JP2008063605A - ナノ金属粒子及びナノオーダの配線の形成方法 - Google Patents
ナノ金属粒子及びナノオーダの配線の形成方法 Download PDFInfo
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
【解決手段】ナノオーダの平坦性を持ち、かつ表面に化学的な結合手が極めて少ない材料からなる基板上に金属材料を真空蒸着する際に、その真空蒸着雰囲気下で基板を400℃から金属材料の融点未満までの範囲の温度に加熱した状態で、金属材料の蒸着量をナノオーダで制御して蒸着せしめ、径の制御されたナノ金属粒子又はナノオーダの配線を形成する。
【選択図】図2
Description
3 蒸着用金属材料 4 基板ステージ
5 基板マニピュレータ 6 加熱手段
7 膜厚測定子 8 ターボ分子ポンプ
9 バルブ 10 ロータリポンプ
11 真空配管 S 基板
Claims (6)
- ナノオーダの平坦性を持ち、かつ表面に化学的な結合手が極めて少ない材料からなる基板上に金属材料を真空蒸着する際に、その真空蒸着雰囲気下で基板を400℃から金属材料の融点未満までの範囲の温度に加熱した状態で、金属材料の蒸着量をナノオーダで制御して蒸着せしめ、径の制御されたナノ金属粒子を形成することを特徴とするナノ金属粒子の形成方法。
- 前記基板が、約10nm以下のステップを少なくとも1つ有する平坦な基板であり、前記ナノ金属粒子を前記ステップの平面とステップの立ち上がり面下端との交線に沿って配列せしめることを特徴とする請求項1記載のナノ金属粒子の形成方法。
- 約10nm以下のステップを少なくとも1つ有する平坦な基板であって、表面に化学的な結合手が極めて少ない材料からなる基板上に金属材料を真空蒸着して配線を形成する際に、その真空蒸着雰囲気下で基板を400℃から金属材料の融点未満までの範囲の温度に加熱した状態で、金属材料の蒸着量をナノオーダで制御して蒸着せしめ、径の制御されたナノ金属粒子を前記ステップの平面とステップの立ち上がり面下端との交線に沿って配列せしめて配線を形成することを特徴とするナノオーダの配線の形成方法。
- 前記基板が、グラファイト基板であることを特徴とする請求項1又は2記載のナノ金属粒子の形成方法。
- 前記基板が、グラファイト基板であることを特徴とする請求項3記載のナノオーダの配線の形成方法。
- 基板上に金属材料を真空蒸着する際に、この基板上に金属粒子脱離層を形成した後に、この基板を真空蒸着雰囲気下で400℃から金属材料の融点未満までの範囲の温度に加熱した状態で、この脱離層上に金属材料の蒸着量をナノオーダで制御して蒸着せしめ、径の制御されたナノ金属粒子を形成し、次いで脱離層からナノ金属粒子を脱離せしめてナノ金属粒子を得ることを特徴とするナノ金属粒子の形成方法。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012140692A (ja) * | 2011-01-06 | 2012-07-26 | Oike Ind Co Ltd | 金属超微粉体 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60825A (ja) * | 1983-06-20 | 1985-01-05 | Res Dev Corp Of Japan | 微粒子の製造方法 |
JPS60155609A (ja) * | 1984-01-25 | 1985-08-15 | Daido Steel Co Ltd | 金属微粉末の製造方法 |
JPS6326302A (ja) * | 1986-07-18 | 1988-02-03 | Kiyoshi Mizushima | 超微細金属粉の製造方法 |
JPH0786164A (ja) * | 1993-09-16 | 1995-03-31 | Matsushita Electric Ind Co Ltd | 微細構造材料の製造方法並びにその製造装置、および微細構造を有する発光素子 |
JPH09256140A (ja) * | 1996-03-21 | 1997-09-30 | Kagaku Gijutsu Shinko Jigyodan | 金、銀、又は銅の金属微粒子の製造方法 |
JP2005007549A (ja) * | 2003-06-20 | 2005-01-13 | National Institute Of Advanced Industrial & Technology | 非対称型ナノ微粒子の製造方法及びこの方法により得られた非対称型ナノ微粒子とその組織体 |
JP2005246339A (ja) * | 2004-03-08 | 2005-09-15 | Masayoshi Murata | ナノ粒子製造方法及びナノ粒子製造装置 |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60825A (ja) * | 1983-06-20 | 1985-01-05 | Res Dev Corp Of Japan | 微粒子の製造方法 |
JPS60155609A (ja) * | 1984-01-25 | 1985-08-15 | Daido Steel Co Ltd | 金属微粉末の製造方法 |
JPS6326302A (ja) * | 1986-07-18 | 1988-02-03 | Kiyoshi Mizushima | 超微細金属粉の製造方法 |
JPH0786164A (ja) * | 1993-09-16 | 1995-03-31 | Matsushita Electric Ind Co Ltd | 微細構造材料の製造方法並びにその製造装置、および微細構造を有する発光素子 |
JPH09256140A (ja) * | 1996-03-21 | 1997-09-30 | Kagaku Gijutsu Shinko Jigyodan | 金、銀、又は銅の金属微粒子の製造方法 |
JP2005007549A (ja) * | 2003-06-20 | 2005-01-13 | National Institute Of Advanced Industrial & Technology | 非対称型ナノ微粒子の製造方法及びこの方法により得られた非対称型ナノ微粒子とその組織体 |
JP2005246339A (ja) * | 2004-03-08 | 2005-09-15 | Masayoshi Murata | ナノ粒子製造方法及びナノ粒子製造装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012140692A (ja) * | 2011-01-06 | 2012-07-26 | Oike Ind Co Ltd | 金属超微粉体 |
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