JP2008175803A5 - - Google Patents

Download PDF

Info

Publication number
JP2008175803A5
JP2008175803A5 JP2007278962A JP2007278962A JP2008175803A5 JP 2008175803 A5 JP2008175803 A5 JP 2008175803A5 JP 2007278962 A JP2007278962 A JP 2007278962A JP 2007278962 A JP2007278962 A JP 2007278962A JP 2008175803 A5 JP2008175803 A5 JP 2008175803A5
Authority
JP
Japan
Prior art keywords
light
measured
measurement
conversion element
measurement light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007278962A
Other languages
English (en)
Japanese (ja)
Other versions
JP5137526B2 (ja
JP2008175803A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007278962A priority Critical patent/JP5137526B2/ja
Priority claimed from JP2007278962A external-priority patent/JP5137526B2/ja
Priority to KR1020070117056A priority patent/KR100911697B1/ko
Priority to US11/942,348 priority patent/US7684050B2/en
Priority to TW096143948A priority patent/TWI358529B/zh
Publication of JP2008175803A publication Critical patent/JP2008175803A/ja
Publication of JP2008175803A5 publication Critical patent/JP2008175803A5/ja
Application granted granted Critical
Publication of JP5137526B2 publication Critical patent/JP5137526B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007278962A 2006-12-22 2007-10-26 形状測定装置、形状測定方法、および露光装置 Expired - Fee Related JP5137526B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007278962A JP5137526B2 (ja) 2006-12-22 2007-10-26 形状測定装置、形状測定方法、および露光装置
KR1020070117056A KR100911697B1 (ko) 2006-12-22 2007-11-16 형상측정장치, 형상측정방법, 및 노광장치
US11/942,348 US7684050B2 (en) 2006-12-22 2007-11-19 Shape measuring apparatus, shape measuring method, and exposure apparatus
TW096143948A TWI358529B (en) 2006-12-22 2007-11-20 Shape measuring apparatus, shape measuring method,

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006346203 2006-12-22
JP2006346203 2006-12-22
JP2007278962A JP5137526B2 (ja) 2006-12-22 2007-10-26 形状測定装置、形状測定方法、および露光装置

Publications (3)

Publication Number Publication Date
JP2008175803A JP2008175803A (ja) 2008-07-31
JP2008175803A5 true JP2008175803A5 (enrdf_load_stackoverflow) 2010-12-09
JP5137526B2 JP5137526B2 (ja) 2013-02-06

Family

ID=39702922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007278962A Expired - Fee Related JP5137526B2 (ja) 2006-12-22 2007-10-26 形状測定装置、形状測定方法、および露光装置

Country Status (3)

Country Link
JP (1) JP5137526B2 (enrdf_load_stackoverflow)
KR (1) KR100911697B1 (enrdf_load_stackoverflow)
TW (1) TWI358529B (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5454020B2 (ja) * 2009-09-03 2014-03-26 株式会社ニコン 角速度検出装置
JP5432680B2 (ja) * 2009-11-27 2014-03-05 株式会社ミツトヨ 斜入射干渉計
JP6110897B2 (ja) * 2015-06-23 2017-04-05 Ckd株式会社 三次元計測装置
US10094774B2 (en) 2015-08-12 2018-10-09 Industrial Technology Research Institute Scattering measurement system and method
CN118243015B (zh) * 2024-05-28 2024-08-20 匠岭科技(上海)有限公司 表面三维形貌的测量方法、装置、设备、介质和程序产品

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6249351B1 (en) 1999-06-03 2001-06-19 Zygo Corporation Grazing incidence interferometer and method
JP4583611B2 (ja) * 2001-01-11 2010-11-17 富士フイルム株式会社 斜入射干渉計装置
JP2002286409A (ja) * 2001-03-26 2002-10-03 Fuji Photo Optical Co Ltd 干渉計装置
US20050044963A1 (en) 2003-08-25 2005-03-03 Asml Holding N.V. High-resolution gas gauge proximity sensor
WO2005029192A2 (en) * 2003-09-15 2005-03-31 Zygo Corporation Surface triangulation and profiling through a thin film coating

Similar Documents

Publication Publication Date Title
TW200951396A (en) Position measurement apparatus, position measurement method, and exposure apparatus
WO2018091640A3 (en) Detector for optically detecting at least one object
EP1939580A3 (en) Optical image measurement device
RU2009124527A (ru) Печатающее устройство и способ управления перемещением объектов
TW200951646A (en) Surface position detection device, exposure device, surface position detection method and device production method
MY151213A (en) Apparatus, system and method for measuring thread features on pipe or tube end
JP2010109257A5 (enrdf_load_stackoverflow)
JP2008175803A5 (enrdf_load_stackoverflow)
WO2008116917A8 (en) Method for detecting surface defects on a substrate and device using said method
JP2013187206A5 (enrdf_load_stackoverflow)
JP2010256359A5 (enrdf_load_stackoverflow)
JP2014215300A5 (enrdf_load_stackoverflow)
WO2009041709A3 (en) Localized surface plasmon resonance sensor and method of detecting a target substance using said sensor
CA2561923A1 (en) Measuring apparatus and method in a distribution system
SG157348A1 (en) Lithographic apparatus and device manufacturing method
WO2009022458A1 (ja) 撮像装置およびカメラ
TW200743779A (en) Measuring apparatus and method using surface plasmon resonance
EP1953511A3 (en) Thermal imaging detector array with optial readout
JP2011040547A5 (enrdf_load_stackoverflow)
WO2008108423A1 (ja) 位置計測モジュール、位置計測装置、ステージ装置、露光装置及びデバイス製造方法
GB2416835C (en) Method and apparatus for studying surfaces
JP2019117386A5 (ja) エンコーダ装置及び露光装置
JP2018025817A5 (ja) エンコーダ装置及び計測方法、露光装置及び方法、並びにデバイス製造方法
WO2010015458A3 (de) Optischer sensor und verfahren zum vermessen von profilen
EP1868066A3 (en) Optimization of statistical movement measurement for optical mouse, with particular application to laser-illuminated surfaces