JP6917706B2 - Measurement method of adsorption pressure distribution - Google Patents

Description

The present invention relates to a method for measuring an adsorption pressure distribution, and more particularly to a method for measuring an attraction pressure distribution when a metal foil is adsorbed by a magnet array in which a plurality of magnets are arranged in a row.

For example, a vacuum vapor deposition method is known as one of the methods for manufacturing an organic EL device. In this vacuum vapor deposition method, a substrate such as a glass substrate and a mask plate that defines a vapor deposition (processing) range are superposed and arranged in a vacuum chamber capable of forming a vacuum atmosphere, and the vaporized material is sublimated or sublimated from the vapor deposition source. By vaporizing and adhering and depositing this sublimated or vaporized vaporized material on one surface (that is, the film-forming surface) of the substrate through the mask plate, various thin films are formed in a predetermined pattern (for example,). See Patent Document 1). In this case, in consideration of the product yield, the vapor deposition source is usually arranged below the mask plate made of a metal foil having a plate thickness of several tens of μm, and the film is formed by a so-called depot-up method. At this time, in order to form a film with a predetermined pattern while suppressing so-called mask blur as much as possible, it is necessary that the mask plate is adhered to one surface of the substrate over the entire surface during the film formation by vacuum vapor deposition. preferable.

From this, the substrate and the mask plate are vertically aligned and overlapped with the direction from the mask plate toward the substrate facing up, and the holding means is arranged on the substrate via the touch plate so as to sandwich the substrate. It is known that the mask plate is held by the touch plate, and as the holding means, it is known to use a magnet array in which a plurality of rod-shaped magnets are arranged in a row at intervals in at least one direction. ing.

Here, when the metal foil (mask plate) is attracted and held by the magnet array, the magnetic flux density inside the metal foil is almost always saturated, so that an adsorption pressure is generated near the magnetic poles of each magnet, but adjacent magnets. At the central position between the two, the adsorption pressure is distributed so that almost no adsorption pressure is generated. In addition, the suction pressure may differ due to the individual difference of each magnet constituting the magnet array. Then, for example, in a place where almost no suction pressure is generated, a gap is generated between the metal foil and the substrate. Therefore, when used for the above-mentioned film formation, mask blurring occurs depending on the gap between the mask plate and the substrate, and the product yield is lowered. Therefore, for example, it has been desired to develop a method for measuring the distribution of the suction pressure when the metal foil is sucked by the magnet array so that the arrangement of each magnet constituting the magnet array can be optimized.

Japanese Unexamined Patent Publication No. 2013-93278

In view of the above points, the present invention provides a method for measuring the suction pressure distribution, which can measure the distribution of the suction pressure when the metal foil is sucked by the magnet array in which a plurality of magnets are arranged in a row. Is the subject.

In order to solve the above problems, the method for measuring the attraction pressure distribution of the present invention for measuring the distribution of the attraction pressure when the metal foil is attracted by the magnet array in which a plurality of magnets are arranged in a row is a magnet array. above, by installing the metal foil through the support, the gas pressure was applied toward adsorbing hold the metal foil to the support upper surface by the magnetic force from the magnet, from the support to the metal foil, metal The displacement amount of the metal foil is measured in the step of applying the same resistance force to the foil over the entire predetermined range of the lower surface thereof and in the range of the metal foil on which the resistance force acts, and the suction pressure is calculated from the measured displacement amount. It is characterized by including a step of obtaining a distribution.

According to the present invention, the metal foil on the support is attracted and held by the magnet array, and the gas pressure as a resistance force is gradually increased from the weight of the metal foil itself, and this gas pressure and the attraction pressure by the magnet array are combined. Utilizing the fact that the difference changes from negative to positive and appears as a vertical displacement on the metal foil, if the amount of displacement at this time is measured over the entire in-plane of the metal foil, the distribution of the attraction pressure by the magnet array can be obtained. Can be measured. In this case, a non-contact displacement meter such as an optical type or an ultrasonic type can be used to measure the displacement amount of the metal foil, and such a displacement meter has two directions orthogonal to each other in one surface of the metal foil. Is set to the X-axis direction and the Y-axis direction, and the displacement meter may be installed so as to be able to scan relative to the metal foil in at least one direction of the X-axis direction and the Y-axis direction from the starting point position.

In the present invention, the support is provided with a base having a recessed portion on the upper surface and a porous plate provided on the upper surface of the base so as to cover the recessed portion. If a gas is supplied to the portion to apply a gas pressure to the metal foil through each hole of the porous plate, the same gas pressure is applied to the entire lower surface of the metal foil. The configuration can be realized.

The plan view of the measuring apparatus which can carry out the measuring method of the suction pressure distribution of embodiment of this invention. The cross-sectional view which shows the state at the time of measuring the distribution of the attraction pressure of a magnet array.

Hereinafter, embodiments of the magnetic field strength measuring method of the present invention will be described with reference to the drawings. In the following, the direction from the magnet array to the metal foil is above the Z-axis direction, and the two directions orthogonal to each other in the plane of the metal foil orthogonal to the Z-axis are the X-axis direction and the Y-axis direction.

With reference to FIG. 1, Ms is a measuring device capable of measuring the amount of displacement of the metal foil in the plane. The measuring device Ms is composed of a measuring unit 1 and a moving unit 2 that can move the measuring unit 1 relative to the measurement object described later in the X-axis direction and the Y-axis direction. The moving portion 2 is a gate type having a slider (not shown) slidably engaged with two rails 22 and 22 laid along the X-axis direction on a support base 21 installed horizontally. A frame 23 is provided, and the frame 23 can move forward and backward in the X-axis direction at a predetermined pitch by a motor (not shown). Further, the frame 23 is provided with a feed screw 24 extending in the Y-axis direction, a mounting portion (not shown) of the support base 25 is screwed into the feed screw 24, and the support base 25 is designated by a motor (not shown). It is possible to move forward and backward in the Y-axis direction at the pitch of. Then, the measuring unit 1 is arranged on the support base 25. The measuring unit 1 is composed of an optical displacement sensor having a light emitting element and a light receiving element. Since a known displacement sensor itself can be used, further detailed description including a method for measuring the displacement amount will be omitted.

A measurement object having a magnet array 3 positioned between the rails 22 and 22 below the measuring unit 1 and in a posture in which the rod-shaped magnets described later are phased so as to coincide with each other in the Y-axis direction. Will be installed. As shown in FIG. 2, the object to be measured includes the support 4 and the metal foil 5 in addition to the magnet array 3. In the magnet array 3, a plate-shaped yoke 31 and a rod-shaped magnet 32 having the same shape and long in the Y-axis direction are arranged on the upper surface of the yoke 31 at equal intervals in the X-axis direction and the upper magnetic poles are alternately changed. It is set up and configured. A support 4 is installed on the magnet array 3. The support 4 is selected from a metal material having a low magnetic permeability, and for example, austenitic stainless steel is used. The support 4 is a porous body having a base 41 having a recessed portion 41a recessed on the upper surface and a plurality of holes 42a attached to the upper surface of the base 41 so as to cover the recessed portion 41a and communicating with the recessed portion 41a. It is composed of a plate 42. Further, on the side surface of the base 41, two gas introduction ports 43 communicating with the recessed portion 41a are opened, and although not particularly illustrated, nitrogen or nitrogen or the like is provided through a supply pipe connected to the gas introduction port 43. A gas such as compressed air can be supplied to the recess 41a. In this case, the gas introduction ports 43 may be provided at a plurality of locations so that the gas supplied to the recessed portion 41a is evenly distributed, and the same gas pressure may be applied from each hole 42a of the porous plate 42 to the metal. In order to act on the foil 5, a dispersion plate (not shown) for dispersing the gas supplied from the gas introduction port 43 may be provided in the recessed portion 41a.

When a gas pressure is applied to the metal foil 5, each hole 42a of the porous plate 42 acts on the same gas pressure (drag) over the entire range of the metal foil 5 attracted and held by the magnet array 3. There are no particular restrictions as long as it is set up so that it can be used. Further, the upper surface of the porous plate 42 is processed so that the flatness of the metal foil 5 can be ensured within a predetermined range when the metal foil 5 is adsorbed and held. The metal foil 5 is made of a material having a small coefficient of thermal expansion near room temperature and has a plate thickness in the range of, for example, several tens of μm to several hundreds of μm. For example, a metal foil made of Invar is used. In this case, the metal foil 5 is set to be larger than the contour of the porous plate 42. Hereinafter, a method for measuring the distribution of the suction pressure of the magnet array 3 will be specifically described.

First, the object to be measured is set. In this case, the magnet array 3 is installed on an assembly table (not shown) with its yoke 31 side downward in the vertical direction. Next, the support 4 is placed on the magnet array 3 in an overlapping manner, and then the metal foil 5 is placed on the support 4. Thus, the magnetic force of the magnet array 3 causes the upper surface of the porous plate 42 of the support 4 to be placed on the upper surface. The metal foil 5 is adsorbed and held on the surface, and the object to be measured is prepared. When the object to be measured is prepared, the object to be measured is positioned between the rails 22 and 22 below the measuring unit 1 and is phased so that each of the rod-shaped magnets 32 coincides with the Y-axis direction. Install things.

When the object to be measured is installed, gas is supplied from the gas introduction port 43 into the recess 41a. As a result, gas pressure is applied to the metal foil 5 through each hole 42a of the porous plate 42, and the same gas pressure acts over the entire range of the metal leaf 5 attracted by the magnetic force of the magnet array 3. Here, the initial gas pressure is appropriately set so that the metal foil 5 is held flat, for example, from the material (density) and thickness of the metal foil 5. In this state, for example, any corner of the metal leaf 5 is set as the starting position, and the measuring unit 1 is scanned in the X-axis direction and the Y-axis direction by the moving unit 2 from this starting position, and the upper surface of the metal leaf 5 at that time is scanned. Acquire the data of the amount of displacement in. At this time, if there is a portion where the magnetic force is relatively strong locally, the metal foil 5 is strongly attracted to the porous plate 42 and bends downward, so that the displacement amount increases.

Next, the gas pressure supplied from the gas introduction port 43 into the recessed portion 41a is increased by a predetermined value, and in the same manner as described above, the measuring portion 1 is moved in the X-axis direction and the Y-axis direction by the moving portion 2 from the starting point position. Scan and acquire data on the amount of displacement on the upper surface of the metal foil 5 at that time. At this time, if there is a portion where the magnetic force is relatively weak locally, the drag force of the gas pressure prevails over the magnetic force and the metal foil 5 bends upward, so that the amount of displacement in the reverse direction increases. Then, if the gas pressure is further increased and the data of the displacement amount on the upper surface of the metal foil 5 is repeatedly acquired, the distribution of the attraction pressure in the X-axis direction and the Y-axis direction of the magnet array 3 can be measured in detail.

As described above, according to the present embodiment, the metal foil 5 on the support 4 is attracted and held by the magnet array 3, and the gas pressure is gradually increased from the weight of the metal foil 5 to obtain the gas pressure. , The amount of displacement at this time is measured over the entire in-plane of the metal foil 5 by utilizing the fact that the difference from the attraction pressure due to the magnet array 3 turns from negative to positive and appears as a vertical displacement on the metal foil 5. By doing so, it is possible to measure the distribution of the attraction pressure by the magnet array 3 in the direction in which the magnet array 3 is arranged and in the direction orthogonal to the row direction.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above, and can be appropriately modified as long as it does not deviate from the technical idea of the present invention. In the above embodiment, as the magnet array 3 in which the distribution of the magnetic field strength is measured, a magnet array 3 in which rod-shaped magnets 32 are arranged in a row in the X-axis direction has been described as an example, but the present invention is not limited to this, and a plurality of magnet pieces are used. The distribution of the suction pressure can be measured by applying the present invention even if the magnets are randomly arranged or regularly arranged in the X-axis direction and the Y-axis direction.

Further, in the above embodiment, the support 4 composed of the base 41 and the porous plate 42 has been described as an example, but if the metal foil 5 can be applied with the same gas pressure in a predetermined range, it is described. It is not limited to this. Further, in the above embodiment, the measuring device Ms has been described as an example in which an optical displacement sensor is used as the measuring unit 1, but the present invention is not limited to this, and a non-contact displacement meter such as an ultrasonic type is used. If so, the form does not matter. Further, the measuring device Ms has been described as an example of a moving unit 2 capable of moving the measuring unit 1 on two orthogonal axes, but it is not particularly limited as long as it can scan the entire surface of the metal foil 5. Instead, for example, an articulated robot can be used. Further, in the above embodiment, the measurement is performed with the magnet array 3 installed on the lower side in the vertical direction as an example, but the measurement can also be performed with the metal foil 5 on the lower side in the vertical direction.

Further, in the above embodiment, the case where the metal foil 5 is used has been described as an example, but the present invention is not limited to this, and for example, a foil-shaped mask plate used when forming a film on a substrate by a vacuum vapor deposition method. The distribution of adsorption pressure can be measured by applying the present invention. In this case, although not particularly illustrated and described, since the mask plate is provided with a plurality of through holes penetrating in the plate thickness direction, the support 4 and the metal foil 5 are provided so that the gas pressure does not escape. A thin-film resin made of, for example, polyimide may be interposed between the two.

3 ... Magnet array, 32 ... Magnets constituting the magnet array, 4 ... Support, 41 ... Base, 41a ... Recessed portion, 42 ... Porous plate, 42a ... Hole, 5 ... Metal leaf.

Claims (2)

It is a method of measuring the suction pressure distribution for measuring the distribution of the suction pressure when the metal foil is sucked by the magnet array in which a plurality of magnets are arranged in a row.
On a magnet array, by installing the metal foil via a support, adsorbing hold the metal foil to the support upper surface by the magnetic force from the magnet,
A step of applying a gas pressure from the support toward the metal foil and exerting an equivalent drag force on the metal foil over a predetermined range of the lower surface thereof.
A measuring method comprising a step of measuring the displacement amount of the metal leaf in the range of the metal foil on which the drag force acts, and obtaining the distribution of the suction pressure from the measured displacement amount. As the support, a base having a recessed portion on the upper surface and a porous plate provided on the upper surface of the base so as to cover the recessed portion are used, and gas is supplied to the recessed portion. The method for measuring an adsorption pressure distribution according to claim 1, wherein a gas pressure is applied to the metal foil through each hole of the porous plate.

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