JP2008202126A - 超臨界プロセス用バッチ式成膜装置 - Google Patents
超臨界プロセス用バッチ式成膜装置 Download PDFInfo
- Publication number
- JP2008202126A JP2008202126A JP2007042002A JP2007042002A JP2008202126A JP 2008202126 A JP2008202126 A JP 2008202126A JP 2007042002 A JP2007042002 A JP 2007042002A JP 2007042002 A JP2007042002 A JP 2007042002A JP 2008202126 A JP2008202126 A JP 2008202126A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- reagent
- compartment
- compartments
- supercritical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract description 18
- 230000008021 deposition Effects 0.000 title abstract description 5
- 239000012530 fluid Substances 0.000 claims abstract description 17
- 238000005192 partition Methods 0.000 claims abstract description 7
- 239000003153 chemical reaction reagent Substances 0.000 claims description 69
- 235000012431 wafers Nutrition 0.000 abstract description 46
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 59
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 46
- 239000002243 precursor Substances 0.000 description 30
- 229910002092 carbon dioxide Inorganic materials 0.000 description 23
- 239000001569 carbon dioxide Substances 0.000 description 23
- 238000005755 formation reaction Methods 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 16
- 229910052739 hydrogen Inorganic materials 0.000 description 16
- 239000001257 hydrogen Substances 0.000 description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 239000010949 copper Substances 0.000 description 7
- 238000004090 dissolution Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 238000011084 recovery Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- GCSJLQSCSDMKTP-UHFFFAOYSA-N ethenyl(trimethyl)silane Chemical compound C[Si](C)(C)C=C GCSJLQSCSDMKTP-UHFFFAOYSA-N 0.000 description 1
- QAMFBRUWYYMMGJ-UHFFFAOYSA-N hexafluoroacetylacetone Chemical compound FC(F)(F)C(=O)CC(=O)C(F)(F)F QAMFBRUWYYMMGJ-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011165 process development Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/08—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】高圧容器1には、各1枚のウエハ4を収容する複数のコンパートメントを垂直方向に並べて配置し、それぞれのコンパートメントに超臨界流体を導入する。また、コンパートメントを区画する隔壁には、コンパートメント間を流通させる流通口5を設ける。各コンパートメント内の雰囲気温度、及び、各コンパートメント内に収容されたウエハ4の表面温度がそれぞれ均一になるように、温度制御する。また、各コンパートメントに導入する超臨界流体の導入レートを均一に揃える。
【選択図】図1
Description
前記コンパートメントのそれぞれに形成され、対応するコンパートメントに試薬を導入する複数の試薬導入口と、
前記コンパートメントを相互に区画する各隔壁に形成され、前記コンパートメント間を流通する流通口と、
前記コンパートメントのそれぞれの内部に配置されて、対応するコンパートメント内の温度を計測する複数の温度計測素子とを備え、
前記複数の温度計測素子による計測温度を、各コンパートメント間で均一にするように温度制御することを特徴とするバッチ式成膜装置を提供する。
2:ウエハ加熱用ヒーター
3:試薬導入孔(32:試薬導入ノズル)
4:ウエハ
5:コンパートメント間流通口
6:超臨界流体流出口
7A:ウエハ温度計測用熱電対
7B:雰囲気温度計測用熱電対
9:熱交換器
10:流速制御器
11:試薬溶解システム
12:二酸化炭素供給システム
13:試薬供給システム
14:背圧調整器
15:温度コントローラー
16:超臨界溶液調整系
17:温度制御系
18:試薬混合ループ
19:二酸化炭素供給用高圧ポンプ
20:前駆体試薬供給用ポンプ
21:背圧調整器
22:前駆体試薬回収用チャンバー
23:リリーフバルブ
24:チェックバルブ
25:二酸化炭素ボンベ
26:回収試薬循環用ポンプ
27:前駆体試薬供給用容器
28:高圧用マスフローコントローラー
29:水素ボンベ
30:試薬溶解用チャンバー
31:高圧バルブ
Claims (4)
- それぞれが1枚のウエハを収容する複数のコンパートメントが垂直方向に並んで内部に配置された高圧容器と、
前記コンパートメントのそれぞれに形成され、対応するコンパートメントに試薬を導入する複数の試薬導入口と、
前記コンパートメントを相互に区画する各隔壁に形成され、前記コンパートメント間を流通する流通口と、
前記コンパートメントのそれぞれの内部に配置されて、対応するコンパートメント内の温度を計測する複数の温度計測素子とを備え、
前記複数の温度計測素子による計測温度を、各コンパートメント間で均一にするように温度制御することを特徴とするバッチ式成膜装置。 - 前記各コンパートメント内の温度を計測する温度計測器が、コンパートメント内の雰囲気温度を計測する第1の温度計測器と、コンパートメント内の各ウエハの表面温度を計測する第2の温度計測器とを含み、前記第1の温度計測器による計測温度と、前記第2の計測器による計測温度とをそれぞれ、コンパートメント間で均一にするように温度制御する、請求項1に記載のバッチ式成膜装置。
- 前記複数の試薬導入口を経由して、超臨界流体に溶解した試薬を各コンパートメントに導入する超臨界溶液導入装置を更に備える、請求項1に記載のバッチ式成膜装置。
- 前記各コンパートメントに導入する試薬の導入レートを、コンパートメント間で均一にするように制御する、請求項3に記載のバッチ式成膜装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007042002A JP5474278B2 (ja) | 2007-02-22 | 2007-02-22 | 超臨界プロセス用バッチ式成膜装置及び半導体装置の製造方法 |
US12/035,467 US20080206462A1 (en) | 2007-02-22 | 2008-02-22 | Batch deposition system using a supercritical deposition process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007042002A JP5474278B2 (ja) | 2007-02-22 | 2007-02-22 | 超臨界プロセス用バッチ式成膜装置及び半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008202126A true JP2008202126A (ja) | 2008-09-04 |
JP5474278B2 JP5474278B2 (ja) | 2014-04-16 |
Family
ID=39716212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007042002A Expired - Fee Related JP5474278B2 (ja) | 2007-02-22 | 2007-02-22 | 超臨界プロセス用バッチ式成膜装置及び半導体装置の製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20080206462A1 (ja) |
JP (1) | JP5474278B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014154735A (ja) * | 2013-02-08 | 2014-08-25 | Univ Of Yamanashi | 導電性物質の形成装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9527118B2 (en) * | 2014-11-10 | 2016-12-27 | Semes Co., Ltd. | System and method for treating a substrate |
US20170207078A1 (en) * | 2016-01-15 | 2017-07-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Atomic layer deposition apparatus and semiconductor process |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09508888A (ja) * | 1994-11-28 | 1997-09-09 | ミクロケミア オイ | 薄膜を成長させるための方法と装置 |
JP2000357686A (ja) * | 1999-01-27 | 2000-12-26 | Matsushita Electric Ind Co Ltd | 異物除去方法,膜形成方法,半導体装置及び膜形成装置 |
JP2001144086A (ja) * | 1999-08-31 | 2001-05-25 | Sony Corp | 埋め込み配線の形成方法、及び、基体処理装置 |
JP2001514440A (ja) * | 1997-08-29 | 2001-09-11 | ジーナス・インコーポレイテッド | 原子層ディポジション用の垂直に積み重ねられたプロセス反応器およびクラスタツールシステム |
JP2002141406A (ja) * | 2000-11-01 | 2002-05-17 | Kobe Steel Ltd | 被処理品容器及び容器移載システム |
JP2004193612A (ja) * | 2002-12-06 | 2004-07-08 | Eastman Kodak Co | 可動基板上にパターン化されたデポジションを製作するシステム |
JP2005187879A (ja) * | 2003-12-25 | 2005-07-14 | Tokyo Electron Ltd | 成膜装置および成膜方法 |
JP2006150350A (ja) * | 2004-11-04 | 2006-06-15 | Tokyo Electron Ltd | 原子層堆積のための方法と装置。 |
JP2006169601A (ja) * | 2004-12-17 | 2006-06-29 | Tokyo Electron Ltd | 成膜装置及び成膜方法 |
JP2007109711A (ja) * | 2005-10-11 | 2007-04-26 | Tokyo Electron Ltd | 処理装置、処理方法及び記憶媒体 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030049372A1 (en) * | 1997-08-11 | 2003-03-13 | Cook Robert C. | High rate deposition at low pressures in a small batch reactor |
US6120613A (en) * | 1998-04-30 | 2000-09-19 | Micell Technologies, Inc. | Carbon dioxide cleaning and separation systems |
US6825447B2 (en) * | 2000-12-29 | 2004-11-30 | Applied Materials, Inc. | Apparatus and method for uniform substrate heating and contaminate collection |
CA2550518C (en) * | 2003-12-19 | 2010-02-09 | Scf Technologies A/S | Systems for preparing fine particles and other substances |
EP1851360A2 (en) * | 2005-02-22 | 2007-11-07 | Nanoscale Components, Inc. | Pressurized reactor for thin film deposition |
US8011317B2 (en) * | 2006-12-29 | 2011-09-06 | Intermolecular, Inc. | Advanced mixing system for integrated tool having site-isolated reactors |
-
2007
- 2007-02-22 JP JP2007042002A patent/JP5474278B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-22 US US12/035,467 patent/US20080206462A1/en not_active Abandoned
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09508888A (ja) * | 1994-11-28 | 1997-09-09 | ミクロケミア オイ | 薄膜を成長させるための方法と装置 |
JP2001514440A (ja) * | 1997-08-29 | 2001-09-11 | ジーナス・インコーポレイテッド | 原子層ディポジション用の垂直に積み重ねられたプロセス反応器およびクラスタツールシステム |
JP2000357686A (ja) * | 1999-01-27 | 2000-12-26 | Matsushita Electric Ind Co Ltd | 異物除去方法,膜形成方法,半導体装置及び膜形成装置 |
JP2001144086A (ja) * | 1999-08-31 | 2001-05-25 | Sony Corp | 埋め込み配線の形成方法、及び、基体処理装置 |
JP2002141406A (ja) * | 2000-11-01 | 2002-05-17 | Kobe Steel Ltd | 被処理品容器及び容器移載システム |
JP2004193612A (ja) * | 2002-12-06 | 2004-07-08 | Eastman Kodak Co | 可動基板上にパターン化されたデポジションを製作するシステム |
JP2005187879A (ja) * | 2003-12-25 | 2005-07-14 | Tokyo Electron Ltd | 成膜装置および成膜方法 |
JP2006150350A (ja) * | 2004-11-04 | 2006-06-15 | Tokyo Electron Ltd | 原子層堆積のための方法と装置。 |
JP2006169601A (ja) * | 2004-12-17 | 2006-06-29 | Tokyo Electron Ltd | 成膜装置及び成膜方法 |
JP2007109711A (ja) * | 2005-10-11 | 2007-04-26 | Tokyo Electron Ltd | 処理装置、処理方法及び記憶媒体 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014154735A (ja) * | 2013-02-08 | 2014-08-25 | Univ Of Yamanashi | 導電性物質の形成装置 |
Also Published As
Publication number | Publication date |
---|---|
US20080206462A1 (en) | 2008-08-28 |
JP5474278B2 (ja) | 2014-04-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10612143B2 (en) | Raw material gas supply apparatus and film forming apparatus | |
US20210040613A1 (en) | Heater assembly including cooling apparatus and method of using same | |
US7402517B2 (en) | Method and apparatus for selective deposition of materials to surfaces and substrates | |
JP5068471B2 (ja) | 基板処理装置 | |
KR100964042B1 (ko) | 기판 처리장치 및 처리가스 토출기구 | |
KR100785133B1 (ko) | 열처리 시스템 | |
JP4534175B2 (ja) | 基板の製造方法 | |
KR101374038B1 (ko) | 성막 방법, 성막 장치 및 반도체 장치의 제조 방법 | |
JP2006093653A (ja) | バッチリアクター内でのTiN膜の堆積 | |
JP5474278B2 (ja) | 超臨界プロセス用バッチ式成膜装置及び半導体装置の製造方法 | |
US20120171365A1 (en) | Film forming apparatus, film forming method and storage medium | |
KR20140043781A (ko) | 증착 시스템용 프로세스 가스 디퓨저 어셈블리 | |
JP4757403B2 (ja) | 固体原料気化装置 | |
US20120064247A1 (en) | Method for forming cu film, and storage medium | |
JP2006169601A (ja) | 成膜装置及び成膜方法 | |
JP2022012502A (ja) | 成膜方法及び成膜装置 | |
JP2010219145A (ja) | 成膜装置 | |
US20080311295A1 (en) | Film deposition processing apparatus and film deposition processing method | |
US20120071001A1 (en) | Vaporizing and feed apparatus and vaporizing and feed method | |
JP2013065791A (ja) | 基板処理装置及び半導体装置の製造方法 | |
JP2006210950A (ja) | 半導体装置の製造方法および半導体製造装置 | |
JP2007081147A (ja) | 半導体装置の製造方法 | |
JP2022146925A (ja) | 温度制御された反応チャンバー | |
KR20200108782A (ko) | 성막 장치 및 성막 방법 | |
JP2012172252A (ja) | 成膜方法および記憶媒体 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100115 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20100205 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111011 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20130730 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130822 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130910 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131210 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140107 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140205 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |