JP2008174357A - Stocker - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stocker capable of transferring an FOUP (Front-Opening Unified Pod) without stopping a conveyor. <P>SOLUTION: The stocker 1 is arranged adjacent a conveyor 3 for conveying an FOUP 2 in a manufacturing process. The stocker 1 comprises a pickup robot 40 which picks up the FOUP 2 moving on the conveyor 3 and places the FOUP 2 on the conveyor 3, a port 30 for conveying in/conveying out the FOUP 2, shelves 10a and 10b for storing the FOUP 2, and a stacker crane 20 which transfers the FOUP 2 loaded in the port 30 to the shelf 10a or 10b, and transfers the FOUP 2 stored on the shelf 10a or 10b to the port 30. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a stocker, and more particularly to a stocker that is disposed adjacent to a conveyor that conveys an object to be conveyed in the manufacturing process.

  The stocker is a facility for temporarily storing a FOUP (Front-Opening Unified Pod) in which a wafer waiting for the next process is accommodated in a semiconductor manufacturing process. In a semiconductor manufacturing factory, a FOUP is carried into a stocker by an automated guided vehicle such as an OHT (Overhead Hoist Transport), an OHS (Overhead Shuttle), or an AGV (Automated Guided Vehicle) after processing in a predetermined semiconductor manufacturing apparatus. Stored. When a transport request is issued from the semiconductor processing apparatus that performs the next process, the semiconductor processing apparatus receives the next process, and therefore is unloaded from the stocker by the above-described unmanned transport carriage and transported to the semiconductor processing apparatus.

  On the other hand, in recent semiconductor manufacturing factories, there is a strong demand for an increase in production capacity, and a conveyor transport apparatus that can further improve the transport efficiency compared to conventional unmanned transport carts such as OHT, OHS, and AGV has been put into practical use. An example of the factory of the conveyance system to which the conveyor conveyance is applied is shown in FIG. FIG. 11 is a plan view of the entire roller conveyor conveyance system having an annular inter-process roller conveyor and an annular in-process roller conveyor. With reference to FIG. 11, the roller conveyor conveyance system 100 by a conventional example is demonstrated.

  The conventional roller conveyor conveyance system 100 is provided with four annular in-process roller conveyors 102 around an annular inter-process roller conveyor 101. The inter-process roller conveyor 101 and the in-process roller conveyor 102 are connected by a port 103. Each port 103 is provided with a turntable 101 a on the inter-process roller conveyor 101 and a turntable 102 a on the in-process roller conveyor 102. Then, in the turntables 101a and 102a, the transport direction of the transported FOUP 104 is changed.

  In addition, four turntables 101 b are provided at the four corners of the inter-process roller conveyor 101, and four turntables 102 b are provided at the four corners of the in-process roller conveyor 102. Then, the FOUP 104 is turned 90 degrees on the turntables 101b and 102b, and is transported around the inter-process roller conveyor 101 and the in-process roller conveyor 102.

  In addition, turntables 101c and 101d are provided at the connection portion where the stocker 105 for temporarily storing the FOUP 104 is connected to the inter-process roller conveyor 101, and the semiconductor processing apparatus 106 is connected to the connection portion where the intra-process roller conveyor 102 is connected. Also, turntables 102c and 102d are provided. The turntable 101c rotates the transport direction of the FOUP 104 by 90 degrees so that the FOUP 104 transported on the inter-process roller conveyor 101 is carried into the stocker 105. Further, the turntable 101d rotates the conveyance direction of the FOUP 104 carried out from the stocker 105 by 90 degrees, matches the conveyance direction of the inter-process roller conveyor 101, and sends it out onto the inter-process roller conveyor 101.

  By the way, as a stocker installed in the above-described roller conveyor conveyance system 100, for example, there is one described in Patent Document 1. The stocker disclosed in Patent Document 1 picks up an object to be transported (FOUP) on a chain conveyor transported by a chain conveyor with a double reach shuttle fork and transfers it to a warehousing station. After that, the stacker crane transfers the FOUP of the storage station to the shelf and stores it.

JP 2000-264406 A

  The conventional roller conveyor transport system 100 shown in FIG. 11 has the following problems. That is, in order to pull the interprocess roller conveyor 101 into the port of the stocker 105, the FOUP 104 on the interprocess roller conveyor 101 is temporarily stopped on the turntable 101c, and then the turntable 101c is rotated 90 degrees to thereby move the FOUP 104. The direction is changed and drawn into the port of the stocker 105. Also, when the FOUP 104 is placed on the inter-process roller conveyor 101 from the stocker 105, after temporarily stopping on the turntable 101d, the direction of the FOUP 104 is changed by rotating the turntable 101d by 90 degrees. Then, it is placed on the inter-process roller conveyor 101. However, the stop of the inter-process roller conveyor 101 and the rotation operation of the turntables 101c and 101d significantly reduce the conveyance efficiency, which is a fatal weakness in the conveyor conveyance originally intended for high-speed conveyance.

  Even when the stocker disclosed in Patent Document 1 is applied to the roller conveyor transport system 100 shown in FIG. 11, when the FOUP 104 is pulled into the chain conveyor, the FOUP 104 on the conveyor is temporarily stopped on the turntable 101c. Then, it is necessary to rotate the turntable 101c by 90 degrees and pull the FOUP 104 into the chain conveyor. Further, when the FOUP 104 is placed on the conveyor from the stocker of Patent Document 1, the FOUP 104 on the chain conveyor is temporarily stopped by the turntable 101d, and then the turntable 101d is rotated 90 degrees and placed on the conveyor. There is a need. As a result, there is a problem that the conveyance efficiency is remarkably lowered.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a stocker capable of transporting an object to be conveyed without stopping the conveyor.

Means for Solving the Problems and Effects of the Invention

  In order to achieve the above object, a stocker according to the present invention is a stocker arranged adjacent to a conveyor that conveys an object to be conveyed in a manufacturing process, and extracts an object to be conveyed that moves on the conveyor, and An extraction / placement means for placing the object to be conveyed on the conveyor, a port for loading and unloading the object to be conveyed, a shelf for storing the object to be conveyed, and an object to be conveyed placed on the port And a transfer means for transferring the object to be transported to the shelf and stored in the shelf to the port.

  According to the above configuration, when the object to be moved moving on the conveyor is stored on the shelf, the object to be moved moving on the conveyor is extracted and placed on the port by using the extraction / placement means. Can do. Thereby, the to-be-conveyed object mounted in the port can be stored on a shelf using a transfer means. In addition, when the object to be stored stored on the shelf is placed on the conveyor, the object to be stored stored on the shelf can be transferred and placed on the port by using the transfer means. Thereby, the to-be-conveyed object mounted in the port can be mounted on a conveyor using extraction and mounting means. As a result, the object to be transported can be extracted and placed and transferred without stopping the conveyor.

  In the stocker, preferably, the extraction / placement means includes a gripping part for gripping the object to be transported, an expansion / contraction part for disposing the gripping part at a position above the conveyor and a position above the port, a gripping part, and an expansion / contraction part. And an elevating part that moves the part up and down. If comprised in this way, when storing the conveyed object which moves on a conveyor on a shelf, after arrange | positioning a holding part in the upper position of a conveyor and holding the conveyed object on a conveyor by the said holding part By moving the gripping part and the expansion / contraction part upward, the object to be conveyed on the conveyor can be extracted without stopping the conveyor. In addition, when placing an object to be transported stored on a shelf on a conveyor, the gripping part that grips the object to be transported is placed at a position above the conveyor, and the gripping part and the expansion / contraction part are moved downward. Then, by releasing the gripped object to be transported, the object to be transported can be placed on the conveyor without stopping the conveyor.

  In the stocker in which the extraction / mounting means has a gripping part, an expansion / contraction part, and a lifting / lowering part, preferably, the gripping part includes a U-shaped finger in a plan view to pick up an object to be conveyed on a conveyor. When the finger is moved to a position above the conveyor and the object to be transported is placed on the conveyor with the opening of the U-shaped finger in the plan view arranged on the conveyor side, The finger is retracted from a position above the conveyor in a state where the opening of the letter-shaped finger is arranged on the conveyor side. If comprised in this way, when extracting the to-be-conveyed object on a conveyor, only to move a holding part to the position above a conveyor, the to-be-conveyed object on a conveyor will enter into the opening part of a finger, and the said to-be-conveyed object An object is gripped by the gripping portion. As a result, the object to be conveyed can be gripped without stopping the conveyor. In addition, when placing an object to be conveyed on a conveyor, the object to be moved on the conveyor is released from the opening of the finger simply by retracting the gripping part from the position above the conveyor, and the object to be conveyed is released. A conveyed product is mounted on a conveyor. As a result, the object to be transported can be placed on the conveyor without stopping the conveyor.

  In the stocker in which the extraction / mounting means has a gripping part, an expansion / contraction part, and a lifting / lowering part, preferably, the gripping part includes a U-shaped finger in a plan view to pick up an object to be conveyed on a conveyor. If the opening of the U-shaped finger in plan view is arranged on the upstream side of the conveyor and the object to be transported is placed on the conveyor, the opening of the U-shaped finger in plan view is placed on the conveyor. Arrange downstream. If comprised in this way, when extracting the conveyed object on a conveyor, the conveyed object conveyed on the conveyor from the upstream to the downstream will enter into the opening part of a finger, and the said conveyed object will become a holding part. Grasped. As a result, the object to be conveyed can be gripped without stopping the conveyor. In addition, when the object to be transported is placed on the conveyor, the object to be transported on the conveyor from the upstream side to the downstream side is released from the opening of the finger, and the object to be transported is transported downstream. As a result, the object to be transported can be placed on the conveyor without stopping the conveyor.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments embodying the present invention will be described in detail with reference to the drawings.

  FIG.1 and FIG.2 is the top view and side view which respectively showed the stocker and conveyor which concern on one Embodiment of this invention. FIG. 3 is a perspective view of the pickup robot of the stocker shown in FIG. 4 and 5 are a front view and a side view, respectively, of a conveyor that conveys the FOUP. FIG. 6 is a plan view for explaining the operation of extracting the FOUP from the conveyor, and FIG. 7 is a plan view for explaining the operation of placing the FOUP on the conveyor.

  As shown in FIGS. 1 and 2, the stocker 1 according to the present embodiment is disposed adjacent to a roller-type conveyor 3 that transports a FOUP 2 that accommodates a plurality of wafers in a semiconductor manufacturing process. This conveyor 3 connects devices that perform various types of processing (cleaning, film formation, resist, CVD (Chemical Vapor Deposition), inspection, etc.) on the wafers accommodated in the FOUP 2, and performs predetermined processing (for example, cleaning processing). The FOUP 2 containing the wafer subjected to is sequentially transferred to an apparatus for performing the next process (for example, CVD process). At this time, the FOUP 2 that accommodates a wafer waiting for the next process is temporarily stored in the stocker 1.

  As shown in FIGS. 1 and 2, the stocker 1 is installed adjacent to the conveyor 3 and parallel to the conveyor 3. The stocker 1 includes shelves 10a and 10b, a stacker crane 20 that moves between the shelves 10a and 10b in the A1 direction and the A2 direction, a port 30 for loading and unloading the FOUP 2, and a pickup robot 40. Yes.

  The shelves 10a and 10b are provided for temporarily storing the FOUP 2 in which wafers waiting for a process are accommodated. The shelves 10 a and 10 b are arranged to face each other and are arranged in parallel to the conveyor 3. The shelves 10a and 10b have a plurality of stages and a plurality of rows, and are configured to store a plurality of FOUPs 2.

  The stacker crane 20 transfers the FOUP 2 placed on the port 30 to a predetermined location on the shelf 10 a or 10 b and transfers the FOUP 2 stored on the shelf 10 a or 10 b to the port 30. The stacker crane 20 includes a traveling vehicle 21 that travels along the rail 4 laid between the shelves 10 a and 10 b, and a stacker robot 22 provided on the traveling vehicle 21.

  The traveling vehicle 21 is configured to be movable in the conveyance direction (A1 direction) of the conveyor 3 and in the opposite direction (A2 direction). The traveling vehicle 21 has a vehicle body portion 21 a provided with a stacker robot 22 and wheels 21 b for traveling on the rail 4. Thereby, when the traveling vehicle 21 travels on the rail 4, the stacker robot 22 provided in the vehicle body portion 21a can be moved in the A1 direction and the A2 direction.

  The stacker robot 22 is configured to be able to move the vehicle body 21a of the traveling vehicle 21 in the vertical direction (B direction). The stacker robot 22 includes an elevator 22a that moves the vehicle body 21a in the vertical direction (B direction), and a linear slider 22b that is provided on the elevator 22a. The elevator 22a raises the linear slider 22b to scoop up the FOUP 2 placed on the shelves 10a and 10b or the port 30. As a result, the FOUP 2 scooped by the linear slider 22b is combined with the movement of the traveling vehicle 21 in the A1 direction and the A2 direction and the movement of the stacker robot 22 in the vertical direction B direction, thereby enabling the racks 10a and 10b or the port. It becomes possible to transfer to 30 desired locations.

  The pickup robot 40 extracts the FOUP 2 moving on the conveyor 3 and places it on the port 30, and places the FOUP 2 placed on the port 30 on the conveyor 3. As shown in FIG. 3, the pickup robot 40 includes a linear slider 41, fingers 42, and an elevator 43.

  The linear slider 41 includes a first stage arm 41a, a second stage arm 41b, and a third stage arm 41c, and each arm 41a to 41c slides in a direction (C direction) orthogonal to the conveying direction (A1 direction) of the conveyor 3. Thereby, the finger 42 provided at the tip of the linear slider 41 is disposed at a position above the conveyor 3.

  The finger 42 is U-shaped in plan view, and an opening 42a is provided on the conveyor 3 side. The finger 42 is configured to be openable and closable in the A direction so as to change the interval between the openings 42a. When extracting the FOUP 2 on the conveyor 3, the finger 42 is moved to a position above the conveyor 3 with the opening 42 a of the finger 42 arranged on the conveyor 3 side. As a result, the finger 42 and the flange portion 2a (see FIG. 4) of the FOUP 2 are engaged with each other through the opening 42a, and the FOUP 2 is gripped by the finger 42. When the FOUP 2 is placed on the conveyor 3, the finger 42 is retracted from the position above the conveyor 3 with the opening 42 a of the finger 42 holding the FOUP 2 disposed on the conveyor 3 side. As a result, the engagement between the finger 42 and the flange portion 2a of the FOUP 2 is released via the opening 42a, and the FOUP 2 is placed on the conveyor 3.

  The elevator 43 is provided to move the linear slider 41 and the finger 42 in the vertical direction (B direction). Therefore, the FOUP 2 on the conveyor 3 is lifted by raising the elevator 43 while the finger 42 grips the FOUP 2. Further, after the finger 42 holding the FOUP 2 is lowered, the linear slider 41 is slid in the C1 direction so that the FOUP 2 is placed on the conveyor 3.

  As shown in FIGS. 1 and 2, the conveyor 3 has two conveyor rails 3a and 3b installed in parallel, and conveys the FOUP 2 placed on the conveyor rails 3a and 3b in the direction of arrow A1. . The conveyor rails 3a and 3b of the conveyor 3 are composed of a plurality of conveyor blocks 50 arranged in parallel. As shown in FIGS. 4 and 5, each conveyor block 50 includes five drive rollers 51 provided mainly on the support frame 21a side and five driven rollers 52 provided on the support frame 21b arranged to face the support frame 21a. And a drive motor 53 serving as a drive source for the drive roller 51 and a conveyor control device (not shown).

  As shown in FIG. 5, the five driving rollers 51 constituting the conveyor block 50 are arranged on the same horizontal plane and in a straight line, and are arranged at intervals such that the FOUPs 2 do not fall. The drive roller 51 includes a roller shaft 51a that is rotatably supported by the support frame 21a, and a load receiving portion 51b and a sprocket 51c that are attached to the roller shaft 51a.

  As shown in FIG. 4, the cargo receiving portion 51b includes a roller member 51d attached to the roller shaft 51a and a urethane rubber 51e with which the bottom portion of the FOUP 2 abuts. The roller member 51d is integrally formed with an attachment portion 51f and a flange portion 51g to which the urethane rubber 51e is attached on the outer periphery. The flange 51g has a function of forcibly restricting the outward movement so that the FOUP 2 moving on the urethane rubber 51e does not deviate from the conveyor track.

  The sprocket 51c is attached to the inside of the cargo receiving portion 51b. As shown in FIG. 5, the sprocket 51 c is arranged on the same plane as the sprocket 53 b attached to the motor shaft 53 a of the drive motor 53. A timing belt 54 is attached to a sprocket 51 c provided on each of the five drive rollers 51 and a sprocket 53 b attached to the motor shaft 53 a of the drive motor 53. And the tooth part 54a provided in the inner peripheral surface of the timing belt 54 and the tooth part provided in the outer peripheral surface of the sprockets 51c and 53b mesh. Thus, when the drive motor 53 is driven, the sprocket 53b attached to the motor shaft 53a of the drive motor 53 and the sprocket 51c of the drive roller 51 rotate in synchronization.

  Further, two tension rollers 55 are provided on the support frame 21a, and the outer peripheral surface of the tension roller 55 is in contact with the outer peripheral surface where the tooth portion 54a of the timing belt 54 is not formed. This tension roller is provided to apply tension to the timing belt 54.

  The driven roller 52 has substantially the same configuration as the drive roller 51 described above, but unlike the drive roller 51 described above, does not have a sprocket and is not equipped with a timing belt. Further, the support frame 21b on which the driven roller 52 is provided is not provided with a motor or a tension roller as a driving source.

  The conveyance speed of the FOUP 2 on the conveyor rails 3 a and 3 b can be controlled for each conveyor block 50 by controlling the rotation of the drive motor 53 of the conveyor block 50. Therefore, when the FOUP 2 to be stored in the stocker 1 enters the facing section of the port 30, the rotation of the drive motor 53 is reduced in the conveyor block 50 corresponding to the facing section, so that the pick-up robot 40 can easily extract it. It is decelerated to the transport speed. Also, when the pickup robot 40 places the FOUP 2 on the conveyor 3, the conveying speed of the conveyor rails 3a and 3b is reduced.

  Next, with reference to FIG.6 and FIG.7, the operation | movement which extracts FOUP2 from the conveyor rail 3a, and the operation | movement which mounts FOUP2 on the conveyor rail 3a are demonstrated.

  First, when the FOUP 2 is extracted from the conveyor rail 3a, as shown in FIG. 6A, the FOUP 2 temporarily stored in the stocker 1 is conveyed in the A1 direction on the conveyor rail 3a. Then, when the FOUP 2 is transported to a position facing the port 30 of the stocker 1, the rotation of the drive motor 53 of the conveyor block 50 on which the FOUP 2 is placed is decreased to decrease the transport speed. At the same time, the pickup robot 40 extends the first stage arm 41a, the second stage arm 41b, and the third stage arm 41c of the linear slider 41 in the C2 direction as shown in FIG. The FOUP 2 is gripped by the finger 42 by closing the finger 42 after engaging the finger 42. Then, by raising the elevator 43, the FOUP 2 is lifted slightly above the conveyor rail 3a. Then, as shown in FIG. 6C, the arms 41a to 41c of the linear slider 41 are retracted in the C1 direction, the FOUP2 is aligned with the mounting position on the port 30, the elevator 43 is lowered, and the FOUP2 is connected to the port. 30.

  After that, after the stacker robot 22 of the stacker crane 20 picks up the FOUP 2 placed on the port 30, the FOUP 2 is transported to and placed on a predetermined position of the shelf 10a or 10b. FOUP2 is stored at the location. As described above, the FOUP 2 is extracted from the conveyor rail 3a and stored in the shelf 10a or 10b.

  Next, when placing the FOUP 2 on the conveyor rail 3a, as shown in FIG. 7A, the first stage arm 41a, the second stage arm 41b of the linear slider 41 with the finger 42 holding the FOUP 2, The three-stage arm 41c is extended in the C2 direction. At this time, the rotation of the drive motor 53 of the conveyor block 50 corresponding to the lower side of the FOUP 2 held by the finger 42 is reduced to reduce the conveying speed. Then, as shown in FIG. 7B, the FOUP 2 is placed on the conveyor rail 3a by lowering the elevator 43. At the same time, as shown in FIG. 7C, the arms 41a to 41c of the linear slider 41 are retracted in the C1 direction, the engagement between the FOUP2 and the finger 42 is released, and the FOUP2 is placed on the conveyor rail 3a. Place.

  Thereafter, the FOUP 2 on the conveyor rail 3a is transported to a device where the next process is performed. As described above, the FOUP 2 is placed on the conveyor rail 3a, and the FOUP 2 is transported by the conveyor rail 3a to an apparatus that performs the next process.

  Here, the case where the FOUP 2 on the conveyor rail 3a is extracted and the case where the FOUP 2 is placed on the conveyor rail 3b have been described. The same procedure can be followed when placing the.

  In the present embodiment, as described above, when the FOUP 2 moving on the conveyor rails 3a and 3b is stored in the shelves 10a and 10b, the pickup robot 40 is used to change the FOUP 2 moving on the conveyor rails 3a and 3b. It can be extracted and placed on the port 30. Accordingly, the FOUP 2 placed on the port 30 can be stored in the shelves 10a and 10b using the stacker crane 20. Further, when the FOUP 2 stored in the shelves 10a and 10b is placed on the conveyor rails 3a and 3b, the stacker crane 20 is used to transfer the FOUP 2 stored in the shelves 10a and 10b and place it on the port 30. Can be placed. Thereby, using the pickup robot 40, the FOUP 2 placed on the port 30 can be placed on the conveyor rails 3a and 3b. As a result, the FOUP 2 can be extracted and placed without stopping the conveyor rails 3a and 3b.

  In the present embodiment, the pickup robot 40 includes at least the linear slider 41, the finger 42, and the elevator 43, so that when the FOUP 2 moving on the conveyor rails 3a and 3b is stored on the shelves 10a and 10b, the finger is used. 42 is disposed at a position above the conveyor rails 3a and 3b, and the fingers 42 hold the FOUP 2 on the conveyor rails 3a and 3b. Then, the fingers 42 and the linear slider 41 are moved upward to thereby move the conveyor rails. The FOUP 2 on the conveyor rails 3a and 3b can be extracted without stopping 3a and 3b. Further, when the FOUP 2 stored in the shelves 10a and 10b is placed on the conveyor rails 3a and 3b, the finger 42 that holds the FOUP 2 is disposed at a position above the conveyor rails 3a and 3b, and the fingers 42 and By moving the linear slider 41 downward and then releasing the gripped FOUP 2, the FOUP 2 can be placed on the conveyor rails 3a and 3b without stopping the conveyor rails 3a and 3b.

  Further, in this embodiment, when extracting the FOUP 2 on the conveyor rails 3a and 3b, the opening 42a of the U-shaped finger 42 in a plan view is arranged on the FOUP 2 side that moves on the conveyor rails 3a and 3b. In this state, the finger 42 is moved to a position above the conveyor rails 3a and 3b. Further, when the FOUP 2 is placed on the conveyor rails 3a and 3b, the fingers 42 are arranged on the side of the FOUP 2 moving on the conveyor rails 3a and 3b with the opening 42a of the U-shaped finger 42 in plan view. 42 is retracted from the position above the conveyor rails 3a and 3b. With this configuration, when the FOUP 2 on the conveyor rails 3a and 3b is extracted, the FOUP 2 on the conveyor rails 3a and 3b can be moved to the finger 42 only by moving the finger 42 to a position above the conveyor rails 3a and 3b. , And the FOUP 2 is gripped by the finger 42. As a result, the FOUP 2 can be gripped without stopping the conveyor rails 3a and 3b. Further, when the FOUP 2 is placed on the conveyor rails 3a and 3b, the FOUP 2 that is about to move on the conveyor rails 3a and 3b can be moved by simply retracting the finger 42 from the position above the conveyor rails 3a and 3b. The FOUP 2 is placed on the conveyor rails 3a and 3b. As a result, the FOUP 2 can be placed on the conveyor rails 3a and 3b without stopping the conveyor rails 3a and 3b.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiment but by the scope of claims for patent, and includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

  For example, in the above embodiment, the pickup robot 40 grips the FOUP 2 on the conveyor rail 3a or 3b by moving the finger 42 provided with the opening 42a on the conveyor rails 3a and 3b side in the C direction. Although the FOUP 2 is placed on the conveyor rail 3a or 3b, the present invention is not limited to this, and the pickup robot 140 according to the modification shown in FIG. 8 may be used. Specifically, in the finger 142 of the pickup robot 140, the opening 142a is arranged on the upstream side of the conveyor rail 3a and on the downstream side of the conveyor rail 3b. When extracting the FOUP 2 on the conveyor rail 3a or 3b, as shown in FIGS. 9 (a) and 9 (b), the opening 142a of the U-shaped finger 142 in plan view is connected to the conveyor rails 3a and 3b. When the FOUP 2 is placed on the conveyor rail 3a or 3b, as shown in FIGS. 10 (a) and 10 (b), the opening portion of the U-shaped finger 142 in plan view is shown. 142a is arranged on the downstream side of the conveyor. With this configuration, when the FOUP 2 on the conveyor rail 3a or 3b is extracted, the FOUP 2 conveyed on the conveyor rail 3a or 3b from the upstream side to the downstream side enters the opening 142a of the finger 142, and the FOUP 2 Is gripped by the finger 142. As a result, the FOUP 2 can be gripped without stopping the conveyor rail 3a or 3b. When the FOUP 2 is placed on the conveyor rail 3a or 3b, the FOUP 2 conveyed on the conveyor rail 3a or 3b from the upstream side to the downstream side is discharged from the opening 142a of the finger 142, and the FOUP 2 is moved downstream. Be transported. As a result, the FOUP 2 can be placed on the conveyor rail 3a or 3b without stopping the conveyor rail 3a or 3b.

It is the top view which showed the stocker and conveyor which concern on one Embodiment of this invention. It is the side view which showed the stocker and conveyor which concern on one Embodiment of this invention. It is a perspective view of the pickup robot of the stocker shown in FIG. It is a front view of the conveyor which conveys FOUP. It is a side view of the conveyor which conveys FOUP. It is a top view for demonstrating the operation | movement which the pick-up robot of the stocker shown in FIG. 1 extracts FOUP from a conveyor. It is a top view for demonstrating the operation | movement which the pickup robot of the stocker shown in FIG. 1 mounts FOUP on a conveyor. It is a perspective view of the pick-up robot which concerns on the modification of one Embodiment of this invention. It is a top view for demonstrating the operation | movement which the pick-up robot which concerns on the modification shown in FIG. 8 extracts FOUP from a conveyor. It is a top view for demonstrating the operation | movement which the pick-up robot which concerns on the modification shown in FIG. 8 mounts FOUP on a conveyor. It is a top view of the roller conveyor conveyance system whole of an example of the past which has an inter-process roller conveyor and an in-process roller conveyor.

Explanation of symbols

1 Stocker 2 FOUP (conveyed object)
3 Conveyors 10a, 10b Shelf 20 Stacker crane (transfer means)
30 port 40, 140 Pickup robot (extraction / placement means)
41 Linear slider (expandable part)
42, 142 Finger (gripping part)
42a, 142a Opening 43 Elevator (elevating part)

Claims (4)

A stocker that is arranged adjacent to a conveyor that conveys an object to be conveyed in the manufacturing process,
Extracting and placing means for extracting the object to be transported moving on the conveyor, and placing the object to be transported on the conveyor;
A port for carrying in and carrying out the object to be conveyed; and
A shelf for storing the object to be conveyed;
A stocker comprising: transporting means for transporting a transported object placed on the port to the shelf and transporting the transported object stored on the shelf to the port. The extraction / placement means is
A gripping part for gripping the object to be conveyed;
An extendable part that arranges the gripping part at a position above the conveyor and a position above the port;
The stocker according to claim 1, further comprising an elevating part that moves the grip part and the extendable part in a vertical direction. The grip portion includes a U-shaped finger in a plan view,
When extracting the object to be transported on the conveyor, the finger is moved to a position above the conveyor with the opening of the U-shaped finger in the plan view arranged on the conveyor side,
When placing an object to be conveyed on the conveyor, the finger is retracted from a position above the conveyor in a state where the opening of the U-shaped finger in the plan view is disposed on the conveyor side. The stocker according to claim 2, wherein: The grip portion includes a U-shaped finger in a plan view,
When extracting the object to be transported on the conveyor, the opening of the U-shaped finger in the plan view is arranged on the upstream side of the conveyor,
The stocker according to claim 2, wherein, when an object to be conveyed is placed on the conveyor, an opening of the U-shaped finger in the plan view is disposed on the downstream side of the conveyor.

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