JP2008018361A5 - - Google Patents
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- Publication number
- JP2008018361A5 JP2008018361A5 JP2006193094A JP2006193094A JP2008018361A5 JP 2008018361 A5 JP2008018361 A5 JP 2008018361A5 JP 2006193094 A JP2006193094 A JP 2006193094A JP 2006193094 A JP2006193094 A JP 2006193094A JP 2008018361 A5 JP2008018361 A5 JP 2008018361A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- viscous fluid
- air
- fluid application
- application device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 239000000758 substrate Substances 0.000 claims 20
- 239000012530 fluid Substances 0.000 claims 12
- 238000007664 blowing Methods 0.000 claims 5
- 238000005507 spraying Methods 0.000 claims 3
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
Claims (5)
前記基板の中心を通る直径方向において前記基板に上側から臨み、前記基板上の粘性流体にエアーを吹き付けるエアー吹出し口、および前記基板の表面に対する前記エアーの吹付け角度を変更する吹付け角度変更手段を有するエアー吹付け手段と、
前記基板上における前記エアーの吹付けエリアが前記基板上の略全域をカバーするように、前記エアー吹出し口に対し前記基板を相対的に回転させる回転機構を有する吹付けエリア移動手段と、
前記エアー吹付け手段および前記エリア移動手段を制御するコントローラと、を備え、
前記コントローラは、前記基板を回転させながら前記粘性流体にエアーを吹き付ける展延動作において、前記粘性流体が拡がるようにエアーを前記基板に斜めに吹き付けた後、拡がった前記粘性流体が均一化するようにエアーを前記基板に垂直に吹き付けることを特徴とする粘性流体塗布装置。 A viscous fluid application device that spreads a viscous fluid applied to the center of a disk-shaped substrate over the entire area of the substrate ,
An air blowing port that faces the substrate from above in a diametrical direction passing through the center of the substrate and blows air to the viscous fluid on the substrate , and a blowing angle changing unit that changes the air blowing angle with respect to the surface of the substrate Air blowing means having
Spraying area moving means having a rotation mechanism for rotating the substrate relative to the air outlet so that the air spraying area on the substrate covers substantially the entire area on the substrate;
A controller for controlling the air blowing means and the area moving means,
In the spreading operation in which the controller blows air to the viscous fluid while rotating the substrate, after the air is obliquely blown to the substrate so that the viscous fluid spreads, the spread viscous fluid is made uniform. A viscous fluid coating apparatus characterized in that air is blown vertically onto the substrate .
前記載置テーブルには、前記基板を所定の温度に加熱するテーブルヒータが組み込まれていることを特徴とする請求項１または２に記載の粘性流体塗布装置。 A mounting table for mounting the substrate;
The viscous fluid application apparatus according to claim 1 , wherein the table table includes a table heater for heating the substrate to a predetermined temperature.
前記接着剤を介して前記第１基板に第２基板を貼り合わせる基板貼合せ装置と、を備えたことを特徴とする貼合せシステム。 The viscous fluid application device according to any one of claims 1 to 4, wherein the substrate is a first substrate, and an adhesive is spread on the first substrate as the viscous fluid .
And a substrate laminating apparatus for laminating a second substrate to the first substrate via the adhesive .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006193094A JP2008018361A (en) | 2006-07-13 | 2006-07-13 | Viscous fluid coater, viscous fluid coating method, and lamination substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006193094A JP2008018361A (en) | 2006-07-13 | 2006-07-13 | Viscous fluid coater, viscous fluid coating method, and lamination substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008018361A JP2008018361A (en) | 2008-01-31 |
| JP2008018361A5 true JP2008018361A5 (en) | 2009-08-06 |
Family
ID=39074743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006193094A Withdrawn JP2008018361A (en) | 2006-07-13 | 2006-07-13 | Viscous fluid coater, viscous fluid coating method, and lamination substrates |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008018361A (en) |
-
2006
- 2006-07-13 JP JP2006193094A patent/JP2008018361A/en not_active Withdrawn
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