JP2008268196A5 - - Google Patents

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Publication number
JP2008268196A5
JP2008268196A5 JP2008082383A JP2008082383A JP2008268196A5 JP 2008268196 A5 JP2008268196 A5 JP 2008268196A5 JP 2008082383 A JP2008082383 A JP 2008082383A JP 2008082383 A JP2008082383 A JP 2008082383A JP 2008268196 A5 JP2008268196 A5 JP 2008268196A5
Authority
JP
Japan
Prior art keywords
contact
smoothness
inspection object
probe according
beam part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008082383A
Other languages
English (en)
Japanese (ja)
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JP2008268196A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008082383A priority Critical patent/JP2008268196A/ja
Priority claimed from JP2008082383A external-priority patent/JP2008268196A/ja
Publication of JP2008268196A publication Critical patent/JP2008268196A/ja
Publication of JP2008268196A5 publication Critical patent/JP2008268196A5/ja
Withdrawn legal-status Critical Current

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JP2008082383A 2007-03-28 2008-03-27 コンタクトプローブ及びコンタクトプローブの製造方法 Withdrawn JP2008268196A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008082383A JP2008268196A (ja) 2007-03-28 2008-03-27 コンタクトプローブ及びコンタクトプローブの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007085422 2007-03-28
JP2008082383A JP2008268196A (ja) 2007-03-28 2008-03-27 コンタクトプローブ及びコンタクトプローブの製造方法

Publications (2)

Publication Number Publication Date
JP2008268196A JP2008268196A (ja) 2008-11-06
JP2008268196A5 true JP2008268196A5 (enExample) 2011-04-07

Family

ID=40047864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008082383A Withdrawn JP2008268196A (ja) 2007-03-28 2008-03-27 コンタクトプローブ及びコンタクトプローブの製造方法

Country Status (1)

Country Link
JP (1) JP2008268196A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010096707A2 (en) * 2009-02-19 2010-08-26 Touchdown Technologies, Inc. Microelectronic contactor assembly, structures thereof, and methods of constructing same
JP2010249538A (ja) * 2009-04-10 2010-11-04 Nps Inc ４探針プローブ及びそれを用いた抵抗率測定装置
CN116783492A (zh) * 2021-04-23 2023-09-19 日本电子材料株式会社 探针卡以及探针卡修补方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3623413B2 (ja) * 1999-10-29 2005-02-23 Ｎｅｃエレクトロニクス株式会社 プローブカード
JP2002040052A (ja) * 2000-07-19 2002-02-06 Mitsubishi Materials Corp コンタクトプローブとその製造方法
JP2004138393A (ja) * 2002-10-15 2004-05-13 Umc Japan カンチレバー式プローブカード、およびその製造方法

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