JP2008023698A5 - - Google Patents
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- Publication number
- JP2008023698A5 JP2008023698A5 JP2007081987A JP2007081987A JP2008023698A5 JP 2008023698 A5 JP2008023698 A5 JP 2008023698A5 JP 2007081987 A JP2007081987 A JP 2007081987A JP 2007081987 A JP2007081987 A JP 2007081987A JP 2008023698 A5 JP2008023698 A5 JP 2008023698A5
- Authority
- JP
- Japan
- Prior art keywords
- base
- gantry
- stage apparatus
- guide
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007081987A JP4328364B2 (ja) | 2007-03-27 | 2007-03-27 | ステージ装置 |
TW097106465A TW200844020A (en) | 2007-03-27 | 2008-02-25 | Stage device |
KR1020080027701A KR20080087724A (ko) | 2007-03-27 | 2008-03-26 | 스테이지장치 |
CNA2008100872777A CN101274407A (zh) | 2007-03-27 | 2008-03-26 | 载物台装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007081987A JP4328364B2 (ja) | 2007-03-27 | 2007-03-27 | ステージ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008023698A JP2008023698A (ja) | 2008-02-07 |
JP2008023698A5 true JP2008023698A5 (it) | 2008-03-21 |
JP4328364B2 JP4328364B2 (ja) | 2009-09-09 |
Family
ID=39114853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007081987A Expired - Fee Related JP4328364B2 (ja) | 2007-03-27 | 2007-03-27 | ステージ装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4328364B2 (it) |
KR (1) | KR20080087724A (it) |
CN (1) | CN101274407A (it) |
TW (1) | TW200844020A (it) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4964853B2 (ja) * | 2008-09-24 | 2012-07-04 | 住友重機械工業株式会社 | ステージ装置 |
JP5550255B2 (ja) * | 2009-04-28 | 2014-07-16 | 株式会社日立製作所 | ペースト塗布装置及び塗布方法 |
JP5380225B2 (ja) * | 2009-09-24 | 2014-01-08 | 株式会社日立ハイテクノロジーズ | ガラス基板の検査装置 |
JP6025516B2 (ja) * | 2012-11-15 | 2016-11-16 | 三菱重工業株式会社 | 取付加工機および加工方法 |
JP2014195805A (ja) * | 2014-05-19 | 2014-10-16 | 芝浦メカトロニクス株式会社 | ペースト塗布装置 |
-
2007
- 2007-03-27 JP JP2007081987A patent/JP4328364B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-25 TW TW097106465A patent/TW200844020A/zh unknown
- 2008-03-26 KR KR1020080027701A patent/KR20080087724A/ko not_active Application Discontinuation
- 2008-03-26 CN CNA2008100872777A patent/CN101274407A/zh active Pending
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