JP2008023698A5 - - Google Patents
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- Publication number
- JP2008023698A5 JP2008023698A5 JP2007081987A JP2007081987A JP2008023698A5 JP 2008023698 A5 JP2008023698 A5 JP 2008023698A5 JP 2007081987 A JP2007081987 A JP 2007081987A JP 2007081987 A JP2007081987 A JP 2007081987A JP 2008023698 A5 JP2008023698 A5 JP 2008023698A5
- Authority
- JP
- Japan
- Prior art keywords
- base
- gantry
- stage apparatus
- guide
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (5)
前記基台は、前記ガントリ部の移動方向と直交する水平方向に分割可能に構成されていることを特徴とするステージ装置。 In a stage apparatus that is supported by a base and has a gantry section that moves on the base in a uniaxial direction that is a traveling direction,
The stage device is configured to be divided in a horizontal direction orthogonal to a moving direction of the gantry unit.
前記基台の分割面は、前記載置領域を除く領域に形成されることを特徴とする請求項１記載のステージ装置。 The base has a placement area for placing a workpiece;
The stage apparatus according to claim 1, wherein the division surface of the base is formed in an area excluding the placement area.
前記基台の分割面は、前記ガイドレールより外側の領域に形成されることを特徴とする請求項２記載のステージ装置。 On the base, a pair of guide rails for guiding the gantry portion in the movement direction is provided so as to extend in the movement direction,
The stage apparatus according to claim 2, wherein the dividing surface of the base is formed in a region outside the guide rail.
前記ガントリ部は、前記移動方向と直交する水平方向に分割可能に構成され、その分割面は、前記ガイド部より外側の領域に形成されることを特徴とする請求項３記載のステージ装置。 The gantry part is provided with a pair of guide parts guided along the guide rails,
4. The stage apparatus according to claim 3, wherein the gantry unit is configured to be divided in a horizontal direction perpendicular to the moving direction, and the dividing surface is formed in a region outside the guide unit.
The stage device according to claim 1, wherein the gantry unit is supported so as to be rotatable around a central axis extending in a vertical direction.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007081987A JP4328364B2 (en) | 2007-03-27 | 2007-03-27 | Stage equipment |
| TW097106465A TW200844020A (en) | 2007-03-27 | 2008-02-25 | Stage device |
| CNA2008100872777A CN101274407A (en) | 2007-03-27 | 2008-03-26 | Stage apparatus |
| KR1020080027701A KR20080087724A (en) | 2007-03-27 | 2008-03-26 | Stage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007081987A JP4328364B2 (en) | 2007-03-27 | 2007-03-27 | Stage equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008023698A JP2008023698A (en) | 2008-02-07 |
| JP2008023698A5 true JP2008023698A5 (en) | 2008-03-21 |
| JP4328364B2 JP4328364B2 (en) | 2009-09-09 |
Family
ID=39114853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007081987A Expired - Fee Related JP4328364B2 (en) | 2007-03-27 | 2007-03-27 | Stage equipment |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4328364B2 (en) |
| KR (1) | KR20080087724A (en) |
| CN (1) | CN101274407A (en) |
| TW (1) | TW200844020A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4964853B2 (en) * | 2008-09-24 | 2012-07-04 | 住友重機械工業株式会社 | Stage equipment |
| JP5550255B2 (en) * | 2009-04-28 | 2014-07-16 | 株式会社日立製作所 | Paste coating apparatus and coating method |
| JP5380225B2 (en) * | 2009-09-24 | 2014-01-08 | 株式会社日立ハイテクノロジーズ | Glass substrate inspection equipment |
| JP6025516B2 (en) * | 2012-11-15 | 2016-11-16 | 三菱重工業株式会社 | Mounting machine and processing method |
| JP2014195805A (en) * | 2014-05-19 | 2014-10-16 | 芝浦メカトロニクス株式会社 | Paste coating apparatus |
-
2007
- 2007-03-27 JP JP2007081987A patent/JP4328364B2/en not_active Expired - Fee Related
-
2008
- 2008-02-25 TW TW097106465A patent/TW200844020A/en unknown
- 2008-03-26 CN CNA2008100872777A patent/CN101274407A/en active Pending
- 2008-03-26 KR KR1020080027701A patent/KR20080087724A/en not_active Application Discontinuation
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