JP2008064382A - 薬液用熱交換器 - Google Patents
薬液用熱交換器 Download PDFInfo
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Abstract
【解決手段】 外面に形成した熱交換面Cuを冷却又は加熱することにより内部に流通する薬液Lに対して熱交換を行う薬液用熱交換器1を構成するに際して、内部に薬液Lを流通させる複数の薬液流通孔R…を形成し、かつ少なくとも外面となる上面及び下面を熱交換面Cu,Cdとして形成するとともに、所定の焼成素材M(アモルファスカーボン素材又は炭化珪素素材等)を焼結することにより全体を一体形成した熱交換ブロック2を備える。
【選択図】 図1
Description
Claims (5)
- 外面に形成した熱交換面を冷却又は加熱することにより内部に流通する薬液に対して熱交換を行う薬液用熱交換器において、内部に薬液を流通させる複数の薬液流通孔を形成し、かつ少なくとも外面となる上面及び下面を前記熱交換面として形成するとともに、所定の焼成素材を焼結することにより全体を一体形成した熱交換ブロックを備えることを特徴とする薬液用熱交換器。
- 前記焼成素材は、アモルファスカーボン素材又は炭化珪素素材を用いることを特徴とする請求項1記載の薬液用熱交換器。
- 前記熱交換ブロックにおける前記薬液流通孔の出入口に接続する接続ブロックを備えることを特徴とする請求項1記載の薬液用熱交換器。
- 前記接続ブロックは、前記薬液流通孔同士を接続する流通孔接続部を備えることを特徴とする請求項3記載の薬液用熱交換器。
- 前記接続ブロックは、前記薬液流通孔に薬液を流入させる流入ポート部及び前記薬液流通孔から薬液を流出させる流出ポート部の少なくとも一方を備えることを特徴とする請求項3記載の薬液用熱交換器。
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JP2006242883A JP4820721B2 (ja) | 2006-09-07 | 2006-09-07 | 薬液用熱交換器 |
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JP2006242883A JP4820721B2 (ja) | 2006-09-07 | 2006-09-07 | 薬液用熱交換器 |
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JP2008064382A true JP2008064382A (ja) | 2008-03-21 |
JP4820721B2 JP4820721B2 (ja) | 2011-11-24 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010043803A (ja) * | 2008-08-18 | 2010-02-25 | Orion Mach Co Ltd | 薬液用熱交換器 |
JP2010164277A (ja) * | 2009-01-19 | 2010-07-29 | Tekkusu Iijii:Kk | 液体温度調節装置 |
JP2011077145A (ja) * | 2009-09-29 | 2011-04-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN105222615A (zh) * | 2015-09-17 | 2016-01-06 | 南通山剑石墨设备有限公司 | 一种石墨卷板换热器 |
KR20210082402A (ko) * | 2021-06-15 | 2021-07-05 | 미래청암 주식회사 | 약액의 온도제어장치 |
KR20220011027A (ko) * | 2020-07-20 | 2022-01-27 | 글로벌라이트 주식회사 | 반도체 처리액 온도 유지 장치 |
WO2023163283A1 (ko) * | 2022-02-24 | 2023-08-31 | 주식회사 아크트리아 | 딥러닝 기반 반도체 약액의 정밀 온도 제어 시스템 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6418974A (en) * | 1987-07-13 | 1989-01-23 | Ibiden Co Ltd | Production of heat-exchanger made of sintered silicon carbide |
JPH0341410A (ja) * | 1989-07-07 | 1991-02-21 | Fuji Photo Film Co Ltd | 光ビーム走査装置 |
JPH06345555A (ja) * | 1993-05-31 | 1994-12-20 | Ibiden Co Ltd | 高温用熱交換器及びその製造方法 |
JPH09229587A (ja) * | 1996-02-20 | 1997-09-05 | Komatsu Electron Kk | 半導体処理液用冷却加熱装置 |
JPH11201582A (ja) * | 1998-01-14 | 1999-07-30 | Smc Corp | 精密流体温調装置 |
JP2001355963A (ja) * | 2000-04-28 | 2001-12-26 | Linde Ag | 熱交換方法及び装置 |
-
2006
- 2006-09-07 JP JP2006242883A patent/JP4820721B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6418974A (en) * | 1987-07-13 | 1989-01-23 | Ibiden Co Ltd | Production of heat-exchanger made of sintered silicon carbide |
JPH0341410A (ja) * | 1989-07-07 | 1991-02-21 | Fuji Photo Film Co Ltd | 光ビーム走査装置 |
JPH06345555A (ja) * | 1993-05-31 | 1994-12-20 | Ibiden Co Ltd | 高温用熱交換器及びその製造方法 |
JPH09229587A (ja) * | 1996-02-20 | 1997-09-05 | Komatsu Electron Kk | 半導体処理液用冷却加熱装置 |
JPH11201582A (ja) * | 1998-01-14 | 1999-07-30 | Smc Corp | 精密流体温調装置 |
JP2001355963A (ja) * | 2000-04-28 | 2001-12-26 | Linde Ag | 熱交換方法及び装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010043803A (ja) * | 2008-08-18 | 2010-02-25 | Orion Mach Co Ltd | 薬液用熱交換器 |
JP2010164277A (ja) * | 2009-01-19 | 2010-07-29 | Tekkusu Iijii:Kk | 液体温度調節装置 |
JP2011077145A (ja) * | 2009-09-29 | 2011-04-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN105222615A (zh) * | 2015-09-17 | 2016-01-06 | 南通山剑石墨设备有限公司 | 一种石墨卷板换热器 |
KR20220011027A (ko) * | 2020-07-20 | 2022-01-27 | 글로벌라이트 주식회사 | 반도체 처리액 온도 유지 장치 |
KR102367230B1 (ko) | 2020-07-20 | 2022-02-24 | 글로벌라이트 주식회사 | 반도체 처리액 온도 유지 장치 |
KR20210082402A (ko) * | 2021-06-15 | 2021-07-05 | 미래청암 주식회사 | 약액의 온도제어장치 |
KR102423917B1 (ko) * | 2021-06-15 | 2022-07-21 | 미래청암 주식회사 | 약액의 온도제어장치 |
WO2023163283A1 (ko) * | 2022-02-24 | 2023-08-31 | 주식회사 아크트리아 | 딥러닝 기반 반도체 약액의 정밀 온도 제어 시스템 |
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