JP2008270262A - Positioning tool and mounting method of element - Google Patents

Positioning tool and mounting method of element Download PDF

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JP2008270262A
JP2008270262A JP2007107136A JP2007107136A JP2008270262A JP 2008270262 A JP2008270262 A JP 2008270262A JP 2007107136 A JP2007107136 A JP 2007107136A JP 2007107136 A JP2007107136 A JP 2007107136A JP 2008270262 A JP2008270262 A JP 2008270262A
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insulating substrate
positioning jig
positioning
positioning hole
heating element
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JP5136748B2 (en
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Yoshiaki Kominami
善章 小南
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Toyota Motor Corp
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Toyota Motor Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning tool and a mounting method of an element for mounting the element at a predetermined position on a curved insulating substrate without causing a position gap. <P>SOLUTION: The positioning tool 1 is provided with a protrusion 6 protruding from the lower surface of a planar body 2 toward the insulating substrate 32 side at a part close to the outer circumferential edge thereof by making a level difference 5 in the lower surface of the planar body 2 within a range including a part of each positioning hole 4. Since the protrusion 6 provided on the lower surface of the planar body 2 touches or approaches the upper surface of the insulating substrate 32 close to the outer circumferential edge thereof when the positioning tool 1 is arranged on the insulating substrate 32 curved upward, a solder foil 31a and a heating element 31 in each positioning hole 4 are positioned such that movement in each positioning hole 4 is regulated by the protrusion 6 and mounted at a predetermined position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、パワーモジュールにおいて、冷却器上にロウ付けされた絶縁基板上に実装される素子の位置決め治具及び実装方法に関するものである。   The present invention relates to a positioning jig and mounting method for an element mounted on an insulating substrate brazed on a cooler in a power module.

図1に示すように、電力用半導体スイッチング素子等の発熱素子(パワーMOSFET、IGBT等)31を絶縁基板32上に実装するパワーモジュール30では、この発熱素子31からの熱を放熱する構造が重要となる。このため、一般的にパワーモジュール30は、絶縁基板32の裏面に冷却器(ヒートシンク)34がロウ付け33されて、発熱素子31からの熱を放熱する構造になっている。   As shown in FIG. 1, in a power module 30 in which a heating element (power MOSFET, IGBT, etc.) 31 such as a power semiconductor switching element is mounted on an insulating substrate 32, a structure for radiating heat from the heating element 31 is important. It becomes. For this reason, the power module 30 generally has a structure in which a cooler (heat sink) 34 is brazed 33 to the back surface of the insulating substrate 32 to dissipate heat from the heating element 31.

そこで、上述したパワーモジュール30を製造する際には、まず、図3に示すように、冷却器34上に複数の絶縁基板32がロウ付け33により溶着される。その後、図2に示すように、従来の位置決め治具50を使用して、各発熱素子31を絶縁基板32上に実装する。
ところで、冷却器34はアルミ製で、絶縁基板32はセラミック製でありそれぞれの線膨張率が異なっており、冷却器34と絶縁基板32とが高温でロウ付け33されると、図4に示すように、それぞれの線膨張率の相違から絶縁基板32が凸湾曲状に反る現象が発生してしまう。
Therefore, when manufacturing the power module 30 described above, first, a plurality of insulating substrates 32 are welded to the cooler 34 by brazing 33 as shown in FIG. Thereafter, as shown in FIG. 2, each heating element 31 is mounted on an insulating substrate 32 using a conventional positioning jig 50.
By the way, the cooler 34 is made of aluminum, and the insulating substrate 32 is made of ceramic and has different linear expansion coefficients. When the cooler 34 and the insulating substrate 32 are brazed 33 at a high temperature, FIG. 4 shows. Thus, the phenomenon in which the insulating substrate 32 warps in a convex curve shape due to the difference in the respective linear expansion coefficients.

しかしながら、従来の位置決め治具50は、図9に示すように、カーボン製で形成され、絶縁基板32を覆い、はんだ箔31a及び発熱素子31を位置決めするための位置決め孔51を有する板状本体52と、該板状本体52の外周縁から垂設される脚部53とから構成されており、位置決め孔51にはんだ箔31a及び発熱素子31を配置しても、絶縁基板32が凸湾曲状に反っているために、発熱素子31を絶縁基板32の所定位置に実装することができなかった。   However, as shown in FIG. 9, the conventional positioning jig 50 is made of carbon, covers the insulating substrate 32, and has a plate-like main body 52 having positioning holes 51 for positioning the solder foil 31 a and the heating element 31. And leg portions 53 suspended from the outer peripheral edge of the plate-like main body 52. Even if the solder foil 31a and the heating element 31 are disposed in the positioning hole 51, the insulating substrate 32 is convexly curved. Due to the warpage, the heating element 31 could not be mounted at a predetermined position on the insulating substrate 32.

すなわち、図9に示すように、凸湾曲状の反った状態の絶縁基板32上に従来の位置決め治具50を配置すると、板状本体52の位置決め孔51の下端内壁部56と、該位置決め孔51における絶縁基板32の最も外周縁寄りの上面との間に大きな隙間55が現出する。
そのために、はんだ箔31a及び発熱素子31を位置決め孔51内に配置しても、はんだ箔31a及び発熱素子31が絶縁基板32の湾曲状に傾斜した上面に沿って矢印の方向に滑るように移動し隙間55から位置決め孔51の外部に出てしまい、発熱素子31を絶縁基板32の所定位置に実装することができなかった。
そこで、上述したような発熱素子31の位置ズレを無くすために、はんだ箔31aの厚みを従来よりも厚くして対応可能であるが、コスト面の観点からはんだ箔31aの厚さを厚くする対策は好ましくない。
That is, as shown in FIG. 9, when the conventional positioning jig 50 is arranged on the insulating substrate 32 in a convexly curved shape, the lower end inner wall portion 56 of the positioning hole 51 of the plate-like main body 52 and the positioning hole A large gap 55 appears between the upper surface of the insulating substrate 32 closest to the outer peripheral edge at 51.
Therefore, even if the solder foil 31a and the heating element 31 are disposed in the positioning hole 51, the solder foil 31a and the heating element 31 move so as to slide in the direction of the arrow along the curved upper surface of the insulating substrate 32. However, the heating element 31 could not be mounted at a predetermined position on the insulating substrate 32 due to the outside of the positioning hole 51 from the gap 55.
Therefore, in order to eliminate the positional deviation of the heating element 31 as described above, the thickness of the solder foil 31a can be increased compared to the conventional case. However, a measure to increase the thickness of the solder foil 31a from the viewpoint of cost. Is not preferred.

なお、特許文献1には、セラミック絶縁基板の裏面に、銅からなる金属層が銀ロウ付けにより接合され、一方、放熱板は銅と酸化銅粒子から構成されており、熱処理を施すことによってセラミック絶縁基板の裏面のCu金属層と放熱板とを金属接合させることが開示されている。
特開2001−217363号公報
In Patent Document 1, a metal layer made of copper is joined to the back surface of a ceramic insulating substrate by silver brazing, while the heat sink is made of copper and copper oxide particles. It is disclosed that the Cu metal layer on the back surface of the insulating substrate and the heat sink are metal-bonded.
JP 2001-217363 A

上述したように、特許文献1の発明では、セラミック絶縁基板の裏面に銅からなる金属層が銀ロウ付けで接合されると共に、放熱板は銅と酸化銅粒子から構成されており、セラミック絶縁基板の金属層と放熱板との熱膨張係数差を小さくすることができ、セラミック絶縁基板の反りも低減されることになるが、その反りが完全に無くなったわけではないので、セラミック絶縁基板上に実装される発熱素子の位置ズレを根本的に解決できるものではない。   As described above, in the invention of Patent Document 1, the metal layer made of copper is joined to the back surface of the ceramic insulating substrate by silver brazing, and the heat sink is made of copper and copper oxide particles. The thermal expansion coefficient difference between the metal layer and the heat sink can be reduced, and the warpage of the ceramic insulating substrate can be reduced, but the warpage is not completely eliminated, so it is mounted on the ceramic insulating substrate. It is not possible to fundamentally solve the positional deviation of the generated heating element.

本発明は、かかる点に鑑みてなされたものであり、素子を、反った状態の絶縁基板上に位置ズレを起すことなく所定位置に実装することのできる素子の位置決め治具及び実装方法を提供することを目的とする。   The present invention has been made in view of the above points, and provides an element positioning jig and a mounting method capable of mounting an element at a predetermined position without causing a positional shift on a warped insulating substrate. The purpose is to do.

上記課題を解決するための手段として、第1に、本発明の素子の位置決め治具は、素子を位置決めするための位置決め孔が形成され、絶縁基板を覆う下面に、前記絶縁基板の外周縁寄りで、且つ前記絶縁基板側に突出する凸部を設けたことを特徴としている。
また、第2に、本発明の素子の実装方法は、絶縁基板上に、前記した第1の本発明の素子の位置決め治具を配置して、前記位置決め治具の下面に形成した凸部を前記絶縁基板の外周縁寄りの上面に接触または近接させて、その後、該位置決め治具の位置決め孔内にはんだ箔および素子を配置し、素子を絶縁基板上に実装することを特徴としている。
As means for solving the above-mentioned problems, firstly, the element positioning jig of the present invention has a positioning hole for positioning the element, and the lower surface covering the insulating substrate is close to the outer peripheral edge of the insulating substrate. And the convex part which protrudes in the said insulated substrate side is provided.
Second, the element mounting method according to the present invention includes a projecting portion formed on the lower surface of the positioning jig by placing the positioning jig for the element according to the first invention on an insulating substrate. It is characterized in that a solder foil and an element are placed in a positioning hole of the positioning jig after being brought into contact with or close to the upper surface of the insulating substrate near the outer peripheral edge, and the element is mounted on the insulating substrate.

これにより、位置決め治具を反った状態の絶縁基板に配置すると、絶縁基板を覆う下面に設けた絶縁基板側に突出する凸部が絶縁基板の外周縁寄りの上面に接触または近接するために、位置決め孔内でのはんだ箔及び素子の移動が規制されて、素子の位置ズレを防止でき、素子を絶縁基板の所定位置に実装することができる。
なお、本発明の素子の位置決め治具及び実装方法の各種態様およびそれらの作用については、以下の(発明の態様)の項において詳しく説明する。
Thereby, when the positioning jig is disposed on the insulating substrate in a warped state, the convex portion protruding to the insulating substrate side provided on the lower surface covering the insulating substrate contacts or approaches the upper surface near the outer peripheral edge of the insulating substrate. The movement of the solder foil and the element in the positioning hole is restricted, the element can be prevented from being displaced, and the element can be mounted at a predetermined position on the insulating substrate.
Various aspects of the element positioning jig and mounting method of the present invention and their functions will be described in detail in the following section (Invention Aspect).

(発明の態様)
以下に、本願において特許請求が可能と認識されている発明(以下、「請求可能発明」という場合がある。)の態様をいくつか例示し、それらについて説明する。なお、各態様は、請求項と同様に、項に区分し、各項に番号を付して、必要に応じて他の項を引用する形式で記載する。これは、あくまでも請求可能発明の理解を容易にするためであり、請求可能発明を構成する構成要素の組み合わせを、以下の各項に記載されたものに限定する趣旨ではない。つまり、請求可能発明は、各項に付随する記載、実施形態等に参酌して解釈されるべきであり、その解釈に従う限りにおいて、各項の態様にさらに他の構成要件を付加した態様も、また、各項の態様から構成要件を削除した態様も、請求可能発明の一態様となり得るのである。なお、以下の各項において、(1)項乃至(3)項の各々が、請求項1乃至3の各々に相当し、(6)項及び(7)項の各々が、請求項4及び5の各々に相当する。
(Aspect of the Invention)
In the following, some aspects of the invention that can be claimed in the present application (hereinafter sometimes referred to as “claimable invention”) will be exemplified and described. In addition, each aspect is divided into a term like a claim, it attaches | subjects a number to each term, and is described in the format which quotes another term as needed. This is for the purpose of facilitating the understanding of the claimable invention, and is not intended to limit the combinations of the constituent elements constituting the claimable invention to those described in the following sections. In other words, the claimable invention should be construed in consideration of the descriptions, embodiments, etc. attached to each section, and as long as the interpretation is followed, an aspect in which other constituent elements are added to the aspect of each section, In addition, an aspect in which the configuration requirements are deleted from the aspect of each item can be an aspect of the claimable invention. In each of the following items, each of items (1) to (3) corresponds to each of claims 1 to 3, and each of items (6) and (7) corresponds to claims 4 and 5 respectively. It corresponds to each of.

(1)冷却器上に溶着された絶縁基板上に素子を実装する際に使用される素子の位置決め治具であって、該位置決め治具には、素子を位置決めするための位置決め孔が形成され、前記絶縁基板を覆う下面に、前記絶縁基板の外周縁寄りで、且つ前記絶縁基板側に突出する凸部を設けたことを特徴とする素子の位置決め治具。
従って、(1)項の素子の位置決め治具では、絶縁基板を覆う下面に設けた絶縁基板側に突出する凸部が絶縁基板の外周縁寄りの上面に接触または近接するために、位置決め孔内でのはんだ箔及び素子の移動が規制され、素子の位置ズレが防止される。
(1) An element positioning jig used for mounting an element on an insulating substrate welded on a cooler, and the positioning jig has a positioning hole for positioning the element. A positioning jig for an element, characterized in that a convex portion that protrudes toward the insulating substrate side is provided on a lower surface that covers the insulating substrate.
Therefore, in the element positioning jig of item (1), since the convex portion protruding on the insulating substrate side provided on the lower surface covering the insulating substrate is in contact with or close to the upper surface near the outer peripheral edge of the insulating substrate, The movement of the solder foil and the element is restricted, and the positional deviation of the element is prevented.

(2)前記凸部は、前記位置決め治具の下面を凹設した段差部により設けられることを特徴とする(1)項に記載の素子の位置決め治具。
従って、(2)項の素子の位置決め治具では、位置決め治具の下面に、絶縁基板の外周縁寄りで、且つ絶縁基板側に突出する凸部を容易に形成できる。
(2) The element positioning jig as set forth in (1), wherein the convex portion is provided by a stepped portion in which a lower surface of the positioning jig is recessed.
Therefore, in the element positioning jig of item (2), a convex portion that protrudes toward the insulating substrate and near the outer peripheral edge of the insulating substrate can be easily formed on the lower surface of the positioning jig.

(3)前記位置決め治具には位置決め孔が複数形成され、前記段差部は、前記位置決め治具の下面に、前記各位置決め孔の一部分を含む範囲に形成されることを特徴とする(2)項に記載の素子の位置決め治具。
従って、(3)項の素子の位置決め治具では、位置決め治具に位置決め孔が複数形成される場合でも、位置決め治具の下面に、絶縁基板の各位置決め孔の一部分を含む外周縁寄りで、且つ絶縁基板側に突出する凸部を容易に形成できる。
(3) A plurality of positioning holes are formed in the positioning jig, and the stepped portion is formed on a lower surface of the positioning jig in a range including a part of the positioning holes. The positioning jig for the element according to item.
Accordingly, in the element positioning jig of item (3), even when a plurality of positioning holes are formed in the positioning jig, the lower surface of the positioning jig is near the outer periphery including a part of each positioning hole of the insulating substrate. And the convex part which protrudes in the insulated substrate side can be formed easily.

(4)前記凸部の高さは、反った状態の絶縁基板の上面の高低差の約1/2に設定されることを特徴とする(1)項〜(3)項のいずれかに記載の素子の位置決め治具。
従って、(4)項の素子の位置決め治具では、位置決め孔内でのはんだ箔及び素子の移動を確実に規制することができる。
(4) The height of the convex portion is set to about ½ of the height difference of the upper surface of the warped insulating substrate, according to any one of (1) to (3), Element positioning jig.
Therefore, in the element positioning jig of the item (4), the movement of the solder foil and the element in the positioning hole can be reliably controlled.

(5)前記段差部は、平面視で矩形状または三角形状の範囲で形成されることを特徴とする(2)項〜(4)項のいずれかに記載の素子の位置決め治具。
従って、(5)項の素子の位置決め治具では、特に、段差部が平面視で三角形状の範囲で形成されると、絶縁基板が凸球面状で反った場合には、位置決め治具の下面に設けた凸部の角部が3点の位置で絶縁基板の上面に接触することになり、位置決め治具が安定するようになる。
(5) The element positioning jig according to any one of (2) to (4), wherein the stepped portion is formed in a rectangular or triangular range in plan view.
Therefore, in the element positioning jig of item (5), in particular, when the stepped portion is formed in a triangular range in plan view, when the insulating substrate warps in a convex spherical shape, the lower surface of the positioning jig The corners of the protrusions provided on the surface come into contact with the upper surface of the insulating substrate at three points, so that the positioning jig is stabilized.

(6)前記凸部は、前記位置決め治具の下面を凹設した曲面状凹部または多角錐状凹部により設けられることを特徴とする(1)項に記載の素子の位置決め治具。
従って、(6)項の素子の位置決め治具では、位置決め孔の下端内周壁が湾曲状に下方に向かって傾斜する絶縁基板の上面に沿うように傾斜して、位置決め治具の下面に、絶縁基板の外周縁寄りで、且つ絶縁基板側に突出する凸部が形成されるので、さらに素子の位置決め精度が向上される。
(6) The element positioning jig according to (1), wherein the convex portion is provided by a curved concave portion or a polygonal pyramid concave portion having a concave bottom surface of the positioning jig.
Therefore, in the element positioning jig of item (6), the inner peripheral wall at the lower end of the positioning hole is inclined along the upper surface of the insulating substrate that is inclined downward in a curved shape, and the lower surface of the positioning jig is insulated. Since the convex portion that protrudes toward the insulating substrate side and closer to the outer peripheral edge of the substrate is formed, the positioning accuracy of the element is further improved.

(7)冷却器上に溶着された絶縁基板上に素子を実装する実装方法であって、前記絶縁基板上に、(1)項〜(6)項のいずれかに記載した素子の位置決め治具を配置して、前記位置決め治具の下面に形成した凸部を前記絶縁基板の外周縁寄りの上面に接触または近接させて、その後、該位置決め治具の位置決め孔内にはんだ箔および素子を配置し、素子を絶縁基板上に実装することを特徴とする素子の実装方法。
従って、(7)項の素子の実装方法では、絶縁基板上に素子を実装する際には、絶縁基板上に、(1)〜(6)項のいずれかに記載の素子の位置決め治具を配置すれば、位置決め治具の下面に設けた絶縁基板側に突出した凸部が絶縁基板の外周縁寄りの上面に接触または近接するので、はんだ箔及び発熱素子は位置決め孔内での移動が規制されて位置決めされ、素子が絶縁基板上の所定位置に実装される。
(7) A mounting method for mounting an element on an insulating substrate welded on a cooler, the element positioning jig described in any one of (1) to (6) on the insulating substrate And the convex portion formed on the lower surface of the positioning jig is brought into contact with or close to the upper surface near the outer peripheral edge of the insulating substrate, and then the solder foil and the element are arranged in the positioning hole of the positioning jig. And mounting the element on an insulating substrate.
Therefore, in the element mounting method according to the item (7), when the element is mounted on the insulating substrate, the element positioning jig according to any one of the items (1) to (6) is provided on the insulating substrate. If it is arranged, the protrusion protruding toward the insulating substrate on the lower surface of the positioning jig contacts or is close to the upper surface near the outer peripheral edge of the insulating substrate, so that the movement of the solder foil and the heating element within the positioning hole is restricted. Then, the device is positioned, and the element is mounted at a predetermined position on the insulating substrate.

本発明によれば、素子を、反った状態の絶縁基板上に位置ズレを起すことなく所定位置に実装することのできる素子の位置決め治具及び実装方法を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the element positioning jig | tool and the mounting method which can mount an element in a predetermined position, without raise | generating a position shift on the insulated substrate of the curvature state can be provided.

以下、本発明を実施するための最良の形態を図1〜図8に基いて詳細に説明する。
図1及び図3に示すように、発熱素子31を絶縁基板32上に実装するパワーモジュール30は、この発熱素子31からの熱を放熱するために、絶縁基板32の裏面に冷却器34がロウ付け33されて構成されている。また、図2に示すように、絶縁基板32上の所定位置に各発熱素子31を実装する際には、本発明の実施の形態に係る位置決め治具1、1a、1bが使用される。
Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to FIGS.
As shown in FIGS. 1 and 3, the power module 30 in which the heating element 31 is mounted on the insulating substrate 32 has a cooler 34 mounted on the back surface of the insulating substrate 32 in order to dissipate heat from the heating element 31. 33 is configured. Further, as shown in FIG. 2, when mounting each heating element 31 at a predetermined position on the insulating substrate 32, the positioning jigs 1, 1a, 1b according to the embodiment of the present invention are used.

そして、本発明の実施の形態に係る素子の位置決め治具1、1a、1bは、絶縁基板32が冷却器34にロウ付け33される際、図4に示すように、絶縁基板32が凸湾曲状に反った場合でも、その絶縁基板32上の所定位置に各発熱素子31を実装することができるように改良されたものである。
本位置決め治具1、1a、1bは、図5、図7及び図8に示すように、カーボン製で形成され、絶縁基板32を覆う板状本体2と、該板状本体2の外周縁から垂設される脚部3と構成されている。この位置決め治具1の板状本体2には、絶縁基板32上に配置される発熱素子31の数量に対応して、位置決め孔4が複数形成される。
The element positioning jigs 1, 1 a, 1 b according to the embodiment of the present invention have a convex curve as shown in FIG. 4 when the insulating substrate 32 is brazed 33 to the cooler 34. Even when the shape is warped, each heating element 31 is improved so that it can be mounted at a predetermined position on the insulating substrate 32.
As shown in FIGS. 5, 7, and 8, the positioning jigs 1, 1 a, and 1 b are made of carbon and cover the insulating substrate 32, and the outer periphery of the plate-like body 2. It is comprised with the leg part 3 suspended. A plurality of positioning holes 4 are formed in the plate-like main body 2 of the positioning jig 1 corresponding to the number of heating elements 31 arranged on the insulating substrate 32.

次に、本発明の第1の実施形態に係る位置決め治具1を図5に基いて説明する。
第1の実施形態に係る位置決め治具1は、その板状本体2が長方形状に形成され、その長手方向に沿って2穴の位置決め孔4が並んで形成されている。各位置決め孔4は矩形状に形成されている。また、板状本体2の下面には、その長手方向においては、隣接する位置決め孔4の略半分の領域を含み、また、短手方向においては、板状本体2の短手側全長に至る平面視矩形状の範囲(図5の斜線部)を凹設した段差部5が形成されている。この段差部5の形成により、板状本体2の下面に、絶縁基板32の各位置決め孔4の略半分を含む外周縁寄りで、且つ絶縁基板32側に突出する凸部6が形成される。
Next, the positioning jig 1 according to the first embodiment of the present invention will be described with reference to FIG.
In the positioning jig 1 according to the first embodiment, the plate-like main body 2 is formed in a rectangular shape, and two positioning holes 4 are formed side by side along the longitudinal direction thereof. Each positioning hole 4 is formed in a rectangular shape. Further, the lower surface of the plate-like main body 2 includes a substantially half region of the adjacent positioning hole 4 in the longitudinal direction, and a plane extending to the entire short side of the plate-like main body 2 in the short-side direction. A stepped portion 5 is formed in which a rectangular range (the shaded portion in FIG. 5) is provided. Due to the formation of the stepped portion 5, a convex portion 6 is formed on the lower surface of the plate-like main body 2 so as to protrude toward the insulating substrate 32 and close to the outer peripheral edge including substantially half of each positioning hole 4 of the insulating substrate 32.

なお、板状本体2の下面に設けた凸部6の高さNは、図4に示す、凸湾曲状に反った状態の絶縁基板32の上面の高低差Mが0.1〜0.15mmであるとすると、0.05〜0.075mmの範囲内で設定される。すなわち、凸部6の高さNは、凸湾曲状に反った状態の絶縁基板32の上面の高低差Mに対して約1/2に設定される。そこで、はんだ箔31aの厚みは略0.1mmであり、発熱素子31の厚みは略0.3mmである。   In addition, the height N of the convex part 6 provided in the lower surface of the plate-shaped main body 2 is 0.1-0.15 mm in height difference M of the upper surface of the insulating substrate 32 in the state which curved in the convex curve shape shown in FIG. Is set within a range of 0.05 to 0.075 mm. That is, the height N of the convex portion 6 is set to about ½ with respect to the height difference M of the upper surface of the insulating substrate 32 in a state of being curved in a convex curve. Therefore, the thickness of the solder foil 31a is approximately 0.1 mm, and the thickness of the heating element 31 is approximately 0.3 mm.

そして、図2に示すように、第1の実施形態に係る位置決め治具1を使用して、各発熱素子31を凸湾曲状に反った絶縁基板32の上面の所定位置に実装する際には、図6(a)に示すように、本位置決め治具1を絶縁基板32の上方から被せるように配置する。
すると、図6(a)に示すように、位置決め治具1の脚部3の内面が絶縁基板32の外面に接触する。これと同時に、位置決め治具1の板状本体2の下面の略中央部分が反った状態の絶縁基板32の頂面に接触または近接し、板状本体2の下面に設けた凸部6の角部12が絶縁基板32で外周縁寄りの上面に接触すると共に、凸部6側の各位置決め孔4の下端内周壁8が、各位置決め孔4における絶縁基板32の最も外周縁寄りの上面に限りなく近接する。なお、この凸部6側の各位置決め孔4の下端内周壁8と、各位置決め孔4における絶縁基板32の最も外周縁寄りの上面との間の隙間10は、はんだ箔31a及び発熱素子31が挿通できるような高さではない。
Then, as shown in FIG. 2, when using the positioning jig 1 according to the first embodiment, each heating element 31 is mounted at a predetermined position on the upper surface of the insulating substrate 32 warped in a convex curve shape. As shown in FIG. 6A, the positioning jig 1 is arranged so as to cover the insulating substrate 32 from above.
Then, as shown in FIG. 6A, the inner surface of the leg portion 3 of the positioning jig 1 comes into contact with the outer surface of the insulating substrate 32. At the same time, the corners of the convex portions 6 provided on the bottom surface of the plate-like body 2 come into contact with or close to the top surface of the insulating substrate 32 in a state where the substantially central portion of the bottom surface of the plate-like body 2 of the positioning jig 1 is warped. The portion 12 contacts the upper surface near the outer peripheral edge of the insulating substrate 32, and the lower end inner peripheral wall 8 of each positioning hole 4 on the convex portion 6 side is limited to the upper surface closest to the outer peripheral edge of the insulating substrate 32 in each positioning hole 4. Not close. Note that the gap 10 between the lower end inner peripheral wall 8 of each positioning hole 4 on the convex portion 6 side and the top surface of the insulating substrate 32 in each positioning hole 4 closest to the outer peripheral edge is formed by the solder foil 31a and the heating element 31. It is not high enough to be inserted.

その後、絶縁素子32に配置された位置決め治具1の各位置決め孔4内に、はんだ箔31a及び発熱素子31を配置する。
すると、各位置決め孔4内のはんだ箔31a及び発熱素子31は、絶縁基板32の短手方向及び長手方向において、板状本体2に設けた凸部6によりそれぞれの方向への移動が規制されて位置決めされる。その後、各はんだ箔31aに熱を付与することにより各発熱素子31が絶縁基板32上の所定位置に実装される。
Thereafter, the solder foil 31 a and the heating element 31 are disposed in the positioning holes 4 of the positioning jig 1 disposed in the insulating element 32.
Then, the movement of the solder foil 31a and the heating element 31 in each positioning hole 4 in each direction is restricted by the convex portion 6 provided in the plate-like body 2 in the short side direction and the long side direction of the insulating substrate 32. Positioned. Thereafter, each heating element 31 is mounted at a predetermined position on the insulating substrate 32 by applying heat to each solder foil 31a.

次に、第2の実施形態に係る位置決め治具1aを図7に基いて説明する。
第2の実施形態に係る位置決め治具1aは、その板状本体2が正方形状に形成され、位置決め孔4が4穴形成されている。また、板状本体2の下面には、全ての位置決め孔4の一部を含む範囲の平面視三角形状(図7の斜線部)で凹設した段差部5が形成されている。
その結果、板状本体2の下面には、第1の実施形態に係る位置決め治具1と同様に、絶縁基板32の各位置決め孔4の一部を含む外周縁寄りで、且つ絶縁基板32側に突出する凸部6(図7には示されていない)が形成されるようになる。
Next, a positioning jig 1a according to the second embodiment will be described with reference to FIG.
As for the positioning jig 1a which concerns on 2nd Embodiment, the plate-shaped main body 2 is formed in square shape, and the four positioning holes 4 are formed. Further, on the lower surface of the plate-like main body 2, a stepped portion 5 is formed that is recessed in a triangular shape in plan view (shaded portion in FIG. 7) in a range including a part of all the positioning holes 4.
As a result, the lower surface of the plate-like main body 2 is close to the outer peripheral edge including a part of each positioning hole 4 of the insulating substrate 32 and on the insulating substrate 32 side, like the positioning jig 1 according to the first embodiment. A protrusion 6 (not shown in FIG. 7) is formed.

そして、第2の実施形態に係る位置決め治具1aでは、絶縁基板32の反りの形状にも依存されるが、例えば、絶縁基板32が凸球面状に反っていれば、図7の3点(符号P1)の位置で、板状本体2の下面に設けた凸部6の角部(図6(a)に示す角部12に相当)が、絶縁基板32の上面に接触することになり、位置決め治具1aが安定するようになる。
なお、第2の実施形態に係る位置決め治具1aのその他の作用については、第1の実施形態に係る位置決め治具1と同じであるためここでの説明を省略する。
In the positioning jig 1a according to the second embodiment, depending on the shape of the warp of the insulating substrate 32, for example, if the insulating substrate 32 is warped in a convex spherical shape, the three points in FIG. At the position of the reference symbol P1), the corners of the convex portions 6 provided on the lower surface of the plate-like main body 2 (corresponding to the corner portions 12 shown in FIG. 6A) are in contact with the upper surface of the insulating substrate 32. The positioning jig 1a becomes stable.
In addition, about the other effect | action of the positioning jig 1a which concerns on 2nd Embodiment, since it is the same as the positioning jig 1 which concerns on 1st Embodiment, description here is abbreviate | omitted.

次に、第3の実施形態に係る位置決め治具1bを図8に基いて説明する。
第3の実施形態に係る位置決め治具1bは、その板状本体2の下面に三角錐状凹部5aを凹設することにより、各位置決め孔4の下端内周壁が湾曲状に下方に向かって傾斜する絶縁基板32の上面に沿うように傾斜して、第1及び第2の実施形態に係る位置決め治具1、1aと同様に、板状本体2の下面に、絶縁基板32の外周縁寄りで、且つ絶縁基板32側に突出する凸部6が形成される。
なお、本実施の形態では、板状本体2の下面に三角錐状凹部5aを凹設しているが、曲面状凹部を凹設しても良い。
Next, a positioning jig 1b according to the third embodiment will be described with reference to FIG.
In the positioning jig 1b according to the third embodiment, a triangular pyramid-shaped concave portion 5a is provided on the lower surface of the plate-like main body 2 so that the inner peripheral wall at the lower end of each positioning hole 4 is inclined downward in a curved shape. Inclined so as to follow the upper surface of the insulating substrate 32, and on the lower surface of the plate-like main body 2 near the outer peripheral edge of the insulating substrate 32, similarly to the positioning jigs 1, 1 a according to the first and second embodiments. And the convex part 6 which protrudes in the insulated substrate 32 side is formed.
In the present embodiment, the triangular pyramid recess 5a is provided on the lower surface of the plate-like main body 2, but a curved recess may be provided.

そして、第3の実施形態に係る位置決め治具1bを、反った状態の絶縁基板32に配置すると、板状本体2の下面に形成した凸部6が絶縁基板32の外周縁寄りの上面に接触または近接するので、各位置決め孔4内に配置されたはんだ箔31a及び発熱素子31は、その移動が規制されて位置決めされる。   When the positioning jig 1b according to the third embodiment is disposed on the warped insulating substrate 32, the convex portion 6 formed on the lower surface of the plate-like main body 2 contacts the upper surface of the insulating substrate 32 near the outer peripheral edge. Or, since they are close to each other, the movement of the solder foil 31a and the heating element 31 disposed in each positioning hole 4 is restricted and positioned.

以上説明したように、本発明の第1及び第2の実施形態に係る位置決め治具1、1aでは、その板状本体2の下面に板状本体2に複数設けられた位置決め孔4の一部を含む範囲の段差部5を凹設することにより、板状本体2の下面に、絶縁基板32の各位置決め孔4の一部を含む外周縁寄りで、且つ絶縁基板32側に突出する凸部6を形成したので、本位置決め治具1、1aを凸湾曲状で反った状態の絶縁基板32上に配置すると、板状本体2の下面に設けた凸部6が絶縁基板32の各位置決め孔4の一部を含む外周縁寄りの上面に接触または近接する。
これにより、各位置決め孔4内のはんだ箔31a及び発熱素子31は、凸部6により各位置決め孔4内での移動が規制されて位置決めされ、発熱素子31が所定位置に実装される。
As described above, in the positioning jigs 1, 1 a according to the first and second embodiments of the present invention, a part of the positioning holes 4 provided in the plate-like body 2 on the lower surface of the plate-like body 2. Is provided on the lower surface of the plate-like main body 2 near the outer peripheral edge including a part of each positioning hole 4 and projecting toward the insulating substrate 32. 6 is formed, when the positioning jigs 1 and 1a are arranged on the insulating substrate 32 in a convex curved shape, the convex portions 6 provided on the lower surface of the plate-like main body 2 become the positioning holes of the insulating substrate 32. 4 is in contact with or close to the upper surface near the outer peripheral edge including a part of 4.
Thereby, the solder foil 31a and the heating element 31 in each positioning hole 4 are positioned by the movement of each positioning hole 4 being restricted by the convex portion 6, and the heating element 31 is mounted at a predetermined position.

また、第2の実施形態の位置決め治具1aでは、板状本体2の下面を凹設した段差部5の平面視形状を三角形状にすることにより、特に、絶縁基板32が凸球面状で反った場合には、板状本体2の下面に設けた凸部6の角部(図6(a)に示す角部12に相当)が3点の位置で絶縁基板32の上面に接触するために、はんだ箔31a及び発熱素子31を絶縁基板32上に実装する際に該位置決め治具1aを若干押える必要があるが、その3点の接触位置を押えることにより位置決め治具1aを安定した状態で維持できる。   Further, in the positioning jig 1a of the second embodiment, the insulating substrate 32 is warped in a convex spherical shape, in particular, by making the planar view shape of the stepped portion 5 in which the lower surface of the plate-like main body 2 is recessed into a triangular shape. In this case, the corners of the protrusions 6 (corresponding to the corners 12 shown in FIG. 6A) provided on the lower surface of the plate-like main body 2 come into contact with the upper surface of the insulating substrate 32 at three points. When mounting the solder foil 31a and the heating element 31 on the insulating substrate 32, the positioning jig 1a needs to be slightly pressed. By pressing the three contact positions, the positioning jig 1a can be held in a stable state. Can be maintained.

さらに、第3の実施形態に係る位置決め治具1bでは、板状本体2の下面に三角錐状凹部5aを凹設することにより、各位置決め孔4の下端内周壁が湾曲状に下方に向かって傾斜する絶縁基板32の上面に沿うように傾斜して、板状本体2の下面に、絶縁基板32の外周縁寄りで、且つ絶縁基板32側に突出する凸部6が形成される。これにより、はんだ箔31a及び発熱素子31の位置決め精度をさらに向上させることができる。   Furthermore, in the positioning jig 1b according to the third embodiment, by forming the triangular pyramid concave portion 5a on the lower surface of the plate-like main body 2, the lower end inner peripheral wall of each positioning hole 4 is curved downward. A convex portion 6 is formed on the lower surface of the plate-like main body 2 so as to be along the upper surface of the inclined insulating substrate 32 and protrudes toward the insulating substrate 32 and closer to the outer peripheral edge of the insulating substrate 32. Thereby, the positioning accuracy of the solder foil 31a and the heating element 31 can be further improved.

図1は、パワーモジュールを示し、(a)は平面図、(b)は側面図である。1A and 1B show a power module, where FIG. 1A is a plan view and FIG. 1B is a side view. 図2は、図1(a)のA部を拡大した分解組立図である。FIG. 2 is an exploded view in which the portion A of FIG. 図3は、図1(b)のB部の拡大図である。FIG. 3 is an enlarged view of a portion B in FIG. 図4は、絶縁基板が反った様子を示す側面図である。FIG. 4 is a side view showing a state in which the insulating substrate is warped. 図5は、本発明の第1の実施形態に係る位置決め治具を示し、(a)は平面図であり、(b)は断面図である。FIG. 5 shows a positioning jig according to the first embodiment of the present invention, where (a) is a plan view and (b) is a cross-sectional view. 図6(a)は、第1の実施形態に係る位置決め治具が絶縁基板に配置された状態の断面図で、(b)は、はんだ箔及び発熱素子が位置決め孔内に配置された状態の断面図である。FIG. 6A is a cross-sectional view of the state in which the positioning jig according to the first embodiment is disposed on the insulating substrate, and FIG. 6B is a state in which the solder foil and the heating element are disposed in the positioning hole. It is sectional drawing. 図7は、第2の実施形態に係る位置決め治具を示した平面図である。FIG. 7 is a plan view showing a positioning jig according to the second embodiment. 図8は、第3の実施形態に係る位置決め治具を示した断面図である。FIG. 8 is a sectional view showing a positioning jig according to the third embodiment. 図9は、従来の位置決め治具を示した断面図である。FIG. 9 is a cross-sectional view showing a conventional positioning jig.

符号の説明Explanation of symbols

1、1a、1b 位置決め治具,2 板状本体,4 位置決め孔,5 段差部、5a 三角錐状凹部,6 凸部,12 角部,30 パワーモジュール,31 発熱素子,31a はんだ箔,32 絶縁基板,33 ロウ付け,34 冷却器,
1, 1a, 1b Positioning jig, 2 Plate body, 4 Positioning hole, 5 Stepped part, 5a Triangular pyramid recessed part, 6 Convex part, 12 Corner part, 30 Power module, 31 Heating element, 31a Solder foil, 32 Insulation Substrate, 33 brazing, 34 cooler,

Claims (5)

冷却器上に溶着された絶縁基板上に素子を実装する際に使用される素子の位置決め治具であって、
該位置決め治具には、素子を位置決めするための位置決め孔が形成され、前記絶縁基板を覆う下面に、前記絶縁基板の外周縁寄りで、且つ前記絶縁基板側に突出する凸部を設けたことを特徴とする素子の位置決め治具。
An element positioning jig used when mounting an element on an insulating substrate welded on a cooler,
The positioning jig is provided with a positioning hole for positioning an element, and a lower surface that covers the insulating substrate is provided with a convex portion that is close to the outer peripheral edge of the insulating substrate and protrudes toward the insulating substrate. An element positioning jig.
前記凸部は、前記位置決め治具の下面を凹設した段差部により設けられることを特徴とする請求項1に記載の素子の位置決め治具。   The element positioning jig according to claim 1, wherein the projecting portion is provided by a stepped portion in which a lower surface of the positioning jig is recessed. 前記位置決め治具には位置決め孔が複数形成され、前記段差部は、前記位置決め治具の下面に、前記各位置決め孔の一部分を含む範囲に形成されることを特徴とする請求項2に記載の素子の位置決め治具。   The positioning jig according to claim 2, wherein a plurality of positioning holes are formed in the positioning jig, and the stepped portion is formed in a range including a part of each positioning hole on a lower surface of the positioning jig. Element positioning jig. 前記凸部は、前記位置決め治具の下面を凹設した曲面状凹部または多角錐状凹部により設けられることを特徴とする請求項1に記載の素子の位置決め治具。   2. The element positioning jig according to claim 1, wherein the convex portion is provided by a curved concave portion or a polygonal pyramid concave portion having a concave bottom surface of the positioning jig. 冷却器上に溶着された絶縁基板上に素子を実装する実装方法であって、
前記絶縁基板上に、請求項1〜4のいずれかに記載した素子の位置決め治具を配置して、前記位置決め治具の下面に形成した凸部を前記絶縁基板の外周縁寄りの上面に接触または近接させて、その後、該位置決め治具の位置決め孔内にはんだ箔および素子を配置し、素子を絶縁基板上に実装することを特徴とする素子の実装方法。
A mounting method for mounting an element on an insulating substrate welded on a cooler,
The element positioning jig according to any one of claims 1 to 4 is arranged on the insulating substrate, and the convex portion formed on the lower surface of the positioning jig is brought into contact with the upper surface near the outer peripheral edge of the insulating substrate. Alternatively, a method for mounting an element comprising placing a solder foil and an element in a positioning hole of the positioning jig and then mounting the element on an insulating substrate.
JP2007107136A 2007-04-16 2007-04-16 Element positioning jig and mounting method Expired - Fee Related JP5136748B2 (en)

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Cited By (9)

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JP2013021145A (en) * 2011-07-12 2013-01-31 Fuji Electric Co Ltd Semiconductor device assembly jig and method of manufacturing semiconductor device using the same
CN103000559A (en) * 2011-09-16 2013-03-27 富士电机株式会社 Positioning clamp for semiconductor chip and manufacture method for semiconductor device
CN103177995A (en) * 2013-02-21 2013-06-26 西安永电电气有限责任公司 Positioning plate for one-off welding of IGBT (insulated gate bipolar transistor)
US8622276B2 (en) 2011-02-08 2014-01-07 Fuji Electric Co., Ltd. Assembly jig for a semiconductor device and assembly method for a semiconductor device
CN103962772A (en) * 2013-02-04 2014-08-06 西安永电电气有限责任公司 IGBT (insulated gate bipolar transistor) once-bonding tooling and assembly method thereof
US9887154B2 (en) 2014-04-21 2018-02-06 Mitsubishi Electric Corporation Semiconductor device and method of manufacturing the semiconductor device
JP2020188152A (en) * 2019-05-15 2020-11-19 富士電機株式会社 Semiconductor module, manufacturing method of semiconductor module, and step jig
CN112016262A (en) * 2020-08-27 2020-12-01 东风汽车集团有限公司 Positioning tool and method for multiple groups of parallel double-side cooling IGBT pins
US20210175148A1 (en) * 2019-12-06 2021-06-10 Fuji Electric Co., Ltd. Semiconductor device and semiconductor device manufacturing method

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8622276B2 (en) 2011-02-08 2014-01-07 Fuji Electric Co., Ltd. Assembly jig for a semiconductor device and assembly method for a semiconductor device
US8759158B2 (en) 2011-02-08 2014-06-24 Fuji Electric Co. Ltd Assembly jig for a semiconductor device and assembly method for a semiconductor device
JP2013021145A (en) * 2011-07-12 2013-01-31 Fuji Electric Co Ltd Semiconductor device assembly jig and method of manufacturing semiconductor device using the same
CN103000559A (en) * 2011-09-16 2013-03-27 富士电机株式会社 Positioning clamp for semiconductor chip and manufacture method for semiconductor device
CN103962772A (en) * 2013-02-04 2014-08-06 西安永电电气有限责任公司 IGBT (insulated gate bipolar transistor) once-bonding tooling and assembly method thereof
CN103177995A (en) * 2013-02-21 2013-06-26 西安永电电气有限责任公司 Positioning plate for one-off welding of IGBT (insulated gate bipolar transistor)
US9887154B2 (en) 2014-04-21 2018-02-06 Mitsubishi Electric Corporation Semiconductor device and method of manufacturing the semiconductor device
JP2020188152A (en) * 2019-05-15 2020-11-19 富士電機株式会社 Semiconductor module, manufacturing method of semiconductor module, and step jig
JP7334464B2 (en) 2019-05-15 2023-08-29 富士電機株式会社 Semiconductor module, method for manufacturing semiconductor module, and step jig
US20210175148A1 (en) * 2019-12-06 2021-06-10 Fuji Electric Co., Ltd. Semiconductor device and semiconductor device manufacturing method
US11637052B2 (en) * 2019-12-06 2023-04-25 Fuji Electric Co., Ltd. Semiconductor device and semiconductor device manufacturing method
CN112016262A (en) * 2020-08-27 2020-12-01 东风汽车集团有限公司 Positioning tool and method for multiple groups of parallel double-side cooling IGBT pins

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