JP5164140B2 - 薬液用熱交換装置 - Google Patents
薬液用熱交換装置 Download PDFInfo
- Publication number
- JP5164140B2 JP5164140B2 JP2007208817A JP2007208817A JP5164140B2 JP 5164140 B2 JP5164140 B2 JP 5164140B2 JP 2007208817 A JP2007208817 A JP 2007208817A JP 2007208817 A JP2007208817 A JP 2007208817A JP 5164140 B2 JP5164140 B2 JP 5164140B2
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- JP
- Japan
- Prior art keywords
- heat exchange
- heat
- chemical
- chemical liquid
- heat transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/02—Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/0041—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for only one medium being tubes having parts touching each other or tubes assembled in panel form
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/26—Arrangements for connecting different sections of heat-exchange elements, e.g. of radiators
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Description
Claims (4)
- 外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材により形成した伝熱ブロック及びこの伝熱ブロック内に埋設して内部に流通する薬液に対して熱交換を行う熱交換管を備える薬液用熱交換装置において、ガラス状炭素系素材により直線状に形成した所定長さを有する複数の熱交換管を前記伝熱ブロック内に所定間隔おきに埋設し、各熱交換管の端部開口をフッ素系樹脂素材により形成した接続管部材により接続することにより、一つの流入口から流入した薬液が全ての熱交換管を通して一つの流出口から流出する流通経路を構成するとともに、前記熱交換管の端部開口を前記接続管部材に接続するに際し、前記熱交換管の端部開口の近傍に位置する外周面の周方向に沿って設けた接続用のリング溝に係止させたストッパリング部に、ユニオンナット部を係止可能に設け、このユニオンナット部を、フェルール部を介在させて、前記接続管部材を構成する継手部材における継手ボディ部の端部に螺合することを特徴とする薬液用熱交換装置。
- 前記接続管部材は、隣接する一又は二以上の熱交換管同士の端部開口を接続することによりジグザグ状の流通経路を構成する一又は二以上の継手部材であることを特徴とする請求項1記載の薬液用熱交換装置。
- 前記接続管部材は、各熱交換管の端部開口を接続することにより並行した複数の流通経路を構成する一又は二以上のヘッダ部材であることを特徴とする請求項1記載の薬液用熱交換装置。
- 前記流入口又は前記流出口には、薬液を循環させる送液ポンプを接続してなることを特徴とする請求項1記載の薬液用熱交換装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007208817A JP5164140B2 (ja) | 2007-08-10 | 2007-08-10 | 薬液用熱交換装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007208817A JP5164140B2 (ja) | 2007-08-10 | 2007-08-10 | 薬液用熱交換装置 |
Publications (2)
Publication Number | Publication Date |
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JP2009041865A JP2009041865A (ja) | 2009-02-26 |
JP5164140B2 true JP5164140B2 (ja) | 2013-03-13 |
Family
ID=40442784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007208817A Active JP5164140B2 (ja) | 2007-08-10 | 2007-08-10 | 薬液用熱交換装置 |
Country Status (1)
Country | Link |
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JP (1) | JP5164140B2 (ja) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54151913U (ja) * | 1978-04-14 | 1979-10-22 | ||
JPH0711336Y2 (ja) * | 1988-06-23 | 1995-03-15 | 東海カーボン株式会社 | プレート型カーボン熱交換器 |
JPH04357398A (ja) * | 1991-06-03 | 1992-12-10 | Yodogawa Kasei Kk | フッ素系樹脂製チューブの継手構造 |
JP3664794B2 (ja) * | 1996-02-20 | 2005-06-29 | 小松エレクトロニクス株式会社 | 半導体処理液用冷却加熱装置 |
JPH09330907A (ja) * | 1996-06-10 | 1997-12-22 | Orion Mach Co Ltd | 液体温度調節用熱交換器 |
JPH11201582A (ja) * | 1998-01-14 | 1999-07-30 | Smc Corp | 精密流体温調装置 |
JP3871428B2 (ja) * | 1998-02-16 | 2007-01-24 | シーケーディ株式会社 | 溶接レス継手 |
JP2001335366A (ja) * | 2000-05-25 | 2001-12-04 | Kobe Steel Ltd | ガラス状炭素チューブ前駆体およびガラス状炭素チューブの製法 |
JP2002243388A (ja) * | 2001-02-16 | 2002-08-28 | Ebara Shinwa Ltd | 冷却塔用などの熱交換体の組立方法 |
JP4312088B2 (ja) * | 2004-01-27 | 2009-08-12 | シーケーディ株式会社 | 流路ブロック |
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2007
- 2007-08-10 JP JP2007208817A patent/JP5164140B2/ja active Active
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Publication number | Publication date |
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JP2009041865A (ja) | 2009-02-26 |
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