JP2008151685A - Device and method for determining lamination quality of tape member - Google Patents

Device and method for determining lamination quality of tape member Download PDF

Info

Publication number
JP2008151685A
JP2008151685A JP2006340990A JP2006340990A JP2008151685A JP 2008151685 A JP2008151685 A JP 2008151685A JP 2006340990 A JP2006340990 A JP 2006340990A JP 2006340990 A JP2006340990 A JP 2006340990A JP 2008151685 A JP2008151685 A JP 2008151685A
Authority
JP
Japan
Prior art keywords
pattern
tape member
acf
brightness
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006340990A
Other languages
Japanese (ja)
Other versions
JP5301094B2 (en
Inventor
Kentaro Nakamura
中村  健太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2006340990A priority Critical patent/JP5301094B2/en
Publication of JP2008151685A publication Critical patent/JP2008151685A/en
Application granted granted Critical
Publication of JP5301094B2 publication Critical patent/JP5301094B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To determine whether or not a tape member (an ACF or the like) for connecting an electronic component is stuck properly on a substrate surface constituting a liquid crystal display panel or the like. <P>SOLUTION: Lightness threshold levels Su, Sd are set on an upper part and a lower part between a lightness level of the ACF 4. A CPU 72 extracts binary signals (Fig.4(ab), Fig.4(bb)) from an imaging pattern (Fig.4(aa)) of a glass substrate 2 on which the ACF 4 is stuck properly and an imaging pattern (Fig.4(ba)) of a quality determination object substrate 2 in the stuck state based on the set lightness threshold levels Su, Sd, and determines lamination quality of the tape member (ACF 4) on the glass substrate 2 from the coincidence rate (α) between both shapes. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、基板に貼付されたテープ部材の貼付状態の良否を判定するテープ部材の貼付良否判定装置及び貼付良否判定方法に関する。   The present invention relates to a tape member sticking quality judging device and a sticking quality judging method for judging the quality of a tape member stuck on a substrate.

液晶ディスプレイに代表されるフラットパネルディスプレイ装置は、薄いガラス基板の電極部に対し、ICドライバ等の電子部品が接続搭載されて製造工程される。   A flat panel display device typified by a liquid crystal display is manufactured by connecting and mounting an electronic component such as an IC driver to an electrode portion of a thin glass substrate.

図9(a)は、TCP(テープキャリアパッケージ)等の電子部品が、テープ部材である異方性導電膜(ACF)を介して、ガラス基板の電極部に接続される様子を示した斜視図である。   FIG. 9A is a perspective view showing a state in which an electronic component such as a TCP (tape carrier package) is connected to an electrode portion of a glass substrate through an anisotropic conductive film (ACF) that is a tape member. It is.

すなわち、搬送テーブル1上には、ガラス基板2が位置決めされて吸着され、そのガラス基板2の電極部には、銅箔等による多数のリード線2aが配列形成されている。   That is, the glass substrate 2 is positioned and sucked on the transport table 1, and a large number of lead wires 2 a made of copper foil or the like are arranged on the electrode portion of the glass substrate 2.

TCP等からなる電子部品3の電極3aは、ガラス基板2上に貼付されたテープ状のACF4を介して、電極部のリード線2aに位置決め対応されて接続される。   The electrode 3a of the electronic component 3 made of TCP or the like is connected to the lead wire 2a of the electrode portion in correspondence with the positioning through the tape-shaped ACF 4 attached on the glass substrate 2.

ACF4は、接着剤の中に導電フィラーを分散させたものであり、両面に粘着性を有し、上面には予め、保護膜である離型紙4aが貼着されている。   The ACF 4 is obtained by dispersing a conductive filler in an adhesive, has adhesiveness on both sides, and a release paper 4a as a protective film is pasted on the upper surface in advance.

ガラス基板2上のACF4は、図9(a)に示すように、矢印x方向に送り出されて位置決めされた後、y1方向に押し下げられて電極部のリード線2a上に位置合わされて貼付される。   As shown in FIG. 9A, the ACF 4 on the glass substrate 2 is sent out in the direction of the arrow x and positioned, and then pushed down in the y1 direction to be aligned and pasted on the lead wire 2a of the electrode portion. .

貼付されたACF4から離型紙4aが引き剥がされ、上面が露呈したところに、電子部品3を矢印y2方向に降下させ、位置合わせを経て接着させ、ACF4に対する押圧加熱により、電極3aとリード線2aとを対応接続する。   When the release paper 4a is peeled off from the attached ACF 4, and the upper surface is exposed, the electronic component 3 is lowered in the direction of the arrow y2, adhered after alignment, and pressed against the ACF 4 to press the electrode 3a and the lead wire 2a. And correspondingly connect.

電子部品3は、ACF4を介して、ガラス基板2の電極部に接続搭載されるが、接着剤であるACF4自体は粘着面を有して変形し易いので取り扱いにくく、ACF4を基板2の所定領域に正確に貼付するのは容易ではない。また、ACF4は両面に粘着性を有するので、ガラス基板2面に一旦貼付されてしまうと、その貼付位置の修正は困難となる。   The electronic component 3 is connected and mounted to the electrode portion of the glass substrate 2 via the ACF 4, but the ACF 4 itself, which is an adhesive, has an adhesive surface and is easily deformed and is difficult to handle. It is not easy to apply it accurately. Moreover, since ACF4 has adhesiveness on both surfaces, once it is affixed to the surface of the glass substrate 2, it is difficult to correct the affixing position.

また、仮にACF4がガラス基板2に適正に位置決めできて貼付されたとしても、電子部品3を搭載接続するために、図9(b)に示したように、剥離棒4bを矢印X方向へ移動操作して離型紙4aを引き剥がす際に、一旦貼り付けたACF4の先端部が離型紙4aに引き摺られて剥がれてしまい、ACF4が貼付すべき所定領域を正確にカバーできないケースが発生する。   Even if the ACF 4 can be properly positioned and pasted to the glass substrate 2, the peeling bar 4b is moved in the direction of the arrow X as shown in FIG. When the release paper 4a is peeled off by operation, the tip of the ACF 4 once pasted is dragged and peeled off by the release paper 4a, and there is a case where the predetermined area to which the ACF 4 is to be attached cannot be accurately covered.

そこで、ガラス基板2上への電子部品3の接続搭載に先立ち、ACF4がガラス基板2の所定位置に適正に貼付されているかどうかをチェックし、適正に貼付されていることが確認されてはじめて、電子部品3のガラス基板2への接続搭載が行われる。   Therefore, prior to connecting and mounting the electronic component 3 on the glass substrate 2, it is checked whether the ACF 4 is properly attached to a predetermined position of the glass substrate 2, and it is confirmed that the ACF 4 is properly attached. Connection mounting of the electronic component 3 to the glass substrate 2 is performed.

ACF4がガラス基板2上の所定位置に適正に貼付されたか否かは、ACF4が貼付されたガラス基板2をCCDカメラ等の撮像機器で撮影し、その撮像パターンと予めACF4が適正に貼付された基準となるガラス基板2の撮像パターンとをパターン認識のもとで比較する方法がある(例えば、特許文献1参照)。   Whether or not the ACF 4 is properly affixed to a predetermined position on the glass substrate 2 is obtained by photographing the glass substrate 2 to which the ACF 4 is affixed with an imaging device such as a CCD camera, and the image pattern and the ACF 4 are appropriately affixed in advance. There is a method of comparing an imaging pattern of a glass substrate 2 serving as a reference under pattern recognition (see, for example, Patent Document 1).

図10及び図11は、撮像パターンに基づくパターン認識により、ACF4が適正に貼付されたか否かを判定する従来のテープ部材の貼付良否判定置装置の説明図である。   10 and 11 are explanatory diagrams of a conventional tape member pasting / passing judgment device for judging whether or not the ACF 4 is properly pasted by pattern recognition based on the imaging pattern.

図10(a)は、CCDカメラ等の撮像機器によって撮影された基準となるパターンを示したもので、搬送テーブル1に搭載されたガラス基板2の電極部上で、最外側の1本のリード線2aのみを外した位置に、ACF4が適正に位置決めされて貼付された状態を示している。   FIG. 10A shows a reference pattern photographed by an imaging device such as a CCD camera, and one outermost lead on the electrode portion of the glass substrate 2 mounted on the transport table 1. A state where the ACF 4 is properly positioned and pasted at a position where only the line 2a is removed is shown.

これに対し、図10(b)は、ACF4が何らかの理由により位置ずれを引き起して、外側に2本のリード線2aを外した不適切な状態で貼付された撮像パターンを示したものである。   On the other hand, FIG. 10 (b) shows an imaging pattern pasted in an inappropriate state in which the ACF 4 causes misalignment for some reason and the two lead wires 2a are removed outside. is there.

貼付状態の良否は、図10(a)に示された撮像パターンを基準とし、実際にACF4が貼付された図10(b)に示された撮像パターンとの対比により、その形状の一致率(マッチング率)をたとえば面積上で算出し、予め設定された基準の一致率に到達しているか否かにより判定する。   The quality of the affixed state is based on the imaging pattern shown in FIG. 10A, and the matching rate of the shape (by comparison with the imaging pattern shown in FIG. 10B in which ACF4 is actually applied) ( (Matching rate) is calculated on the area, for example, and it is determined by whether or not a predetermined reference matching rate is reached.

撮像機器が、ACF4が貼付された電極部を撮影して得られる撮像パターンの明度(明るさ)は、一般的には、明るい方から、銅箔や金メッキ等からなるリード線2a部分、ACF4部分、背景となるガラス基板2の順となる。   The brightness (brightness) of the imaging pattern obtained by the imaging device photographing the electrode part to which the ACF 4 is attached is generally from the brighter side, the lead wire 2a portion made of copper foil or gold plating, the ACF 4 portion, etc. The order of the glass substrate 2 is the background.

図10(a)及び図10(b)にそれぞれ示したように、貼付されたACF4上の長手方向、すなわちX−X線で示す方向に撮像パターンを走査したとすれば、その明度パターンは、それぞれ図11(aa)、図11(ba)に示したようになる。   As shown in FIGS. 10 (a) and 10 (b), if the imaging pattern is scanned in the longitudinal direction on the attached ACF 4, that is, the direction indicated by the XX line, the brightness pattern is These are as shown in FIG. 11 (aa) and FIG. 11 (ba), respectively.

そこで、ACF4の明度信号を検出すべく閾値レベルSを設け、その閾値レベルSを基準とする2値化信号をそれぞれ生成すると、図11(ab)、図11(bb)に示したパターンが得られる。   Therefore, when a threshold level S is provided to detect the brightness signal of ACF4, and binarized signals based on the threshold level S are generated, the patterns shown in FIGS. 11 (ab) and 11 (bb) are obtained. It is done.

ACF4が適正に貼付されたとされる図11(ab)に示す2値化信号のパターンを基準とし、実際に貼付された図11(bb)の被判定パターンとの面積の対比から、たとえばパターンにおける形状の一致率が面積上で95%を超えたとき、ACF4は適正に貼付されたと判定する。   Based on the pattern of the binarized signal shown in FIG. 11 (ab) where the ACF 4 is properly attached, the comparison of the area with the judgment target pattern of FIG. 11 (bb) actually attached, for example, in the pattern When the coincidence rate of the shape exceeds 95% on the area, it is determined that the ACF 4 is properly attached.

特開2003−142900号公報JP 2003-142900 A

上記のように、従来のテープ部材の貼付良否判定装置及びテープ部材の貼付良否判定方法において、ガラス基板2面にACF4が適正に貼付されているか否かは、ACF4の明度内に閾値レベルSを設定し、被判定パターンと基準パターンとの形状の一致率の算出により判定された。   As described above, in the conventional tape member application quality determination device and tape member application quality determination method, whether or not the ACF 4 is appropriately applied to the surface of the glass substrate 2 is determined by setting the threshold level S within the brightness of the ACF 4. It was determined by calculating the coincidence rate of the shape of the pattern to be determined and the reference pattern.

しかしながら、図11(ab)と図11(bb)との対比で分かるように、図11(bb)では、実際にはACF4が貼付されていないにもかかわらず、貼付されるべき領域内に位置する一本のリード線2aが、あたかもACF4が貼付されているかのように残存してしまい、その結果、わずか(Δr1+Δr2)の領域のみが一致率判定の算定根拠となり、正確な貼付判定結果が得られないケースが発生したので、何らかの対応が要望されていた。   However, as can be seen from the comparison between FIG. 11 (ab) and FIG. 11 (bb), in FIG. 11 (bb), although the ACF 4 is not actually attached, the position is within the region to be attached. One lead wire 2a remains as if the ACF4 is stuck, and as a result, only a small area (Δr1 + Δr2) becomes the basis for calculating the coincidence rate, and an accurate sticking judgment result is obtained. Since some cases were not possible, some kind of response was requested.

そこで本発明は、ACF等のテープ部材の貼付状態の良否を、より適切かつ容易に判定可能なテープ部材の貼付良否判定装置及び貼付良否判定方法を提供することを目的とする。   Accordingly, an object of the present invention is to provide a tape member sticking pass / fail judgment device and a sticking pass / fail judgment method capable of more appropriately and easily judging the sticking state of a tape member such as an ACF.

本発明のテープ部材の貼付良否判定装置は、基板電極部に貼付のテープ部材の明度レベルまたは基板電極部のリード線の明度レベルを間に、上下に対をなす明度閾値レベルを設定する閾値レベル設定手段と、前記テープ部材が貼付された基板電極部の撮像パターンから、前記対をなす明度閾値レベル間の映像を抽出する抽出手段と、この抽出手段で抽出された映像パターンと、この影像パターンに対応して予め設定された基準パターンとの間の形状の一致率を算出する演算手段と、この演算手段によって算出された形状の一致率が予め設定された基準値を超えたか否かを判定する判定手段とを具備することを特徴とする。   The tape member sticking pass / fail judgment device of the present invention is a threshold level for setting a lightness threshold level that is paired up and down with the lightness level of the tape member stuck on the substrate electrode portion or the lightness level of the lead wire of the substrate electrode portion in between. A setting means; an extraction means for extracting an image between the paired brightness threshold levels from an imaging pattern of the substrate electrode portion to which the tape member is affixed; a video pattern extracted by the extraction means; and an image pattern And calculating means for calculating a matching rate of a shape with a reference pattern set in advance corresponding to the above, and determining whether or not the matching rate of the shape calculated by the calculating means exceeds a preset reference value And a determination means for performing the above.

また、本発明のテープ部材の貼付良否判定方法は、基板電極部に貼付のテープ部材の明度レベルまたは基板電極部のリード線の明度レベルを間に、上下に対をなす明度閾値レベルを設定する閾値レベル設定工程と、前記テープ部材が貼付された基板電極部の撮像パターンから、前記対をなす明度閾値レベル間の映像を抽出する抽出工程と、この抽出工程で抽出された映像パターンと、この影像パターンに対応して予め設定された基準パターンとの間の形状の一致率を算出する演算工程と、この演算工程によって算出された形状の一致率が予め設定された基準値を超えたか否かを判定する判定工程とからなることを特徴とする。   The tape member sticking quality determination method of the present invention sets a lightness threshold level that makes a pair in the vertical direction with the lightness level of the tape member stuck on the substrate electrode part or the lightness level of the lead wire of the substrate electrode part in between. A threshold level setting step, an extraction step of extracting an image between the paired lightness threshold levels from the imaging pattern of the substrate electrode portion to which the tape member is attached, a video pattern extracted in the extraction step, and A calculation step of calculating a matching rate of a shape with a reference pattern set in advance corresponding to the image pattern, and whether or not the matching rate of the shape calculated by the calculation step exceeds a preset reference value And a determination step of determining the

本発明のテープ部材の貼付良否判定装置及び貼付良否判定方法によれば、基板電極部に貼付のテープ部材の明度レベルまたは基板電極部のリード線の明度レベルを間に、上下に対をなす明度閾値レベルを設定し、この上下に対をなす明度閾値レベル間の映像のみを抽出するので、たとえばテープ部材を抽出するのにリード線を誤って抽出するのを排除して、形状の一致率をより正確に算出することができ、貼付状態の良否判定を適切に行うことができる。   According to the tape member sticking pass / fail judgment device and the sticking pass / fail judgment method of the present invention, the brightness that makes a pair in the vertical direction with the brightness level of the tape member stuck to the substrate electrode part or the brightness level of the lead wire of the substrate electrode part in between Since the threshold level is set and only the video between the brightness threshold levels paired up and down is extracted, for example, it is excluded that the lead wire is mistakenly extracted to extract the tape member, and the shape matching rate is increased. It is possible to calculate more accurately, and it is possible to appropriately determine whether the pasting state is good or bad.

以下、本発明のテープ部材の貼付良否判定装置及び貼付良否判定方法の一実施例を図1ないし図8を参照して詳細に説明する。なお、図9ないし図11に示した従来の構成と同一構成には同一符号を付して詳細な説明は省略する。   DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a tape member sticking quality determination device and a sticking quality determination method according to the present invention will be described in detail with reference to FIGS. The same components as those of the conventional configuration shown in FIGS. 9 to 11 are denoted by the same reference numerals, and detailed description thereof is omitted.

図1は、本発明に係るテープ部材の貼付良否判定装置の第1の実施例を示した構成図で、図2は図1に示した認識機器の詳細構成図である。また図3は、図1及び図2に示した撮像機器による撮像パターンを示したもので、図4及び図5は、認識機器における良否判定動作を説明するためのパターン図、図6はこの第1の実施例における貼付良否判定方法を説明したフローチャートである。   FIG. 1 is a block diagram showing a first embodiment of a tape member sticking quality determination apparatus according to the present invention, and FIG. 2 is a detailed block diagram of the recognition device shown in FIG. 3 shows an imaging pattern by the imaging device shown in FIGS. 1 and 2, FIGS. 4 and 5 are pattern diagrams for explaining the pass / fail judgment operation in the recognition device, and FIG. It is the flowchart explaining the sticking quality determination method in 1 Example.

すなわち、図1において、テープ部材であるACF4を電極部に貼付した基板、すなわち薄いガラス基板2は搬送テーブル1上に位置決めされて載置されている。   That is, in FIG. 1, a substrate on which an ACF 4 as a tape member is attached to an electrode portion, that is, a thin glass substrate 2 is positioned and placed on the transport table 1.

ガラス基板2の上方に設置されたCCDカメラ等の撮像機器5は、光源6からの照射光に基づきガラス基板2の電極部を撮影し、その撮影によるアナログ映像信号は、図2に示す構成からなる認識機器7のアナログ/デジタル(A/D)変換回路71に供給される。   An imaging device 5 such as a CCD camera installed above the glass substrate 2 images the electrode portion of the glass substrate 2 based on the irradiation light from the light source 6, and the analog video signal obtained by the imaging is based on the configuration shown in FIG. To the analog / digital (A / D) conversion circuit 71 of the recognition device 7.

撮像機器5は、搬送テーブル1上において、ACF4が適正位置に貼付されたガラス基板2の電極部を撮影し、図3(a)に示すアナログ映像信号からなる基準撮像パターンを認識機器7のA/D変換回路71に供給し、続いて供給される貼付良否判定対象のガラス基板2を撮影し、たとえば図3(b)に示す同じくアナログ映像信号からなる撮像パターンを認識機器7のA/D変換回路71に供給する。   The imaging device 5 photographs the electrode part of the glass substrate 2 on which the ACF 4 is pasted on an appropriate position on the transport table 1, and detects the reference imaging pattern composed of the analog video signal shown in FIG. The glass substrate 2 that is supplied to the / D conversion circuit 71 and is subsequently supplied and is determined to be pasted or rejected is photographed. For example, an imaging pattern consisting of analog video signals shown in FIG. This is supplied to the conversion circuit 71.

A/D変換回路71は、順次供給される上記各アナログ映像信号をデジタル信号に変換し、CPU(抽出手段、演算手段、判定手段)72を介してRAM等で構成されたメモリ回路73に供給し記憶する。   The A / D conversion circuit 71 converts each analog video signal supplied sequentially into a digital signal and supplies it to a memory circuit 73 constituted by a RAM or the like via a CPU (extraction means, calculation means, determination means) 72. And remember.

次に、CPU72は、メモリ回路73に記憶された図3(a)に示す撮像パターンを読み出し、撮像パターン中のACF4を長手方向に縦断するX−X方向に走査して、図4(aa)に示す基準明度パターンを生成する。   Next, the CPU 72 reads the image pickup pattern shown in FIG. 3A stored in the memory circuit 73, scans the ACF 4 in the image pickup pattern in the XX direction longitudinally cut in the longitudinal direction, and FIG. 4 (aa). The standard brightness pattern shown in FIG.

CPU72には閾値レベル設定回路(閾値レベル設定手段)74が接続されていて、その閾値レベル設定回路74には、図4(aa)に示すように、ガラス基板2の電極部に貼付されたACF4の明度レベルMtを間に、上下に対をなす、明度閾値レベルSu,Sdの値が予め設定されている。   A threshold level setting circuit (threshold level setting means) 74 is connected to the CPU 72. The threshold level setting circuit 74 has an ACF 4 attached to the electrode portion of the glass substrate 2 as shown in FIG. Values of brightness threshold levels Su and Sd, which are paired up and down with the brightness level Mt between, are preset.

そこで、CPU72は、閾値レベル設定回路74に設定された明度閾値レベルSu,Sdに基づき、基準明度パターンからその明度閾値レベルSu,Sd間のデジタル映像信号、すなわち図4(ab)に示す2値化信号を生成して、メモリ回路73に供給記憶する。   Therefore, the CPU 72, based on the lightness threshold levels Su and Sd set in the threshold level setting circuit 74, the digital video signal between the lightness threshold levels Su and Sd from the reference lightness pattern, that is, the binary shown in FIG. The signal is generated and supplied to the memory circuit 73 for storage.

次にCPU72は、同様にメモリ回路73に記憶された貼付良否判定対象の撮像パターンを読み出し、その撮像パターン中の同じくACF4を長手方向に縦断するX−X方向に走査して、図4(ba)に示す被判定用の明度パターンを得るとともに、閾値レベル設定回路74に設定された対をなす明度閾値レベルSu,Sdに基づき、図4(bb)に示すように、明度閾値レベルSu,Sd間の2値化信号を生成する。   Next, the CPU 72 similarly reads out the imaging pattern of the sticking pass / fail judgment target stored in the memory circuit 73, scans the ACF 4 in the imaging pattern in the XX direction longitudinally cut in the longitudinal direction, and FIG. ), And based on the paired brightness threshold levels Su and Sd set in the threshold level setting circuit 74, as shown in FIG. 4B, the brightness threshold levels Su and Sd are obtained. A binarized signal between them is generated.

そこで、CPU72は、図4(ab)に示された基準パターンをメモリ回路73から読み出し、演算により、図4(bb)に示されたパターンとの形状の一致率(マッチング率)を面積上で算出し、その算出した一致率(α)が予め設定された基準値(β)、たとえば95%を超えたとき、そのガラス基板2にはACF4が良好に貼付されたものと判定し、ガラス基板2を次の電子部品3の接続搭載工程へと搬送供給する。   Therefore, the CPU 72 reads the reference pattern shown in FIG. 4 (ab) from the memory circuit 73, and calculates the matching rate (matching rate) of the shape with the pattern shown in FIG. When the calculated coincidence rate (α) exceeds a preset reference value (β), for example, 95%, it is determined that the ACF 4 is satisfactorily adhered to the glass substrate 2, and the glass substrate 2 is conveyed and supplied to the connection mounting step of the next electronic component 3.

CPU72において、形状の一致率が95%(基準値(β))に達しないガラス基板2は、ACF4が適正位置に貼付されてないものと判定され、その旨、I/O(入出力)回路75を介して表示器8に表示されて報知されるとともに、当該ガラス基板2は不良品として除外される。   In the CPU 72, it is determined that the glass substrate 2 whose shape coincidence rate does not reach 95% (reference value (β)) is that the ACF 4 is not pasted at an appropriate position, so that an I / O (input / output) circuit is provided. In addition to being displayed on the display 8 via 75, the glass substrate 2 is excluded as a defective product.

つまり、この実施例によれば、図4(bb)に示されたパターンと図4(ab)に示されたパターンとの比較において、テープ部材の貼付領域は、図4(bb)に示すように、リード線2aの映像パターンを排除し、領域ΔRの適正な差領域を形状における一致率判定の算定根拠とするので、貼付パターンの一致率を適正に算出することができる。   That is, according to this embodiment, in the comparison between the pattern shown in FIG. 4 (bb) and the pattern shown in FIG. 4 (ab), the sticking area of the tape member is as shown in FIG. 4 (bb). In addition, since the video pattern of the lead wire 2a is excluded and the appropriate difference region of the region ΔR is used as the basis for determining the match rate in the shape, the match rate of the pasting pattern can be calculated appropriately.

上記のように、この第1の実施例のテープ部材の貼付良否判定装置は、認識機器7において、ACF4の明度レベルMtを間に挟んで設定された閾値レベルSu,Sdに基づき、撮像パターン中のACF4のみを抽出するように構成したので、明度閾値レベルSu,Sdに基づき、テープ部材であるACF4が真に貼付された領域を適切に抽出し、基準となるパターンとの比較により、貼付状態の良否判定を適正かつ良好に行うことができる。   As described above, the tape member sticking pass / fail judgment device of the first embodiment is based on the threshold levels Su and Sd set with the brightness level Mt of the ACF 4 in the recognition device 7. Since only the ACF 4 of the tape member is extracted based on the lightness threshold levels Su and Sd, the region where the ACF 4 as the tape member is truly attached is appropriately extracted and compared with the reference pattern. Can be determined appropriately and satisfactorily.

なお、上記説明では、ガラス基板2のACF4の明度レベルMtを間に、上下に対をなす明度閾値レベルSu,Sdが予め閾値レベル設定回路74に設定されている旨説明したが、ACF4ではなく、ガラス基板2のリード線2aの明度レベルMdを間に挟んで上下に設定された閾値レベルSu,Sdを閾値レベル設定回路74に予め設定し、リード線2aにおける貼付パターンの良否判定から、逆に、ACF4側の貼付状態の良否を判定するように構成することもできる。   In the above description, the brightness threshold levels Su and Sd that are paired up and down with the brightness level Mt of the ACF 4 of the glass substrate 2 are set in advance in the threshold level setting circuit 74, but not the ACF 4 The threshold levels Su and Sd set up and down with the lightness level Md of the lead wire 2a of the glass substrate 2 sandwiched therebetween are preset in the threshold level setting circuit 74, and from the pass / fail judgment of the pasting pattern on the lead wire 2a, the reverse In addition, it may be configured to determine whether the pasting state on the ACF 4 side is good or bad.

すなわち、CPU72に接続された閾値レベル設定回路74には、図5(aa)に示すように、ガラス基板2の電極部のリード線2aの明度レベルMdを間に、上下に対をなす、明度閾値レベルSu,Sdが予め設定されている。   That is, in the threshold level setting circuit 74 connected to the CPU 72, as shown in FIG. 5 (aa), the lightness level Md of the lead wire 2a of the electrode part of the glass substrate 2 is paired up and down. Threshold levels Su and Sd are set in advance.

そこで、CPU72は、その明度閾値レベルSu,Sdに基づき、基準明度パターンからその明度閾値レベルSu,Sd間のデジタル映像信号を抽出し、図5(ab)に示す2値化信号を生成して、メモリ回路73に供給記憶する。   Therefore, the CPU 72 extracts a digital video signal between the lightness threshold levels Su and Sd from the reference lightness pattern based on the lightness threshold levels Su and Sd, and generates a binarized signal shown in FIG. , And supplied to and stored in the memory circuit 73.

次にCPU72は、同様にメモリ回路73に記憶された貼付良否判定対象であるガラス基板2の撮像パターンを読み出し、撮像パターン中のACF4を長手方向に縦断するX−X方向に走査して、図5(ba)に示す明度パターンを得るとともに、閾値レベル設定回路74に設定された対をなす明度閾値レベルSu,Sdに基づき、その明度閾値レベルSu,Sd間のデジタル映像信号を抽出し、図5(bb)に示す2値化信号を生成する。   Next, the CPU 72 similarly reads out the imaging pattern of the glass substrate 2 that is the object of pasting determination stored in the memory circuit 73 and scans the ACF 4 in the imaging pattern in the XX direction longitudinally cut in the longitudinal direction. 5 (ba) is obtained, and a digital video signal between the lightness threshold levels Su and Sd is extracted based on a pair of lightness threshold levels Su and Sd set in the threshold level setting circuit 74. The binarized signal shown in 5 (bb) is generated.

そこで、CPU72は、図5(ab)に示された基準パターンをメモリ回路73から読み出し、図5(bb)に示されたパターンとの形状の一致率を演算により算出し、その算出した一致率(α)が予め設定された基準値(β)、たとえば95%を超えたとき、そのガラス基板2にはACF4が良好に貼付されたものと判定し、ガラス基板2を次の電子部品3の接続搭載工程へと搬送供給する。   Therefore, the CPU 72 reads out the reference pattern shown in FIG. 5 (ab) from the memory circuit 73, calculates the matching rate of the shape with the pattern shown in FIG. 5 (bb) by calculation, and the calculated matching rate. When (α) exceeds a preset reference value (β), for example, 95%, it is determined that the ACF 4 is satisfactorily adhered to the glass substrate 2, and the glass substrate 2 is replaced with the next electronic component 3. Transport and supply to the connection mounting process.

CPU72において、形状の一致率が基準値(β)である95%に達しないと判定されたガラス基板2は、ACF4の貼付位置が不適切であると判定し、その旨、I/O回路75を介して表示器8に表示して報知するので、当該ガラス基板2を不良品として製造工程から除外することができる。   In the CPU 72, the glass substrate 2 determined that the shape coincidence rate does not reach the reference value (β) of 95% is determined that the ACF 4 attaching position is inappropriate. Therefore, the glass substrate 2 can be excluded from the manufacturing process as a defective product.

次に、上記説明の構成によるテープ部材の貼付良否判定装置における良否判定手順を図6に示したフローチャートを参照して以下説明する。   Next, the pass / fail determination procedure in the tape member sticking pass / fail determination device having the above-described configuration will be described with reference to the flowchart shown in FIG.

まず、ステップ61において、テープ部材であるACF4が貼付されたガラス基板2の電極部を撮像機器5が撮像し、その撮像パターンを取込み、認識機器7のメモリ回路73に記憶する。   First, in step 61, the imaging device 5 captures an image of the electrode portion of the glass substrate 2 to which the ACF 4 as the tape member is attached, captures the imaging pattern, and stores it in the memory circuit 73 of the recognition device 7.

次に、ステップ62において、テープ部材であるACF4またはリード線2aの明度レベル(Mt,Md)の上下に明度閾値レベルSu,Sdを設定する。   Next, in step 62, brightness threshold levels Su and Sd are set above and below the brightness level (Mt, Md) of the tape member ACF4 or lead wire 2a.

次に、ステップ63において、メモリ回路73に記憶された撮像パターンを読み出し、各明度閾値レベルSu,Sd間の映像を抽出し、続くステップ64において、その抽出された映像パターンを予め設定された基準パターンとの形状のマッチング率(α)を算出する。   Next, in step 63, the imaging pattern stored in the memory circuit 73 is read out, and an image between the respective lightness threshold levels Su and Sd is extracted. In the subsequent step 64, the extracted image pattern is set as a preset reference. The matching rate (α) of the shape with the pattern is calculated.

次のステップ65において、算出されたマッチング率(α)が予め設定された基準値(β:たとえば面積上で95%)より大きいか否かを判定し、基準値(β)を超えたとき(YES)には、テープ部材であるACF4は適正に貼付されたものと判定して終了する。   In the next step 65, it is determined whether or not the calculated matching rate (α) is larger than a preset reference value (β: 95% on the area, for example), and when the reference value (β) is exceeded ( YES), it is determined that the ACF 4 as the tape member has been properly applied, and the process ends.

ここで、面積のマッチング率(α)が基準値(β)より小さい(NO)と判定されたときには、ステップ66に移行し、表示器8にその旨表示されて報知され、ステップ67にて、そのガラス基板2は不良貼付基板として抽出され、製造工程から除外される。   Here, when it is determined that the area matching rate (α) is smaller than the reference value (β) (NO), the routine proceeds to step 66, where it is displayed and notified, and at step 67, The glass substrate 2 is extracted as a defective pasted substrate and excluded from the manufacturing process.

上記のように、この第1の実施例のテープ部材の貼付良否判定装置及び良否判定方法では、認識機器7において、テープ部材であるACF4あるいはリード線2aの明度(Mt,Md)を間に挟んだ閾値レベルSu,Sdに基づき、撮像パターン中のACF4あるいはリード線2aのみの映像が抽出されるので、テープ部材が所定領域に貼付されているか否かを的確に判定することができる。   As described above, in the tape member sticking quality determination device and the quality determination method according to the first embodiment, the recognition device 7 sandwiches the lightness (Mt, Md) of the ACF 4 or the lead wire 2a as the tape member. On the basis of the threshold levels Su and Sd, an image of only the ACF 4 or the lead wire 2a in the imaging pattern is extracted, so it is possible to accurately determine whether or not the tape member is stuck on a predetermined area.

なお、上記図1ないし図6により説明した実施例では、撮像機器5により得られた撮像パターンでは、その明度(明るさ)がリード線2a部分、ACF4部分、背景となるガラス基板2の順となるものとして説明したが、ガラス基板2等の基板の材質の種類等によっては、明度の順がガラス基板2、リード線2a、ACF4等のテープ部材の順となることも考えられる。   In the embodiment described with reference to FIGS. 1 to 6, in the imaging pattern obtained by the imaging device 5, the brightness (brightness) is in the order of the lead wire 2 a part, the ACF 4 part, and the background glass substrate 2. As described above, depending on the type of the material of the substrate such as the glass substrate 2, the order of brightness may be the order of the glass substrate 2, the lead wire 2a, the ACF4, and the like tape member.

映像パターンは、テープ部材が適正に貼付されたか否かを判定するための根拠となるものであるが、テープ部材あるいはリード線2aの明度(Mt,Md)を間に挟んだ閾値レベルSu,Sdに基づき、形状の一致率を算出するためのパターンを得るので、映像パターンを形成する各部材の明るさが異なる組み合わせとなっても、テープ部材の貼付状態の良否を適切に判定することができる。   The video pattern is a basis for determining whether or not the tape member is properly applied, but threshold levels Su and Sd sandwiching the lightness (Mt, Md) of the tape member or the lead wire 2a. Since the pattern for calculating the coincidence rate of the shape is obtained based on the above, even if the brightness of each member forming the video pattern is a different combination, it is possible to appropriately determine whether the tape member is stuck or not. .

図7及び図8は、ガラス基板2の明度レベルがリード線2aの明度レベルを越えているときであっても、テープ部材貼付状態の良否を適切に判定できる本発明のテープ部材の貼付良否判定装置及び貼付良否判定方法の第2の実施例を説明した撮像パターン図である。   FIGS. 7 and 8 show whether or not the tape member of the present invention can be properly applied even when the lightness level of the glass substrate 2 exceeds the lightness level of the lead wire 2a. It is the imaging pattern figure explaining the 2nd Example of the apparatus and the sticking pass / fail determination method.

すなわち、図7は第1の実施例で示した図4に、また図8は同じく第1の実施例で示した図5に対応したもので、明度閾値レベルSu,SdがそれぞれACF4及びガラス基板2のリード線2aの各明度レベルMt,Mdを間に上下に設定されている。   That is, FIG. 7 corresponds to FIG. 4 shown in the first embodiment, and FIG. 8 corresponds to FIG. 5 shown in the first embodiment, and the brightness threshold levels Su and Sd are respectively ACF 4 and glass substrate. The brightness levels Mt and Md of the second lead wire 2a are set up and down.

従って、たとえば図7(ab)と図7(bb)との対比から分かるように、図4(bb)に示したパターンと同様に、基準明度パターンと良否判定対象基板のパターンとの間に、明確な差(ΔR)が形成される。   Therefore, for example, as can be seen from the comparison between FIG. 7 (ab) and FIG. 7 (bb), like the pattern shown in FIG. 4 (bb), between the reference brightness pattern and the pattern of the pass / fail judgment target substrate, A clear difference (ΔR) is formed.

また、ガラス基板2のリード線2aに明度閾値レベルSu,Sdを設定した場合においても、図8(bb)に示したように、図5(bb)に示したパターンと同様に、明確に2本のリード線2aを抽出して、1本のリード線2aからなる図8(ab)との間に明確な差異を形成するので、適切な良否判定を行うことができる。   Further, even when the lightness threshold levels Su and Sd are set for the lead wire 2a of the glass substrate 2, as shown in FIG. 8 (bb), it is clearly 2 like the pattern shown in FIG. 5 (bb). Since the two lead wires 2a are extracted and a clear difference is formed with respect to FIG. 8 (ab) consisting of one lead wire 2a, an appropriate quality determination can be made.

このように、たとえガラス基板2自体の明度が変化して、ACF4等のテープ部材及びリード線2a等の明度レベルの組み合わせが変化したとしても、テープ部材の貼付状態の良否を適正に判定できるものであり、上記実施例を液晶表示パネル等の製造工程に採用して実用上優れた効果を発揮することができる。   Thus, even if the lightness of the glass substrate 2 itself changes and the combination of the lightness levels of the tape member such as ACF4 and the lead wire 2a changes, it is possible to properly determine whether the tape member is attached or not. Thus, the above-described embodiment can be adopted in a manufacturing process of a liquid crystal display panel and the like, and a practically excellent effect can be exhibited.

図1(a)は、本発明によるテープ部材の貼付良否判定装置の第1の実施例を示す構成図である。FIG. 1A is a block diagram showing a first embodiment of a tape member sticking quality determination device according to the present invention. 図1に示した認識機器7の詳細構成図である。It is a detailed block diagram of the recognition apparatus 7 shown in FIG. 図3(a)は、図1及び図2に示した撮像機器により撮影された基準パターン図、図3(b)は、図1及び図2に示した撮像機器により撮影された貼付状態の良否判定対象基板の撮影パターン図である。FIG. 3A is a reference pattern diagram photographed by the imaging device shown in FIGS. 1 and 2, and FIG. 3B is a pass / fail state of the pasting state photographed by the imaging device shown in FIGS. It is a photography pattern figure of a substrate for judgment. 図4はテープ部材の明度に抽出レベルを設定したもので、図4(aa)は、図3(a)のパターンの明度パターン、図4(ab)は、図4(aa)の2値化パターン図、図4(ba)は、図3(b)のパターンの明度パターン、図4(bb)は、図4(ba)の2値化パターン図である。FIG. 4 shows an extraction level set for the brightness of the tape member. FIG. 4 (aa) shows the brightness pattern of the pattern of FIG. 3 (a), and FIG. 4 (ab) shows the binarization of FIG. 4 (aa). 4B is a lightness pattern of the pattern of FIG. 3B, and FIG. 4BB is a binarized pattern diagram of FIG. 4B. 図5は基板のリード線の明度に抽出レベルを設定したもので、図5(aa)は、図3(a)のパターンの明度パターン、図4(ab)は、図4(aa)の2値化パターン図、図4(ba)は、図3(b)のパターンの明度パターン、図4(bb)は、図4(ba)の2値化パターン図である。FIG. 5 shows an extraction level set for the brightness of the lead wire of the substrate. FIG. 5 (aa) shows the brightness pattern of the pattern in FIG. 3 (a), and FIG. 4 (ab) shows 2 in FIG. 4 (aa). FIG. 4 (ba) is a lightness pattern of the pattern of FIG. 3 (b), and FIG. 4 (bb) is a binary pattern diagram of FIG. 4 (ba). 図1及び図2に示した装置の動作を説明したフローチャートである。It is a flowchart explaining operation | movement of the apparatus shown in FIG.1 and FIG.2. 本発明のテープ部材の貼付良否判定装置及び貼付良否判定方法の第2の実施例を説明するもので、図4に示した図に対応し、基板の明度に抽出範囲を設定した場合のパターン図である。FIG. 10 is a diagram for explaining a second example of the tape member sticking pass / fail judgment device and the sticking pass / fail judgment method of the present invention, corresponding to the diagram shown in FIG. 4, and a pattern diagram when an extraction range is set for the brightness of the substrate It is. 本発明のテープ部材の貼付良否判定装置及び判定方法の第2の実施例を説明するもので、図5に示した図に対応し、基板の明度に抽出範囲を設定した場合のパターン図である。FIG. 10 is a pattern diagram for explaining a second embodiment of the tape member sticking quality determination apparatus and determination method according to the present invention, corresponding to the diagram shown in FIG. 5, when an extraction range is set for the brightness of the substrate. . 図9(a)は、従来のテープ部材の貼付良否判定装置の動作を説明する図示分解構成図、図9(b)は、図9(a)に示した貼付良否判定装置でテープ部材から離型紙を引き剥がす操作を説明した正面図である。FIG. 9 (a) is an exploded configuration diagram for explaining the operation of the conventional tape member sticking pass / fail judgment device, and FIG. 9 (b) is a part of the sticking pass / fail judgment device shown in FIG. 9 (a). It is a front view explaining operation which peels off a pattern paper. 図10(a)は、従来の撮像機器により撮影された基準パターン図、図10(b)は、従来の撮像機器により撮影された貼付状態の良否判定対象の基板の撮影パターン図である。FIG. 10A is a reference pattern diagram photographed by a conventional imaging device, and FIG. 10B is a photograph pattern diagram of a substrate to be determined as a pass / fail state in a pasted state photographed by a conventional imaging device. 図11はテープ部材の明度に抽出レベルを設定したもので、図11(aa)は、図10(a)のパターンの明度パターン、図11(ab)は、図11(aa)の2値化パターン図、図11(ba)は、図10(b)のパターンの明度パターン、図11(bb)は、図11(ba)の2値化パターン図である。FIG. 11 shows an extraction level set for the brightness of the tape member. FIG. 11 (aa) shows the brightness pattern of the pattern of FIG. 10 (a), and FIG. 11 (ab) shows the binarization of FIG. 11 (aa). FIG. 11 (ba) is a lightness pattern of the pattern of FIG. 10 (b), and FIG. 11 (bb) is a binarized pattern diagram of FIG. 11 (ba).

符号の説明Explanation of symbols

1 搬送テーブル
2 ガラス基板(基板)
2a リード線(電極部)
3 電子部品
3a 電極
4 ACF(テープ部材)
4a 離型紙
5 撮像機器
6 光源
7 認識機器
71 A/D変換器
72 CPU(抽出手段、演算手段、判定手段)
73 メモリ回路
74 閾値レベル設定回路(閾値レベル設定手段)
75 I/O回路
8 表示器
1 Transport table 2 Glass substrate (substrate)
2a Lead wire (electrode part)
3 Electronic component 3a Electrode 4 ACF (tape member)
4a Release paper 5 Imaging device 6 Light source 7 Recognition device 71 A / D converter 72 CPU (extraction means, calculation means, determination means)
73 Memory circuit 74 Threshold level setting circuit (threshold level setting means)
75 I / O circuit 8 indicator

Claims (2)

基板電極部に貼付のテープ部材の明度レベルまたは基板電極部のリード線の明度レベルを間に、上下に対をなす明度閾値レベルを設定する閾値レベル設定手段と、
前記テープ部材が貼付された基板電極部の撮像パターンから、前記対をなす明度閾値レベル間の映像を抽出する抽出手段と、
この抽出手段で抽出された映像パターンと、この影像パターンに対応して予め設定された基準パターンとの間の形状の一致率を算出する演算手段と、
この演算手段によって算出された形状の一致率が予め設定された基準値を超えたか否かを判定する判定手段と
を具備することを特徴とするテープ部材の貼付良否判定装置。
A threshold level setting means for setting a brightness threshold level that is paired up and down between the brightness level of the tape member affixed to the substrate electrode part or the brightness level of the lead wire of the substrate electrode part;
Extracting means for extracting an image between the paired lightness threshold levels from the imaging pattern of the substrate electrode part to which the tape member is attached;
A computing means for calculating a coincidence rate of the shape between the video pattern extracted by the extracting means and a reference pattern set in advance corresponding to the image pattern;
A tape member adhering / defective determining device, comprising: a determining unit configured to determine whether or not the matching rate of the shape calculated by the calculating unit exceeds a preset reference value.
基板電極部に貼付のテープ部材の明度レベルまたは基板電極部のリード線の明度レベルを間に、上下に対をなす明度閾値レベルを設定する閾値レベル設定工程と、
前記テープ部材が貼付された基板電極部の撮像パターンから、前記対をなす明度閾値レベル間の映像を抽出する抽出工程と、
この抽出工程で抽出された映像パターンと、この影像パターンに対応して予め設定された基準パターンとの間の形状の一致率を算出する演算工程と、
この演算工程によって算出された形状の一致率が予め設定された基準値を超えたか否かを判定する判定工程と
からなることを特徴とするテープ部材の貼付良否判定方法。
A threshold level setting step for setting a brightness threshold level paired up and down between the brightness level of the tape member affixed to the substrate electrode portion or the brightness level of the lead wire of the substrate electrode portion;
An extraction step of extracting an image between the paired brightness threshold levels from the imaging pattern of the substrate electrode part to which the tape member is attached,
A calculation step of calculating a coincidence rate of the shape between the video pattern extracted in the extraction step and a reference pattern set in advance corresponding to the image pattern;
A tape member adhering / defective determining method comprising: a determining step that determines whether or not the coincidence rate of the shape calculated by the calculating step exceeds a preset reference value.
JP2006340990A 2006-12-19 2006-12-19 Tape member sticking pass / fail judgment device and tape member sticking pass / fail judgment method Active JP5301094B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006340990A JP5301094B2 (en) 2006-12-19 2006-12-19 Tape member sticking pass / fail judgment device and tape member sticking pass / fail judgment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006340990A JP5301094B2 (en) 2006-12-19 2006-12-19 Tape member sticking pass / fail judgment device and tape member sticking pass / fail judgment method

Publications (2)

Publication Number Publication Date
JP2008151685A true JP2008151685A (en) 2008-07-03
JP5301094B2 JP5301094B2 (en) 2013-09-25

Family

ID=39653993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006340990A Active JP5301094B2 (en) 2006-12-19 2006-12-19 Tape member sticking pass / fail judgment device and tape member sticking pass / fail judgment method

Country Status (1)

Country Link
JP (1) JP5301094B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011007695A (en) * 2009-06-26 2011-01-13 Hitachi High-Technologies Corp Apparatus for detecting pasted state

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075366A (en) * 2001-09-04 2003-03-12 Shibaura Mechatronics Corp Device and method for inspecting substrate
JP2003142900A (en) * 2001-10-31 2003-05-16 Shibaura Mechatronics Corp Apparatus and method for judging correct lamination of tape member
JP2005301405A (en) * 2004-04-07 2005-10-27 Matsushita Electric Ind Co Ltd Adhesive tape sticking condition inspection device and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075366A (en) * 2001-09-04 2003-03-12 Shibaura Mechatronics Corp Device and method for inspecting substrate
JP2003142900A (en) * 2001-10-31 2003-05-16 Shibaura Mechatronics Corp Apparatus and method for judging correct lamination of tape member
JP2005301405A (en) * 2004-04-07 2005-10-27 Matsushita Electric Ind Co Ltd Adhesive tape sticking condition inspection device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011007695A (en) * 2009-06-26 2011-01-13 Hitachi High-Technologies Corp Apparatus for detecting pasted state

Also Published As

Publication number Publication date
JP5301094B2 (en) 2013-09-25

Similar Documents

Publication Publication Date Title
JP4495250B2 (en) Inspection apparatus and inspection method
JP2004006632A (en) Connection structure as well as forming method for circuit board and indicating device having connection structure for circuit board
JP5128699B1 (en) Wiring inspection method and wiring inspection apparatus
JP4273683B2 (en) ACF sticking presence / absence detection method
JP5301094B2 (en) Tape member sticking pass / fail judgment device and tape member sticking pass / fail judgment method
US7195682B2 (en) Method and apparatus for determining processing size of bonding material
JP2007151112A (en) Image sensor module and camera module package
JP2014021087A (en) Inspection device and module assembly device
JP2001021333A (en) Method for inspecting attachment quality of anisotropic conductive sheet and its device
JP3939159B2 (en) Tape member sticking state inspection device and tape member sticking device using the same
JP3974374B2 (en) Tape member sticking pass / fail judgment device and sticking pass / fail judgment method
JP2013145162A (en) Inspection device and module assembly apparatus
JP6205120B2 (en) Visibility evaluation apparatus for transparent base material, visibility evaluation program for transparent base material and computer-readable recording medium on which it is recorded, laminated body positioning device, laminated body positioning program, and computer on which it is recorded Readable recording medium and printed wiring board manufacturing method
JP3848292B2 (en) Electronic component mounting apparatus and electronic component mounting method
JP4987500B2 (en) Inspection apparatus and inspection method for tape-like member attached to substrate
JP2004354520A (en) Inspection method and inspecting apparatus
JP2012104543A (en) End portion detecting device of member mounted on fpd module, end portion detection method, and acf sticking device
JP2006210592A (en) Tape sticking method
JP2011054634A (en) Coat amount detector and coated amount detecting method
CN218388522U (en) Joining device
TW201411112A (en) Device for evaluating visibility of transparent substrate, device for positioning laminate, determination device, position detection device, device for evaluating surface state of metal foil, program, recording medium
WO2023189766A1 (en) Long film and connection structure production method
JP2006013541A (en) Component mounting equipment
JP4118904B2 (en) Component mounting equipment
JP3705129B2 (en) Insulating substrate inspection method and inspection apparatus

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090611

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110602

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110705

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110810

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120306

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120423

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121114

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121226

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130618

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130619

R150 Certificate of patent or registration of utility model

Ref document number: 5301094

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150