JP2008246280A5 - - Google Patents
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- Publication number
- JP2008246280A5 JP2008246280A5 JP2007087167A JP2007087167A JP2008246280A5 JP 2008246280 A5 JP2008246280 A5 JP 2008246280A5 JP 2007087167 A JP2007087167 A JP 2007087167A JP 2007087167 A JP2007087167 A JP 2007087167A JP 2008246280 A5 JP2008246280 A5 JP 2008246280A5
- Authority
- JP
- Japan
- Prior art keywords
- slot
- coating
- coating liquid
- width direction
- slot die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims 27
- 238000000576 coating method Methods 0.000 claims 27
- 239000007788 liquid Substances 0.000 claims 18
- 239000000758 substrate Substances 0.000 claims 6
- 230000001808 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
Claims (7)
(1)該塗布液との接液面を有し、該スロットの形状を規定するスロット規定部材が塗布幅方向に3個以上配列され、
(2)少なくとも塗布幅方向に隣接する2個の該スロット規定部材を結合する部材結合手段が設けられ、
(3)該3個以上のスロット規定部材の少なくとも1個は、該吐出口の塗布幅方向両端部の所定範囲で塗布液の吐出量分布を独立して調整可能な吐出量調整手段を有する、
ことを特徴とするスロットダイ。 A coating liquid supply port for supplying the coating liquid to the slot die, a manifold for guiding the coating liquid supplied from the coating liquid supply port in the coating width direction, and a slit-like discharge extending in the coating width direction for discharging the coating liquid In a slot die having an outlet, a slot communicating the manifold and the discharge port,
(1) Three or more slot defining members having a liquid contact surface with the coating liquid and defining the shape of the slot are arranged in the coating width direction;
(2) A member coupling means for coupling at least two slot defining members adjacent to each other in the coating width direction is provided,
(3) At least one of the three or more slot defining members has a discharge amount adjusting means capable of independently adjusting the discharge amount distribution of the coating liquid in a predetermined range at both ends of the discharge port in the coating width direction.
A slot die characterized by that.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007087167A JP5098396B2 (en) | 2007-03-29 | 2007-03-29 | Manufacturing apparatus for substrate having slot die and coating film, and method for manufacturing substrate having coating film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007087167A JP5098396B2 (en) | 2007-03-29 | 2007-03-29 | Manufacturing apparatus for substrate having slot die and coating film, and method for manufacturing substrate having coating film |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008246280A JP2008246280A (en) | 2008-10-16 |
JP2008246280A5 true JP2008246280A5 (en) | 2010-04-30 |
JP5098396B2 JP5098396B2 (en) | 2012-12-12 |
Family
ID=39971872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007087167A Active JP5098396B2 (en) | 2007-03-29 | 2007-03-29 | Manufacturing apparatus for substrate having slot die and coating film, and method for manufacturing substrate having coating film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5098396B2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2444165B1 (en) | 2009-06-18 | 2016-10-19 | Konica Minolta Holdings, Inc. | Coating method |
JP5315453B1 (en) * | 2012-03-07 | 2013-10-16 | 日東電工株式会社 | Shim member, die coater and coating film manufacturing method |
JP6069014B2 (en) * | 2013-02-18 | 2017-01-25 | 株式会社Screenホールディングス | Slit nozzle and substrate processing apparatus |
JP6477236B2 (en) * | 2015-05-20 | 2019-03-06 | 株式会社豊田自動織機 | Coating apparatus and coating method |
JP6768755B2 (en) * | 2018-09-21 | 2020-10-14 | 株式会社Screenホールディングス | Slit nozzle and substrate processing equipment |
CN215390401U (en) * | 2019-12-19 | 2022-01-04 | 株式会社斯库林集团 | Slit nozzle and substrate processing apparatus |
JP7162994B2 (en) * | 2020-02-26 | 2022-10-31 | 株式会社Screenホールディングス | Slit nozzle and substrate processing equipment |
CN113926645B (en) * | 2021-09-30 | 2023-05-05 | 安脉时代智能制造(宁德)有限公司 | Coating machine die head flow regulating mechanism and working method thereof |
CN114535004B (en) * | 2022-03-23 | 2022-12-27 | 北京大学长三角光电科学研究院 | Coating head and coating machine |
KR102608277B1 (en) * | 2023-06-01 | 2023-11-30 | 주식회사 준성테크 | slit coater |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6040904B2 (en) * | 1981-09-30 | 1985-09-13 | 日本発条株式会社 | Continuous application equipment for reactive mixtures |
JPS59182713A (en) * | 1983-03-31 | 1984-10-17 | Toshiba Mach Co Ltd | T die for synthetic resin |
JPH02107368A (en) * | 1988-10-14 | 1990-04-19 | Fuji Photo Film Co Ltd | Coating apparatus |
JP2001029860A (en) * | 1999-07-19 | 2001-02-06 | Matsushita Electric Ind Co Ltd | Coating device |
JP2002246870A (en) * | 2001-02-20 | 2002-08-30 | Toshiba Corp | Surface acoustic wave device and its manufacturing device |
JP4639491B2 (en) * | 2001-02-23 | 2011-02-23 | 東レ株式会社 | Sheet extrusion die |
JP2003112103A (en) * | 2001-10-01 | 2003-04-15 | Toray Ind Inc | Coating apparatus, coating method, and apparatus and method for producing color filter |
JP2007021395A (en) * | 2005-07-19 | 2007-02-01 | Dainippon Printing Co Ltd | Die head |
-
2007
- 2007-03-29 JP JP2007087167A patent/JP5098396B2/en active Active
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