JP2008170358A - Sample stand, measuring object sample, and moisture permeability measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology capable of measuring accurately a moisture permeability without generating a stress of a measuring object film, moisture absorption of a substrate, deformation of the substrate caused by heat, or breakage of the measuring object film. <P>SOLUTION: A substrate 41 used for a sample stand 30 and a measuring object sample 40 is made of a ceramics whose moisture permeability is 1×10<SP>-1</SP>g/m<SP>2</SP>/day or higher. The substrate 41 made of the ceramics is hardly deformable, and has high mechanical strength, being different from a resin substrate, and thereby the substrate 41 itself or the measuring object film 42 formed on the substrate 41 is hardly damaged or deformed. In addition, since the moisture permeability of the ceramic substrate 41 is not changed, the moisture permeability of the measuring object film 42 can be determined accurately. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a sample table used for measuring moisture permeability, a measurement target sample using the sample table, and a moisture permeability measuring apparatus.

Conventionally, a moisture permeability measuring apparatus has been widely used to measure the moisture permeability of a measurement target film.
In general, a moisture permeation measuring device supplies gaseous water to one vacuum chamber (supply chamber) across a substrate having a measurement target film formed on the surface, passes through the measurement target film and the substrate, The moisture permeability is measured by measuring the amount of water that has reached the vacuum chamber (measuring chamber).
Since the substrate is required to have water permeability, organic resins such as nylon and acrylic are generally used.

However, such a substrate is highly hygroscopic, easily deformed by heat, and has high flexibility, so it is rounded due to the stress of the film to be measured, and depending on how it is handled, the film to be measured is prone to cracks. There was a problem that the reproducibility of the results was poor.
Conventionally, since the substrate is directly placed on the O-ring of the moisture permeability measuring device, when the O-ring is deformed and the substrate is brought into close contact with the O-ring, the substrate is difficult to handle.
JP 2002-357533 A

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a technique capable of accurately measuring moisture permeability.

In order to solve the above-mentioned problem, the invention according to claim 1 is a sample table for a moisture permeability measuring device, and has a planar shape larger than the ring-shaped mounting ring and the opening inside the mounting ring, This is a sample stage having a ceramic substrate having a moisture permeability of 1 × 10 ⁻¹ g / m ² / day or more.
This invention is a sample stand, Comprising: The support part in which the surface and the surface of the said mounting ring are the same height protrudes toward the ring inner side from the said inner periphery of the said mounting ring.
The present invention is a sample table, and a sample table in which a positioning portion whose surface protrudes higher than a surface of the previous ring is arranged along an edge of the previous ring. It is.
This invention is a sample stand, Comprising: The said mounting ring is a sample stand made from metal.
The present invention includes the sample table on which the substrate is placed on the mounting ring, a measurement target film that is disposed on the surface of the substrate, and a substrate that is disposed between the mounting ring and the substrate. It is a sample to be measured having a sealing member that surrounds an opening inside the ring and hermetically adheres between the substrate and the mounting ring.
The present invention includes a measurement chamber, a supply chamber, and a ring-shaped mounting member each surrounded by a wall member, and the mounting member is airtight to the wall member around the opening of the measurement chamber. The internal space of the measurement chamber and the internal space of the supply chamber communicate with each other through the opening of the mounting member, and the mounting member according to claim 5 The sample to be measured is disposed in close contact with the surface of the mounting ring opposite to the surface on which the sealing member is disposed and the surface of the mounting member, and the opening of the mounting member is the mounting ring described above. The water supply system is connected to the supply chamber, and the water inside the supply chamber can move to the measurement chamber through the substrate and the measurement target film of the measurement target sample. The measuring device configured to measure the pressure of the water includes the supply chamber and the measuring chamber. Respectively connected moisture permeability measuring device.
The present invention is a moisture permeation measuring apparatus having a sealing member disposed between the mounting ring and the mounting member and surrounding an opening of the mounting member.
The present invention is a moisture permeability measuring apparatus, wherein the supply chamber is a moisture permeability measuring apparatus disposed in a vacuum chamber.

Moisture permeability refers to the amount of gaseous water that passes through a membranous substance per unit area over a certain period of time. At a temperature of 25 ° C or 40 ° C, the object to be measured is the boundary surface, and the air on one side is relative. When the humidity on the other side is kept dry by the hygroscopic agent at a humidity of 90%, the mass (g) of water passing through this interface for 24 hours is converted to the value per 1 m ² of the material. It is defined as moisture permeability (JIS Z0208 (1976)).

The present invention is configured as described above, and the moisture permeability of the substrate is 1 × 10 ⁻¹ g / m ² / day or more, and the permeability of gaseous water is high. The substrate can also penetrate and enter the measurement chamber.
Since the substrate is made of ceramic, deformation and breakage are unlikely to occur. Therefore, even if the measurement target film is thin with a film thickness of 10 nm or more and 100 nm or less, deformation and damage are prevented by being formed on the substrate surface.

  In the present invention, since the substrate is disposed on the mounting ring, the substrate does not directly contact the sealing member when the sample to be measured is disposed on the sealing member such as an O-ring. Therefore, the substrate is not deformed when the sealing member is deformed and the sample to be measured is brought into close contact with the sealing member.

  In the present invention, since a ceramic substrate is used, stress of the measurement target film, moisture absorption of the substrate, and deformation of the substrate due to heat do not occur, and the measurement target film does not break. In addition, since the moisture permeability of the substrate does not change, the moisture permeability can be measured accurately and the reproducibility is high.

Reference numeral 30 in FIG. 2 represents a sample table of the present invention, and this sample table 30 has a mounting ring 31, a positioning portion 32, and a substrate 41.
The mounting ring 31 is formed in a ring shape having a circular inner periphery. Reference numeral 35 in FIG. 2 indicates an opening inside the ring of the mounting ring 31. The positioning portion 32 has a ring shape, and the opening inside the ring is made larger in diameter than the opening 35 of the mounting ring 31, and the center of the opening of the positioning portion 32 coincides with the center of the opening 35 of the mounting ring 31. As described above, the ring is disposed on the surface of the mounting ring 31, and the upper portion of the ring of the positioning portion 32 protrudes high from the surface of the mounting ring 31.

  Therefore, the distance from the center of the opening 35 is such that the inner periphery of the positioning portion 32 is farther than the inner periphery of the mounting ring 31, and the surface of the mounting ring 31 is exposed from the opening 35 to the positioning portion 32. Thus, a ring-shaped mounting portion 39 surrounding the opening 35 is formed.

  The substrate 41 is a ceramic disk having a diameter larger than the diameter of the opening 35 of the mounting ring 31 and smaller than the inner periphery of the positioning portion 32, and the substrate 41 does not fall from the opening 35 and is placed on the mounting portion. It can be placed on 39.

  Here, since the mounting ring 31 has a flat plate with an opening and the surface is located on the same plane, the mounting portion 39 has no step and the substrate 41 is mounted on the mounting portion 39. Then, all the parts located outside the opening 35 of the substrate 41 are in contact with the mounting portion 39 so that the substrate 41 is stably held.

Next, a process of creating a measurement target sample using the sample stage 30 will be described.
First, a paste-like adhesive is applied to the mounting portion 39 along the edge of the opening 35, or a film-like adhesive is applied to the mounting portion 39 along the edge of the opening 35 to surround the opening 35. A ring-shaped adhesive layer 36 is formed (FIGS. 3A and 4A).
The inner ring periphery of the adhesive layer 36 is smaller than the outer periphery of the substrate 41, and here the ring of the adhesive layer 36 is concentric with the opening 35.

  A measurement target film 42 is formed in advance on the surface of the substrate 41, the rear surface of the substrate 41 is disposed above the mounting ring 31 with the mounting ring 31 facing the mounting ring 31, and the center of the substrate 41 is directly above the center of the opening 35. When the substrate 41 is lowered in a substantially vertical direction after the edge of the substrate 41 does not overlap the positioning portion 32, the substrate 41 is placed on the mounting portion 39 without contacting the positioning portion 32, and the adhesive The surface opposite to the mounting ring 31 of the layer 36 is in close contact with the back surface of the substrate 41 over the entire ring, and the opening 35 is covered with the substrate 41.

The adhesive layer 36 is composed of an adhesive containing a thermosetting resin (here, an epoxy resin). When the adhesive layer 36 is heated, the thermosetting resin is thermally polymerized, and the adhesive layer 36 is disposed on the entire circumference. Over the course, one surface is cured to the mounting portion 39 and the opposite surface is in close contact with the substrate 41, and the substrate 41 is fixed to the mounting ring 31 to obtain the measurement target sample 40 (FIG. 3B). FIG. 4 (b)).
Reference numeral 38 in FIG. 4B denotes a ring-shaped seal member formed by curing the adhesive layer 36, and the seal member 38 has one surface on the mounting portion 39 and the opposite side over the entire circumference. The surface is in close contact with the substrate 41.

Next, a moisture permeability measuring device used for measuring the measurement target sample 40 will be described.
Reference numeral 1 in FIG. 1 shows an example of a moisture permeability measuring apparatus of the present invention. This moisture permeability measuring apparatus 1 has a measuring chamber 11, a supply chamber 12, a mounting member 21, and a sealing member 28. ing.
The measurement chamber 11 and the supply chamber 12 are box-shaped with openings.
The mounting member 21 is a metal plate having an opening (connection port) 25 formed in the center portion, and the planar shape is a ring shape.

The inner periphery of the ring of the mounting member 21, that is, the connection port 25 is smaller than both the opening of the measurement chamber 11 and the opening of the supply chamber 12, and the outer periphery of the ring is smaller than both the opening of the measurement chamber 11 and the opening of the supply chamber 12. It is getting bigger.
The measurement chamber 11 is arranged with the opening facing upward.

  The mounting member 21 is attached in close contact with a wall member surrounding the opening of the measurement chamber 11 so that the connection port 25 is positioned on the opening of the measurement chamber 11. Therefore, the opening of the measurement chamber 11 and the opening of the connection port 25 communicate with each other, and the measurement chamber 11 is connected to the outside through only the connection port.

  The supply chamber 12 has its opening directed downward, and the wall member surrounding the opening is located on the connection port 25 so that the wall member surrounding the opening of the measurement chamber 11 or the mounting member 21 It arrange | positions on the measurement chamber 11 so that it may closely_contact | adhere to the edge part perimeter of a ring.

  Therefore, the opening of the measurement chamber 11 and the opening of the supply chamber 12 face each other only through the connection port 25, and the internal space of the measurement chamber 11 and the internal space of the supply chamber 12 are connected to each other only through the connection port 25. ing.

  On the outer surface of the mounting member 21 of the measurement chamber 11, that is, the surface facing the internal space of the supply chamber 12, a groove similar to the connection port 25 is separated from the edge of the connection port 25 by a predetermined distance. The connection port 25 is formed so as to surround it.

  The sealing member 28 has a ring shape and is made of a deformable elastic material such as rubber. When the sealing member 28 has a similar shape to the groove 24 and is arranged concentrically with the connection port 25, the sealing member 28 is placed on the mounting member 21. Here, it is the same size as the groove 24, and is placed on the bottom surface of the groove 24 (FIG. 5A).

  As described above, since the groove 24 surrounds the connection port 25 with a predetermined distance from the edge of the connection port 25, the sealing member 28 surrounds the connection port 25 with a predetermined distance from the edge of the connection port 25. It is out.

  The mounting ring 31 of the measurement target sample 40 used in the moisture permeability measuring device 1 has a ring outer periphery larger than the connection port 25 and an inner periphery smaller than an inner periphery of the sealing member 28 on the bottom surface of the groove 24. The mounting ring 31 can be disposed on the sealing member 28 without dropping from the connection port 25.

  Here, on the surface of the mounting ring 31 opposite to the side on which the seal member 38 is disposed, a groove 34 having substantially the same planar shape as the groove 24 of the mounting member 21 is a predetermined distance from the edge of the opening 35. It is formed so as to surround the opening 35 at a spaced location.

  The vacuum chamber 2 and the supply chamber 12 are provided with a carry-in / out chamber opening (not shown), the carry-in / out port is opened, the sample 40 to be measured is carried into the supply chamber 12 through the inside of the vacuum chamber 2 and placed. Alignment is performed so that the groove 34 of the ring 31 faces the groove 24 of the mounting member 21.

  The thickness of the sealing member 28 is larger than the total depth of the grooves 24 and 34 when the sealing member 28 is placed on the mounting member 21, and when the measurement target sample 40 is lowered with the grooves 24 and 34 facing each other, The upper part of the ring of the sealing member 28 enters the groove 34 of the mounting ring 31, contacts the bottom surface of the groove 34, and the measurement target sample 40 is put on the sealing member 28.

In this state, when the measurement target sample 40 is pressed toward the mounting member 21 with a pressing member (not shown), the sealing member 28 is deformed by the pressing, and the sealing member 28 is in close contact with the mounting member 21 over the entire circumference. The opposite surface is in close contact with the mounting ring 31.
The substrate 41 has a moisture permeability of 1 × 10 ⁻¹ g / m ² / day or more and a high gas permeability, whereas the sealing member 28 and the sealing member 38 described above are made of a material that does not transmit gas. ing.

  Since the sealing member 28 is in close contact with the mounting member 21 on one side and the mounting ring 31 on the opposite side, the gas does not permeate between the mounting member 21 and the mounting ring 31. As described above, since the seal member 38 is in close contact with the substrate 41 and the opposite surface is in close contact with the mounting ring 31 over the entire circumference, gas is also transmitted between the substrate 41 and the mounting ring 31. do not do.

  Moreover, since the mounting ring 31, the mounting member 21, and the wall members of the supply chamber 12 and the measurement chamber 11 are made of a material that does not transmit gas, such as metal, the substrate 41 and the measurement target film 42. Only the gas that has passed through can enter the measurement chamber 11 from the supply chamber 12.

An evacuation system 9 is disposed outside the vacuum chamber 2.
Here, the evacuation system 9 includes a roughing pump 7 and a turbo molecular pump 8. The roughing pump 9 is closed in a state where the supply chamber 12 and the carry-in / out port of the vacuum chamber 2 are closed and the sample 40 to be measured is pressed. 7 evacuates the vacuum chamber 2, the supply chamber 12, and the measurement chamber 11.

The measurement chamber 11 and the supply chamber 12 are connected to first and second measuring devices 3 and 4 that measure internal pressure (total pressure).
When the internal pressure of the measurement chamber 11 is evacuated to a predetermined pressure, the valve 19 is operated while continuing to evacuate the vacuum chamber 2 and the supply chamber 12, and the measurement chamber 11 is changed from the roughing pump 7 to the turbo molecular pump 8. Switching, the back pressure of the turbo molecular pump 8 is exhausted by the roughing pump 7, and a high vacuum atmosphere lower than the internal pressure of the supply chamber 12 is formed inside the measurement chamber 11.

A water supply system 5 disposed outside the vacuum chamber 2 is connected to the supply chamber 12 via a flow control device 17, and after a high vacuum atmosphere of a predetermined pressure is formed inside the measurement chamber 11, the vacuum chamber 2 and the supply chamber 12 are continued to be evacuated, and gaseous water is introduced from the water supply system 5 together with the carrier gas while maintaining the exhaust speed of the turbo molecular pump 8 at a predetermined speed.
Here, the first and second measuring devices 3 and 4 are provided with mass spectrometers, and are capable of measuring the molar ratio of the carrier gas and water, and the partial pressure of water is calculated from the molar ratio and the total pressure. Desired.

  The partial pressure of water inside the supply chamber 12 when measuring the moisture permeability is determined in advance, and the second measuring device 4 determines the amount of water inside the supply chamber 12 based on the measured partial pressure of water. The flow control device 17 between the water supply system 5 and the supply chamber 12 and the variable valve 18 between the roughing pump 7 and the supply chamber 12 are controlled so that the pressure becomes a predetermined value, and the water inside the supply chamber 12 is controlled. Is maintained at a predetermined pressure.

After the partial pressure of the water in the supply chamber 12 reaches a predetermined pressure, the measurement of the partial pressure of the water in the measurement chamber 11 is continued, and the amount of increase in the partial pressure of the water in the measurement chamber 11 during a certain measurement time is measured. From the time, the temperature inside the measurement chamber 11, the exhaust speed of the measurement chamber 11, and the exposed area of the substrate 41 (here, the area of the opening 35), the moisture permeability (unit: g / g) of the measurement target film 42 and the substrate 41 is measured. m ² / day). The moisture permeability of the substrate 41 is known in advance, and a value obtained by subtracting the moisture permeability of the substrate 41 from the total moisture permeability is the moisture permeability of the measurement target film 42.

  If the substrate 41 is weak to heat like a resin substrate, breakage or deformation occurs, and the moisture permeability cannot be measured accurately. However, the substrate 41 is made of ceramic and is not easily damaged or deformed. It can be measured accurately.

  The substrate 41 may have a known moisture permeability. If the moisture permeability of the substrate 41 is unknown, the substrate 41 in which the measurement target film 42 is not formed is fixed to the mounting ring 31. Then, the measurement target sample 40 may be prepared, and the moisture permeability of only the substrate 41 may be obtained in the same process as described above.

  Since the moisture permeability is a value per unit area, the measured value of moisture permeability becomes inaccurate if the back surface of the substrate 41 is greatly exposed outside the opening 35. For example, if the distance between the ring inner periphery of the mounting ring 31 and the edge of the opening 35 is too large, the measured value of moisture permeability becomes inaccurate, so the distance from the sealing member 38 to the opening 35 Is more desirable, and more desirably, the inner circumference of the ring of the seal member 38 and the edge of the opening 35 substantially coincide with each other.

The thermosetting resin used for the seal member 38 is not limited to an epoxy resin, and for example, an acrylic resin, a melamine resin, a urethane resin, or the like can be used as long as it does not transmit a gas (particularly water) of a cured product. In addition to the thermosetting resin, additives such as a filler, a thermoplastic resin, and rubber can be added to the adhesive constituting the seal member 38. Further, if the gas does not permeate, the adhesive layer 36 may be used as it is without being cured. The seal member 38 preferably has a vacuum leak rate of 1 × 10 ⁻⁷ Pa · m ³ / sec or less.

The sealing member 28 is not particularly limited, but is specifically an O-ring made of rubber such as fluorine rubber, silicone rubber, or nitrile rubber. The sealing member 28 preferably has an H ₂ O (water vapor) leak rate of 1 × 10 ⁻⁷ Pa · m ³ / sec or less.
The case where the back surface of the substrate 41 is exposed in the entire opening 35 of the mounting ring 31 has been described above, but the present invention is not limited to this.

FIG. 6 shows another example of the mounting ring 31 used for the measurement target sample 40 of the present invention, and this mounting ring 31 has an elongated support portion 37.
One end of the support portion 37 is connected to the inner circumferential side surface of the mounting ring 31, and the other end protrudes toward the inside of the opening 35. Here, the support portion 37 is an elongated plate, and one end of each of the four support portions 37 is connected to the inner periphery of the ring of the mounting ring 31, and the other end is connected to each other substantially at the center of the opening 35. It has a cross shape.

  When the surface of the support portion 37 is flush with the placement portion 39 and the thickness of the seal member 38 is negligibly small, when the substrate 41 is placed on the seal member 38, the back surface of the substrate 41 is supported by the support portion 37. Contact with.

  The substrate 41 is not only supported by the mounting portion 39 via the seal member 38 but also the central portion thereof is supported by the support portion 37, so that the substrate 41 has a large diameter and flexibility. However, the substrate 41 and the measurement target film 42 are not damaged or deformed without bending.

When the thickness of the seal member 38 is so large that it cannot be ignored, the surface of the support portion 37 is made higher than the placement portion 39, and when the substrate 41 is fixed to the placement ring 31 by the seal member 38, The surface of the support part 37 is brought into contact with the surface.
As long as the support part 37 can contact the back surface of the substrate 41 when the substrate 41 is fixed by the seal member 38, the support part 37 may be a bar having a circular cross section instead of a plate.

  When the area of the support part 37 is so large that it cannot be ignored, the area of the opening 35 when calculating the water vapor transmission rate is obtained by subtracting the area of the part located in the opening 35 of the support part 37 from the area of the opening 35. Is used.

  In the above, the case where the substrate 41 is disk-shaped and the opening 35 is circular has been described. However, the present invention is not limited to this, and the planar shape of the substrate 41 is larger than the opening 35, and If all the edge portions can contact the mounting ring 31, the planar shape of the substrate 41 and the opening 35 may be, for example, a rectangle.

  The shape of the positioning portion 32 is not limited to a circular ring, and may be a rectangular ring shape, and the positioning portion 32 does not have to be a ring shape. The positioning part 32 is farther from the center of the opening 35 than the distance from the center of the opening 35 to the edge of the substrate 41 when the substrate 41 is placed on the mounting ring 31, and can place the substrate 41 on the mounting ring 31. If there is, for example, the plurality of positioning portions 32 may be arranged at intervals on a circumference whose distance from the center of the opening 35 is farther than the distance from the center of the opening 35 to the edge of the substrate 41.

  Although the case where the measurement chamber 11 and the supply chamber 12 are disposed inside the vacuum chamber 2 has been described above, the present invention is not limited to this. Although the measurement chamber 11 and the supply chamber 12 may not be arranged inside the vacuum chamber 2 and the outer wall thereof may be directly exposed to the external atmosphere, the supply chamber 12 is arranged inside the vacuum chamber 2 and the carry-in / out port of the supply chamber 12 is provided outside. If it is not directly exposed to the atmosphere, water and air are less likely to enter the supply chamber 12 from the outside atmosphere, so that the moisture permeability can be measured more accurately.

As the thickness of the substrate 41 increases, the moisture permeability decreases. When the thickness was changed with a porous aluminum substrate and the moisture permeability was measured, the moisture permeability was less than 1 × 10 ⁻¹ g / m ² / day when the thickness was 0.15 mm or more. If the moisture permeability is less than 1 × 10 ⁻¹ g / m ² / day, the moisture permeability of the measurement target film 42 cannot be accurately measured. Therefore, a ceramic substrate having a thickness of 0.14 mm or less is suitable for the present invention. ing.

The substrate used in the present invention is not particularly limited as long as it is a ceramic substrate having a moisture permeability of 1 × 10 ⁻¹ g / m ² / day or more. Specifically, in addition to porous aluminum, a substrate made of porous alumina can be used.

The measurement target film 42 of the present invention is not particularly limited, but an example thereof is a barrier film of an organic EL element, for example, an insulating film such as a SiON film, a SiOx film (x is a positive real number), an Al ₂ O ₃ film, etc. It is.
When the measurement target film 42 is a barrier film used for an organic EL element, the thickness of the barrier film is generally 10 nm or more and 100 nm or less. Therefore, in order to cover the surface of the substrate 41 with the measurement target film 42, the surface roughness of the substrate 41 is reduced. The thickness is desirably 10 nm or less.

The mounting member 21 and the mounting ring 31 are not limited to metal, and glass, hard resin, or the like can be used as long as the moisture permeability is low.
Any carrier gas may be used as long as it does not decompose water. For example, an inert gas such as nitrogen or argon can be used alone or in combination.

A porous aluminum ceramic substrate having a thickness of 0.14 mm was used as the substrate 41, and the measurement target sample 40 of the example was formed without forming the measurement target film on the surface of the substrate 41.
Separately from this, a polyimide film having a film thickness of 25 μm was used as a substrate, and a measurement target sample of a comparative example was prepared without forming a measurement target film on the surface of the substrate.

  The measurement target sample 40 of the example and the comparative example was attached to the moisture permeability measuring device 1 of FIG. 1 and the moisture permeability measurement was repeated five times without replacing the substrate 41. The measurement results are shown in Table 1 below.

  As apparent from Table 1 above, the change in the moisture permeability was large in the comparative example, whereas the change in the moisture permeability was small even when the measurement was repeated. It can be seen that is accurately obtained.

Sectional drawing for demonstrating the water vapor permeability measuring apparatus of this invention The perspective view for demonstrating the sample stand of this invention (A), (b): The perspective view for demonstrating the process of producing a measurement object sample (A), (b): Sectional drawing for demonstrating the process of producing a measuring object sample (A)-(c): Sectional drawing for demonstrating the process of mounting a measurement object sample on a mounting member. The perspective view for demonstrating the other example of a mounting ring

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Moisture permeability measuring device 2 ... Vacuum chamber 5 ... Water supply system 11 ... Measurement chamber 12 ... Supply chamber 21 ... Mounting member 25 ... Connection port 28 ... Sealing member 30 ... Sample stand 31 …… Mounting ring 32 …… Positioning part 35 …… Opening 37 …… Supporting part 38 …… Seal member 40 …… Measurement sample 41 …… Substrate 42 …… Measurement film

Claims (8)

A sample base for a moisture permeability measuring device,
A sample table having a ring-shaped mounting ring and a ceramic substrate having a planar shape larger than the opening inside the mounting ring and a moisture permeability of 1 × 10 ⁻¹ g / m ² / day or more.   The sample stage in which the support part in which the surface and surface of the said mounting ring are the same height protruded toward the ring inner side from the said inner periphery of the said mounting ring.   Either one of Claim 1 or Claim 2 with which the positioning part by which the surface was protruded higher than the surface of the said mounting ring was arrange | positioned on the surface of the said mounting ring along the edge of the said mounting ring. Sample stand as described in the section.   The sample stand according to any one of claims 1 to 3, wherein the placement ring is made of metal. The sample stage according to any one of claims 1 to 3, wherein the substrate is placed on the placement ring.
A measurement target film disposed on the substrate surface;
Arranged between the mounting ring and the substrate, surrounding an opening inside the mounting ring,
A sample to be measured having a sealing member that hermetically adheres between the substrate and the mounting ring. A measurement chamber and a supply chamber each surrounded by a wall member,
A ring-shaped mounting member,
The mounting member is hermetically connected to the wall member around the opening of the measurement chamber,
The internal space of the measurement chamber and the internal space of the supply chamber communicate with each other through the opening of the mounting member,
On the mounting member, the sample to be measured according to claim 5 is in close contact with the surface of the mounting ring opposite to the surface on which the seal member is disposed and the surface of the mounting member. Arranged,
The opening of the mounting member is surrounded by the outer periphery of the mounting ring,
A water supply system is connected to the supply chamber, and water inside the supply chamber is configured to be able to move to the measurement chamber through the substrate and the measurement target film of the measurement target sample,
A moisture permeability measuring device in which a measuring device for measuring the pressure of water is connected to the supply chamber and the measuring chamber, respectively.   The moisture permeability measuring device according to claim 6, further comprising a sealing member disposed between the mounting ring and the mounting member and surrounding an opening of the mounting member.   The moisture permeability measuring device according to claim 6 or 7, wherein the supply chamber is arranged in a vacuum chamber.

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