JP2008098621A5 - - Google Patents
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- Publication number
- JP2008098621A5 JP2008098621A5 JP2007233645A JP2007233645A JP2008098621A5 JP 2008098621 A5 JP2008098621 A5 JP 2008098621A5 JP 2007233645 A JP2007233645 A JP 2007233645A JP 2007233645 A JP2007233645 A JP 2007233645A JP 2008098621 A5 JP2008098621 A5 JP 2008098621A5
- Authority
- JP
- Japan
- Prior art keywords
- lens
- laser
- conjugate point
- point
- laser oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 8
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007233645A JP5210574B2 (ja) | 2006-09-14 | 2007-09-10 | レーザ照射装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006248975 | 2006-09-14 | ||
| JP2006248975 | 2006-09-14 | ||
| JP2007233645A JP5210574B2 (ja) | 2006-09-14 | 2007-09-10 | レーザ照射装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008098621A JP2008098621A (ja) | 2008-04-24 |
| JP2008098621A5 true JP2008098621A5 (enExample) | 2010-09-30 |
| JP5210574B2 JP5210574B2 (ja) | 2013-06-12 |
Family
ID=39381092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007233645A Expired - Fee Related JP5210574B2 (ja) | 2006-09-14 | 2007-09-10 | レーザ照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5210574B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2460648A (en) * | 2008-06-03 | 2009-12-09 | M Solv Ltd | Method and apparatus for laser focal spot size control |
| CN108549159B (zh) * | 2018-06-04 | 2023-06-23 | 凯迈（洛阳）测控有限公司 | 一种用于机载激光照测器的光学系统 |
| WO2024018785A1 (ja) * | 2022-07-19 | 2024-01-25 | 住友重機械工業株式会社 | ビーム調整装置、レーザアニール装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04237587A (ja) * | 1991-01-18 | 1992-08-26 | Hitachi Constr Mach Co Ltd | レーザ加工装置 |
| JPH11251220A (ja) * | 1998-03-02 | 1999-09-17 | Nikon Corp | 露光装置及び露光方法 |
| JP2003053578A (ja) * | 2001-08-15 | 2003-02-26 | Sumitomo Heavy Ind Ltd | レーザビームのプロファイル調整方法及び装置 |
| DE10144244A1 (de) * | 2001-09-05 | 2003-03-20 | Zeiss Carl | Zoom-System, insbesondere für eine Beleuchtungseinrichtung |
| JP4439794B2 (ja) * | 2001-09-10 | 2010-03-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2006049606A (ja) * | 2004-08-05 | 2006-02-16 | Sumitomo Heavy Ind Ltd | レーザ加工装置 |
| JP5100127B2 (ja) * | 2006-01-12 | 2012-12-19 | 株式会社半導体エネルギー研究所 | レ−ザー光照射装置 |
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2007
- 2007-09-10 JP JP2007233645A patent/JP5210574B2/ja not_active Expired - Fee Related