JP2008205068A - 加圧ヘッドおよび部品圧着装置 - Google Patents
加圧ヘッドおよび部品圧着装置 Download PDFInfo
- Publication number
- JP2008205068A JP2008205068A JP2007037520A JP2007037520A JP2008205068A JP 2008205068 A JP2008205068 A JP 2008205068A JP 2007037520 A JP2007037520 A JP 2007037520A JP 2007037520 A JP2007037520 A JP 2007037520A JP 2008205068 A JP2008205068 A JP 2008205068A
- Authority
- JP
- Japan
- Prior art keywords
- component
- contact
- chip
- contact portion
- electronic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B5/00—Presses characterised by the use of pressing means other than those mentioned in the preceding groups
- B30B5/02—Presses characterised by the use of pressing means other than those mentioned in the preceding groups wherein the pressing means is in the form of a flexible element, e.g. diaphragm, urged by fluid pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/06—Platens or press rams
- B30B15/065—Press rams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75302—Shape
- H01L2224/75303—Shape of the pressing surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75314—Auxiliary members on the pressing surface
- H01L2224/75315—Elastomer inlay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75314—Auxiliary members on the pressing surface
- H01L2224/75315—Elastomer inlay
- H01L2224/75316—Elastomer inlay with retaining mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7598—Apparatus for connecting with bump connectors or layer connectors specially adapted for batch processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
- H01L2924/07811—Extrinsic, i.e. with electrical conductive fillers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19105—Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
Abstract
【解決手段】配線基板13に異方導電性接着フィルム14を貼り付け、ICチップ15と表面実装部品16を搭載し、この配線基板13を固定部11に弾性体からなる接触部12を固定した加圧ヘッドで加圧する。この加圧ヘッドに、ICチップ15を加圧する部分と表面実装部品16を加圧する部分に分割し、さらに、ICチップ15と表面実装部品16との部品厚み差を吸収する段差を設け、また部品の厚みバラツキを弾性体により吸収することで、ICチップ15または表面実装部品16への接触部12の片当たりによる横ズレを押さえ、高精度に実装する。
【選択図】図1
Description
図1は本発明の実施の形態1における加圧ヘッドおよび圧着工程を示す概略構成図である。本実施の形態1の加圧ヘッドは、金属からなる固定部11に弾性体からなる接触部12を固定したもので構成される。固定部11と接触部12は、第1電子部品であるICチップ15、および第1電子部品の厚さよりも厚い第2電子部品である表面実装部品16の配置に合わせ段差を設ける。当然のことながら、金属より弾性体(例えば、ゴム等)の方が変形しやすいので、固定部11の縦弾性係数は、接触部12の縦弾性係数よりも大きい。
図3は本発明の実施の形態2における加圧ヘッドおよび圧着工程を示す概略構成図である。本実施の形態2について、図3を参照しながら説明する。
図4は本発明の実施の形態3における加圧ヘッドを示す概略構成図である。本実施の形態3について、図4を参照しながら説明する。
図6は本発明の実施の形態4の加圧ヘッドおよび圧着工程を示す概略構成図である。本実施の形態4について、図6を参照しながら説明する。
図7は本発明の実施の形態5の加圧ヘッドを示す概略構成図である。本実施の形態5について、図7を参照しながら説明する。
図8は本発明の実施の形態6に関わるボンディング装置である部品圧着装置の概略構成図である。本実施の形態6について、図8を用いて説明する。
2 弾性体
3,13 配線基板
4,14 異方導電性接着フィルム
5,15 ICチップ
11,41 固定部
12,42 接触部
16 表面実装部品
17 基板電極
18 バンプ電極
21a 第1固定部
21b 第2固定部
22a,27a 第1接触部
22b,27b 第2接触部
23a 第1加圧体
23b 第2加圧体
26 ホルダー
30 空間
42a 第1成型溝
42b 第2成型溝
46 ピエゾ
52 加圧ヘッド移動部
53 基板搬送部
54 基板ホルダー
Claims (6)
- 樹脂を介して基板上に載置した厚さの異なる第1電子部品と第2電子部品を加圧する加圧ヘッドにおいて、
前記第1電子部品と前記第2電子部品との厚さの差を吸収する段差を設けた接触部と、前記接触部を端部に配置した固定部と、により構成したことを特徴とする加圧ヘッド。 - 樹脂を介して基板上に載置した厚さの異なる第1電子部品と第2電子部品を加圧する加圧ヘッドにおいて、
前記第1電子部品の加圧面と接触する第1接触部と、前記第1接触部を端部に配置した第1固定部と、からなる第1加圧体と、
前記第2電子部品の加圧面と接触する第2接触部と、前記第2接触部を端部に配置した第2固定部と、からなる第2加圧体と、
前記第1加圧体と前記第2加圧体を固定するホルダーと、により構成し、
前記第1接触部の前記第1電子部品の加圧面と接触する第1接触面と、
前記第2接触部の前記第2電子部品の加圧面と接触する第2接触面と、の間には段差があることを特徴とする加圧ヘッド。 - 前記第1接触部と前記第2接触部との間には空間が存在し、かつ非接触の状態であることを特徴とする請求項2に記載の加圧ヘッド。
- 前記第1電子部品と前記第2電子部品の前記基板上での配置において、
前記接触部に前記第1電子部品と前記第2電子部品の形状に合わせた凹部を設けたことを特徴とする請求項1に記載の加圧ヘッド。 - 前記ホルダーと前記第1加圧体との間と、前記ホルダーと前記第2加圧体との間のそれぞれに、圧電素子を配置したことを特徴とする請求項2または3に記載の加圧ヘッド。
- 樹脂を介して基板上に載置した厚さの異なる第1電子部品と第2電子部品を加圧する部品圧着装置において、
前記基板を搬送する基板搬送部と、前記基板を保持する基板ホルダーと、請求項1〜5のいずれか1項に記載の加圧ヘッドと、前記加圧ヘッドを移動する加圧ヘッド移動部と、により構成したことを特徴とする部品圧着装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007037520A JP5361134B2 (ja) | 2007-02-19 | 2007-02-19 | 加圧ヘッドおよび部品圧着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007037520A JP5361134B2 (ja) | 2007-02-19 | 2007-02-19 | 加圧ヘッドおよび部品圧着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008205068A true JP2008205068A (ja) | 2008-09-04 |
JP5361134B2 JP5361134B2 (ja) | 2013-12-04 |
Family
ID=39782288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007037520A Expired - Fee Related JP5361134B2 (ja) | 2007-02-19 | 2007-02-19 | 加圧ヘッドおよび部品圧着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5361134B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2779219A4 (en) * | 2011-11-07 | 2015-11-04 | Dexerials Corp | BONDING DEVICE, METHOD FOR MANUFACTURING BONDING STRUCTURE, METHOD FOR MANUFACTURING STACKED BUNK COMPONENT, AND METHOD FOR MOUNTING ELECTRONIC COMPONENT |
EP4080554A3 (de) * | 2021-04-21 | 2023-04-19 | PINK GmbH Thermosysteme | Sintervorrichtung und verfahren zum steuern einer sintervorrichtung |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01278099A (ja) * | 1988-04-28 | 1989-11-08 | Taiyo Yuden Co Ltd | チップ状回路部品配置装置 |
JPH0477134U (ja) * | 1990-11-15 | 1992-07-06 | ||
JPH05218140A (ja) * | 1991-03-29 | 1993-08-27 | Toshiba Corp | 部品実装装置 |
JPH1174319A (ja) * | 1997-08-29 | 1999-03-16 | Nec Corp | 熱圧着装置及びその制御方法 |
JP2002534799A (ja) * | 1999-01-07 | 2002-10-15 | アルファセム・アクチェンゲゼルシャフト | 基板上に配列された構成部品、特に半導体チップを加工処理するための方法及び装置 |
JP2002324821A (ja) * | 2001-04-25 | 2002-11-08 | Matsushita Electric Ind Co Ltd | 電子部品の圧着装置及び圧着方法 |
JP2003086878A (ja) * | 2001-09-07 | 2003-03-20 | Ricoh Co Ltd | 半導体光源モジュールの製造方法及び半導体光源モジュール |
JP2003086635A (ja) * | 2001-09-12 | 2003-03-20 | Nikkiso Co Ltd | 回路素子の実装方法 |
JP2005072299A (ja) * | 2003-08-26 | 2005-03-17 | Matsushita Electric Ind Co Ltd | 電子部品の実装装置およびその配列治具、真空チャック |
JP2008010716A (ja) * | 2006-06-30 | 2008-01-17 | Victor Co Of Japan Ltd | 電子部品の接続方法 |
-
2007
- 2007-02-19 JP JP2007037520A patent/JP5361134B2/ja not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01278099A (ja) * | 1988-04-28 | 1989-11-08 | Taiyo Yuden Co Ltd | チップ状回路部品配置装置 |
JPH0477134U (ja) * | 1990-11-15 | 1992-07-06 | ||
JPH05218140A (ja) * | 1991-03-29 | 1993-08-27 | Toshiba Corp | 部品実装装置 |
JPH1174319A (ja) * | 1997-08-29 | 1999-03-16 | Nec Corp | 熱圧着装置及びその制御方法 |
JP2002534799A (ja) * | 1999-01-07 | 2002-10-15 | アルファセム・アクチェンゲゼルシャフト | 基板上に配列された構成部品、特に半導体チップを加工処理するための方法及び装置 |
JP2002324821A (ja) * | 2001-04-25 | 2002-11-08 | Matsushita Electric Ind Co Ltd | 電子部品の圧着装置及び圧着方法 |
JP2003086878A (ja) * | 2001-09-07 | 2003-03-20 | Ricoh Co Ltd | 半導体光源モジュールの製造方法及び半導体光源モジュール |
JP2003086635A (ja) * | 2001-09-12 | 2003-03-20 | Nikkiso Co Ltd | 回路素子の実装方法 |
JP2005072299A (ja) * | 2003-08-26 | 2005-03-17 | Matsushita Electric Ind Co Ltd | 電子部品の実装装置およびその配列治具、真空チャック |
JP2008010716A (ja) * | 2006-06-30 | 2008-01-17 | Victor Co Of Japan Ltd | 電子部品の接続方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2779219A4 (en) * | 2011-11-07 | 2015-11-04 | Dexerials Corp | BONDING DEVICE, METHOD FOR MANUFACTURING BONDING STRUCTURE, METHOD FOR MANUFACTURING STACKED BUNK COMPONENT, AND METHOD FOR MOUNTING ELECTRONIC COMPONENT |
US9196599B2 (en) | 2011-11-07 | 2015-11-24 | Dexerials Corporation | Connection device, method for manufacturing connection structure, method for manufacturing stacked chip component and method for mounting electronic component |
EP4080554A3 (de) * | 2021-04-21 | 2023-04-19 | PINK GmbH Thermosysteme | Sintervorrichtung und verfahren zum steuern einer sintervorrichtung |
Also Published As
Publication number | Publication date |
---|---|
JP5361134B2 (ja) | 2013-12-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7355285B2 (en) | Structure of mounting electronic component | |
JP6591426B2 (ja) | 実装用ヘッドおよびそれを用いた実装装置 | |
KR101398307B1 (ko) | 전기 부품의 실장 방법 및 실장 장치 | |
WO2016190424A1 (ja) | 異方導電性フィルム及び接続構造体 | |
US9173285B2 (en) | Mounting structure for electronic component, input device, and method of manufacturing mounting structure | |
JPWO2008120705A1 (ja) | 半導体装置 | |
KR100642356B1 (ko) | 반도체장치와 반도체장치용 다층 기판 | |
US20110017397A1 (en) | Method and apparatus for mounting electric component | |
JP4973290B2 (ja) | プローブ接触用電極、パッケージ及び電子デバイス | |
JP5361134B2 (ja) | 加圧ヘッドおよび部品圧着装置 | |
JPH11211755A (ja) | 電子装置用試験装置 | |
JP4973752B2 (ja) | 電子デバイス用パッケージの製造方法、および電子デバイスの製造方法 | |
EP2603063A1 (en) | Printed circuit board | |
US20180358320A1 (en) | Electronic device, electronic device manufacturing method, and electronic apparatus | |
JP2009016522A (ja) | 半導体装置 | |
JP7453035B2 (ja) | 圧着ヘッド、これを用いた実装装置および実装方法 | |
US20050006793A1 (en) | Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument | |
JP4436588B2 (ja) | 半導体実装モジュール | |
JP2012088115A (ja) | 電子部品の電気的特性の測定方法及びそれに用いる電子部品の電気的特性測定装置 | |
JP2004128259A (ja) | 接合構造とこの接合構造を備えた電子機器 | |
JP5277754B2 (ja) | フリップ接続実装体、フリップ接続実装体の製造方法 | |
JP2009177122A (ja) | 薄型接合体の製造方法及び薄型接合体 | |
JP2003133371A (ja) | 半導体装置の製造方法及び製造装置 | |
KR20090053453A (ko) | 패키지 기판 제조방법 | |
JP2007059774A (ja) | 半導体チップ実装用部材およびその製造方法と半導体チップ実装用回路基板およびこれを用いた半導体チップ実装構造 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20091026 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100204 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20100917 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100927 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120221 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120418 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121106 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121226 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130806 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130903 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |