JP2008018361A - Viscous fluid coater, viscous fluid coating method, and lamination substrates - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a viscous fluid coater which coats a substrate with a viscous fluid properly without exhausting an excessive viscous fluid nor deteriorating the working efficiency. <P>SOLUTION: The viscous fluid coating device 2 to spread an adhesive coating the approximately central part of a first substrate W1 is provided with an air spraying unit 22 to spray air from an air spraying port 58 and a rotation mechanism 42 to conduct the relative displacement of the air spraying port 58 to the first substrate W1 so that the air sprayed area in the first substrate W1 covers approximately the whole area of the first substrate W1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a viscous fluid coating apparatus, a viscous fluid coating method, and a bonded substrate for coating a viscous fluid such as an adhesive on a substrate.

Conventionally, as this type of viscous fluid coating apparatus, various apparatuses using a spin coating method that spreads a viscous fluid by centrifugal force, and a contact-type squeegee coating method and a transfer coating method (roll coater) are known (patents). Reference 1).
JP-A-11-276970

  However, when the spin coating method is used, the amount of material used is large because the liquid is excessively supplied and centrifuged. Further, in this method, it is difficult to uniformly spread (extend) a material having a high viscosity (100 mPs · s or more), resulting in coating unevenness. On the other hand, when a contact member (squeegee or roll coater) is used as a means for spreading a viscous fluid as in the squeegee coating method or transfer coating method, the contact member must be cleaned after coating, so the work efficiency is improved. It will decline.

  The present invention provides a viscous fluid coating apparatus, a viscous fluid coating method, and a bonded substrate that can appropriately apply a viscous fluid to a substrate without excessively consuming the viscous fluid and without reducing work efficiency. The challenge is to do.

  The viscous fluid coating apparatus of the present invention is an air sprayer that blows air from an air outlet toward a viscous fluid on a substrate in the viscous fluid coating apparatus that spreads the viscous fluid applied to a predetermined location on the substrate. And a blowing area moving means for moving the air blowing port relative to the substrate so that the air blowing area on the substrate covers substantially the entire area of the substrate.

  The viscous fluid application method of the present invention is a viscous fluid application method in which a viscous fluid applied to a predetermined location on a substrate is spread, while blowing air from an air outlet toward the viscous fluid on the substrate, The air blowing port is moved relative to the substrate so that the upper air blowing area covers substantially the entire area of the substrate.

  According to these configurations, by blowing air, the viscous fluid spreads around the spraying area, and the spraying area covers substantially the entire area of the substrate, so that a relatively high viscosity (400 mPa · s) is obtained. ), The viscous fluid can be spread thinly over substantially the entire area of the substrate. In this case, since the applied viscous fluid spreads on the substrate without waste, the viscous fluid is not consumed excessively. Further, since air is used instead of the contact member as means for expanding the viscous fluid, no cleaning work is required. Accordingly, the viscous fluid can be appropriately applied to the substrate without excessively consuming the viscous fluid and without reducing the working efficiency.

  In the above viscous fluid application apparatus, the air outlet is preferably formed in a slit shape.

  According to this configuration, the spray area has a long and narrow shape. For this reason, the movement of a spray area can be labor-saving compared with the case where an air blowing outlet is formed in a nozzle shape and a spray area becomes a small diameter. In addition, the viscous fluid can be efficiently expanded as compared with the case where the air outlet is formed in a large shape and the spray area has a wide shape. Therefore, the processing time can be shortened.

  In this case, the substrate is formed in a disk shape, the viscous fluid is applied to the substantially central portion, and the air spraying means sprays air so that the spray area includes the radius portion of the substrate. The spray area moving means preferably has a rotation mechanism for rotating the substrate around the center of the substrate.

  According to this configuration, by rotating the substrate by the spray area moving means with respect to the spray area including the radius portion of the substrate, the spray area relatively rotates around the center of the substrate. As a result, the spray area covers substantially the entire area on the substrate. For this reason, air can be blown continuously and uniformly in the circumferential direction, and the viscous fluid can be spread uniformly in the circumferential direction. Therefore, the viscous fluid can be appropriately and efficiently applied to the substrate with a simple configuration.

  In this case, the blowing area moving means performs the relative movement of the air blowing port for covering substantially the entire area on the substrate over a plurality of times, and the air blowing means is the air blowing angle with respect to the surface of the substrate. A spray angle change means for changing the spray angle change means, and a spray angle control means for controlling the spray angle change means. The spray angle control means has a surface of the substrate in the first half of the relative movement over a plurality of times. On the other hand, it is preferable that air is blown obliquely in the direction of relative movement of the air blowing port, and air is blown perpendicularly to the surface of the substrate in the latter half of the relative movement over a plurality of times.

  According to this configuration, in the first half of the relative movement over a plurality of times, the air is blown obliquely toward the relative movement direction of the air outlet on the substrate surface, so that the relative movement direction of the blowing area with respect to the substrate is increased. Viscous fluid spreads. For this reason, the viscous fluid can be quickly spread over substantially the entire area of the substrate, and the processing time can be shortened. Further, in the latter half of the relative movement over a plurality of times, the thickness of the expanded viscous fluid can be made uniform over substantially the entire area of the substrate by blowing air perpendicularly to the substrate surface. Therefore, the viscous fluid can be applied to the substrate quickly and uniformly.

  In this case, it is preferable that a mounting table for mounting the substrate is further provided, and a table heater for heating the substrate to a predetermined temperature is incorporated in the mounting table.

  According to this configuration, the viscous fluid can be adjusted to a desired temperature by heating the substrate to a predetermined temperature. That is, the viscous fluid can be set to a temperature at which the viscosity is easily spread. Thereby, the viscous fluid can be efficiently applied to the substrate.

  In this case, the air blowing means preferably has an air heater that heats the air to a predetermined temperature.

  According to this configuration, the viscous fluid can be adjusted to a desired temperature by blowing air heated to a predetermined temperature. That is, the viscous fluid can be set to a temperature at which the viscosity is easily spread. Thereby, the viscous fluid can be efficiently applied to the substrate.

  The bonded substrate of the present invention includes a first substrate in which an adhesive is spread as a viscous fluid by the above-described viscous fluid application device, and a second substrate bonded to the first substrate through the adhesive. It is characterized by.

  According to this configuration, since the first substrate on which the adhesive is appropriately applied is provided by the viscous fluid application device, it is possible to shorten the bonding processing time. That is, since the adhesive is applied over substantially the entire area, the time for filling and adhering the adhesive between the first substrate and the second substrate can be reduced. Further, since the adhesive is thinly applied, the time is shortened when the defoaming (degassing) process is performed under reduced pressure. Therefore, production efficiency can be improved.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. The viscous fluid application apparatus according to the present embodiment applies a viscous fluid such as an adhesive onto a substrate. This viscous fluid coating apparatus is provided in a laminating system for laminating two substrates, for example. First, the bonding system will be described.

  The bonding system bonds two substrates (first substrate and second substrate) as in, for example, a process for bonding a dustproof glass for a liquid crystal panel, a process for manufacturing a microlens for a liquid crystal panel, and a process for manufacturing an optical disk. It is adopted in the process of bonding through an agent.

  As shown in FIG. 1, the bonding system S includes an adhesive application device 1 for applying (supplying) adhesive B to the first substrate W1, and the applied adhesive B on the first substrate W1. Introducing the viscous fluid coating device 2 to spread, the first substrate W1 coated with the adhesive B and the second substrate W2 uncoated, the substrate bonding device 3 for bonding both substrates, and after bonding And an adhesive curing device 4 for curing the adhesive B at a high temperature.

  Here, the first substrate W1 and the second substrate W2 are each composed of a disk-shaped glass substrate, and the second substrate W2 is formed to have a slightly larger diameter than the first substrate W1. . For the adhesive B, for example, a transparent acrylic adhesive or epoxy adhesive is used. In this embodiment, a thermosetting material is used, but other properties such as ultraviolet curable properties may be used. The adhesive B has a property that the viscosity is, for example, about 400 mPa · s at room temperature, and the viscosity decreases as the temperature increases.

  The adhesive application device 1 applies a predetermined amount of the adhesive B so as to be raised at a predetermined location (for example, a substantially central portion) of the first substrate W1. The adhesive coating apparatus 1 includes, for example, a syringe 11 filled with an adhesive and an air dispenser 12 that supplies compressed air to the syringe 11. By controlling the pressure and supply time of the compressed air supplied from the air dispenser 12, the amount of the adhesive B discharged from the syringe 11 to the first substrate W1 can be controlled.

  As shown in FIGS. 1 and 2, the substrate bonding apparatus 3 includes a pair of left and right glass holders 31 that support the first substrate W <b> 1 and the second substrate W <b> 2 so as to be movable up and down, and a first received from the pair of glass holders 31. A thick plate-like lower plate 32 on which the substrate W1 and the second substrate W2 are placed, a thick plate-like upper plate 33 provided so as to be movable up and down with respect to the lower plate 32, and a vacuum chamber 34 for accommodating them. It is configured. Although not shown, the substrate bonding apparatus 3 includes an alignment mechanism for aligning (concentric) the first substrate W1 and the second substrate W2 supported by the glass holder 31 with each other.

  The substrate laminating apparatus 3 first supports the introduced first substrate W1 and second substrate W2 with the glass holder 31 raised so as to be parallel to each other with a gap therebetween, and the mutual position Align. In this state, the vacuum chamber 34 is operated to decompress the inside of the chamber, and air in the chamber and bubbles in the adhesive B applied to the first substrate W1 are removed. Thereby, it is possible to perform bonding without mixing air bubbles on the bonding surface of the first substrate W1 and the second substrate W2.

  Subsequently, the substrate bonding apparatus 3 lowers the glass holder 31 and places the first substrate W <b> 1 and the second substrate W <b> 2 on the lower plate 32. Then, the upper plate 33 is lowered, and both the substrates are pressurized between the upper plate 33 and the lower plate 32. At this time, pressure is applied until the adhesive B applied to the first substrate W1 spreads over the entire bonded surface. Thus, the first substrate W1 and the second substrate W2 are brought into close contact with each other and bonded together.

  The adhesive curing device 4 includes a heating device that heats the adhesive B to a temperature at which thermosetting can be performed. In addition, when an ultraviolet curable thing is used as the adhesive agent B, this is set as an ultraviolet irradiation device.

  By the bonding system S configured as described above, the adhesive B is applied to the first substrate W1, the adhesive B is applied to the first substrate W1, the first substrate W1 and the second substrate W2 are bonded, Then, the adhesive B is cured and the bonded substrate WW is completed. Here, as will be described later, since the adhesive B is appropriately applied to the first substrate W1 by the viscous fluid application device 2, the processing time of the bonding can be shortened. That is, since the adhesive B is applied to substantially the entire area of the first substrate W1, in the substrate laminating apparatus 3, there is little time to fill and adhere the adhesive B between the first substrate W1 and the second substrate W2. That's it. In addition, since the adhesive B is thinly applied, the defoaming time is shortened in the substrate bonding apparatus 3. Therefore, the production efficiency of the bonded substrate WW can be improved.

  Next, the viscous fluid application device 2 will be described. The viscous fluid application device 2 rotates the first substrate W1 while blowing air A toward the adhesive B applied to a substantially central portion of the first substrate W1, thereby applying the applied adhesive. B is spread over substantially the entire area of the first substrate W1.

  As shown in FIG. 3, the viscous fluid coating apparatus 2 includes a substrate stage 21 on which the first substrate W1 is mounted, an air spray unit 22 that blows air A onto the first substrate W1, and a controller 23 that controls the entire apparatus. It has.

  The substrate stage 21 rotates the placed first substrate W1 with its center as the center of rotation. The substrate stage 21 includes a placement table 41 that directly places the first substrate W1, a rotation mechanism 42 that rotates the placement table 41, and a lifting mechanism 43 that raises and lowers the placement table 41 via the rotation mechanism 42. I have.

  The mounting table 41 is formed in a disc shape and has a substrate positioning mechanism (not shown). The first substrate W1 is positioned coaxially with itself and placed horizontally. The placement table 41 is preferably a suction table capable of sucking the placed first substrate W1.

  The mounting table 41 includes a table heater 44 controlled by the controller 23 and a temperature sensor 45 that detects the temperature of the first substrate W1 mounted (see FIG. 4). Thereby, the first substrate W1 is heated to a predetermined temperature. For this reason, the adhesive B applied to the first substrate W1 can be adjusted to a desired temperature. That is, the adhesive B can be set to a temperature (for example, 50 ° C.) at which the viscosity is easily spread (for example, 100 mPa · s).

  The rotation mechanism 42 rotates the first substrate W <b> 1 with its center as the rotation center via the mounting table 41. The rotation mechanism 42 includes a rotation shaft 51 that rotatably supports the mounting table 41, and a table rotation motor 53 that is connected to the lower end of the rotation shaft 51 via a shaft coupling 52. By rotating the mounting table 41 by the rotation mechanism 42, the spray area R (see FIG. 5) covers substantially the entire area of the first substrate W1 (details will be described later). The rotating mechanism 42 is provided so as to be movable up and down by an elevating mechanism 43.

  The elevating mechanism 43 includes an elevating block 54 extending parallel to the rotating shaft 51 (vertical direction), a lead screw 55 screwed to the elevating block 54, an elevating motor 56 connected to the lower end of the lead screw 55, and one end side. And a horizontal block 57 that is fixed to the elevating block 54 and rotatably supports the rotating shaft 51 on the other end side.

  On the other hand, the air spraying unit 22 sprays air A toward the adhesive B applied to the first substrate W1. The air blowing unit 22 includes an air blowing port 58 facing the mounting table 41, an air supply device (not shown) connected to the air blowing port 58, and a blowing angle change for changing the blowing angle of the air A. And a mechanism 59.

  The air blowing port 58 is formed in a slit shape and has a length substantially the same as the diameter of the first substrate W1. The air spray unit 22 sprays air A so that the spray area R on the first substrate W1 includes the diameter portion of the first substrate W1. Thus, by forming the air blowing port 58 in the slit shape, the blowing area R has a long and narrow shape. For this reason, compared with the case where the air blowing port 58 is formed in a nozzle shape and the blowing area R has a small diameter, the movement of the blowing area R can be saved. Also, the adhesive B can be spread more efficiently than when the air outlet 58 is formed in a large shape and the spray area R has a wide shape. Therefore, the processing time can be shortened.

  The spray angle changing mechanism 59 rotates the air outlet 58 so that the spray angle with respect to the surface of the first substrate W1 is changed within a predetermined range (for example, 45 ° to 135 °). The blowing angle changing mechanism 59 extends along the longitudinal direction of the air blowing port 58 and supports a pivot 61 that rotatably supports the upper end of the air blowing port 58, and the supporting shaft 61 via the coupling 62. It is comprised with the blower outlet rotation motor 63 connected with the end. By controlling the blowout port rotation motor 63 by the controller 23, the air blowout port 58 can be rotated to an arbitrary angle within a predetermined range, and the air A at an arbitrary angle with respect to the first substrate W1. Can be sprayed.

  Note that the blowing angle changing mechanism 59 may be configured by a wind direction plate provided at the air outlet 58. In other words, the air blowing port 58 may be provided with a wind direction plate directed so that the blowing direction can be changed, and the blowing angle may be changed by changing the blowing direction.

  In this embodiment, as described above, the temperature of the adhesive B is adjusted by the table heater 44 incorporated in the mounting table 41, but an air heater capable of heating the air A to a predetermined temperature is provided in the air supply device. Thus, the temperature of the adhesive B may be adjusted. Further, as described above, the air A blowing strength to the first substrate W1 is adjusted according to the height position of the mounting table 41. However, the air blowing port 58 may be moved up and down, and the air supply device is pressurized. A control mechanism may be provided to adjust the blowing strength of the air A.

  As shown in FIG. 4, the controller 23 controls a table rotation motor 53, an elevating motor 56, and an outlet rotation motor 63. By controlling the table rotation motor 53 by the controller 23, the rotation speed and rotation direction of the mounting table 41 (the first substrate W1 mounted thereon) are adjusted. Similarly, the controller 23 controls the elevating motor 56 to adjust the height position of the mounting table 41, that is, the blowing strength of the air A against the first substrate W1. Accordingly, the parameters of the rotation speed, rotation direction, and height position of the mounting table 41 are optimum for each type of the first substrate W1 (surface properties, size, etc.) and the type of the adhesive B (viscosity, etc.). It is possible to control each motor so that the value is obtained in advance and the optimum value is obtained. Further, the table heater 44 is controlled based on the detection result of the temperature sensor 45. Thus, the placed first substrate W1 is adjusted to a predetermined temperature.

  As shown in FIG. 5 (a), the viscous fluid application device 2 configured in this manner is configured such that the spray area R is the first while the air A is sprayed from the air outlet 58 to the adhesive B applied. The air outlet 58 is moved relative to the first substrate W1 so as to cover substantially the entire area on the one substrate W1.

  That is, the first substrate W1 is rotated by the rotation mechanism 42 while the air A is blown. According to this, the adhesive B spreads around the spray area R by the air spray of the air spray unit 22. On the other hand, the rotation area 42 rotates the first substrate W1 with respect to the spray area R corresponding to the diameter portion of the first substrate W1, so that the spray area R has the center of the first substrate W1 as the center of rotation. Moves relative to each other. As a result, the spray area R covers substantially the entire area on the first substrate W1. For example, if the first substrate W1 is rotated 60 times while air A is being blown, the relative movement of the air blowing port 58 for the air blowing area R to cover substantially the entire area of the first substrate W1 is 60 times. Will be carried out. For this reason, the air A can be continuously and uniformly sprayed on the first substrate W1 in the circumferential direction. Therefore, the adhesive B can be appropriately and efficiently applied to the first substrate W1 with such a simple configuration.

  In this case, since the applied adhesive B spreads on the first substrate W1 without waste, the adhesive B is not consumed excessively. Further, since air A is used instead of the contact member as means for spreading the adhesive B, no cleaning work is required. Therefore, the adhesive B can be appropriately applied to the first substrate W1 without consuming the adhesive B excessively and without reducing the work efficiency.

  Further, since the adhesive B is applied to substantially the entire area of the first substrate W1, in the above-described substrate laminating apparatus 3, the time for applying pressure until the adhesive B spreads over the entire area of the bonding surface can be shortened. it can. In other words, in the viscous fluid application device 2, the adhesive B is not spread completely to the peripheral portion of the first substrate W1 in the substrate laminating device 3 without spreading the adhesive B completely to the peripheral portion of the first substrate W1. Can be expanded.

  As shown in FIG. 6, the first substrate W <b> 1 is controlled in the first half (for example, 1 to 50) of the relative movement of the spray area over a plurality of times (for example, 60 times) by controlling the above-described spray angle changing mechanism 59. The air A is blown obliquely toward the surface of the air blower port 58 in the relative movement direction of the air blowing port 58, and the air A is perpendicular to the surface of the first substrate W1 in the second half of the relative movement (for example, the 51st to 60th times). It is preferable to spray on. According to the “oblique spraying”, the adhesive B spreads in the relative movement direction of the spraying area R with respect to the first substrate W1 by blowing the air A obliquely in the relative movement direction in the first half of the relative movement. . For this reason, the adhesive B can be spread quickly over substantially the entire area on the first substrate W1, and the processing time can be shortened. Further, in the latter half of the relative movement, the thickness of the spread adhesive B can be made uniform over substantially the entire area of the first substrate W1 by blowing the air A vertically. Therefore, the adhesive B can be applied to the first substrate W1 quickly and uniformly.

  However, in FIG. 6A, air A is blown obliquely in one radial portion of the blowing area R toward the relative movement direction of the air blowing port 58, but in the other radial portion, Since the air A is blown obliquely opposite to the relative movement direction of the air blowing port 58, the effect of “oblique blowing” is halved. Therefore, the air blowing unit 22 is configured to be able to individually change the blowing angle of the air A for both radial portions in the blowing area R. In the first half of the above relative movement, the air blowing unit 22 More preferably, the air A is blown obliquely in the direction of relative movement of the outlet 58 (see FIG. 6B).

  As described above, according to the viscous fluid coating apparatus 2 of the present embodiment, the adhesive B is appropriately applied to the first substrate W1 without excessively consuming the adhesive B and without reducing the work efficiency. can do. In the present embodiment, the adhesive B used for substrate bonding has been described as an object to be applied to the substrate, but it goes without saying that the present invention can also be applied to other viscous fluids.

  In the present embodiment, the first substrate W1 is rotated with respect to the spraying area R corresponding to the diameter portion of the first substrate W1 as a configuration in which the spraying area R covers substantially the entire area on the first substrate W1. However, other configurations may be used.

  For example, the air spray unit 22 may spray the air A so that the spray area R includes the radius portion of the first substrate W1, for example, the spray area R corresponds to the radius portion of the first substrate W1. You may comprise as follows. In this case, the first substrate W1 may be rotated in the same manner as described above with respect to the spraying area R corresponding to the radius portion (see FIG. 5B).

  Further, when the first substrate W1 is square, the air blowing unit 22 is configured such that the blowing area R corresponds to one side of the first substrate W1, and the first substrate W1 is arranged on the side. The spraying area R may cover substantially the entire area on the first substrate W1 by reciprocating in a direction orthogonal to the first substrate W1 (see FIG. 5C). At this time, the air blowing port 58 may be rotated (swinged) by the blowing angle changing mechanism 59 (see FIG. 5D). In these cases, it is preferable to apply the adhesive B to the substantially full width of the first substrate W1. In FIG. 6, an arrow 71 indicates the movement (rotation) direction of the first substrate W <b> 1, and an arrow 72 indicates the rotation direction of the air outlet 58.

It is a figure explaining a bonding system. It is a figure explaining a board | substrate bonding apparatus. It is an external appearance perspective view of a viscous fluid application apparatus. It is a block diagram of a viscous fluid application apparatus. It is a figure explaining the spraying area on the board | substrate by a viscous fluid application apparatus. It is a figure explaining the spray angle of the air with respect to a board | substrate in a viscous fluid coating device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 2 ... Viscous fluid application apparatus 22 ... Air spraying unit 23 ... Controller 42 ... Rotating mechanism 44 ... Table heater 58 ... Air blowing port 59 ... Spraying angle change mechanism A Air B ... Adhesive R ... Spraying area W1 ... 1st Substrate W2 ... Second substrate WW ... Laminated substrate

Claims (8)

In a viscous fluid application apparatus that spreads a viscous fluid applied to a predetermined location on a substrate,
Air blowing means for blowing air from an air blowing port toward the viscous fluid on the substrate;
A blowing area moving means for moving the air blowing port relative to the substrate such that the air blowing area on the substrate covers a substantially entire area on the substrate;
A viscous fluid application device comprising:   The viscous fluid application device according to claim 1, wherein the air outlet is formed in a slit shape. The substrate is formed in a disc shape, and the viscous fluid is applied to a substantially central portion,
The air blowing means blows the air so that the blowing area includes a radius portion of the substrate,
The viscous fluid application apparatus according to claim 2, wherein the spray area moving unit includes a rotation mechanism that rotates the substrate around the center of the substrate. The spray area moving means performs a relative movement of the air outlet for covering a substantially entire area on the substrate over a plurality of times,
The air spraying means has spraying angle changing means for changing the spraying angle of the air with respect to the surface of the substrate, and spraying angle control means for controlling the spraying angle changing means,
In the first half of the relative movement over a plurality of times, the blowing angle control means blows the air obliquely toward the relative movement direction of the air blowing port on the surface of the substrate, and a plurality of times. 4. The viscous fluid coating apparatus according to claim 1, wherein the air is blown perpendicularly to the surface of the substrate in the latter half of the relative movement. A mounting table for mounting the substrate;
5. The viscous fluid coating apparatus according to claim 1, wherein a table heater for heating the substrate to a predetermined temperature is incorporated in the mounting table.   The viscous fluid coating apparatus according to claim 1, wherein the air spraying unit includes an air heater that heats the air to a predetermined temperature. In a viscous fluid application method for spreading a viscous fluid applied to a predetermined location on a substrate,
While blowing air from an air blowing port toward the viscous fluid on the substrate, the air blowing is performed on the substrate so that the air blowing area on the substrate covers substantially the entire area on the substrate. A viscous fluid application method characterized by relatively moving a mouth. A first substrate in which an adhesive is spread as the viscous fluid by the viscous fluid application device according to claim 1;
A second substrate bonded to the first substrate via the adhesive;
A laminated substrate characterized by comprising:

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