known metal processing method such as rolling or punching to a metal ingot. The holding member 5 is joined to the through-hole 2a by brazing using Ag brazing or the like, or soldering using Au—Sn solder or the like, and airtightly seals the through-hole 2a serving as the light transmission window 14 of the package together with the translucent member 4a.

  A frame-like or cylindrical fixing member 7 for fixing the optical fiber 6 is provided at one end outside the side wall 2 of the holding member 5. As shown in FIG. 2, the translucent member 4a is joined such that the central axis of the translucent member 4a and the central axis of the through hole 5a (the central axis 5c of the holding member 5) coincide.

  Further, the surface of the translucent member 4a and the central axis of the translucent member 4a are penetrated so that the surface of the translucent member 4a and the optical axis of the signal light are not perpendicular to each other by using the joint surface of the holding member 5 with the translucent member 4a as an inclined surface. The hole 5a may be joined with the central axis inclined.

  In this case, the loss due to the reflection of the light can be suppressed by preventing the reflection of the light on the surface of the translucent member 4a, particularly the regular reflection (reflection due to the vertical incidence of the light on the incident surface).

  At this time, the angle formed by the central axis of the translucent member 4a and the optical axis of the optical element 8 is preferably 1 to 10 °.

  If the angle is less than 1 °, when the optical element 8 is an LD, the light from the optical element 8 is regularly reflected on the surface of the translucent member 4a, the reflected light returns to the optical element 8, and the reflected light reflects the optical element 8 The optical element 8 may malfunction due to an increase in temperature or an oscillation frequency of the optical element 8 being shifted.

  When the optical element 8 is a PD, the optical signal from the optical fiber 6 is regularly reflected on the surface of the translucent member 4a, and the reflected light returns to the optical fiber 6 to be an optical signal transmitted through the optical fiber 6. This will cause noise.

  If it exceeds 10 °, the intensity of the reflected light due to the oblique incidence on the surface of the translucent member 4a increases, and it becomes difficult to efficiently pass the optical signal through the translucent member 4a.

  A through hole 5a is formed in the holding member 5 in the axial direction of the central portion, and the metal layer 4b of the translucent member 4a surrounds the mounting portion 1a side opening of the through hole 5a so as to close the through hole 5a. Are hermetically bonded to each other through low-temperature solder having a melting point of 400 ° C. or lower.

  Preferably, as shown in FIG. 2, the holding member 5 has a stepped portion 5b formed on the end surface of the through hole 5a on the mounting portion 1a side, and the translucent member 4a is fitted into the stepped portion 5b. Should be joined together. With this configuration, the alignment of the translucent member 4a with respect to the holding member 5 can be facilitated, and the workability of manufacturing the package can be improved. Further, by accurately positioning the position of the translucent member 4a, when a lens is used as the translucent member 4a, the focal position of the translucent member 4a can be arranged at a predetermined position, and the optical characteristics It is possible to make an excellent package.

  By fitting the holding member 5 into the through hole 2a, it is possible to suppress the displacement of the attachment of the holding member 5 with respect to the side wall 2 and to ensure the alignment between the optical axis of the optical fiber 6 and the optical axis of the optical element 8. At the same time, since both the translucent member 4 a and the fixing member 7 are joined to the holding member 5, it is possible to prevent the position of the translucent member 4 a from being displaced with respect to the optical fiber 6, and it is possible to reliably transmit an optical signal without waste.

  The translucent member 4a has a plate shape such as a disk shape made of glass or sapphire, a spherical shape, a hemispherical shape, or a lens shape.

  In FIG. 2, the translucent member 4a is formed in a plate shape, and a metal layer 4b is formed over the entire outer periphery of one main surface of the translucent member 4a, and the metal layer 4b is interposed with solder 4c. By joining to the holding member 5, the holding member 5 is airtightly joined. The configuration of the metal layer 4b and the solder 4c is the same as that of the first embodiment of the present invention, the light transmissive member 4a can have good light transmittance, and the optical signal is accurately transmitted. be able to.

A lid 3 made of a metal such as Fe-Ni-Co alloy or Fe-Ni alloy or ceramics such as Al ₂ O ₃ , AlN, 3Al ₂ O ₃ .2SiO _{2 is} placed on the upper surface of the container 10 with brazing material or solder. The inside of the package in which the optical element 8 is housed can be hermetically sealed by airtight joining by a welding method such as brazing joining using seam or the like or seam welding.

  As a result, the optical element 8 accommodated in the package can be stored in an airtight manner, and the optical element 8 can be operated normally and stably over a long period of time, and the light transmission of the translucent member 4a is good and the optical signal is accurately obtained. The package can be transmitted.

  The package shown in FIG. 2 has a high internal airtight reliability, and has a configuration in which the bottom plate 1 is projected outward from the side wall 2 and the protruding portion is fixed to the external electric circuit board by screws. It is easy to fix tightly to the external electric circuit board, and the heat generated from the optical element 8 can be dissipated well from the bottom plate 1. Therefore, the heat generated during the operation of the optical element 8 can be efficiently dissipated to the outside of the container 10, and an optical element storage package suitable for high-speed optical communication can be provided. In particular, it can be suitably used as an optical element storage package for optical communication of a long distance transmission system.

  The optical fiber 6 is fixed to a frame-shaped or cylindrical fixing member 7 made of a metal such as an Fe-Ni-Co alloy, and one end or one main surface of the fixing member 7 is an end surface outside the side wall 2 of the holding member 5. The optical fiber 6 is joined to one side of the side wall 2 via the fixing member 7.

  As a result, optical signals can be exchanged between the optical element 8 housed inside the package and the outside via the optical fiber 6.

  In the package of the present invention, the electrode of the optical element 8 is electrically connected to an external electric circuit, and then the lid 3 made of a metal such as Fe—Ni—Co alloy is soldered to the upper surface of the side wall 2. Or an optical module as a product by joining them by the seam weld method.

  This optical module excites light in the optical element 8 by an electrical signal supplied from an external electric circuit, transmits this light in the order of the light-transmissive member 4a and the optical fiber 6, and transmits the light to the outside via the optical fiber 6. By doing so, it is used for high-speed optical communication or the like.

  Alternatively, an optical signal transmitted from the outside through the optical fiber 6 is transmitted through the translucent member 4a, received by the optical element 8, and converted into an electrical signal, thereby being used for high-speed optical communication or the like. The

  Next, a package according to a third embodiment of the present invention will be described. FIG. 3 is a sectional view showing an example of an optical module in which an optical element 8 such as an LD or PD is hermetically sealed in a package according to a third embodiment of the present invention. In the figure, 10 is a container, 8 is an optical element, 3 is a metal lid, 4 is a translucent member, and 6 is an optical fiber.

The container 10 is made of a metal such as Fe—Ni—Co alloy, SUS, Cu—W alloy, Cu—Mo alloy, and the like. It is mounted and fixed on a surface perpendicular to the upper main surface of the container 10 through a rectangular parallelepiped mounting base 9 made of ceramics such as Al ₂ O ₃ ceramics. In FIG. 3, the container 10 has a plate shape, but may have a concave shape in which the outer peripheral portion is drawn upward on the entire circumference.

  By mounting the optical element 8 in this manner, an optical signal emitted from the optical element 8 is emitted above the container 10.

  Further, it is joined to the outer peripheral portion of the upper main surface of the container 10 and has a cylindrical shape in which the upper end is closed and the lower end is opened, and a through hole 3b serving as a light transmission window 14 is formed at the center of the upper end surface 3d. A lid 3 made of a metal such as an Fe-Ni-Co alloy is provided.

  The lower end 3c of the lid 3 has, for example, a bowl shape as shown in FIG. 3, thereby increasing the bonding area between the container 10 and the lid 3, and the inside of the container constituted by the container 10 and the lid 3. Improves airtight reliability.

  Further, the optical element window member 4 is joined around the opening on the upper end surface 3d side of the through hole 3b so as to close the through hole 3b.

  The translucent member 4a serving as the optical element window member 4 has a plate shape such as a disk shape made of glass, sapphire, or the like, a spherical shape, a hemispherical shape, or a lens shape.

  Preferably, the translucent member 4a is made of sapphire, the optical signal transmission characteristics through the translucent member 4a can be improved, and the internal hermetic retention reliability can be improved.

  In FIG. 3, the translucent member 4a is plate-shaped, and the metal layer 4b is formed over the entire outer periphery of one main surface (lower surface) of the translucent member 4a. By being bonded to the holding member 5 via the melting point solder 4c, the holding member 5 is airtightly bonded. The configurations of the metal layer 4b and the solder 4c are the same as those of the first embodiment of the present invention and the second embodiment of the present invention, and the light transmissive property of the translucent member 4a is to be good. And the optical signal can be transmitted accurately.

  Also in this case, the joint surface of the lid 3 with the translucent member 4a may be an inclined surface, and the central axis of the translucent member 4a and the central axis of the through hole 3b may be inclined and joined.

  A package according to the third embodiment of the present invention is formed from the container 10, the lid 3, and the translucent member 4a, and the optical element 8 is accommodated in the package and hermetically sealed.

  Finally, a cylindrical fixing member 7 for fixing the optical fiber 6 is welded to the outer peripheral surface of the lid 3, and the optical fiber 6 is inserted and fixed from the outside into the through hole on the upper surface of the fixing member 7, thereby translucent member. A terminal (not shown) fixed to the upper side of 4a and provided on the container 10 is electrically connected to an external electric circuit (not shown), thereby forming an optical module.

  With this configuration, the optical element 8 accommodated in the package can be stored in an airtight manner, the optical element 8 can be operated normally and stably over a long period of time, and the light transmission of the translucent member 4a is good and the optical signal is accurate. It can be set as the package which can be transmitted to. The optical module of the present invention is highly reliable using the optical element storage package of the present invention.

  Note that the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention.

(A) is sectional drawing which shows the window member for optical elements of the 1st Embodiment of this invention, the package for optical element accommodation, and an optical module, (b) is a top view of Fig.1 (a). It is sectional drawing which shows the window member for optical elements of the 2nd Embodiment of this invention, the package for optical element accommodation, and an optical module. It is sectional drawing which shows the window member for optical elements of the 3rd Embodiment of this invention, the package for optical element accommodation, and an optical module.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1: Bottom plate 1a: Mounting part 2: Side wall 2a: Through-hole 3: Lid 3a: Annular member 4: Optical element window member 4a: Translucent member 4b: Metal layer 4c: Solder 5: Holding member 8: Light element
10: Container
10b: Opening
14: Light transmission window

Claims (6)

The optical element window member is attached to the light transmission window portion of the optical element storage package, and a metal layer made of a silver-copper-titanium alloy is attached to the entire outer periphery of the light transmission member, An optical element window member in which the metal layer is bonded to the light transmission window portion via solder. 2. The optical element window member according to claim 1, wherein the translucent member is made of sapphire. A container having a placement portion for placing an optical element therein, a lid for sealing the inside of the container hermetically sealed, and the container or the lid so as to face the optical element An optical element, comprising: a light transmission window portion made of an iron-nickel-cobalt alloy; and the optical element window member according to claim 1 joined to the light transmission window portion. Storage package. 3. An optical element window according to claim 1, wherein a container having a mounting portion for mounting the optical element therein and an annular member made of an iron-nickel-cobalt alloy joined to the opening of the container. An optical element storage package, comprising: a lid to which members are joined. The container is provided with a bottom plate having a placement portion for placing an optical element on the upper main surface, and an outer peripheral portion of the upper main surface of the bottom plate so as to surround the placement portion, and a through hole is formed on the side portion. 3. A holding member made of an iron-nickel-cobalt alloy that is fitted into the through-hole and that holds the translucent member and that holds the translucent member. 4. The optical element storage package according to claim 3, wherein the optical element window member is joined. The optical element storage package according to any one of claims 3 to 5, and an optical element placed and fixed on the placement portion of the container so as to be optically coupled to the translucent member, An optical module comprising a lid joined to the container.

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