JP2008072107A - ソース及びドレインにドープされたエピタキシャル・コンタクトを有する半導体ナノワイヤmosfet - Google Patents
ソース及びドレインにドープされたエピタキシャル・コンタクトを有する半導体ナノワイヤmosfet Download PDFInfo
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- JP2008072107A JP2008072107A JP2007223096A JP2007223096A JP2008072107A JP 2008072107 A JP2008072107 A JP 2008072107A JP 2007223096 A JP2007223096 A JP 2007223096A JP 2007223096 A JP2007223096 A JP 2007223096A JP 2008072107 A JP2008072107 A JP 2008072107A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 150
- 239000002070 nanowire Substances 0.000 title claims abstract description 148
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 82
- 229910052710 silicon Inorganic materials 0.000 claims description 81
- 239000010703 silicon Substances 0.000 claims description 81
- 239000000758 substrate Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 25
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- 239000002184 metal Substances 0.000 claims description 12
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- 238000011065 in-situ storage Methods 0.000 description 11
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- 239000013078 crystal Substances 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
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- 229910000577 Silicon-germanium Inorganic materials 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
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- 238000005498 polishing Methods 0.000 description 4
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- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910005883 NiSi Inorganic materials 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
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- 238000001459 lithography Methods 0.000 description 3
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000005049 silicon tetrachloride Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
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- 238000000231 atomic layer deposition Methods 0.000 description 2
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical group O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
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- 235000012239 silicon dioxide Nutrition 0.000 description 2
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- 238000000038 ultrahigh vacuum chemical vapour deposition Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910003811 SiGeC Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
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- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
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- 229910000078 germane Inorganic materials 0.000 description 1
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- 238000011534 incubation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
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- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/45—Ohmic electrodes
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H01L29/78684—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys
Abstract
【解決手段】 FETチャネルを形成する半導体ナノワイヤと、半導体ナノワイヤから半径方向のエピタキシによって形成されるドープされたソース及びドレイン領域を有するFETが開示される。トップ・ゲート型及びボトム・ゲート型のナノワイヤFETが論じられる。ソース及びドレインの形成には、選択的又は非選択的エピタキシを用いることができる。
【選択図】 図4
Description
102、103、203:絶縁体膜
104、204:シリコン・ナノワイヤ、半導体ナノワイヤ
105:SiO2膜
106:Si3N4膜
107、110:コンタクト・ホール
108:半導体材料
111:シリサイド
202:ゲート誘電体
210:トップ・ゲート
211:マスク
212:スペーサ
213:エピタキシャルな延長部分
214:自己整合シリサイド
Claims (7)
- 電界効果トランジスタであって、
半導体ナノワイヤにより形成される半導体ナノワイヤ・チャネルと、
前記半導体ナノワイヤ・チャネル内の電流を制御するためのゲートと、
前記ゲートに隣接するソース領域及びドレイン領域と
を含み、前記ソース及びドレイン領域はドープされ、前記半導体ナノワイヤ・チャネルの半径方向に延びる、電界効果トランジスタ。 - 前記ソース及び前記ドレイン領域は前記半導体ナノワイヤ・チャネルからエピタキシャル成長されている、請求項1に記載の電界効果トランジスタ。
- 前記ソース及び前記ドレイン領域の上に配置された金属半導体合金をさらに含む、請求項1に記載の電界効果トランジスタ。
- 前記半導体ナノワイヤ・チャネルはシリコン・ナノワイヤより成るシリコン・ナノワイヤ・チャネルであり、前記金属半導体合金はニッケル・シリサイドである、請求項3に記載の電界効果トランジスタ。
- 電界効果トランジスタを作成する方法であって、
導電性基板の上にゲート誘電体を形成するステップと、
前記ゲート誘電体の上に半導体ナノワイヤを設けるステップと、
前記半導体ナノワイヤの上に誘電体スタックを堆積させるステップと、
前記誘電体スタック内にコンタクト・ホールを形成して前記半導体ナノワイヤの選択された領域を露出するステップと、
前記露出された領域の半導体ナノワイヤを半径方向のエピタキシャル成長によって厚くするステップと
を含み、前記エピタキシャル成長した領域は、ソース及びドレイン領域を形成するためにドープする、方法。 - 前記半導体ナノワイヤを前記設けるステップは、金触媒の使用を含む、請求項5に記載の方法。
- 電界効果トランジスタを作成する方法であって、
半導体基板上に絶縁層を形成するステップと、
前記絶縁層上に半導体ナノワイヤ懸濁液をスピンコートするステップと、
前記半導体ナノワイヤ上にゲート誘電体を堆積させるステップと、
前記ゲート誘電体の一部分の上にトップ・ゲートを形成するステップと、
前記トップ・ゲートの側壁上にスペーサを形成するステップと、
前記半導体ナノワイヤの一部分を露出させるための前記トップ・ゲート及び前記スペーサによって覆われていない前記ゲート誘電体の一部分を除去するステップと、
前記露出された半導体ナノワイヤを半径方向のエピタキシャル成長によって厚くするステップと
を含む方法。
Applications Claiming Priority (2)
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JP5273972B2 (ja) | 2013-08-28 |
CN101145573A (zh) | 2008-03-19 |
US20090311835A1 (en) | 2009-12-17 |
US20120190155A1 (en) | 2012-07-26 |
US20080061284A1 (en) | 2008-03-13 |
US7999251B2 (en) | 2011-08-16 |
US8153494B2 (en) | 2012-04-10 |
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