JP2008066745A - Method for mounting electronic part - Google Patents

Method for mounting electronic part Download PDF

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JP2008066745A
JP2008066745A JP2007287906A JP2007287906A JP2008066745A JP 2008066745 A JP2008066745 A JP 2008066745A JP 2007287906 A JP2007287906 A JP 2007287906A JP 2007287906 A JP2007287906 A JP 2007287906A JP 2008066745 A JP2008066745 A JP 2008066745A
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mounting
shuttle
electronic component
component
substrate
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JP4291387B2 (en
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Kanji Hata
寛二 秦
Masachika Narita
正力 成田
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To accurately mount electronic parts where connection surfaces of bare IC chips and the like are directed upwardly that are supplied on a substrate at a high speed. <P>SOLUTION: The system includes a step of positioning the substrate 3, a step of taking electronic parts 2 out of a part supplying section 5 that supplies the electronic parts 2 whose connection surfaces are directed upwardly, a step of keeping a plurality of the parts 2 taken out of the section 5 in a row in the X direction by a first shuttle 27 and moving them to a transfer position in the X direction, a step of taking a plurality of the parts 2 at the transfer position from the first shuttle 27 to a second shuttle 28 and positioning each part 2 at a part supply position B by turning upside down the second shuttle 28 and moving the same in the X direction, and a step of receiving the part 2 at the part supply position B with a mounting head 15 and mounting the same on the substrate 3 positioned at a mounting position A by moving it in the receiving X direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、ベアICチップなどの接続面を上向きにして供給される電子部品を基板に実装する電子部品実装方法に関するものである。   The present invention relates to an electronic component mounting method for mounting an electronic component, such as a bare IC chip, supplied on a substrate with a connection surface facing upward.

電子部品を基板に実装する電子部品実装方法としては、間欠回転する回転体の外周部にその間欠回転角間隔で複数の実装ヘッドを配設して各実装ヘッドが供給位置と実装位置との間で移動するようにし、供給位置に所定の電子部品を部品供給部を移動させて供給し、基板の所定の実装位置を実装位置に位置決めし、実装ヘッドにて基板の所定位置に電子部品を実装する方式や、基板を位置決め固定し、XY方向に移動可能な実装ヘッドにて、部品供給部から所定の電子部品を取り出し、基板の所定の実装位置に移動して実装する方式など、種々の方式のものが知られている。   As an electronic component mounting method for mounting an electronic component on a substrate, a plurality of mounting heads are arranged on the outer periphery of a rotating body that rotates intermittently at intervals of the intermittent rotation angle, and each mounting head is located between a supply position and a mounting position. And move the component supply unit to the supply position by moving the component supply unit, position the predetermined mounting position of the board at the mounting position, and mount the electronic component at the predetermined position on the board with the mounting head Various methods, such as a method of positioning and fixing a substrate, a method of taking a predetermined electronic component from a component supply unit with a mounting head movable in the X and Y directions, and moving to a predetermined mounting position on the substrate Things are known.

また、ベアICチップを基板に実装する電子部品実装方法として、ダイシングされたウエハの状態でベアICチップをXYテーブル上に供給し、このXYテーブルにて所定のベアICチップを第1の供給位置に位置決めし、反転移送手段にて第1の供給位置で所定のベアICチップを保持して上下を反転して第2の供給位置に移送し、第2の供給位置で実装ヘッドにて保持し、一方、基板をY方向テーブルにてY方向に移動可能な支持台上に載置固定し、実装ヘッドをX方向テーブルにて基板における実装位置のX方向位置まで移動させるとともに基板における実装位置のY方向位置が実装ヘッドのY方向位置に一致するようにY方向テーブルにて基板を移動し、ベアICチップと基板の実装箇所の位置合わせを行った後、実装ヘッドにてベアICチップを実装するように構成されたものが知られている(例えば、特許文献1参照)。
特開2000−68327号公報
As an electronic component mounting method for mounting a bare IC chip on a substrate, the bare IC chip is supplied onto an XY table in a diced wafer state, and a predetermined bare IC chip is supplied to the first supply position on the XY table. And the reverse transfer means holds the predetermined bear IC chip at the first supply position, reverses it upside down and transfers it to the second supply position, and holds it at the second supply position by the mounting head. On the other hand, the substrate is placed and fixed on a support table movable in the Y direction by the Y direction table, the mounting head is moved to the X direction position of the mounting position on the substrate by the X direction table, and the mounting position on the substrate is changed. The substrate is moved by the Y direction table so that the Y direction position matches the Y direction position of the mounting head, and the mounting positions of the bare IC chip and the substrate are aligned, and then the mounting head That is configured to mount the IC chip is known (e.g., see Patent Document 1).
JP 2000-68327 A

ところで、上記のようなベアIC部品を実装する電子部品実装方法においては、実装ヘッドを第2の部品供給位置と実装位置との間でX方向に移動及び位置決めし、基板をX方向と直交するY方向に移動及び位置決めすることで、高精度で高速の実装を実現するようにしているが、一層の高速化を図るためには、第2の部品供給位置を基板の近傍に配設し、この第2部品供給位置にベアIC部品を高速にて供給位置決めする必要がある。   By the way, in the electronic component mounting method for mounting bare IC components as described above, the mounting head is moved and positioned in the X direction between the second component supply position and the mounting position, and the substrate is orthogonal to the X direction. By moving and positioning in the Y direction, high-precision and high-speed mounting is realized, but in order to further increase the speed, the second component supply position is arranged near the board, It is necessary to supply and position the bare IC component at the second component supply position at a high speed.

しかし、上記電子部品実装方法では、反転移送手段にて第1の供給位置でベアICチップを保持し、上下反転しつつ移動し、第2部品供給位置に位置決めする工程に多くの時間を要し、特に近年はICウエハが大型化しているために、第1の供給位置と第2の供給位置までの移動距離が大きく、高速実装の実現を困難にしている。   However, in the electronic component mounting method described above, it takes a lot of time to hold the bare IC chip at the first supply position by the reversing transfer means, move it upside down, and position it at the second component supply position. In particular, since the size of IC wafers has been increasing in recent years, the moving distance between the first supply position and the second supply position is large, making it difficult to realize high-speed mounting.

本発明は、このような状況に鑑み、ベアICチップなどの接続面を上向きにして供給される電子部品を基板に高精度かつ高速にて実装することができる電子部品実装方法を提供することを目的とする。   In view of such circumstances, the present invention provides an electronic component mounting method capable of mounting an electronic component supplied with a connection surface facing upward such as a bare IC chip on a substrate with high accuracy and high speed. Objective.

本発明の電子部品実装方法は、基板を位置決めする工程と、接続面が上向きの電子部品を供給する部品供給部から電子部品を取り出す工程と、部品供給部から取り出した複数の電子部品を第1のシャトルにてX方向に一列状に保持し、受け渡し位置までX方向に移動する工程と、受け渡し位置で第1のシャトルから第2のシャトルに複数の電子部品を一括して受け取り、第2のシャトルを上下反転するとともにX方向に移動して各電子部品を部品供給位置に位置決めする工程と、部品供給位置で実装ヘッドにて電子部品を受け取りX方向に移動して実装位置で位置決めされた基板に実装する工程とを有するものである。   The electronic component mounting method of the present invention includes a step of positioning a board, a step of taking out an electronic component from a component supply unit that supplies an electronic component having a connection surface facing upward, and a plurality of electronic components taken out from the component supply unit. Holding in a single line in the X direction with the shuttle of No. 1 and moving in the X direction to the delivery position, and receiving a plurality of electronic components from the first shuttle to the second shuttle at the delivery position, A process in which the shuttle is turned upside down and moved in the X direction to position each electronic component at the component supply position, and the electronic component is received by the mounting head at the component supply position and moved in the X direction and positioned at the mounting position. And a process of mounting on the board.

この構成によると、電子部品を取り出して第1のシャトルに移載する動作は単純動作であるため高速にて第1のシャトルに移載することができ、受け渡し位置で第1のシャトルから第2のシャトルに複数の電子部品を一括して受け渡すことで、複数の電子部品を一括して上下反転して各電子部品を順次部品供給位置に供給することができるので、部品供給位置に対する電子部品の供給の高速化を図ることができ、電子部品高速実装を実現することができる。   According to this configuration, since the operation of taking out the electronic component and transferring it to the first shuttle is a simple operation, it can be transferred to the first shuttle at a high speed, and the second shuttle can be transferred from the first shuttle at the delivery position. By transferring multiple electronic components to the shuttle at once, the electronic components can be turned upside down at the same time and each electronic component can be sequentially supplied to the component supply position. Supply speed can be increased, and high-speed electronic component mounting can be realized.

なお、第1及び第2のシャトルは、往復移動させてもよいが、複数のシャトルを循環移動させるようにすると、一層の高速化を実現できる。また、基板の位置決め工程で、基板をXY方向の2方向に位置決めすると、基板の位置決めが高速で行える場合には実装ヘッドによる実装位置を固定することができて一層高速にて高精度に実装でき、また基板をY方向の一方向に位置決めすると、基板の位置決めを高速化できて高速にて実装することができる。   The first and second shuttles may be reciprocated, but if a plurality of shuttles are circulated, a further increase in speed can be realized. In addition, if the board is positioned in two directions in the XY direction in the board positioning process, if the board can be positioned at high speed, the mounting position by the mounting head can be fixed and mounting at higher speed and higher accuracy is possible. Further, when the substrate is positioned in one direction in the Y direction, the positioning of the substrate can be speeded up and can be mounted at a high speed.

また、第2のシャトルに代えて一定軸芯回りに回転可能な回転テーブルに装着されて部品供給位置まで旋回移動可能な旋回シャトルにて、受け渡し位置で第1のシャトルから複数の電子部品を一括して受け取り、旋回シャトルを上下反転するとともに旋回して各電子部品を部品供給位置に位置決めすると、第2のシャトルを往復動作させたり循環させたりするよりも簡単な構成によって高速化を実現できる。   Further, instead of the second shuttle, a plurality of electronic components are collectively collected from the first shuttle at the delivery position by a turning shuttle that is mounted on a rotary table that can be rotated around a fixed axis and can turn to the parts supply position. If the electronic shuttle is turned upside down and turned to position each electronic component at the component supply position, the speed can be increased with a simpler structure than when the second shuttle is reciprocated or circulated.

また、部品供給位置で複数の実装ヘッドにて電子部品を受け取り、実装位置で各実装ヘッドにて基板に実装すると、実装ヘッドによる実装工程のタクトタイムを短縮できて一層の高速実装を実現することができる。   In addition, when electronic components are received by multiple mounting heads at the component supply position and mounted on the substrate by each mounting head at the mounting position, the tact time of the mounting process by the mounting head can be shortened to achieve higher-speed mounting. Can do.

また、基板を位置決めする工程は、実装ヘッドの移動方向と直交するY方向に移動及び位置決めすると、実装ヘッドと基板をそれぞれ1軸方向に移動及び位置決めするので、簡単な構成にて高速にて高精度に実装することができる。   Also, the substrate positioning step moves and positions the mounting head and the substrate in one axial direction when moving and positioning in the Y direction orthogonal to the moving direction of the mounting head, so that the high speed can be achieved with a simple configuration. Can be implemented with accuracy.

また、実装する工程で、実装ヘッドによる実装位置と退避位置との間で移動可能な認識手段にて電子部品と基板の実装位置の両方を認識すると、高精度の実装を実現できる。   Further, in the mounting process, if both the electronic component and the mounting position of the board are recognized by the recognition means that can move between the mounting position and the retracted position by the mounting head, highly accurate mounting can be realized.

本発明の電子部品実装方法によれば、電子部品を取り出して第1のシャトルに移載する動作は単純動作であるため高速にて第1のシャトルに移載することができ、受け渡し位置で第1のシャトルから第2のシャトルに複数の電子部品を一括して受け渡すことで、複数の電子部品を一括して上下反転して各電子部品を順次部品供給位置に供給することができるので、部品供給位置に対する電子部品の供給の高速化を図ることができ、接続面が上向きで供給される電子部品の高速実装を実現することができる。   According to the electronic component mounting method of the present invention, since the operation of taking out the electronic component and transferring it to the first shuttle is a simple operation, it can be transferred to the first shuttle at high speed and the first position can be transferred at the delivery position. By transferring a plurality of electronic components from one shuttle to the second shuttle at a time, the plurality of electronic components can be turned upside down and supplied to the component supply position sequentially. It is possible to increase the supply speed of the electronic component to the component supply position, and it is possible to realize high-speed mounting of the electronic component supplied with the connection surface facing upward.

(第1の実施形態)
以下、本発明の電子部品実装方法の第1の実施形態について、図1〜図3を参照して説明する。
(First embodiment)
Hereinafter, a first embodiment of the electronic component mounting method of the present invention will be described with reference to FIGS.

本実施形態の電子部品実装方法を実施する電子部品実装装置1は、ベアICチップなど、接続面を上向きにした状態で供給される電子部品2を基板3に実装するものであり、本体部4と部品供給部5にて構成されている。本体部4において、基板3を左右方向(X方向)の一側(右側)から他側(左側)に向けて搬送するように、本体部4のX方向の一側部に搬入手段6が、中央部に基板位置決め手段7が、他側部に搬出手段8が配設され、さらに部品供給部5に基板3をX方向に貫通して搬送する搬送手段9が配設されている。   An electronic component mounting apparatus 1 that performs the electronic component mounting method according to the present embodiment mounts an electronic component 2 supplied with a connection surface facing upward, such as a bare IC chip, on a substrate 3. And the component supply unit 5. In the main body part 4, the loading means 6 is provided on one side part of the main body part 4 in the X direction so as to transport the substrate 3 from one side (right side) to the other side (left side) in the left-right direction (X direction). A substrate positioning means 7 is disposed at the center, an unloading means 8 is disposed at the other side, and a conveying means 9 that conveys the substrate 3 through the component supply section 5 in the X direction is disposed.

基板位置決め手段7は、基板3の電子部品2を実装すべき位置を、X方向及びそれに直交するY方向の所定位置に設定された実装位置A(図3参照)に位置決めするように構成されている。そのため、X方向及びY方向に移動及び位置決め可能なXYテーブル10上に基板3を固定支持する支持台11が配設され、その前後両側に搬入手段6及び搬出手段8に接続可能な移載レール12が上下移動可能に配設され、かつXYテーブル10を昇降動作させる昇降手段(図示せず)が設けられている。かくして、昇降手段にてXYテーブル10が下降し、移載レール12が上方位置に移動して搬入手段6と移載レール12が接続された状態で基板3が移載レール12に受け渡され、その後XYテーブル10が上昇するとともに移載レール12が下方位置に移動することで基板3が支持台11にて固定支持され、XYテーブル10にてXY方向に位置決めされる。   The board positioning means 7 is configured to position the position where the electronic component 2 of the board 3 is to be mounted at a mounting position A (see FIG. 3) set at a predetermined position in the X direction and the Y direction perpendicular thereto. Yes. Therefore, a support base 11 that fixes and supports the substrate 3 is disposed on an XY table 10 that can be moved and positioned in the X direction and the Y direction, and a transfer rail that can be connected to the carry-in means 6 and the carry-out means 8 on both front and rear sides thereof. 12 is disposed so as to be movable up and down, and lifting means (not shown) for moving the XY table 10 up and down is provided. Thus, the XY table 10 is lowered by the elevating means, the transfer rail 12 is moved to the upper position, and the substrate 3 is transferred to the transfer rail 12 with the carry-in means 6 and the transfer rail 12 connected. Thereafter, the XY table 10 is raised and the transfer rail 12 is moved to a lower position, whereby the substrate 3 is fixedly supported by the support base 11 and positioned in the XY direction by the XY table 10.

基板位置決め手段7の上方には実装手段13が配設されている。実装手段13は、上記実装位置AのY方向位置においてX方向テーブル14にて実装ヘッド15をX方向に移動させ、後述の部品供給位置B(図3参照)と上記実装位置Aとの間で往復移動するように構成されている。実装ヘッド15は、電子部品2を吸着保持する吸着ノズルとその昇降手段と所定の加圧力を負荷する加圧手段とを有し、さらに必要に応じて加熱手段を備えている。   A mounting means 13 is disposed above the substrate positioning means 7. The mounting means 13 moves the mounting head 15 in the X direction on the X direction table 14 in the Y direction position of the mounting position A, and between a component supply position B (see FIG. 3) described later and the mounting position A. It is configured to reciprocate. The mounting head 15 has a suction nozzle that sucks and holds the electronic component 2, its lifting and lowering means, and a pressurizing means that loads a predetermined pressurizing force, and further includes a heating means as necessary.

また、実装ヘッド15と支持台11との間に、上側で実装ヘッド15に保持された電子部品2を認識し下側で基板3の電子部品を実装すべき位置を認識できるように構成された同時認識手段16が配設されている。なお、同時認識手段16は、実装位置に位置決めされた状態でプリズム等で光路を切り換えて順次電子部品2と基板3の実装位置を認識するように構成され、字義通りに完全に同時に認識するのではない。勿論、字義通り同時に認識するようにしても良いが、構成が複雑になったり、コスト高になったりして好ましくない場合が多い。   Further, the electronic component 2 held by the mounting head 15 is recognized on the upper side between the mounting head 15 and the support base 11, and the position where the electronic component on the substrate 3 is to be mounted can be recognized on the lower side. Simultaneous recognition means 16 is provided. Note that the simultaneous recognition means 16 is configured to sequentially recognize the mounting positions of the electronic component 2 and the board 3 by switching the optical path with a prism or the like while being positioned at the mounting position, and recognizes them completely at the same time literally. is not. Of course, it may be recognized at the same time literally, but there are many cases where the configuration becomes complicated and the cost is high, which is not preferable.

17は、実装ヘッド15の移動経路における基板位置決め手段17の一側部の下部に配設された転写ステーションで、実装ヘッド15にて保持された電子部品2に接着剤や封止剤などを転写付与するように構成されている。   Reference numeral 17 denotes a transfer station disposed under one side of the substrate positioning means 17 in the movement path of the mounting head 15, and transfers an adhesive, a sealing agent, etc. to the electronic component 2 held by the mounting head 15. It is configured to grant.

部品供給部5の前側と後側には部品供給手段18、19が配設され、それぞれ交換可能に結合されている。前側の部品供給手段18は、多数の電子部品2が配列して形成されるとともに個片にダイシングされた状態でエキスパンドシート上に支持されている半導体ウエハを複数枚収容した部品マガジン20と、所望の半導体ウエハを所定の供給高さ位置に位置決めするマガジンリフタ21にて構成されている。また、後側の部品供給手段19は、多数の電子部品2を収容して成るテープ状部品集合体が装着された複数の部品供給カセット22が並列して搭載されており、部品供給カセット22の部品取り出し位置を所定のY方向位置に位置決めできるように構成されている。   Component supply means 18 and 19 are disposed on the front side and the rear side of the component supply unit 5 and are connected to each other in a replaceable manner. The front-side component supply means 18 includes a component magazine 20 containing a plurality of semiconductor wafers formed by arranging a large number of electronic components 2 and being diced into individual pieces and supported on an expanded sheet, and a desired magazine. The magazine lifter 21 positions the semiconductor wafer at a predetermined supply height position. The rear component supply means 19 includes a plurality of component supply cassettes 22 mounted with a tape-shaped component assembly containing a large number of electronic components 2 mounted in parallel. The component takeout position can be positioned at a predetermined Y direction position.

部品供給部5の前部には、エキスパンド台23(図3参照)がY方向テーブル(図示せず)上に上下移動可能に設置され、ウエハ引き出し手段(図示せず)にて部品供給手段18の部品マガジン20から半導体ウエハをエキスパンド台23(図3参照)に導入するように構成され、エキスパンド台23にてそのエキスパンドシートを拡張させて各電子部品2を間隔をあけて分離させ、さらにY方向テーブルにて所望の電子部品2を所定のY方向位置に位置決めするように構成されている。   An expand base 23 (see FIG. 3) is installed at the front part of the component supply unit 5 so as to be movable up and down on a Y-direction table (not shown), and the component supply unit 18 is provided by a wafer drawing unit (not shown). The semiconductor wafer is introduced from the component magazine 20 into the expanding table 23 (see FIG. 3), and the expanding sheet is expanded on the expanding table 23 to separate the electronic components 2 at intervals. A desired electronic component 2 is positioned at a predetermined Y-direction position by a direction table.

24は、所定のY方向位置に位置決めされたエキスパンド台23上や部品供給カセット22の電子部品2を認識する認識カメラであり、X方向に移動可能に配設され、所定のY方向位置に位置決めされた任意の電子部品2を認識するように構成されている。   Reference numeral 24 is a recognition camera for recognizing the electronic component 2 on the expand base 23 or the component supply cassette 22 positioned at a predetermined Y direction position, and is arranged to be movable in the X direction and positioned at the predetermined Y direction position. It is configured to recognize any electronic component 2 that has been made.

部品供給部5と実装ヘッド15に対する部品供給位置Bとの間には、部品供給部5において接続面が上向きで供給された電子部品2を取り出し、その接続面を下向きにして部品供給位置Bに供給する部品反転移送手段25が配設されている。   Between the component supply unit 5 and the component supply position B with respect to the mounting head 15, the electronic component 2 supplied with the connection surface facing upward in the component supply unit 5 is taken out, and the connection surface is directed downward to the component supply position B. A component reversal transfer means 25 to be supplied is disposed.

部品反転移送手段25は、図3(a)、(b)に詳細に示すように、部品供給部5から各電子部品2を取り出して移載する移載手段26と、移載手段26にて移載された複数の電子部品2をX方向に一列状に保持して受け渡し位置までX方向に移動可能な第1のシャトル27と、第1のシャトル27から複数の電子部品2を一括して保持して上下反転するとともにX方向に移動して各電子部品2を部品供給位置Bに位置決めする第2のシャトル28にて構成されている。   As shown in detail in FIGS. 3A and 3B, the component reversal transfer unit 25 includes a transfer unit 26 that takes out each electronic component 2 from the component supply unit 5 and transfers it, and a transfer unit 26. A plurality of transferred electronic components 2 are held in a row in the X direction and can be moved in the X direction to the delivery position, and the plurality of electronic components 2 from the first shuttle 27 are collectively collected. The second shuttle 28 is configured to hold and turn upside down and move in the X direction to position each electronic component 2 at the component supply position B.

図示例では、移載手段26は、4つの吸着ノズル29が放射状に配設されるとともにその中心の水平軸芯回りに回転可能に構成され、部品供給部5で4つの電子部品2を順次保持して第1のシャトル27に対する受け渡し位置に移動し、ここで第1のシャトル27に順次受け渡し、次に第1のシャトル27が第2のシャトル28に対する受け渡し位置に移動し、ここで4つの電子部品2を一括して第2のシャトル28に受け渡し、この第2のシャトル28にて各電子部品2を上下反転させてその接続面を下向きにし、部品供給位置Bに順次供給するように構成されている。   In the illustrated example, the transfer means 26 is configured such that four suction nozzles 29 are arranged radially and can be rotated around a central horizontal axis, and the four electronic components 2 are sequentially held by the component supply unit 5. To the transfer position for the first shuttle 27, where it is sequentially transferred to the first shuttle 27, and then the first shuttle 27 is moved to the transfer position for the second shuttle 28, where four electrons are transferred. The components 2 are collectively delivered to the second shuttle 28, and each electronic component 2 is turned upside down by the second shuttle 28 so that the connection surface faces downward and is sequentially supplied to the component supply position B. ing.

次に、以上の構成における基板3に対する電子部品2の実装動作を説明すると、搬入手段6にて供給された基板3は、XYテーブル10に設けられた移載レール12上に受け渡された後、移載レール12が下降することで支持台11上に載置固定される。その後、XYテーブル10にて基板3における電子部品3を実装すべき位置が実装位置Aに一致するように位置決めされる。   Next, the mounting operation of the electronic component 2 on the board 3 in the above configuration will be described. After the board 3 supplied by the carry-in means 6 is transferred onto the transfer rail 12 provided on the XY table 10. The transfer rail 12 is lowered and placed on the support table 11. After that, the XY table 10 is positioned so that the position where the electronic component 3 is to be mounted on the substrate 3 coincides with the mounting position A.

一方、部品供給手段18にて供給され、エキスパンド台23上に導入された半導体ウエハは、エキスパンド台23でエキスパンドシートが拡大されて各電子部品2が分離された後、Y方向テーブルが作動されて実装すべき電子部品2が部品反転移送手段25の移載手段26の吸着ノズル29の移動経路の直下に位置するように位置決めされる。部品供給手段19にて電子部品2が供給される場合も同様である。次に、認識カメラ24が実装すべき電子部品2の直上に位置決めされ、電子部品2の適否とその位置が認識され、その認識結果によってY方向テーブルの位置補正が成されるとともに、移載手段26における吸着ノズル25の位置決めすべき位置が求められる。   On the other hand, the semiconductor wafer supplied by the component supplying means 18 and introduced onto the expanding table 23 is expanded by the expanding table 23 to separate each electronic component 2 and then the Y direction table is operated. The electronic component 2 to be mounted is positioned so as to be located immediately below the movement path of the suction nozzle 29 of the transfer means 26 of the component reversal transfer means 25. The same applies when the electronic component 2 is supplied by the component supply means 19. Next, the recognition camera 24 is positioned immediately above the electronic component 2 to be mounted, the suitability of the electronic component 2 and its position are recognized, the position of the Y direction table is corrected based on the recognition result, and the transfer means. 26, the position where the suction nozzle 25 should be positioned is obtained.

次いで、移載手段26の吸着ノズル29が実装すべき電子部品2の位置に位置決めされ、吸着ノズル29にてその電子部品2が吸着保持されて持ち上げられ、その後上記のように第1のシャトル27に対する受け渡し位置に移動して順次第1のシャトル27に受け渡され、この第1のシャトル27から第2のシャトル28に一括して受け渡され、第2のシャトル28にて複数の電子部品2が一括して上下反転されて接続面を下向きにして部品供給位置Bに順次供給される。   Next, the suction nozzle 29 of the transfer means 26 is positioned at the position of the electronic component 2 to be mounted, and the electronic component 2 is sucked and held by the suction nozzle 29 and then lifted as described above. To the first shuttle 27 and sequentially delivered from the first shuttle 27 to the second shuttle 28, and the second shuttle 28 allows a plurality of electronic components 2 to be delivered. Are turned upside down at a time and are sequentially supplied to the component supply position B with the connection surface facing downward.

その時には、実装手段13の実装ヘッド15が部品供給位置Bに移動してきており、実装ヘッド15にて電子部品2が保持された後、X方向テーブル14が作動されて実装ヘッド15が実装位置Aに位置決めされる。   At that time, the mounting head 15 of the mounting means 13 has moved to the component supply position B. After the electronic component 2 is held by the mounting head 15, the X-direction table 14 is actuated and the mounting head 15 is moved to the mounting position A. Is positioned.

それと同時に、同時認識手段16が基板3の実装位置Aに位置決めされ、その状態で基板3の実装位置に設けられている位置マークが認識されるとともに、実装ヘッド15に保持されている電子部品2が認識され、所定の位置決め精度が確保されるようにXYデーブル10又はX方向テーブル14による位置補正が成され、基板3の実装位置に電子部品2の位置が高精度に位置決めされる。   At the same time, the simultaneous recognition means 16 is positioned at the mounting position A of the substrate 3, and the position mark provided at the mounting position of the substrate 3 is recognized in this state, and the electronic component 2 held by the mounting head 15. And the position correction by the XY table 10 or the X direction table 14 is performed so that a predetermined positioning accuracy is ensured, and the position of the electronic component 2 is positioned with high accuracy at the mounting position of the substrate 3.

その後、実装ヘッド15の吸着ノズルが昇降手段にて下降されるとともに加圧手段にて加圧されて電子部品2が実装される。なお、必要に応じて実装ヘッド15に設けられた加熱手段にて電子部品2が加熱され、加熱加圧によって電子部品2の電極と基板2の電極の接合が行われる。また、必要に応じて実装ヘッド15は実装前に転写ステーション17に移動して接着剤や封止剤などを転写付与され、その場合実装時に加熱手段で加熱することで接着剤や封止剤の硬化工程まで含めた実装が完了される。   Thereafter, the suction nozzle of the mounting head 15 is lowered by the raising / lowering means and pressurized by the pressurizing means, and the electronic component 2 is mounted. If necessary, the electronic component 2 is heated by heating means provided in the mounting head 15, and the electrodes of the electronic component 2 and the electrodes of the substrate 2 are joined by heating and pressing. Further, if necessary, the mounting head 15 is moved to the transfer station 17 before mounting and transferred with an adhesive or sealant. In that case, the mounting head 15 is heated by a heating means at the time of mounting so that the adhesive or sealant is transferred. Mounting including the curing process is completed.

以上の実装動作が適宜繰り返されて、基板3に対して所要数の電子部品2の実装が完了すると、基板3は搬出手段8及び搬送手段9にて次工程に向けて搬出され、次の基板2が搬入手段6にて搬入され、支持台11上に設置される。   When the above-described mounting operation is repeated as appropriate and mounting of the required number of electronic components 2 on the substrate 3 is completed, the substrate 3 is unloaded for the next process by the unloading means 8 and the conveying means 9, and the next substrate 2 is carried in by the carrying-in means 6 and installed on the support base 11.

本実施形態によれば、部品反転移送手段25において、移載手段26にて電子部品2を取り出して移載する工程が単純動作であるため高速にて第1のシャトル27に移載することができ、この第1のシャトル27から第2のシャトル28に複数の電子部品2を一括して受け渡すことで、複数の電子部品2を一括して上下反転して各電子部品2を順次実装位置Aの近傍に設定された部品供給位置Bに供給することができ、したがって部品供給位置Bに対する電子部品2の供給の高速化を図ることができ、実装ヘッド15による実装工程も高速化できるため、接続面が上向きで供給される電子部品2の高速実装を実現することができる。   According to this embodiment, in the component reversal transfer means 25, the process of taking out and transferring the electronic component 2 by the transfer means 26 is a simple operation, so that it can be transferred to the first shuttle 27 at high speed. The plurality of electronic components 2 are collectively delivered from the first shuttle 27 to the second shuttle 28, so that the plurality of electronic components 2 are turned upside down and the respective electronic components 2 are sequentially mounted. Since it can be supplied to the component supply position B set in the vicinity of A, the speed of the supply of the electronic component 2 to the component supply position B can be increased, and the mounting process by the mounting head 15 can also be increased. High-speed mounting of the electronic component 2 supplied with the connection surface facing upward can be realized.

また、実装ヘッド15による実装位置Aと実装ヘッド15との干渉を避けた退避位置との間で移動可能な同時認識手段16にて、電子部品2と基板3の実装位置の両方を認識するようにしていることで、高精度の実装を実現できる。   In addition, the simultaneous recognition means 16 that can move between the mounting position A by the mounting head 15 and the retracted position that avoids interference with the mounting head 15 recognizes both the mounting position of the electronic component 2 and the board 3. As a result, high-precision mounting can be realized.

なお、図3(a)は実装手段13に単一の実装ヘッド15が配設され、図3(b)は複数の実装ヘッド15が配設されている例を示しており、図3(b)に示すように複数の実装ヘッド15を配設すると、実装ヘッド15が部品供給位置Bと実装位置Aとの間で往復移動する回数を低減できるため、その分実装速度を向上することができる。   3A shows an example in which a single mounting head 15 is disposed on the mounting means 13, and FIG. 3B shows an example in which a plurality of mounting heads 15 are disposed. FIG. When a plurality of mounting heads 15 are disposed as shown in FIG. 6, the number of times the mounting head 15 reciprocates between the component supply position B and the mounting position A can be reduced, and the mounting speed can be improved accordingly. .

また、以上の実施施形態の説明では、基板位置決め手段7としてXYテーブル10を備え、実装位置を一定位置に固定したものを例示したが、基板位置決め手段7を基板3をY方向にのみ位置決めするYテーブルにて構成し、実装位置を実装ヘッド15のX方向位置と組み合わせ、基板3のX方向幅の範囲内の任意位置を実装位置とするように構成しても良く、そうするとそれぞれ一方向に位置決めすればよいので、簡単な構成にて高精度で高速実装を実現することができる。   In the above description of the embodiment, the substrate positioning unit 7 includes the XY table 10 and the mounting position is fixed at a fixed position. However, the substrate positioning unit 7 is positioned only in the Y direction. It may be configured by a Y table, and the mounting position may be combined with the X direction position of the mounting head 15 so that an arbitrary position within the range of the X direction width of the substrate 3 is set as the mounting position. Since positioning is sufficient, high-speed mounting with high accuracy can be realized with a simple configuration.

(第2の実施形態)
次に、本発明の電子部品実装方法の第2の実施形態について、図4を参照して説明する。なお、本実施形態の説明においては、先行する実施形態と同一の構成要素については説明を省略し、相違点についてのみ説明する。
(Second Embodiment)
Next, a second embodiment of the electronic component mounting method of the present invention will be described with reference to FIG. In the description of the present embodiment, the description of the same components as those of the preceding embodiment will be omitted, and only the differences will be described.

本実施形態においては、第1の実施形態における第2のシャトル28に代えて、受け渡し位置で複数の電子部品2を一括して保持し上下反転するとともに、一定軸芯回りに回転可能な回転テーブル35に装着されて部品供給位置Bまで旋回して移動可能な旋回シャトル36を備えている。   In the present embodiment, instead of the second shuttle 28 in the first embodiment, a plurality of electronic components 2 are collectively held at the delivery position, are turned upside down, and are rotatable about a fixed axis. A swivel shuttle 36 that is mounted on 35 and swivel to the component supply position B is provided.

本実施形態によれば、第2のシャトル28を往復動作させたり循環させたりするよりも簡単な構成によって高速化を実現できる。   According to the present embodiment, higher speed can be realized with a simpler configuration than when the second shuttle 28 is reciprocated or circulated.

本発明の電子部品実装方法によれば、部品供給部から電子部品を取り出して高速にて第1のシャトルに移載し、第1のシャトルから第2のシャトルに複数の電子部品を一括して受け渡し、複数の電子部品を一括して上下反転して部品供給位置に順次各電子部品を供給することにより、部品供給位置に対する電子部品の供給の高速化を図ることができるので、接続面を上向きにして供給される電子部品を実装する部品実装装置に好適に利用することができる。   According to the electronic component mounting method of the present invention, an electronic component is taken out from the component supply unit and transferred to the first shuttle at a high speed, and a plurality of electronic components are collectively transferred from the first shuttle to the second shuttle. By delivering and electronically turning multiple electronic components upside down and supplying each electronic component sequentially to the component supply position, it is possible to speed up the supply of electronic components to the component supply position, so the connection surface faces upward Thus, it can be suitably used for a component mounting apparatus for mounting electronic components supplied in this manner.

本発明の電子部品実装方法の第1の実施形態における全体概略構成を示す透視斜視図。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an overall schematic configuration in a first embodiment of an electronic component mounting method of the present invention. 同実施形態におおける要部の概略構成を示す斜視図。The perspective view which shows schematic structure of the principal part in the same embodiment. 同実施形態における部品供給工程を示し、(a)は実装ヘッドが1つの場合の動作説明図、(b)は実装ヘッドが1つの場合の動作説明図。The component supply process in the embodiment is shown, (a) is an operation explanatory diagram when there is one mounting head, (b) is an operation explanatory diagram when there is one mounting head. 本発明の電子部品実装方法の第2の実施形態における部品供給工程を示し、(a)は平面図、(b)は動作説明図。The component supply process in 2nd Embodiment of the electronic component mounting method of this invention is shown, (a) is a top view, (b) is operation | movement explanatory drawing.

符号の説明Explanation of symbols

1 電子部品実装装置
2 電子部品
3 基板
5 部品供給部
7 基板位置決め手段
13 実装手段
15 実装ヘッド
16 同時認識手段
25 部品反転移送手段
26 移載手段
27 第1のシャトル
28 第2のシャトル
35 回転テーブル
36 旋回シャトル
A 実装位置
B 部品供給位置
DESCRIPTION OF SYMBOLS 1 Electronic component mounting apparatus 2 Electronic component 3 Board | substrate 5 Component supply part 7 Board | substrate positioning means 13 Mounting means 15 Mounting head 16 Simultaneous recognition means 25 Component inversion transfer means 26 Transfer means 27 1st shuttle 28 2nd shuttle 35 Rotary table 36 Swing shuttle A Mounting position B Parts supply position

Claims (5)

基板を位置決めする工程と、接続面が上向きの電子部品を供給する部品供給部から電子部品を取り出す工程と、部品供給部から取り出した複数の電子部品を第1のシャトルにてX方向に一列状に保持し、受け渡し位置までX方向に移動する工程と、受け渡し位置で第1のシャトルから第2のシャトルに複数の電子部品を一括して受け取り、第2のシャトルを上下反転するとともにX方向に移動して各電子部品を部品供給位置に位置決めする工程と、部品供給位置で実装ヘッドにて電子部品を受け取りX方向に移動して実装位置で位置決めされた基板に実装する工程とを有することを特徴とする電子部品実装方法。   The step of positioning the substrate, the step of taking out the electronic components from the component supply unit that supplies the electronic components with the connection surface facing upward, and the plurality of electronic components taken out from the component supply unit in a row in the X direction by the first shuttle And moving to the delivery position in the X direction, receiving a plurality of electronic components from the first shuttle to the second shuttle at the delivery position, turning the second shuttle upside down, and moving in the X direction. A step of moving and positioning each electronic component at a component supply position, and a step of receiving the electronic component by the mounting head at the component supply position and moving it in the X direction and mounting the electronic component on the substrate positioned at the mounting position. A method for mounting electronic components. 第2のシャトルに代えて一定軸芯回りに回転可能な回転テーブルに装着されて部品供給位置まで旋回移動可能な旋回シャトルにて、受け渡し位置で第1のシャトルから複数の電子部品を一括して受け取り、旋回シャトルを上下反転するとともに旋回して各電子部品を部品供給位置に位置決めすることを特徴とする請求項1記載の電子部品実装方法。   In place of the second shuttle, a plurality of electronic components are collectively collected from the first shuttle at the delivery position by a turning shuttle that is mounted on a rotary table that can rotate around a fixed axis and can turn to the parts supply position. 2. The electronic component mounting method according to claim 1, wherein the electronic shuttle is turned upside down and turned to position each electronic component at a component supply position. 部品供給位置で複数の実装ヘッドにて電子部品を受け取り、実装位置で各実装ヘッドにて基板に実装することを特徴とする請求項1又は2に記載の電子部品実装方法。   The electronic component mounting method according to claim 1, wherein electronic components are received by a plurality of mounting heads at a component supply position, and mounted on a substrate by each mounting head at the mounting position. 基板を位置決めする工程は、実装ヘッドの移動方向と直交するY方向に移動及び位置決めすることを特徴とする請求項1〜3の何れか1つに記載の電子部品実装方法。   The electronic component mounting method according to claim 1, wherein the step of positioning the substrate moves and positions in a Y direction orthogonal to a moving direction of the mounting head. 実装する工程で、実装ヘッドによる実装位置と退避位置との間で移動可能な認識手段にて電子部品と基板の実装位置の両方を認識することを特徴とする請求項1〜4の何れか1つに記載の電子部品実装方法。   5. In the mounting step, both the electronic component and the mounting position of the board are recognized by a recognition means that can move between a mounting position and a retracted position by the mounting head. Electronic component mounting method described in one.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604873B2 (en) * 2007-10-31 2014-10-15 日本電気株式会社 Manufacturing method of electronic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604873B2 (en) * 2007-10-31 2014-10-15 日本電気株式会社 Manufacturing method of electronic device

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