JP2008115031A - Testing apparatus of workpiece - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a testing apparatus of a workpiece suitable for inspecting whether a workpiece made of a transparent material is cleaved or not. <P>SOLUTION: A testing apparatus 15 to inspect whether material glass 2 is cleaved or not comprises an inspection light irradiation means 32 to irradiate the material glass 2 with inspection light L1 and a light-receiving means 33 to receive reflection light L2 from the material glass 2. Cleaving the material glass 2 forms cleaved surfaces 2C and 2D. The inspection light L1 enters into the material glass 2, is alternately reflected by the back surface 2B and the front surface 2A in the material glass 2 and is then reflected by the cleaved surface 2C before it passes out of the material glass 2 and is received by the light-receiving means 33. When the reflection light L2 is not received by the light-receiving means 33, it is determined that the material glass 2 is not completely cleaved. According to the present invention, the inspection light irradiation means 32 and the light-receiving means 33 can be arranged in proximity to each other in the front surface side of the material glass 2, thereby miniaturizing the structure of the inspection apparatus 15. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a workpiece inspection apparatus, and more particularly to a workpiece inspection apparatus suitable for inspecting whether or not a workpiece made of a transparent material has been cleaved.

Conventionally, a cleaving apparatus for cleaving a glass plate that is a brittle material is known. When cleaving glass with a cleaving device, first, a minute groove is formed by a mechanical cutter along the planned cleaving line in the glass, and a crack is generated from the groove by heating by irradiating CO2 laser light along the groove. The glass is broken according to the planned breaking line.
The glass cleaving described above requires a cleaving process at as high a speed as possible. However, if the moving speed of the laser beam is too high, a defective cleaving portion in which the glass is not cleaved completely may occur.
Therefore, conventionally, it is necessary to inspect whether or not the glass is completely cleaved according to the planned cutting line, and for example, Patent Document 1 has been proposed as such an inspection apparatus.
JP-A-10-323778

  By the way, in the inspection apparatus of Patent Document 1, the inspection light irradiation means is arranged on the upper surface side of the workpiece, and the camera for photographing the processed portion is arranged on the lower side of the workpiece. Therefore, the inspection apparatus disclosed in Patent Document 1 has a problem that the configuration of the inspection apparatus is complicated and large.

In view of the above-described circumstances, the present invention described in claim 1 is to inspect whether or not the workpiece is cleaved by irradiating inspection light onto the cut surface of the plate-like transparent workpiece. An inspection apparatus for an object, the inspection light irradiating means for irradiating the workpiece with inspection light, and the inspection light irradiation means when the inspection light is irradiated from the inspection light irradiation means to the workpiece. Light receiving means for receiving the reflected light reflected by the cross section, and the inspection light irradiating means and the light receiving means are arranged so as to be relatively moved parallel to the split cross section on the surface side of the workpiece.
According to a second aspect of the present invention, there is provided a workpiece inspection apparatus for inspecting whether or not the workpiece has been cleaved by irradiating inspection light onto a cut section of the plate-shaped transparent workpiece. The inspection light irradiating means for irradiating the workpiece with inspection light, and when the inspection light is irradiated from the inspection light irradiating means to the workpiece, it is reflected on the inner back surface of the workpiece. A light receiving means for receiving the reflected light, and the inspection light irradiating means and the light receiving means are arranged so as to move relatively in parallel to the split surface on the surface side of the work piece. Even when the inspection light is irradiated to the workpiece, it is determined that the split section is formed when the light receiving means cannot receive the reflected light.
In addition to the invention of claim 1 or claim 2, the invention described in claim 3 is arranged so that the inspection light from the inspection light irradiation means is irradiated from a direction orthogonal to the split surface. .

According to the configuration of the invention described in claim 1 and claim 2 described above, the inspection light irradiating means and the light receiving means can be arranged in close proximity to each other. Therefore, the configuration of the inspection apparatus is simplified, and the inspection apparatus can be downsized as compared with the conventional one.
Moreover, according to the structure of the invention described in claim 3, even if the cleaving line is orthogonal, the non-cleaving portion can be reliably detected.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, reference numeral 1 denotes a laser cleaving apparatus. The laser cleaving apparatus 1 is an apparatus that cleaves a material glass 2 as a brittle material into a square having a predetermined size. .
The laser cleaving apparatus 1 has a horizontal and flat mounting surface 3A, a processing table 3 that supports a raw material glass 2 formed in advance in a square shape on the mounting surface 3A, and one side of the processing table 3. A material table 4 disposed at an adjacent position and supporting the material glass 2, and a product table supporting a glass substrate 2 'as a product disposed at an adjacent position on the other side of the processing table 3 and carried out of the processing table 3. And 5.

  A large number of holes (not shown) are formed in the mounting surface 3A of the processing table 3, and the material glass 2 can be floated on the mounting surface 3A by ejecting air from the large number of holes when necessary. it can. On the other hand, the material glass 2 can be adsorbed and held on the mounting surface 3A by applying negative pressure to the numerous holes after the material glass 2 is mounted on the mounting surface 3A. Similar to the processing table 3, the mounting surfaces of the material table 4 and the product table 5 are provided with holes for supplying and discharging a large amount of air. When necessary, the material glass 2 or the glass substrate 2 'is adsorbed to the mounting surface. Alternatively, it is made to float on the mounting surface. In addition, a hole for ejecting air when necessary is provided between the tables serving as the conveying surfaces of the material glass 2 and the product glass 2 '.

Further, the laser cleaving apparatus 1 is independently moved in the XY directions on the horizontal plane by a laser oscillator 6 that oscillates the laser light L and a moving mechanism that will be described later, and directs the laser light L toward the material glass 2 on the processing table 3. A first processing head 7A and a second processing head 7B to be irradiated, and a light guide means 11 comprising a plurality of optical components for dividing and guiding the laser light L oscillated from the laser oscillator 6 to both processing heads 7A and 7B; It has.
The laser cleaving apparatus 1 has a plurality of suction pads 12A and 12B capable of sucking and holding the material glass 2 and the cleaved glass substrate 2 ′, and extends over the material table 4, the processing table 3 and the product table X. A frame-shaped conveying means 12 that is moved in the direction and a control device 13 that controls the operations of the conveying means 12, the laser oscillator 6, and the two processing heads 7A and 7B are provided. Note that an XYZ coordinate system is set based on the moving end of the first machining head 7A of the laser cleaving apparatus 1 in FIG. 1 downward, the rightward moving end in FIG. Each part is controlled in accordance with a machining program registered in the control device 13.

As shown in FIG. 2, the first machining head 7A and the second machining head 7B as the cleaving mechanism are configured to be rotatable, and a groove forming mechanism 14 and a material having a mechanical cutter 14A in each of the machining heads 7A and 7B. An inspection device 15 for inspecting whether or not the glass 2 has been broken is provided.
A pair of movable guide rails 16 and 16 'parallel to the Y direction are provided on the processing table 3, and the processing heads 7A and 7B are attached to the movable guide rails 16 and 16' so as to be movable in the Y direction. ing. The machining heads 7A and 7B are moved in the Y direction along the movable guide rails 16 and 16 ′ by the first moving mechanisms 17 and 17, respectively.
Further, both end portions of the movable guide rails 16 and 16 ′ are engaged with a pair of X-direction guide rails 18 and 18 ′ arranged with the processing table 3 interposed therebetween, and both the processing heads 7A and 7B are attached. The movable guide rails 16 and 16 ′ are moved in the X direction along the X direction guide rails 18 and 18 ′ by a second moving mechanism (not shown). The first moving mechanism 17 and the second moving mechanism are operated by the control device 13. The control device 13 can control the operations of the first moving mechanism 17 and the second moving mechanism to move the processing heads 7A and 7B in the XY directions on the horizontal plane.

As shown in FIG. 2, the first machining head 7A includes a bracket 21 that is movably engaged with the movable guide rail 16 in the Y direction, an annular member 22 that is rotatably supported by the bracket 21, and an annular member. A rectangular tube member 23 whose upper end is connected to the member 22 and whose axis is maintained in the vertical direction, a cylindrical lens 24 attached below the inner peripheral portion of the rectangular tube member 23, and the annular member 22 A reflecting mirror 25 connected to the bracket 21 in a state inclined upward is provided.
Further, as shown in FIG. 1, a beam homogenizer 26 is fixedly provided on the optical path of the laser beam L in front of the reflecting mirror 25 on the bracket 21 of the first processing head 7A. The laser light L oscillated from the laser oscillator 6 passes through the beam homogenizer 26 through the light guide means 11, so that the intensity distribution of the laser light L is formed in a top hat shape and about 5 degrees in the laser light L. A spread angle is given.
The laser light L transmitted through the beam homogenizer 26 is reflected vertically downward by the reflecting mirror 25 and then passes through the cylindrical lens 24 before being irradiated onto the material glass 2. The laser light L is transmitted through the cylindrical lens 24, and as shown in FIG. 3, is formed into a leaf-like cross-sectional shape of an elongated tree in the traveling direction (processing direction). By irradiating the material glass 2 with the laser light L having such a cross-sectional shape, the processing speed can be increased as compared with the case of processing the material glass 2 with the laser light L having a circular cross section. It can be done.

As will be described in detail later, a minute V-shaped groove M1 continuous with the mechanical cutter 14A is first formed over the entire area of the straight cutting line 101 set on the surface 2A of the material glass 2, and is made to follow the mechanical cutter 14A. Thus, the laser beam L is irradiated to the minute groove M1 while moving. When the minute groove M1 is heated by being irradiated with the laser beam L, the material glass 2 is cleaved when a crack based on the bottom of the groove reaches the back surface 2B.
The first machining head 7A and the second machining head 7B having the same configuration as the first machining head 7A constitute a cleaving mechanism for cleaving a crack from a minute groove M1 formed by the groove forming mechanism 14.
The integrated annular member 22 and square tube member 23 are linked to an actuator 27 provided on the upper portion of the bracket 21, and the operation of the actuator 27 is controlled by the control device 13. When the actuator 27 is actuated when necessary by the control device 13, the annular member 22 and the rectangular tube member 23 are rotated by a required angle with the vertical axis as the center of rotation.

The groove forming mechanism 14 is attached to the lower outer surface of the rectangular tube member 23 via a bracket 28, and the inspection device 15 is attached to the groove forming mechanism 14 at a position shifted by 180 degrees in the circumferential direction. Accordingly, the mechanical cutter 14A and the inspection device 15 are positioned at the front and rear positions across the optical path of the laser light L that passes through the position of the axis of the rectangular tube member 23.
By rotating the rectangular tube member 23 of the first machining head 7A by a required angle by the actuator 27, the mechanical cutter 14A, the laser beam L, and the inspection device 15 can be rotated in the horizontal plane while maintaining the above-described positional relationship. it can.
An elevating mechanism 31 is attached to the square tube member 23 via a bracket 28, and the mechanical cutter 14 </ b> A is raised and lowered by the elevating mechanism 31, and the operation of the elevating mechanism 31 is controlled by the control device 13. It has become so.
When the lifting mechanism 31 moves the mechanical cutter 14 </ b> A to the descending end in response to a command from the control device 13, the lower end of the mechanical cutter 14 </ b> A is positioned at a height that abuts on the surface 2 </ b> A of the material glass 2 on the processing table 3. It has become. In this state, when the first processing head 7A is moved by the first moving mechanism 17 or the second moving mechanism, the mechanical cutter 14A rolls to form a minute groove M1 continuous with the surface 2A of the material glass 2. (See FIG. 3).
Further, when the lifting mechanism 31 moves the mechanical cutter 14 </ b> A to the rising end according to a command from the control device 13, the lower end of the mechanical cutter 14 </ b> A is separated from the material glass 2. In this state, a groove cannot be formed in the material glass 2 by the mechanical cutter 14A.

Next, as shown in FIG. 2 and FIG. 3, the inspection device 15 irradiates the inspection light irradiating means 32 for irradiating the cleaving portion of the material glass 2 with the inspection light L <b> 1 and the inspection light irradiating means 32 to the material glass 2. The light receiving means 33 that receives the reflected light L2 when the irradiated inspection light L1 is reflected from the material glass 2, and the cleaved portion and the cleaved parts that are completely cleaved based on the reflected light L2 received by the light receiving means 33 And storage means 13A provided in the control device 13 for storing uncut portions that have not been performed (see FIG. 1).
The inspection light irradiating means 32 and the light receiving means 33 are connected to a bracket 34 connected to the lower end of the outer peripheral portion of the rectangular tube member 23 so as to be adjacent vertically. The inspection light irradiating means 32 irradiates the inspection light L <b> 1 in a direction orthogonal to the portion that becomes the planned cutting line 101 set on the surface 2 </ b> A of the material glass 2 and obliquely from above the surface 2 </ b> A of the material glass 2. It is supposed to be. Since the wavelength is transparent with respect to the material glass 2 as the brittle material and needs a certain level of strength and straightness, a laser beam is used as the inspection light L1. When the inspection light irradiation means 32 is operated by the control device 13, the inspection light irradiation means 32 irradiates the material glass 2 with laser light as the inspection light L1.

The light receiving means 33 is disposed adjacent to the inspection light irradiating means 32 at a position directly above it. As described above, in this embodiment, the inspection light irradiation means 32 and the light receiving means 33 are arranged on the upper side of the surface 2A of the material glass 2 and at positions close to the top and bottom.
The light receiving means 33 includes a photosensor that transmits an ON / OFF signal according to the amount of received reflected light L2, and the signal transmitted from the light receiving means 33 is transmitted to the control device 13. .
The inspection device 15 receives the reflected light L1 from the material glass 2 by the light receiving means 33 according to the following principle.
That is, when the portion of the planned cutting line 101 irradiated with the laser beam L of the cutting mechanism is completely cut from the groove to the back surface portion, as shown in FIG. A pair of vertical split sections 2C, 2D are formed along and slightly spaced apart.
When the inspection light L1 is irradiated toward the material glass 2 from the inspection light irradiation means 32 following the movement of the laser light L, the inspection light L1 enters the inside from the front surface 2A of the material glass 2, and the inner back surface. Reflected by 2B (see FIG. 4). Thereafter, the inspection light L1 is sequentially reflected by the inner surface 2A and the inner back surface 2B of the material glass 2 and then by the split section 2C, and then passes through the surface 2A of the material glass 2 as reflected light L2. The light receiving means 33 receives the light after going out of the material glass 2.
In this way, when the material glass 2 is cleaved according to the cleaving planned line 101 and a pair of cleaved sections 2C and 2D are generated, the reflected light L2 reflected by the cleaved section 2C is received by the light receiving means 33. It has become so.
In other words, the light receiving means 33 is disposed at a position where the reflected light L2 from the fractured surface 2C is obtained, and at a position close to the inspection light irradiation means 32.

On the other hand, when the part of the planned cutting line 101 is not cut, the above-described pair of split sections 2C and 2D are not generated at the part of the planned cutting line 101 in the material glass 2. That is, in this case, even if the inspection light L1 is applied to the material glass 2 from the inspection light irradiation means 32, the reflected light L2 reflected by the split section of the material glass 2 is received by the light receiving means 33. There is no.
Then, as schematically shown in FIG. 3, the laser beam L is irradiated to the position of the groove M <b> 1 formed by the mechanical cutter 14 </ b> A while moving the first processing head 7 </ b> A along the planned cutting line 101 of the material glass 2, Further, the inspection light L1 is irradiated from the inspection light irradiation means 32 to the material glass 2 following the movement of the laser light L. At that time, the light receiving means 33 always transmits the presence or absence of the reflected light L2 from the material glass 2 as a signal to the control device 13, and the control device 13 changes the signal indicating that the reflected light L2 is present to a signal indicating nothing. In this case, the storage means 13A stores the XY coordinate value of the position where the planned cutting line intersects with the inspection light at the changed timing, that is, the leading position of the non-cutting portion. As a result, the cleaved portion and the non-cleaved portion of the cleaved planned line 101 can be recognized.
As will be described later, the control device 13 re-irradiates the portion where the reflected light L2 was not obtained, that is, the uncut portion, with the laser light L based on the data stored in the storage means 13A. The entire region of the planned cutting line 101 can be completely cut.
The arrangement of the inspection light irradiation means 32 and the light receiving means 33 in the inspection device 15 may be reversed. As described above, the inspection device 15 includes the light receiving means 13 with an inexpensive photosensor without providing an expensive camera or an image processing device.
In addition, on the outer periphery of the lower end portion of the rectangular tube member 23 in the first processing head 7A, an air injection / suction nozzle 35 is disposed across the optical path of the laser light L. When cleaving the material glass 2, the atmosphere is sucked by the nozzle 35, and the cullet generated at the cleaving portion is sucked by the nozzle 35 and collected. Thereby, the cullet is prevented from being scattered around the processed portion.
The other second processing head 7B is configured in the same manner as the first processing head 7A described above, and the control device 13 controls the operations of both the processing heads 7A and 7B independently of each other. Yes.

In the above configuration, the material glass 2 is cleaved by the laser cleaving apparatus 1 as follows.
That is, when one rectangular material glass 2 is supplied to a predetermined position on the material table 4, the conveying means 12 is moved onto the material table 4, and the X-direction in the frame frame of the conveying means 12 is moved. The portion on the processing table 3 side on the upper surface of the material glass 2 is sucked and held by the suction pad 12A on one end side.
Thereafter, air is ejected from the plurality of holes described above between the material table 4, the mounting surface 3A of the processing table 3, and the two tables, and the material glass 2 on the material table 4 is floated by the air. In this state, the conveying means 12 holding the material glass 2 is moved in the X direction, whereby the material glass 2 held by the conveying means 12 is conveyed to a predetermined position on the processing table 3. Thereafter, the mounting surface of the material table 4 and the processing table 3 and the air ejection between the both tables are stopped, the holding state of the material glass 2 by the conveying means 12 is released, and the hole of the mounting surface 3A of the processing table 3 is released. Since the negative pressure is introduced into the glass, the material glass 2 is adsorbed and held on the placement surface 3A by the negative pressure.

The control device 13 operates the first moving mechanism 17, the second moving mechanism, and the actuator 27, thereby cutting the material glass 2 so that the mechanical cutter 14 </ b> A precedes the first processing head 7 </ b> A in the traveling direction. The mechanical cutter 14 </ b> A of the groove forming mechanism 14 is lowered to the descending end by the elevating mechanism 31, being positioned outside the extension line of the one end 101 a of the planned line 101. Similarly, the control device 13 positions the second processing head 7B outside the extension line of the one end 102a of the breaking line 102 of the material glass 2 so that the mechanical cutter 14A precedes, and the lifting mechanism 31 performs the first operation. (2) The mechanical cutter 14A of the machining head 7B is lowered to the lower end.
In this state, the control device 13 moves both processing heads 7A and 7B toward the planned cutting lines 101 and 102 via the first moving mechanism 17 and the second moving mechanism, and then follows the planned cutting lines 101 and 102. To move at a predetermined speed. Further, after moving both the processing heads 7A and 7B, the control device 13 operates the laser oscillator 6 to oscillate the laser light L, and from the inspection light irradiation means 32 of the both processing heads 7A and 7B to the material glass 2. The inspection light L1 is irradiated toward the head (see FIGS. 1 to 3).
As both the processing heads 7A and 7B are moved in this way, the mechanical cutter 14A of both processing heads 7A and 7B comes into contact with the one ends 101a and 102a of the planned cutting lines 101 and 102, and the other end 101b from there. A minute groove M1 is formed on the surface of the material glass 2 up to 102b, and the laser beam L is irradiated to the groove M1 thus formed while being moved. Further, the inspection light L1 is continuously irradiated from the inspection light irradiation means 32 toward the cleaving portion of the material glass 2 irradiated with the laser light L so as to follow the movement of the laser light L, and the light receiving means 33. Thus, the presence or absence of the reflected light L2 from the material glass 2 is transmitted to the control device 13 as a signal.

As described above, when a crack progresses from the minute continuous groove M1 formed in the material glass 2 and the material glass 2 is completely cleaved, the planned cutting line 101 of the material glass 2 as shown in FIG. , 102 are generated at the portions 102 and 102, and the reflected light L <b> 2 reflected by the split surface 2 </ b> C close to the inspection device 15 is detected by the light receiving means 33. On the other hand, when a non-cleavable portion in which the material glass 2 is not completely cleaved occurs, the split sections 2C and 2D cannot be formed, and thus the reflected light L2 cannot be obtained by the light receiving means 33.
Both processing heads 7A and 7B are temporarily moved by the control device 13 from one end 101a, 102a of the planned cutting lines 101, 102 to a position past the other ends 101b, 102b, and are continuously minute over the entire range of the two planned cutting lines 101, 102. The groove M1 is formed, and in this process, the laser beam L is irradiated to the minute groove M1 to heat the material glass 2 to perform the cleaving process. Further, when the detection of the reflected light L2 is interrupted by the light receiving means 33 of the inspection device 15, that is, when an uncut portion is generated, the control device 13 stops the oscillation of the laser light L from the laser oscillator 6. At the same time, the XY coordinate value of the position where the reflected light L2 was not obtained is stored in the storage means 13A.

Thereafter, when an uncut portion is generated based on the storage contents of the storage means 13A, the control device 13 raises the groove forming mechanism 14 by the lifting mechanism 31 to separate the mechanical cutter 14A from the material glass 2. In this state, both the machining heads 7A and 7B are moved back along the planned cutting lines 101 and 102 to the non-cleaved portion where the reflected light L2 was not obtained by the first moving mechanism 17 and the second moving mechanism.
Thereafter, the control device 13 moves the machining heads 7A and 7B again from the non-cleaved portion along the planned cutting lines 101 and 102, and again oscillates the laser light L from the laser oscillator 6 to the other end from the non-cleaved portion. In this case, the inspection light 15 is irradiated to the material glass 2 by the inspection device 15 and the presence or absence of the reflected light L2 is detected to inspect the occurrence of the uncut portion.
In other words, in a state where the mechanical cutter 14A is maintained above the material glass 2, the two processing heads 7A and 7B are moved along the planned cutting lines 101 and 102, and the non-cleaving in the already formed groove M1 is performed. By irradiating the part with the laser beam L again, the material glass 2 is completely cleaved by causing a crack to propagate from the groove M1 formed in the non-cleaved part.
In this way, the material glass 2 is cleaved by the laser machining apparatus 1 according to the two machining heads 7A and 7B in accordance with the planned cutting lines 101 and 102 in the Y direction.

Next, when the material glass 2 is further cut along a cutting planned line (not shown) in the X direction, both the processing heads 7A and 7B are rotated by 90 degrees via the actuator 27 by the control device 13, and the first movement is performed. The machining heads 7A and 7B are moved to the required positions by the mechanism 17 and the second moving mechanism, respectively.
After that, the control device 13 controls the operation of each of the above-described constituent members in the same manner as when the above-mentioned two split planned lines 101 and 102 are cut, and each cutting head places the planned split line not shown in the X direction. Cleave with 7A and 7B.
In this way, when the cutting of the material glass 2 by the laser cleaving apparatus 1 is completed, the introduction of the negative pressure into the hole of the mounting surface 3A of the processing table 3 is stopped, and the remaining material cut off from the material glass 2 is illustrated. It removes from the processing table 3 with the removal apparatus which does not.
Thereafter, air is ejected from all the tables and a large number of holes described above between the tables, and the glass substrate 2 ′ as a product is floated on the mounting surface 3 </ b> A of the processing table 3.

At the same time, the material glass 2 already supplied to the material table 4 is also levitated by the air supplied to the placing surface of the material table 4. The material glass 2 is sucked and held by the suction pad 12A on the one end side in the X direction in the transport means 12, and at the same time, the glass substrate 2 on the processing table 3 by the suction pad 12B on the other end side in the X direction in the transport means 12. 'Is adsorbed and retained.
Thereafter, since the conveying means 12 is translated in the X direction toward the product table 5, a new material glass 2 is supplied onto the processing table 3, and a glass substrate 2 'as a product is placed on the product table 5. It is carried out (see FIG. 1).
Thereafter, the air jetting of each part is stopped, the holding state of the material glass 2 and the glass substrate 2 ′ by the suction pads 12A and 12B by the conveying means 12 is released, and each mounting surface of the processing table 3 and the product table 5 is A negative pressure is introduced into the holes so that the new material glass 2 and the glass substrate 2 'are sucked and supported by each table.

As described above, in this embodiment, the first machining head 7A is moved to form the minute groove M1 in the planned cutting line 101 by the mechanical cutter 14A from the one end 101a to the other end 101b of the planned cutting line 101, and The laser beam L is irradiated to the surface, and the cleaving process is performed. In the process, the part completely cleaved by the inspection device 15 and the non-cleaved part are inspected, and the position of the non-cleaved part is stored by the storage means 13A. Yes. Then, after that, the first machining head 7A is moved backward with the mechanical cutter 14A supported upward, and the first machining head 7A is moved in the moving direction while maintaining the mechanical cutter 14A upward. The formed groove M1 is irradiated with the laser beam L.
Therefore, there is no double minute groove M1 formed in the non-cleaved portion, and there is only a single minute groove M1 formed in advance. The groove M1 is used as a base point by the laser light L. A crack progresses and the material glass 2 is completely cleaved.
Therefore, according to the processing method using the laser cleaving apparatus 1 of the present embodiment, the material glass 2 can be cleaved accurately as the planned cleaving line 101 (102), and a defective product does not occur.
Each processing head 7A, 7B is provided with a groove forming mechanism 14, a cleaving mechanism, and an inspection device 15. The inspection light irradiation means 32 and the light receiving means 33 of the inspection device 15 are arranged close to each other, and further groove formation is performed. The mechanism 14, the cleaving mechanism, and the inspection device 15 are integrally provided so as to be rotatable by an actuator 27.
By comprising in this way, the structure of the test | inspection apparatus 15 can be reduced in size, and the laser cutting apparatus 1 whole can be reduced in size.
Moreover, if it is the said inspection apparatus 15 which irradiates inspection light from the orthogonal direction with respect to a split surface, and receives the reflected light of the orthogonal direction, the two cutting planned lines in the raw material glass 2 may be orthogonally crossed by XY direction Even in such a case, the cleaved portion and the non-cleaved portion can be accurately detected. In this case, one of the planned cutting lines in the XY direction is cut first and then the other planned cutting line is cut. Even in such a case, according to the inspection device 15, The cleaved part and the non-cleaved part of the material glass 2 can be accurately detected.

Next, FIG. 5 shows another embodiment relating to the inspection device 15 provided in each processing head 7A, 7B. That is, in the first embodiment, the reflected light L2 from the fractured surface 2C is received by the light receiving means 33, focusing on the fact that the fractured surfaces 2C and 2D appear when the material glass 2 is completely cleaved. However, in the second embodiment, the arrangement position of the light receiving means 33 is changed as follows. That is, the light receiving means 33 is arranged on the surface 2A side of the material glass 2 that is opposite to the inspection light irradiation means 32 across the split sections 2C and 2D that will be formed on the planned cutting line 101 of the material glass 2. Has been. In this case, when the inspection light L1 is irradiated toward the material glass 2 from the inspection light irradiation means 32, the inspection light L1 enters the inside of the material glass 2 from the front surface 2A and then reflects to the inner back surface 2B. After that, the light passes through the inner surface 2A and comes out of the material glass 2, and is received by the light receiving means 33 as reflected light L2.
That is, the cleaving portion is located between a position 2A ′ where the inspection light L1 enters from the surface 2A side of the material glass 2 and a position 2A ″ where the reflected light L2 passes through the surface 2A and exits to the outside. . For this reason, when the material glass 2 is completely cleaved, in this case, the split sections 2C and 2D are formed between both the positions 2A ′ and 2A ″. In this case, a part of the reflected light L2 is Since the light is reflected by the split surface 2C, the intensity of the reflected light L2 received by the light receiving means 33 becomes weak. On the other hand, when the split sections 2C and 2D do not occur, the intensity of the reflected light L2 received by the light receiving means 33 increases. It is inspected whether or not the material glass 2 is cleaved by such a difference in intensity of the reflected light L2.
The configuration other than the inspection device 15 is the same as that of the first embodiment described above, and the same operation and effect as the first embodiment described above can be obtained also by the second embodiment having such a configuration.

In addition, as a processing process of the raw material glass 2 by the laser cleaving apparatus 1, the following processing processes may be sufficient. That is, as described above, both the processing heads 7A and 7B are moved along the planned cutting lines 101 and 102 to form the groove M1 from one end to the other end, and the cutting apparatus 101 cuts the planned cutting line 101 by the inspection device 15. Even if it is detected that there is an uncleaved portion, the laser light L from each processing head 7A, 7B is continuously irradiated, and the groove M1 is formed to the end of the cleaved lines 101, 102 by each mechanical cutter 14A. You may make it do.
Thereafter, as described above, the processing heads 7A and 7B are retracted to the non-cleavable portion, and then the laser beam L is irradiated again to the non-cleavable portion to completely cleave the material glass 2. Even if it is such a processing process, the same operation and effect as the example mentioned above can be acquired.
Moreover, the formation of minute grooves by the groove forming mechanism and the development of cracks by the cleaving mechanism made of laser light may be performed separately.
In the above-described embodiment, the mechanical cutter 14A is used as the groove forming mechanism 14 for forming the minute groove M1, but the groove forming mechanism 14 using a laser beam is used instead, and both processing heads are used. Prior to heating with the laser beam L from 7A and 7B, a minute continuous groove may be formed on the front surface 2A or the back surface 2B by irradiating the material glass 2 with the laser beam from the groove forming mechanism 14. .
Further, as the inspection apparatus 15 in the above-described embodiment, a light projecting / receiving sensor may be used.

The top view which shows one Example of this invention. Sectional drawing of the principal part which follows the II-II line | wire of FIG. The schematic block diagram which shows the processing state of the raw material glass 2 by the 1st processing head 7A of FIG. Sectional drawing which showed the relationship between the test | inspection apparatus 15 shown in FIG. Sectional drawing which shows the principal part of the inspection apparatus 15 as 2nd Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 ... Material glass (workpiece) 2A ... Front surface 2B ... Back surface 2C ... Split section 2D ... Split section 15 ... Inspection apparatus 32 ... Inspection light irradiation means 33 ... Light receiving means L1 ... Inspection light L2 ... Reflected light

Claims (3)

A workpiece inspection apparatus for inspecting whether or not the workpiece has been cleaved by irradiating inspection light on a cut surface of the transparent workpiece having a plate shape,
Inspection light irradiating means for irradiating inspection light toward the workpiece, and reflected light reflected by the cut surface of the workpiece when inspection light is irradiated from the inspection light irradiating means to the workpiece. A light receiving means for receiving light,
An inspection apparatus for a workpiece, wherein the inspection light irradiating means and the light receiving means are arranged so as to move relative to each other on the surface side of the workpiece in parallel with the split surface. A workpiece inspection apparatus for inspecting whether or not the workpiece has been cleaved by irradiating inspection light on a cut surface of the transparent workpiece having a plate shape,
Inspection light irradiating means for irradiating inspection light toward the workpiece, and reflected light reflected on the inner back surface of the workpiece when the inspection light is irradiated from the inspection light irradiating means to the workpiece. A light receiving means for receiving light,
The inspection light irradiating means and the light receiving means are arranged so as to move relatively in parallel to the split surface on the surface side of the workpiece, and the light receiving means is provided even if the inspection light is irradiated from the inspection light irradiating means to the workpiece. An apparatus for inspecting a work piece, wherein when it is not possible to receive reflected light, it is determined that a split section is formed. The inspection apparatus for a workpiece according to claim 1 or 2, wherein the inspection light from the inspection light irradiating means is arranged so as to be irradiated from a direction orthogonal to the split surface.

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