JP2008218498A5 - - Google Patents

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Publication number
JP2008218498A5
JP2008218498A5 JP2007050039A JP2007050039A JP2008218498A5 JP 2008218498 A5 JP2008218498 A5 JP 2008218498A5 JP 2007050039 A JP2007050039 A JP 2007050039A JP 2007050039 A JP2007050039 A JP 2007050039A JP 2008218498 A5 JP2008218498 A5 JP 2008218498A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2007050039A
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JP2008218498A (ja
JP5064835B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2007050039A external-priority patent/JP5064835B2/ja
Priority to JP2007050039A priority Critical patent/JP5064835B2/ja
Priority to PCT/JP2008/053375 priority patent/WO2008105444A1/ja
Priority to US12/528,703 priority patent/US8571704B2/en
Priority to CN2008800062852A priority patent/CN101681863B/zh
Priority to TW097106931A priority patent/TWI352398B/zh
Priority to KR1020097019861A priority patent/KR101221109B1/ko
Publication of JP2008218498A publication Critical patent/JP2008218498A/ja
Publication of JP2008218498A5 publication Critical patent/JP2008218498A5/ja
Publication of JP5064835B2 publication Critical patent/JP5064835B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007050039A 2007-02-28 2007-02-28 基板搬送装置 Active JP5064835B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007050039A JP5064835B2 (ja) 2007-02-28 2007-02-28 基板搬送装置
TW097106931A TWI352398B (en) 2007-02-28 2008-02-27 Substrate transfer apparatus
US12/528,703 US8571704B2 (en) 2007-02-28 2008-02-27 Substrate transfer apparatus
CN2008800062852A CN101681863B (zh) 2007-02-28 2008-02-27 基板传送装置
PCT/JP2008/053375 WO2008105444A1 (ja) 2007-02-28 2008-02-27 基板搬送装置
KR1020097019861A KR101221109B1 (ko) 2007-02-28 2008-02-27 기판 이송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007050039A JP5064835B2 (ja) 2007-02-28 2007-02-28 基板搬送装置

Publications (3)

Publication Number Publication Date
JP2008218498A JP2008218498A (ja) 2008-09-18
JP2008218498A5 true JP2008218498A5 (ja) 2010-01-21
JP5064835B2 JP5064835B2 (ja) 2012-10-31

Family

ID=39721269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007050039A Active JP5064835B2 (ja) 2007-02-28 2007-02-28 基板搬送装置

Country Status (6)

Country Link
US (1) US8571704B2 (ja)
JP (1) JP5064835B2 (ja)
KR (1) KR101221109B1 (ja)
CN (1) CN101681863B (ja)
TW (1) TWI352398B (ja)
WO (1) WO2008105444A1 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5185054B2 (ja) * 2008-10-10 2013-04-17 東京エレクトロン株式会社 基板搬送方法、制御プログラム及び記憶媒体
US8666551B2 (en) * 2008-12-22 2014-03-04 Asm Japan K.K. Semiconductor-processing apparatus equipped with robot diagnostic module
JP2010162611A (ja) * 2009-01-13 2010-07-29 Ulvac Japan Ltd 相対ティーチング方法
JP5728204B2 (ja) * 2010-11-17 2015-06-03 株式会社アルバック 基板位置検出方法
JP5851126B2 (ja) * 2011-06-24 2016-02-03 株式会社アルバック 基板位置検出方法
JP6063776B2 (ja) * 2013-03-04 2017-01-18 東京エレクトロン株式会社 基板搬送経路の決定方法、基板搬送装置、基板処理装置及びプログラム
JP5905521B2 (ja) * 2014-06-26 2016-04-20 ファナック株式会社 工具先端点制御中に生じるバックラッシを抑制することを特徴とする数値制御装置
CN107408526B (zh) * 2015-03-12 2022-03-15 柿子技术公司 具有从动末端执行器运动的机器人
US10818561B2 (en) * 2016-01-28 2020-10-27 Applied Materials, Inc. Process monitor device having a plurality of sensors arranged in concentric circles
JP6298109B2 (ja) * 2016-07-08 2018-03-20 キヤノントッキ株式会社 基板処理装置及びアライメント方法
JP7049909B2 (ja) * 2018-05-11 2022-04-07 川崎重工業株式会社 基板搬送ロボット及び基板保持ハンドの光軸ずれ検出方法
KR20210027455A (ko) * 2018-07-03 2021-03-10 퍼시몬 테크놀로지스 코포레이션 로봇 페이로드 위치의 감지 및 수정을 위한 시스템 및 방법
CN110757447A (zh) * 2018-07-25 2020-02-07 西门子（中国）有限公司 一种机器人示教编程方法、装置、系统和计算机可读介质
JP7384575B2 (ja) * 2018-08-10 2023-11-21 川崎重工業株式会社 情報処理装置、仲介装置、シミュレートシステム、情報処理方法及びプログラム
JP7158238B2 (ja) * 2018-10-10 2022-10-21 東京エレクトロン株式会社 基板処理システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4819167A (en) 1987-04-20 1989-04-04 Applied Materials, Inc. System and method for detecting the center of an integrated circuit wafer
JPH0736417B2 (ja) * 1989-10-24 1995-04-19 株式会社メツクス ウエハーの位置決め装置
EP0597637B1 (en) 1992-11-12 2000-08-23 Applied Materials, Inc. System and method for automated positioning of a substrate in a processing chamber
US6707544B1 (en) * 1999-09-07 2004-03-16 Applied Materials, Inc. Particle detection and embedded vision system to enhance substrate yield and throughput
JP2003165078A (ja) * 2001-11-27 2003-06-10 Kawasaki Heavy Ind Ltd 自動教示システム
US7233841B2 (en) * 2002-04-19 2007-06-19 Applied Materials, Inc. Vision system
ATE493757T1 (de) * 2005-02-22 2011-01-15 Oc Oerlikon Balzers Ag Verfahren zur positionierung eines wafers
JP2006351883A (ja) * 2005-06-16 2006-12-28 Tokyo Electron Ltd 基板搬送機構及び処理システム
US7532940B2 (en) * 2005-06-16 2009-05-12 Tokyo Electron Limited Transfer mechanism and semiconductor processing system

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