JP2008091804A - Electronic component crimping method and apparatus - Google Patents

Electronic component crimping method and apparatus Download PDF

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JP2008091804A
JP2008091804A JP2006273533A JP2006273533A JP2008091804A JP 2008091804 A JP2008091804 A JP 2008091804A JP 2006273533 A JP2006273533 A JP 2006273533A JP 2006273533 A JP2006273533 A JP 2006273533A JP 2008091804 A JP2008091804 A JP 2008091804A
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sheet
electronic component
crimping
crimping tool
substrate
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JP4821551B2 (en
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Masaya Watanabe
雅也 渡邉
Masahiro Kumamoto
昌弘 熊本
Tetsuro Ueno
哲朗 上野
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic component crimping method of crimping an electronic component on a substrate through a sheet by a crimping tool, which method secures a highly reliable crimping state since the rise of the temperature in crimping can be made fast. <P>SOLUTION: The electronic component crimping method involves arranging an electronic component on a substrate through the jointing material, supporting the substrate on a back-up stage, and heating/pressing the electronic component through the sheet by a crimping tool to crimp the electronic component on the substrate. At least one of the sheet and a heating means is moved to a preheating position to preheat the sheet just before a time, needed for preheating the sheet, obtained by back-counting from the pressing start time for the electronic component, and thereafter, the pressing operation is performed through the preheated sheet by a crimping tool. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、電子部品圧着方法及び装置に関し、 特に圧着ツールにてシートを介して電子部品を基板に圧着する方式において、圧着時の温度立ち上がりを早くできて信頼性の高い圧着状態を確保できる電子部品圧着方法及び装置に関するものである。   TECHNICAL FIELD The present invention relates to an electronic component crimping method and apparatus, and more particularly to an electronic device capable of ensuring a highly reliable crimped state by increasing the temperature rise during crimping in a method of crimping an electronic component to a substrate via a sheet with a crimping tool. The present invention relates to a component crimping method and apparatus.

例えば、液晶パネルやプラズマディスプレイパネルなどのフラットディスプレイパネルの製造工程において、基板としてのパネルにTCP(Tape Carrier Package)やFPC(Flexible Printed Circuit)やCOG(Chip On Glass)などの電子部品を圧着して実装したり、プリント回路基板にパネルに実装されたTCPやFPCを圧着することでパネルにプリント回路基板を実装したりする工程があり、その圧着工程に電子部品圧着装置が用いられている。   For example, in the manufacturing process of flat display panels such as liquid crystal panels and plasma display panels, electronic components such as TCP (Tape Carrier Package), FPC (Flexible Printed Circuit) and COG (Chip On Glass) are pressure-bonded to the panel as a substrate. Or mounting a printed circuit board on the panel by crimping TCP or FPC mounted on the panel to the printed circuit board, and an electronic component crimping apparatus is used for the crimping process.

電子部品圧着装置で基板に電子部品を圧着する際には、図11(a)に示すように、予め基板41に接合部材としての異方性導電材42を貼り付け、この異方性導電材42を介して電子部品43を基板41に仮圧着して電子部品圧着装置に供給される。電子部品圧着装置では、基板41をバックアップステージ44で支持した状態で圧着ツール45にて電子部品43を加圧して基板41に電子部品43を本圧着している。なお、異方性導電材42は、図11(b)に示すように、熱硬化性樹脂42a中に樹脂粒子の表面にNi被膜を形成した導電性粒子42bを分散させて構成され、基板41と電子部品43の間で、導電性を得るべき部位を選択的に圧縮させることで、導電性粒子42b同士が相互に接触してその部位で導電性を確保した状態で基板41と電子部品43を接合するものである。   When the electronic component is crimped to the substrate by the electronic component crimping apparatus, as shown in FIG. 11A, an anisotropic conductive material 42 as a bonding member is previously pasted on the substrate 41, and this anisotropic conductive material. The electronic component 43 is temporarily pressure-bonded to the substrate 41 via 42 and supplied to the electronic component crimping apparatus. In the electronic component crimping apparatus, the electronic component 43 is pressed against the substrate 41 by pressurizing the electronic component 43 with the crimping tool 45 while the substrate 41 is supported by the backup stage 44. As shown in FIG. 11B, the anisotropic conductive material 42 is configured by dispersing conductive particles 42b in which a Ni film is formed on the surface of resin particles in a thermosetting resin 42a, and a substrate 41. Between the substrate 41 and the electronic component 43, the conductive particles 42b are brought into contact with each other and the conductivity is ensured at the portion by selectively compressing the portion where the conductivity is to be obtained. Are joined.

ところで、上記本圧着工程において、はみ出した異方性導電材42が圧着ツール45の圧着面に付着することがあり、その場合後続する本圧着工程に悪影響を与えることになる。そこで、図11(a)に示すように、圧着ツール45と電子部品43の間に付着防止用のシート46を介して圧着することが知られている。また、基板の平面度や電子部品の厚さ寸法の微小なばらつきを吸収して均一な圧着状態を確保するために緩衝用のシートを介して圧着することも知られている。さらに、これら付着防止用のシートや緩衝用のシートが圧着ツールの熱で損傷するのを防止するため、これらシートと圧着ツールの間に耐熱性シートを介して圧着することも知られている。また、これらのシートの何れかを複合したシートを介して圧着することも知られている。   By the way, in the main crimping step, the protruding anisotropic conductive material 42 may adhere to the crimping surface of the crimping tool 45, and in this case, the subsequent main crimping step is adversely affected. Therefore, as shown in FIG. 11A, it is known to perform crimping between the crimping tool 45 and the electronic component 43 via an adhesion preventing sheet 46. It is also known to perform pressure bonding via a cushioning sheet in order to absorb a minute variation in the flatness of the substrate and the thickness dimension of the electronic component and ensure a uniform pressure bonding state. Furthermore, in order to prevent these adhesion preventing sheets and cushioning sheets from being damaged by the heat of the crimping tool, it is also known to crimp these sheets and the crimping tool via a heat resistant sheet. It is also known to press-bond via a sheet obtained by combining any of these sheets.

このように圧着ツールと電子部品の間に付着防止用のシートを介して圧着する方法において、供給ロールから繰り出したシートを、電子部品と圧着ツールの間を通して巻取ロールにて巻き取るように構成し、圧着ツールによる圧着動作に先立って、そのシートを繰り出してたるませることで電子部品上にシートを広げた状態とし、その状態で圧着ツールで圧着することで圧着時にシートにしわがよって圧着不良が発生するのを防止するようにすることが知られている(例えば、特許文献1参照)。   In this way, the sheet fed from the supply roll is wound by the winding roll between the electronic component and the crimping tool in the method of crimping the adhesion tool and the electronic component via the adhesion preventing sheet. Prior to the crimping operation by the crimping tool, the sheet is drawn out and slackened so that the sheet is spread on the electronic component. It is known to prevent the occurrence (see, for example, Patent Document 1).

なお、この特許文献1に記載された圧着方法においては、圧着が完了するとシートを巻取って供給ロールからシートを繰り出し、圧着した部分を巻取側に移動させて新しい部分が圧着ツールに接するようにする。その巻取りに際して、シートが圧着ツールに接した状態となるが、そのまま長時間接触すると熱的変形を生じる恐れがあるので、巻取ロールを少し逆転させてシートが圧着ツールの下方にたるんだ状態で待機するように構成されている。   In the crimping method described in Patent Document 1, when the crimping is completed, the sheet is wound up, the sheet is fed out from the supply roll, the crimped part is moved to the winding side, and the new part comes into contact with the crimping tool. To. At the time of winding, the sheet is in contact with the crimping tool, but if it is left in contact for a long time, there is a risk of thermal deformation, so the winding roll is slightly reversed and the sheet sags below the crimping tool Configured to wait at.

また、サポートテープ上に異方性導電材を担持させたテープを圧着ツールでパネルに加圧することで、パネルにテープ状の異方性導電材を貼付けるテープ圧着装置において、パネルと圧着ツールの間にテープを供給するテープ供給手段に、圧着ツールとパネルの間にテープを通すとともにそのテープの上下位置を任意に位置決めするテープ位置決め部を設け、テープ位置決め部を、圧着ツールとパネルの間の空間の両側に、昇降動作及び位置決め可能でかつテープのガイドローラとチャックを有する昇降体を配置して構成し、テープ位置決め部によって張力の作用しない状態でテープをパネルに当接させ、その状態で圧着ツールにて加圧するようにしたものが知られている(例えば、特許文献2参照)。
特開平8−184847号公報 特開平7−270742号公報
In addition, in a tape crimping apparatus that attaches a tape-shaped anisotropic conductive material to a panel by pressing a tape carrying an anisotropic conductive material on a support tape with a crimping tool, the panel and the crimping tool The tape supply means for supplying the tape in between is provided with a tape positioning part that passes the tape between the crimping tool and the panel and arbitrarily positions the vertical position of the tape, and the tape positioning part is provided between the crimping tool and the panel. A lifting body that can be moved up and down and positioned and has a guide roller and a chuck for the tape is arranged on both sides of the space, and the tape is brought into contact with the panel in a state where no tension is applied by the tape positioning portion. A device that is pressurized with a crimping tool is known (for example, see Patent Document 2).
JP-A-8-184847 Japanese Patent Laid-Open No. 7-270742

ところで、近年、フラットディスプレイパネルの増産や価格低下のために、基板に電子部品を圧着する圧着工程のタクトの短縮とともに、歩留まりを向上するために圧着による接合品質の向上に対する要請が高まっている。   By the way, in recent years, due to an increase in production of flat display panels and a reduction in price, there has been a growing demand for improvement in bonding quality by crimping in order to shorten the tact time of the crimping process for crimping electronic components to a substrate and improve yield.

しかし、上記のように基板41上の電子部品43と圧着ツール45の間にシート46を介在させて圧着を行った場合、圧着ツール45の熱がシート46を通して逃げてしまい、電子部品43と基板41の間の異方性導電材42が配置された接合部(圧着部)の温度が所定の温度に上昇するのに時間を要し、圧着工程のタクトを短縮することが不可能であるという問題がある。   However, when the sheet 46 is interposed between the electronic component 43 on the substrate 41 and the crimping tool 45 as described above, the heat of the crimping tool 45 escapes through the sheet 46, and the electronic component 43 and the substrate. It takes time for the temperature of the joint part (crimp part) where the anisotropic conductive material 42 between 41 is arranged to rise to a predetermined temperature, and it is impossible to shorten the tact time of the crimping process. There's a problem.

また、圧着時に異方性導電材42の温度の立ち上がりが遅いと、図12(a)、(b)に示すように、異方性導電材42中の熱硬化性樹脂42aの流動性が低いために、電子部品43と基板41の電極が十分に電気的に接合されるための圧縮厚さtに比べて十分に圧縮されてない状態で熱硬化性樹脂42aが硬化してしまい、その結果、図12(c)に示すように、異方性導電材42中の導電性粒子42b同士が相互に十分に接触し合わず、導電接合が十分に確保されない接合状態となり、圧着接合の信頼性が確保されないという問題がある。   In addition, if the temperature of the anisotropic conductive material 42 rises slowly during pressure bonding, the fluidity of the thermosetting resin 42a in the anisotropic conductive material 42 is low as shown in FIGS. 12 (a) and 12 (b). Therefore, the thermosetting resin 42a is cured in a state where the electronic component 43 and the electrode of the substrate 41 are not sufficiently compressed as compared with the compression thickness t for sufficiently joining the electrodes, and as a result. As shown in FIG. 12 (c), the conductive particles 42b in the anisotropic conductive material 42 are not in sufficient contact with each other, resulting in a bonded state in which sufficient conductive bonding is not ensured, and the reliability of the crimp bonding There is a problem that is not secured.

なお、特許文献1に記載された構成では、シートの巻取り時に圧着ツールにシートが接した状態となるが、シートの熱的変形を防止するためシートを直ちに圧着ツールの下方にたるんだ状態にして待機するようにしているので、再度シートを電子部品上に広げた状態にした時には温度が低下してしまっており、上記問題を解消する手段を開示したり、示唆したりするものではない。   In the configuration described in Patent Document 1, the sheet is in contact with the crimping tool when the sheet is wound. However, in order to prevent thermal deformation of the sheet, the sheet is immediately sagged below the crimping tool. Therefore, when the sheet is spread again on the electronic component, the temperature drops, and no means for solving the above problem is disclosed or suggested.

また、特許文献2には、圧着ツールとパネルの間にテープを供給するテープ供給手段にテープの上下位置を任意に位置決めするテープ位置決め部を設けた構成が開示されているだけで、上記問題の解消手段を開示したり、示唆したりするものではない。   Patent Document 2 only discloses a configuration in which a tape positioning unit that arbitrarily positions the vertical position of the tape is provided in a tape supply unit that supplies the tape between the crimping tool and the panel. It does not disclose or suggest a solution.

本発明は、上記従来の問題に鑑み、圧着ツールにてシートを介して電子部品を基板に圧着する方式において、圧着時の温度立ち上がりを早くできて圧着工程のタクトを短縮でき、また信頼性の高い圧着状態を確保できる電子部品圧着方法及び装置を提供することを目的とする。   In view of the above-described conventional problems, the present invention can reduce the tact time of the crimping process by shortening the temperature rise at the time of crimping in a method of crimping an electronic component to a substrate through a sheet with a crimping tool, and having high reliability. An object of the present invention is to provide an electronic component crimping method and apparatus capable of ensuring a high crimped state.

本発明の電子部品圧着方法は、電子部品を接合材を介して基板上に配置し、この基板をバックアップステージにて支持し、圧着ツールにてシートを介して電子部品を加熱・加圧して基板に電子部品を圧着する電子部品圧着方法において、電子部品の加圧開始時点から逆算してシートの予熱に要する時間だけ前に、シートと加熱手段の少なくとも一方を予熱位置に移動させてシートを予熱し、その後予熱されたシートを介して圧着ツールによる加圧動作を行うものである。   In the electronic component crimping method of the present invention, an electronic component is placed on a substrate via a bonding material, the substrate is supported by a backup stage, and the electronic component is heated and pressurized via a sheet by a crimping tool. In the electronic component crimping method in which the electronic component is crimped to the sheet, the sheet is preheated by moving at least one of the sheet and the heating means to the preheating position just before the time required to preheat the sheet by calculating backward from the start of pressing the electronic component. Then, a pressing operation is performed by a crimping tool through the preheated sheet.

この構成によれば、圧着動作に先だってその直前にシートを予熱しておき、予熱後直ちに圧着動作を行うので、圧着時に圧着ツールと電子部品の間に介在したシートへの熱の逃げを抑制することができ、接合材による接合に必要な温度に上昇する時間を短縮できて圧着工程のタクトを短縮することができる。また、シートの予熱によって圧着時の温度上昇時間が短縮されることから、例えばポリテトラフルオルエチレンのように熱伝導率の小さい材質でかつ所要のクッション性が得られる厚さの単一のシートを用いても、所望のタクトを実現することが可能となる。なお、シートの予熱温度は、シートの耐熱温度以下で、できるだけ高い温度とするのが好ましい。その理由は、圧着ツールの温度は接合材による接合に必要な温度(例えば、200〜250℃)より50〜100℃程度高い温度(例えば、250〜350℃)に設定する必要があるため、その温度は一般にシートの耐熱温度(例えば、260℃)よりかなり高い温度になってしまうが、圧着時にはその圧着時間が短時間であるためシートはその温度に十分耐えることができる一方、シートの予熱に際してはその耐熱温度以下にする必要があることによる。   According to this configuration, the sheet is preheated immediately before the crimping operation, and the crimping operation is performed immediately after the preheating, so that the heat escape to the sheet interposed between the crimping tool and the electronic component during the crimping is suppressed. It is possible to shorten the time required to increase the temperature required for bonding with the bonding material, and to shorten the tact time of the crimping process. In addition, since the temperature rise time at the time of pressure bonding is shortened by preheating the sheet, for example, a single sheet with a material having a low thermal conductivity such as polytetrafluoroethylene and having a required cushioning property is obtained. Even if is used, a desired tact can be realized. The preheating temperature of the sheet is preferably as high as possible below the heat resistant temperature of the sheet. The reason is that the temperature of the crimping tool needs to be set to a temperature (for example, 250 to 350 ° C.) that is higher by about 50 to 100 ° C. than the temperature (for example, 200 to 250 ° C.) required for bonding with the bonding material. The temperature is generally much higher than the heat resistance temperature of the sheet (for example, 260 ° C.), but the pressure-bonding time is short when crimping, so that the sheet can sufficiently withstand that temperature. Is because it is necessary to make the temperature lower than the heat resistant temperature.

また、接合材が異方性導電材であると、基板と電子部品の間の異方性導電材の温度立ちあがりを早くできることで、異方性導電材中の熱硬化性接着剤が硬化する前の流動性を十分に確保できて、異方性導電材が確実に圧縮された状態で硬化し、その結果導電接合が十分に確保されて接合され、圧着接合の信頼性を向上することができるので、特に効果が顕著である。   Moreover, when the bonding material is an anisotropic conductive material, the temperature rise of the anisotropic conductive material between the substrate and the electronic component can be accelerated, so that the thermosetting adhesive in the anisotropic conductive material is cured. Can be sufficiently ensured, and the anisotropic conductive material is cured in a surely compressed state. As a result, the conductive bonding is sufficiently ensured and bonded, and the reliability of the pressure bonding can be improved. Therefore, the effect is particularly remarkable.

また、シートと圧着ツールとを接触させ又は近接させて予熱すると、圧着ツールをシートの加熱手段として兼用することで、加熱手段を別に設ける必要がなく、コスト低下を図ることができる。   In addition, when the sheet and the crimping tool are brought into contact with each other or preheated, the crimping tool is also used as a sheet heating unit, so that it is not necessary to separately provide a heating unit, and the cost can be reduced.

また、シートと圧着ツールとは別に設けた加熱手段とを接触させ又は近接させて予熱すると、シートの加熱温度を安定して精度良く制御することができ、圧着時間の短縮と接合信頼性の両立を安定的に図ることができる。   In addition, if the sheet and the heating means provided separately from the crimping tool are brought into contact with each other or preheated, the heating temperature of the sheet can be controlled stably and accurately, and both the shortening of the crimping time and the bonding reliability can be achieved. Can be achieved stably.

また、本発明の電子部品圧着装置は、電子部品を接合材を介して配置した基板を支持するバックアップステージと、電子部品を加熱・加圧して基板に電子部品を圧着する圧着ツールと、圧着ツールと電子部品の間に介在するようにシート供給するシート供給手段とを備えた電子部品圧着装置において、シート供給手段は圧着ツールと電子部品の間でシートを位置決めするシート位置決め部を有し、圧着ツールによる電子部品の加圧開始時点から逆算してシートの予熱に要する時間だけ前に、シート位置決め部と圧着ツールの少なくとも一方を移動させて、シートを圧着ツールに接触又は近接した予熱位置に位置させ、加圧開始時にシートを電子部品に接触又は近接した位置に移動させる制御部を設けたものであり、上記圧着方法を実施してその作用効果を奏することができる。   The electronic component crimping apparatus according to the present invention includes a backup stage that supports a substrate on which the electronic component is disposed via a bonding material, a crimping tool that heats and pressurizes the electronic component, and crimps the electronic component to the substrate, and a crimping tool. And a sheet supply means for supplying a sheet so as to be interposed between the electronic component and the sheet supply means, the sheet supply means has a sheet positioning portion for positioning the sheet between the crimping tool and the electronic component, and is crimped At least one of the sheet positioning part and the crimping tool is moved back by the time required for preheating the sheet by calculating backward from the time when the electronic component is pressed by the tool, and the sheet is positioned at a preheating position in contact with or close to the crimping tool. And a control unit that moves the sheet to a position in contact with or close to the electronic component at the start of pressurization. Advantages can be attained.

また、圧着ツールとは別に加熱手段を設け、シート供給手段は圧着ツールと電子部品の間でシートを位置決めするシート位置決め部を有し、圧着ツールによる電子部品の加圧開始時点から逆算してシートの予熱に要する時間だけ前に、シート位置決め部と加熱手段の少なくとも一方を移動させて、シートを加熱手段に接触又は近接した予熱位置に位置させ、加圧開始時にシートを電子部品に接触又は近接した位置に移動させる制御部を設けても、同様の作用効果が得られる。   In addition, a heating means is provided separately from the crimping tool, and the sheet supply means has a sheet positioning portion for positioning the sheet between the crimping tool and the electronic component, and the sheet is calculated backward from the start of pressing the electronic component by the crimping tool. At least one of the sheet positioning part and heating means is moved before the time required for preheating of the sheet, and the sheet is placed in a preheating position in contact with or close to the heating means, and the sheet is brought into contact with or close to the electronic component at the start of pressurization. Even if a control unit for moving to the above position is provided, the same effect can be obtained.

本発明の電子部品圧着方法及び装置によれば、圧着動作に先だってシートを予熱して圧着動作を行うので、圧着時に圧着ツールと電子部品の間に介在したシートへの熱の逃げを抑制することができ、接合材による接合に必要な温度に上昇する時間を短縮できて圧着工程のタクトを短縮することができる。   According to the electronic component crimping method and apparatus of the present invention, the sheet is preheated prior to the crimping operation to perform the crimping operation, so that the heat escape to the sheet interposed between the crimping tool and the electronic component at the time of crimping is suppressed. It is possible to shorten the time required to increase the temperature required for bonding with the bonding material, and to shorten the tact time of the crimping process.

以下、本発明の電子部品圧着方法及び装置の各実施形態について、図1〜図10を参照しながら説明する。   Hereinafter, each embodiment of the electronic component crimping method and apparatus of the present invention will be described with reference to FIGS.

(第1の実施形態)
まず、本発明の第1の実施形態について、図1〜図7を参照して説明する。本実施形態は、液晶表示装置などのフラットパネルディスプレイ(FPD)におけるパネルにTCPやFPCなどの電子部品を本圧着するものである。
(First embodiment)
First, a first embodiment of the present invention will be described with reference to FIGS. In the present embodiment, an electronic component such as TCP or FPC is pressure-bonded to a panel in a flat panel display (FPD) such as a liquid crystal display device.

図1〜図3において、電子部品圧着装置1は、基板の一例であるパネル2にTCPなどの電子部品3が仮圧着された状態で供給され、その電子部品3を加熱・加圧してパネル2に本圧着する装置である。具体的には、パネル2は、その側端部に接合材としての異方性導電材(ACF)22(図3参照)を介して電子部品3が仮圧着された状態で供給され、電子部品3を加熱・加圧することで、異方性導電材22にて電子部品3の電極とパネル2の電極が電気的に接続された状態で電子部品3がパネル2に接合される。   1 to 3, an electronic component crimping apparatus 1 is supplied in a state where an electronic component 3 such as TCP is provisionally crimped to a panel 2 which is an example of a substrate, and the electronic component 3 is heated and pressurized to generate a panel 2. This is a device that performs the main pressure bonding. Specifically, the panel 2 is supplied in a state where the electronic component 3 is temporarily press-bonded to the side end portion thereof via an anisotropic conductive material (ACF) 22 (see FIG. 3) as a bonding material. By heating and pressurizing 3, the electronic component 3 is joined to the panel 2 in a state where the electrode of the electronic component 3 and the electrode of the panel 2 are electrically connected by the anisotropic conductive material 22.

電子部品圧着装置1は、パネル2を本圧着を行う所定位置に搬入し、本圧着後搬出するパネル移載装置(図示せず)と、パネル2の圧着部位を下方から支持するバックアップステージ4と、バックアップステージ4と協働してパネル2と電子部品3を本圧着する圧着装置5と、圧着装置5の圧着ヘッド6とバックアップステージ4上の電子部品3との間にテープ状のシート7を供給するシート供給装置8と、これらパネル移載装置(図示せず)と圧着装置5とシート供給装置8の動作を制御する制御部40とを備えている。   The electronic component crimping apparatus 1 carries a panel 2 into a predetermined position where final crimping is performed and carries it out after the final crimping, and a backup stage 4 that supports the crimping part of the panel 2 from below. In addition, a pressure bonding device 5 that performs the main pressure bonding of the panel 2 and the electronic component 3 in cooperation with the backup stage 4, and a tape-shaped sheet 7 between the pressure bonding head 6 of the pressure bonding device 5 and the electronic component 3 on the backup stage 4. A sheet supply device 8 to be supplied, a panel transfer device (not shown), a crimping device 5, and a control unit 40 that controls operations of the sheet supply device 8 are provided.

シート7は、圧着時にはみ出した異方性導電材22が付着し難い材料としてポリテトラフルオルエチレンのシートが好適であり、またパネル2や電子部品3の寸法ばらつきを吸収して均一な圧着状態を確保するためのクッション性を有する材料としてはシリコンゴムのシートが好適であり、圧着ヘッド6の熱による物性の劣化を抑制する材料としては耐熱温度が非常に高いポリイミドのシートが好適である。そこで、圧着条件によって必要とされる特性に応じて、これらのシートの何れかのシート又は複数のシートを併用し、それら重ねた状態で使用され、あるいは予めこれらのシートの何れかを積層した複合シートが使用される。また、圧着ヘッド6から電子部品3への熱伝導性を向上するためには金属箔を積層したり、コーティング層を形成しても良い。   The sheet 7 is preferably a polytetrafluoroethylene sheet as a material to which the anisotropic conductive material 22 that protrudes at the time of crimping is difficult to adhere, and absorbs the dimensional variation of the panel 2 and the electronic component 3 and is in a uniform crimped state. A silicone rubber sheet is suitable as a material having a cushioning property for ensuring heat resistance, and a polyimide sheet having a very high heat resistance temperature is suitable as a material that suppresses deterioration of physical properties due to heat of the crimping head 6. Therefore, depending on the characteristics required by the crimping conditions, any one of these sheets or a plurality of sheets are used in combination and used in a stacked state, or a composite in which any of these sheets is laminated in advance. A sheet is used. Further, in order to improve the thermal conductivity from the crimping head 6 to the electronic component 3, a metal foil may be laminated or a coating layer may be formed.

シート7の厚さは、0.05〜0.3mm程度のものが好適に用いられるが、その中でポリテトラフルオルエチレンは、熱伝導率が0.245W/(m・K)と低いので、厚いと熱伝達が悪くなるため、0.05〜0.1mm程度の薄いシートが用いられる。一方、シリコンゴムは、熱伝導率が0.42W/(m・K)と比較的高いので、ある程度厚くても熱伝達を確保できるとともに、より高いクッション性を得るように0.2〜0.3mm程度の厚いシートが用いられる。   The sheet 7 having a thickness of about 0.05 to 0.3 mm is preferably used. Among them, polytetrafluoroethylene has a low thermal conductivity of 0.245 W / (m · K). If it is thick, heat transfer becomes poor, so a thin sheet of about 0.05 to 0.1 mm is used. On the other hand, silicon rubber has a relatively high thermal conductivity of 0.42 W / (m · K), so that heat transfer can be secured even if it is thick to some extent, and 0.2 to 0. A thick sheet of about 3 mm is used.

バックアップステージ4は、石英やセラミックスからなるステージ部材4aを台部4b上に設置して構成され、圧着工程で、ステージ部材4aの上面にパネル2の側端部を載置し、圧着ヘッド6との間でパネル2の側端部と電子部品3を挟み、加熱加圧して圧着するものである。   The backup stage 4 is configured by installing a stage member 4a made of quartz or ceramics on a base part 4b. In the crimping process, the side end of the panel 2 is placed on the upper surface of the stage member 4a, and the crimping head 6 and The side part of the panel 2 and the electronic component 3 are sandwiched between them, and are heated and pressed to perform pressure bonding.

圧着装置5は、その圧着ヘッド6がバックアップステージ4の直上に対向するように配設され、この圧着ヘッド6を門型のフレーム9に設置されたヘッド駆動部10にて上下移動及び加圧するように構成されている。圧着ヘッド6は、その下端にシート7を介して電子部品3の圧着部位を押圧する圧着ツール11が装着され、かつこの圧着ツール11を加熱するヒータ(図示せず)が内蔵されている。   The crimping device 5 is arranged so that the crimping head 6 faces directly above the backup stage 4, and the crimping head 6 is moved up and down by a head driving unit 10 installed on a gate-shaped frame 9. It is configured. A crimping tool 11 that presses the crimping part of the electronic component 3 via the sheet 7 is attached to the lower end of the crimping head 6, and a heater (not shown) that heats the crimping tool 11 is incorporated.

シート供給装置8は、圧着装置5の一側に配置したシート供給部12と、圧着装置5の他側に配置したシート回収部13と、圧着ツール11とパネル2に仮圧着された電子部品3との間にシート7を通すとともにそのシート7の上下位置を任意に位置決め可能なシート位置決め部14とを備えている。   The sheet supply device 8 includes a sheet supply unit 12 disposed on one side of the crimping device 5, a sheet collection unit 13 disposed on the other side of the crimping device 5, and the electronic component 3 temporarily bonded to the crimping tool 11 and the panel 2. And a sheet positioning portion 14 capable of arbitrarily positioning the vertical position of the sheet 7.

シート供給部12は、シート7を巻回した供給ロール16を回転させてシート7を所定量づつ繰り出す繰り出し手段15と、シート位置決め部14の動作に伴うシート7の出し入れを吸収するとともに、シート7に弛みを生じないように所定の張力を付与するテンション部17とを備えている。テンション部17は、一対のガイドローラ17a、17bと、それらの間に上下移動自在にかつ所定力にて下方に移動付勢されたテンションローラ17cにて構成されている。シート回収部13は、シート7を弛まない程度の吸引力で吸引して排出する吸引排出手段18にて構成されている。   The sheet supply unit 12 absorbs the loading and unloading of the sheet 7 accompanying the operation of the sheet feeding unit 15 and the sheet positioning unit 14 by rotating the supply roll 16 around which the sheet 7 is wound and feeding the sheet 7 by a predetermined amount. And a tension portion 17 for applying a predetermined tension so as not to cause slack. The tension portion 17 includes a pair of guide rollers 17a and 17b, and a tension roller 17c that is urged to move downward between them with a predetermined force. The sheet collection unit 13 is configured by suction / discharge means 18 that sucks and discharges the sheet 7 with a suction force that does not sag.

シート位置決め部14は、圧着ツール11とパネル2上の電子部品3との間の空間の両側に、昇降動作及び位置決め可能に配設された左右一対の昇降体19a、19bを備え、これら昇降体19a、19bにガイドローラ20とチャック21を設け、チャック21でシート7を挟持した状態で、昇降体19a、19bを昇降させて所定位置に位置決めすることで、ガイドローラ20、20間に張り渡されたシート7の高さ位置を任意に位置決め可能なように構成されている。なお、このシート7の高さ位置変化に伴うシート供給部12とシート回収部13におけるシート7の出し入れは、テンション部17と吸引排出手段18にて無理なく行われる。   The sheet positioning unit 14 includes a pair of left and right lifting bodies 19a and 19b disposed on both sides of the space between the crimping tool 11 and the electronic component 3 on the panel 2 so as to be able to be lifted and positioned. A guide roller 20 and a chuck 21 are provided at 19a and 19b, and the lifting and lowering bodies 19a and 19b are moved up and down and positioned at a predetermined position while the sheet 7 is sandwiched between the chucks 21, so that the guide rollers 20 and 20 are stretched. The height position of the formed sheet 7 can be arbitrarily positioned. It should be noted that the loading and unloading of the sheet 7 in the sheet supply unit 12 and the sheet collection unit 13 accompanying the change in the height position of the sheet 7 is performed without difficulty by the tension unit 17 and the suction / discharge unit 18.

シート位置決め部14によるシート7の位置決め位置は、具体的には、圧着時にシート7をパネル2上の電子部品3上に接触又は近接して沿わせる第1の位置と、圧着後パネル2を搬出するため上方に退避して圧着ヘッド6の下方に適当間隔あけた位置で待機する第2の位置と、圧着動作の前に圧着ツール11に接触又は近接させて圧着ツール11の熱でシート7を予熱する第3の位置の3つの位置である。なお、シート7を予熱する第3の位置は、シート位置決め部14による位置決めとしているが、圧着ツール11の移動による位置決めであっても良い。この場合、第3の位置は第2の位置と略同じ位置であっても良い。   Specifically, the positioning position of the sheet 7 by the sheet positioning portion 14 is the first position where the sheet 7 is brought into contact with or close to the electronic component 3 on the panel 2 at the time of crimping, and the panel 2 after crimping is carried out. Therefore, the sheet 7 is moved by the heat of the crimping tool 11 while being brought into contact with or in proximity to the crimping tool 11 before the crimping operation. There are three positions of the third position to preheat. Note that the third position for preheating the sheet 7 is the positioning by the sheet positioning unit 14, but may be the positioning by the movement of the crimping tool 11. In this case, the third position may be substantially the same position as the second position.

次に、 以上の構成の電子部品圧着装置1にてパネル2に電子部品3を圧着する圧着工程を、主として図4の動作フロー図を参照して説明する。   Next, a crimping process for crimping the electronic component 3 to the panel 2 by the electronic component crimping apparatus 1 having the above configuration will be described mainly with reference to an operation flow diagram of FIG.

図4において、まず電子部品3が仮圧着されたパネル2を電子部品圧着装置1に搬入し、電子部品3が仮圧着されたパネル2の側端部をバックアップステージ4上に配置して支持させるパネル搬入動作を行う(ステップS1)。このパネル2の搬入動作を開始した後、その搬入動作中に予熱を開始すべき時間になったか否かの判定を行い、予熱開始時間になるのを待って(ステップS2)、次にシート位置決め部14を動作させてシート7を予熱位置に移動させる(ステップS3)。予熱開始時間は、圧着ツール11による電子部品3の加圧動作開始時点から逆算してシート7の予熱に要する時間だけ前に設定されている。次に、予熱開始後予熱に要する所定時間が経過したか否かの判定を行い、予熱時間が満了すると(ステップS4)、加圧動作を開始できるようにパネル2の搬入動作も完了しているので、直ちに圧着動作に入る。   In FIG. 4, first, the panel 2 on which the electronic component 3 is temporarily crimped is carried into the electronic component crimping apparatus 1, and the side end portion of the panel 2 on which the electronic component 3 is temporarily crimped is disposed on the backup stage 4 and supported. A panel loading operation is performed (step S1). After the carry-in operation of the panel 2 is started, it is determined whether or not it is time to start preheating during the carry-in operation, wait for the preheat start time (step S2), and then sheet positioning The unit 14 is operated to move the seat 7 to the preheating position (step S3). The preheating start time is set backward from the time required for preheating the sheet 7 by calculating backward from the time when the pressing operation of the electronic component 3 by the crimping tool 11 is started. Next, it is determined whether or not a predetermined time required for preheating has elapsed after the start of preheating. When the preheating time expires (step S4), the carry-in operation of the panel 2 is also completed so that the pressurizing operation can be started. So, immediately enter the crimping operation.

圧着動作においては、まずシート位置決め部14を動作させてシート7をパネル2上の電子部品3の圧着部位の上に沿うように下降させ(ステップS5)、続いてヘッド駆動部10を動作させて圧着ツール11を下降させ(ステップS6)、圧着ツール11にて電子部品3の圧着部位を加圧・加熱する本圧着動作を行う(ステップS7)。本圧着が終わると、圧着ツール11を上昇させ(ステップS8)、シート7を待機位置まで上昇させた後(ステップS9)、パネル2を電子部品圧着装置1から搬出する(ステップS10)。その後、ステップS1にリターンして次のパネル2の搬入動作を開始し、上記動作を繰り返すことで、パネル2に対する電子部品3の本圧着動作を順次行う。   In the crimping operation, first, the sheet positioning unit 14 is operated to lower the sheet 7 along the crimping part of the electronic component 3 on the panel 2 (step S5), and then the head driving unit 10 is operated. The crimping tool 11 is lowered (step S6), and a final crimping operation is performed in which the crimping part of the electronic component 3 is pressed and heated with the crimping tool 11 (step S7). When the main crimping is finished, the crimping tool 11 is raised (step S8), the sheet 7 is raised to the standby position (step S9), and the panel 2 is unloaded from the electronic component crimping apparatus 1 (step S10). Thereafter, the process returns to step S1 to start the next panel 2 carry-in operation, and the above operation is repeated to sequentially perform the main pressure bonding operation of the electronic component 3 on the panel 2.

以上の実施形態によれば、ステップS5〜S7の圧着ツール11による本圧着動作に先だって、その直前のステップS2〜S4でシート7を予熱し、その予熱直後に、図6(a)、(b)に示すように、電子部品3が仮圧着されたパネル2の側端部をバックアップステージ4にて支持した状態で、その電子部品3の圧着部位をシート7を介して圧着ツール11にて加熱・加圧して本圧着するので、圧着時における圧着ツール11からシート7への熱の逃出を抑制することができる。その結果、図5に実線で示すように、異方性導電材22が接合に必要な温度(Ts−δT)まで上昇する時間t1を、従来例のシート7の予熱を行わない場合(破線で示した)に必要とする時間t2に比して大幅に短縮することができ、本圧着工程のタクトを短縮することができる。なお、Tsは異方性導電材22の規定接合温度で、接合時に最終的に到達する温度であり、(Ts−δT)は接合作用が実効的に開始される温度である。   According to the above embodiment, prior to the main crimping operation by the crimping tool 11 in steps S5 to S7, the sheet 7 is preheated in steps S2 to S4 immediately before that, and immediately after the preheating, FIGS. As shown in FIG. 2, the side part of the panel 2 to which the electronic component 3 has been temporarily crimped is supported by the backup stage 4, and the crimping portion of the electronic component 3 is heated by the crimping tool 11 through the sheet 7. -Since it pressurizes and this crimps | bonds, the escape of the heat | fever from the crimping tool 11 to the sheet | seat 7 at the time of crimping | compression-bonding can be suppressed. As a result, as shown by a solid line in FIG. 5, the time t1 when the anisotropic conductive material 22 rises to the temperature required for joining (Ts−δT) is set to the time when the sheet 7 of the conventional example is not preheated (indicated by a broken line). The time t2 required for (shown) can be significantly shortened, and the tact time of the main crimping process can be shortened. Note that Ts is a specified joining temperature of the anisotropic conductive material 22 and is a temperature finally reached at the time of joining, and (Ts−δT) is a temperature at which the joining action is effectively started.

また、上記のように異方性導電材22の温度立ちあがりを早くできるので、図7(a)、(b)に示すように、異方性導電材22中の熱硬化性樹脂22aの流動性が高い内に、確実に電子部品3の電極とパネル2の電極が十分に電気的に接合されるための圧縮厚さtに圧縮され、その状態で熱硬化性樹脂22aが硬化することになる。その結果、異方性導電材22が十分に加熱・加圧されて圧縮硬化されるため、図6(c)に示したように、異方性導電材22中の導電性粒子22bが熱硬化性樹脂22a中でばらばらに離間して分散した圧着前の状態から、図7(c)に示すように、電子部品3の電極とパネル2の電極が電気的に接合されるように、導電性粒子22bが相互に確実に接触し、導電状態が十分に確保された状態で接合することができ、従来例の図12(c)に示した状態に比較して、圧着接合の信頼性を向上することができる。   Moreover, since the temperature rise of the anisotropic conductive material 22 can be accelerated as described above, the fluidity of the thermosetting resin 22a in the anisotropic conductive material 22 as shown in FIGS. 7 (a) and 7 (b). Is compressed to a compression thickness t for ensuring that the electrode of the electronic component 3 and the electrode of the panel 2 are sufficiently electrically joined to each other, and the thermosetting resin 22a is cured in this state. . As a result, the anisotropic conductive material 22 is sufficiently heated and pressurized to be compressed and cured, so that the conductive particles 22b in the anisotropic conductive material 22 are thermally cured as shown in FIG. 6C. As shown in FIG. 7 (c), the conductive resin 22a is electrically conductive so that the electrode of the electronic component 3 and the electrode of the panel 2 are electrically joined from the state before the crimping dispersed and dispersed in the conductive resin 22a. Particles 22b can reliably contact each other and can be bonded in a state in which the conductive state is sufficiently secured, improving the reliability of the pressure bonding compared to the state shown in FIG. 12 (c) of the conventional example. can do.

(第2の実施形態)
次に、本発明の第2の実施形態について、図8、図9を参照して説明する。なお、以下の実施形態の説明では、先行する実施形態と共通する構成要素について、同一の参照符号を付して説明を省略し、主として相違点についてのみ説明する。
(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. In the following description of the embodiment, components common to the preceding embodiment are denoted by the same reference numerals, description thereof is omitted, and only differences will be mainly described.

上記実施形態の電子部品圧着装置1では、本圧着部位の幅寸法に略対応した幅寸法のテープ状のシート7を、パネル2の側端部の長手方向に沿って供給するように構成した例を示したが、本実施形態では、図8、図9に示すように、パネル2の側端部の略全長にわたる幅の帯状のシート7を、パネル2の側端側から中央側に向けて供給するシート供給装置23が配設されている。   In the electronic component crimping apparatus 1 of the above-described embodiment, an example in which the tape-like sheet 7 having a width dimension substantially corresponding to the width dimension of the main crimping portion is supplied along the longitudinal direction of the side end portion of the panel 2. However, in this embodiment, as shown in FIGS. 8 and 9, the belt-like sheet 7 having a width that extends over substantially the entire length of the side end portion of the panel 2 is directed from the side end side of the panel 2 toward the center side. A sheet feeding device 23 for feeding is provided.

シート供給装置23は、圧着装置5の後部(図8の左側)に配設されたシート供給部24と、圧着装置5の前部(図8の右側)に配設されたシート回収部25と、圧着ツール11とパネル2に仮圧着された電子部品3との間にシート7を通すとともにそのシート7の上下位置を任意に位置決めするシート位置決め部26とを備えている。   The sheet supply device 23 includes a sheet supply unit 24 disposed at the rear portion (left side in FIG. 8) of the crimping device 5, and a sheet collection unit 25 disposed at the front portion (right side in FIG. 8) of the crimping device 5. A sheet positioning unit 26 is provided for passing the sheet 7 between the crimping tool 11 and the electronic component 3 temporarily bonded to the panel 2 and arbitrarily positioning the vertical position of the sheet 7.

シート供給部24は、シート7を巻回した供給ロール27とテンション部28(図9のみに図示)を備えている。供給ロール27は、回転自在に支持されるとともに、所要時に回転制動する制動手段(図示せず)を備えている。テンション部28は一対のガイドローラ28a、28bとそれらの間にこれらローラに対して遠近方向に移動可能にかつ離間する方向に移動付勢されたテンションローラ28cにて構成されている。シート回収部25は、シート7を巻き取る巻取ロール29と巻取ロール29を回転駆動するモータ30とテンション部31(図9のみに図示)を備えている。テンション部31は、テンション部28と同様に一対のガイドローラ31a、31bとテンションローラ31cにて構成されている。   The sheet supply unit 24 includes a supply roll 27 around which the sheet 7 is wound and a tension unit 28 (shown only in FIG. 9). The supply roll 27 is rotatably supported and includes braking means (not shown) for rotating and braking when necessary. The tension portion 28 is composed of a pair of guide rollers 28a and 28b and a tension roller 28c that is urged to move in a direction away from the pair of guide rollers 28a and 28b. The sheet collecting unit 25 includes a winding roll 29 that winds the sheet 7, a motor 30 that rotationally drives the winding roll 29, and a tension unit 31 (shown only in FIG. 9). The tension part 31 is composed of a pair of guide rollers 31a and 31b and a tension roller 31c, like the tension part 28.

シート位置決め部26は、圧着ツール11の前後両側位置で、シート7に上方から当接する一対の昇降ローラ32a、32bにて構成され、シート供給部24のテンション部28とシート回収部25のテンション部31にてシート7に作用している張力によってシート7がこれら昇降ローラ32a、32b間に平面状に張設されている。これら昇降ローラ32a、32bの上下移動と位置決めによって、シート7はパネル2上の電子部品3上に接触又は近接して沿った圧着時の第1の位置と、パネル2を搬出するため上方に退避し、圧着ヘッド6の下方に適当間隔あけた位置で待機する第2の位置と、圧着動作の前に圧着ツール11とシート7とを接触又は近接させて圧着ツール11の熱でシート7を予熱する予熱時の第3の位置の3つの位置に位置決めされる。なお、シート7を予熱する第3の位置は、シート位置決め部26による位置決めとしているが、圧着ツール11の移動による位置決めであっても良い。この場合、第3の位置は第2の位置と略同じ位置であっても良い。   The sheet positioning unit 26 includes a pair of lifting rollers 32 a and 32 b that are in contact with the sheet 7 from above at both the front and rear positions of the crimping tool 11, and the tension unit 28 of the sheet supply unit 24 and the tension unit of the sheet collection unit 25. The sheet 7 is stretched between the elevating rollers 32a and 32b in a planar shape by the tension applied to the sheet 7 at 31. By the vertical movement and positioning of the elevating rollers 32 a and 32 b, the sheet 7 is retracted upward in order to carry out the panel 2 and the first position when the sheet 7 is brought into contact with or close to the electronic component 3 on the panel 2. Then, the sheet 7 is preheated by the heat of the crimping tool 11 by bringing the crimping tool 11 and the sheet 7 into contact with or in proximity to each other before the crimping operation. It is positioned at three positions of the third position during preheating. Note that the third position for preheating the sheet 7 is the positioning by the sheet positioning unit 26, but may be the positioning by the movement of the crimping tool 11. In this case, the third position may be substantially the same position as the second position.

なお、図8において、33はパネル2を搬入・搬出するパネル移載装置であり、Xテーブル33aと、Yテーブル33bと、Zテーブル33cにて構成されている。また、シート供給装置23は、フレーム9の上下方向中間部に取付けられた前後方向の取付フレーム34に設置されている。   In FIG. 8, reference numeral 33 denotes a panel transfer device that carries in and out the panel 2, and is composed of an X table 33a, a Y table 33b, and a Z table 33c. Further, the sheet supply device 23 is installed on a mounting frame 34 in the front-rear direction attached to the middle portion in the vertical direction of the frame 9.

本実施形態における圧着工程も、シート7の幅と供給方向が異なるだけで、図4を参照して説明した上記第1の実施形態の動作と同様であり、同様の作用効果が得られる。   The crimping process in the present embodiment is also similar to the operation of the first embodiment described with reference to FIG. 4 except that the width of the sheet 7 and the supply direction are different, and the same operational effects are obtained.

(第3の実施形態)
次に、本発明の第3の本実施形態について、図10を参照して説明する。
(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG.

上記第2の実施形態では、シート7を予熱する手段として、圧着ツール11を兼用し、シート7とこの圧着ツール11とを近接又は接触させて予熱するようにした例を示したが、本実施形態では、圧着ツール11より若干下方の前後両側位置に加熱手段35を配設した構成としている。本実施形態における圧着工程も、第1の実施形態の動作と同様であり、同様の作用効果が得られるとともに、加熱手段35とシート7の少なくとも一方の移動により所定温度に加熱制御された加熱手段35とシート7とを直接接触させて加熱することで、シート7を精度良く、所望の温度に予熱することができる。   In the second embodiment, the example in which the crimping tool 11 is also used as the means for preheating the sheet 7 and the sheet 7 and the crimping tool 11 are preliminarily brought into close contact or in contact with each other is shown. In the embodiment, the heating means 35 is disposed at both front and rear positions slightly below the crimping tool 11. The crimping process in the present embodiment is also the same as the operation of the first embodiment, and the same operation and effect can be obtained. The heating unit is controlled to be heated to a predetermined temperature by moving at least one of the heating unit 35 and the sheet 7. By heating 35 and the sheet 7 in direct contact, the sheet 7 can be preheated to a desired temperature with high accuracy.

以上の実施形態の説明では、パネル2に異方性導電材22を介して仮圧着されたTCPなどの電子部品3を本圧着するようにした例についてのみ説明したが、本発明は、任意の基板に異方性導電材22や非導電性接合材などの各種接合材を介して仮固定された電子部品を加熱加圧して接合する電子部品圧着装置にも適用することができる。   In the above description of the embodiment, only the example in which the electronic component 3 such as TCP temporarily bonded to the panel 2 via the anisotropic conductive material 22 is permanently bonded is described. The present invention can also be applied to an electronic component crimping apparatus that heats and presses an electronic component temporarily fixed to a substrate via various bonding materials such as an anisotropic conductive material 22 and a nonconductive bonding material.

本発明の電子部品圧着方法及び装置によれば、圧着動作に先だってシートを予熱して圧着動作を行うので、圧着時に圧着ツールと電子部品の間に介在したシートへの熱の逃出を抑制することができ、接合材による接合に必要な温度に上昇する時間を短縮できて圧着工程のタクトを短縮することができるので、各種基板に電子部品を圧着する電子部品圧着装置に好適に利用することができる。   According to the electronic component crimping method and apparatus of the present invention, the sheet is preheated prior to the crimping operation to perform the crimping operation, so that the escape of heat to the sheet interposed between the crimping tool and the electronic component during the crimping is suppressed. It is possible to shorten the time required to rise to the temperature required for bonding with the bonding material, and to shorten the tact time of the crimping process, so that it can be suitably used for an electronic component crimping apparatus that crimps electronic components to various substrates. Can do.

本発明の電子部品圧着装置の第1の実施形態の全体斜視図。1 is an overall perspective view of a first embodiment of an electronic component crimping apparatus according to the present invention. 同実施形態の正面図。The front view of the embodiment. 同実施形態の側面図。The side view of the embodiment. 同実施形態の動作フロー図。The operation | movement flowchart of the same embodiment. 圧着時の接合材の温度変化の特性図。The characteristic view of the temperature change of the joining material at the time of pressure bonding. 同実施形態の圧着開始時の状態を示し、(a)は圧着部の側面図、(b)は同要部拡大図、(c)はパネル下面から接合材を顕微鏡で見た状態の模式図。The state at the time of the crimping | compression-bonding start of the embodiment is shown, (a) is a side view of the crimping part, (b) is an enlarged view of the main part, and (c) is a schematic view of the bonding material viewed from the bottom of the panel with a microscope. . 同実施形態の圧着時の状態を示し、(a)は圧着部の側面図、(b)は同要部拡大図、(c)はパネル下面から接合材を顕微鏡で見た状態の模式図。The state at the time of the crimping | compression-bonding of the embodiment is shown, (a) is a side view of the crimping part, (b) is an enlarged view of the main part, and (c) is a schematic view of the bonding material viewed from the bottom of the panel with a microscope. 本発明の電子部品圧着装置の第2の実施形態の全体斜視図。The whole perspective view of 2nd Embodiment of the electronic component crimping apparatus of this invention. 同実施形態の正面図。The front view of the embodiment. 本発明の電子部品圧着装置の第3の実施形態の全体正面図。The whole front view of 3rd Embodiment of the electronic component crimping apparatus of this invention. 従来例の電子部品圧着装置における圧着部の構成を示し、(a)は側面図、(b)は異方性導電材の組成説明図。The structure of the crimping | compression-bonding part in the electronic component crimping apparatus of a prior art example is shown, (a) is a side view, (b) is composition explanatory drawing of an anisotropic electrically-conductive material. 従来例における圧着時の状態を示し、(a)は圧着部の側面図、(b)は同要部拡大図、(c)はパネル下面から接合材を顕微鏡で見た状態の模式図。The state at the time of the crimping | compression-bonding in a prior art example is shown, (a) is a side view of a crimping | compression-bonding part, (b) is the principal part enlarged view, (c) is the schematic diagram of the state which looked at the bonding material with the microscope from the panel lower surface.

符号の説明Explanation of symbols

1 電子部品圧着装置
2 パネル(基板)
3 電子部品
4 バックアップステージ
7 シート
8 シート供給装置
11 圧着ツール
14 シート位置決め部
22 異方性導電材(接合材)
23 シート供給装置
26 シート位置決め部
35 加熱手段
40 制御部
1 Electronic component crimping device 2 Panel (substrate)
DESCRIPTION OF SYMBOLS 3 Electronic component 4 Backup stage 7 Sheet 8 Sheet supply apparatus 11 Crimping tool 14 Sheet positioning part 22 Anisotropic conductive material (bonding material)
23 Sheet feeding device 26 Sheet positioning unit 35 Heating means 40 Control unit

Claims (6)

電子部品を接合材を介して基板上に配置し、この基板をバックアップステージにて支持し、圧着ツールにてシートを介して電子部品を加熱・加圧して基板に電子部品を圧着する電子部品圧着方法において、電子部品の加圧開始時点から逆算してシートの予熱に要する時間だけ前に、シートと加熱手段の少なくとも一方を予熱位置に移動させてシートを予熱し、その後予熱されたシートを介して圧着ツールによる加圧動作を行うことを特徴とする電子部品圧着方法。   An electronic component is placed on a substrate via a bonding material, this substrate is supported by a backup stage, and the electronic component is crimped to the substrate by heating and pressing the electronic component via a sheet with a crimping tool. In the method, the sheet is preheated by moving at least one of the sheet and the heating means to the preheating position by the time required for the preheating of the sheet by counting backward from the start of pressurization of the electronic component, and then via the preheated sheet. An electronic component crimping method characterized by performing a pressing operation with a crimping tool. 接合材が異方性導電材であることを特徴とする請求項1記載の電子部品圧着方法。   The electronic component crimping method according to claim 1, wherein the bonding material is an anisotropic conductive material. シートと圧着ツールとを接触させ又は近接させて予熱することを特徴とする請求項1又は2記載の電子部品圧着方法。   3. The electronic component crimping method according to claim 1 or 2, wherein the sheet and the crimping tool are brought into contact with or in proximity to each other and preheated. シートと圧着ツールとは別に設けた加熱手段とを接触させ又は近接させて予熱することを特徴とする請求項1又は2記載の電子部品圧着方法。   3. The electronic component crimping method according to claim 1 or 2, wherein the sheet and the heating means provided separately from the crimping tool are brought into contact with each other or brought into close proximity to preheat. 電子部品を接合材を介して配置した基板を支持するバックアップステージと、電子部品を加熱・加圧して基板に電子部品を圧着する圧着ツールと、圧着ツールと電子部品の間に介在するようにシートを供給するシート供給手段とを備えた電子部品圧着装置において、シート供給手段は圧着ツールと電子部品の間でシートを位置決めするシート位置決め部を有し、圧着ツールによる電子部品の加圧開始時点から逆算してシートの予熱に要する時間だけ前に、シート位置決め部と圧着ツールの少なくとも一方を移動させて、シートを圧着ツールに接触又は近接した予熱位置に位置させ、加圧開始時にシートを電子部品に接触又は近接した位置に移動させる制御部を設けたことを特徴とする電子部品圧着装置。   A backup stage that supports a substrate on which electronic components are arranged via a bonding material, a crimping tool that heats and pressurizes the electronic components to crimp the electronic components to the substrate, and a sheet that is interposed between the crimping tool and the electronic components In the electronic component crimping apparatus including the sheet feeding means for feeding the sheet, the sheet feeding means has a sheet positioning portion for positioning the sheet between the crimping tool and the electronic component, and from the start of pressing the electronic component by the crimping tool. Back-calculate and move at least one of the sheet positioning part and the crimping tool just before the time required to preheat the sheet, and place the sheet in a preheating position in contact with or close to the crimping tool. An electronic component crimping apparatus comprising a control unit that moves to a position in contact with or close to the electronic component. 電子部品を接合材を介して配置した基板を支持するバックアップステージと、電子部品を加熱・加圧して基板に電子部品を圧着する圧着ツールと、圧着ツールと電子部品の間に介在するようにシートを供給するシート供給手段とを備えた電子部品圧着装置において、圧着ツールとは別に加熱手段を設け、シート供給手段は圧着ツールと電子部品の間でシートを位置決めするシート位置決め部を有し、圧着ツールによる電子部品の加圧開始時点から逆算してシートの予熱に要する時間だけ前に、シート位置決め部と加熱手段の少なくとも一方を移動させて、シートを加熱手段に接触又は近接した予熱位置に位置させ、加圧開始時にシートを電子部品に接触又は近接した位置に移動させる制御部を設けたことを特徴とする電子部品圧着装置。   A backup stage that supports a substrate on which electronic components are arranged via a bonding material, a crimping tool that heats and pressurizes the electronic components to crimp the electronic components to the substrate, and a sheet that is interposed between the crimping tool and the electronic components In the electronic component crimping apparatus comprising the sheet feeding means for feeding the sheet, a heating means is provided separately from the crimping tool, and the sheet feeding means has a sheet positioning portion for positioning the sheet between the crimping tool and the electronic component, and is crimped. At least one of the sheet positioning part and heating means is moved backward from the time when the electronic component is pressed by the tool, and the sheet is positioned at a preheating position in contact with or close to the heating means. An electronic component crimping apparatus comprising a control unit that moves the sheet to a position in contact with or close to the electronic component at the start of pressurization.
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JP2012054350A (en) * 2010-08-31 2012-03-15 Shibaura Mechatronics Corp Mounting device and mounting method of electronic component
JP2017123423A (en) * 2016-01-08 2017-07-13 東レエンジニアリング株式会社 Semiconductor mounting device and semiconductor mounting method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054350A (en) * 2010-08-31 2012-03-15 Shibaura Mechatronics Corp Mounting device and mounting method of electronic component
JP2017123423A (en) * 2016-01-08 2017-07-13 東レエンジニアリング株式会社 Semiconductor mounting device and semiconductor mounting method

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