JP2008055593A5 - - Google Patents

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Publication number
JP2008055593A5
JP2008055593A5 JP2007191691A JP2007191691A JP2008055593A5 JP 2008055593 A5 JP2008055593 A5 JP 2008055593A5 JP 2007191691 A JP2007191691 A JP 2007191691A JP 2007191691 A JP2007191691 A JP 2007191691A JP 2008055593 A5 JP2008055593 A5 JP 2008055593A5
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JP
Japan
Prior art keywords
diamond
conditioner
band
diamond abrasive
bonded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007191691A
Other languages
English (en)
Japanese (ja)
Other versions
JP4441552B2 (ja
JP2008055593A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007191691A priority Critical patent/JP4441552B2/ja
Priority claimed from JP2007191691A external-priority patent/JP4441552B2/ja
Publication of JP2008055593A publication Critical patent/JP2008055593A/ja
Publication of JP2008055593A5 publication Critical patent/JP2008055593A5/ja
Application granted granted Critical
Publication of JP4441552B2 publication Critical patent/JP4441552B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007191691A 2006-07-31 2007-07-24 ダイヤモンドコンディショナ Expired - Fee Related JP4441552B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007191691A JP4441552B2 (ja) 2006-07-31 2007-07-24 ダイヤモンドコンディショナ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006228411 2006-07-31
JP2006228412 2006-07-31
JP2007191691A JP4441552B2 (ja) 2006-07-31 2007-07-24 ダイヤモンドコンディショナ

Publications (3)

Publication Number Publication Date
JP2008055593A JP2008055593A (ja) 2008-03-13
JP2008055593A5 true JP2008055593A5 (enrdf_load_stackoverflow) 2009-04-16
JP4441552B2 JP4441552B2 (ja) 2010-03-31

Family

ID=39238928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007191691A Expired - Fee Related JP4441552B2 (ja) 2006-07-31 2007-07-24 ダイヤモンドコンディショナ

Country Status (1)

Country Link
JP (1) JP4441552B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4604122B2 (ja) * 2009-02-12 2010-12-22 本田技研工業株式会社 再研磨方法
WO2010110834A1 (en) * 2009-03-24 2010-09-30 Saint-Gobain Abrasives, Inc. Abrasive tool for use as a chemical mechanical planarization pad conditioner
KR101052325B1 (ko) * 2009-04-06 2011-07-27 신한다이아몬드공업 주식회사 Cmp 패드 컨디셔너 및 그 제조방법
GB201121637D0 (en) * 2011-12-16 2012-01-25 Element Six Ltd Polycrystalline cvd diamond wheel dresser parts and methods of utilizing the same
JP2014147993A (ja) * 2013-01-31 2014-08-21 Shin Etsu Handotai Co Ltd ドレッシングプレート及びドレッシングプレートの製造方法
JP6542793B2 (ja) 2014-03-21 2019-07-10 インテグリス・インコーポレーテッド 長尺状の切削エッジを有する化学機械平坦化パッド・コンディショナ
GB201701246D0 (en) 2017-01-25 2017-03-08 Fives Landis Ltd Machine tools and methods of operation thereof

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