JP2008014767A5 - - Google Patents

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Publication number
JP2008014767A5
JP2008014767A5 JP2006185635A JP2006185635A JP2008014767A5 JP 2008014767 A5 JP2008014767 A5 JP 2008014767A5 JP 2006185635 A JP2006185635 A JP 2006185635A JP 2006185635 A JP2006185635 A JP 2006185635A JP 2008014767 A5 JP2008014767 A5 JP 2008014767A5
Authority
JP
Japan
Prior art keywords
substrate
gate
optical unit
pair
support portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006185635A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008014767A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006185635A priority Critical patent/JP2008014767A/ja
Priority claimed from JP2006185635A external-priority patent/JP2008014767A/ja
Publication of JP2008014767A publication Critical patent/JP2008014767A/ja
Publication of JP2008014767A5 publication Critical patent/JP2008014767A5/ja
Pending legal-status Critical Current

Links

JP2006185635A 2006-07-05 2006-07-05 基板検査装置 Pending JP2008014767A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006185635A JP2008014767A (ja) 2006-07-05 2006-07-05 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006185635A JP2008014767A (ja) 2006-07-05 2006-07-05 基板検査装置

Publications (2)

Publication Number Publication Date
JP2008014767A JP2008014767A (ja) 2008-01-24
JP2008014767A5 true JP2008014767A5 (enExample) 2009-08-20

Family

ID=39071924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006185635A Pending JP2008014767A (ja) 2006-07-05 2006-07-05 基板検査装置

Country Status (1)

Country Link
JP (1) JP2008014767A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101030120B1 (ko) 2008-07-09 2011-04-20 (주)티에스티아이테크 기판 인쇄 장치
KR101846385B1 (ko) * 2016-07-12 2018-04-06 주식회사 에이치비테크놀러지 양단지지보 구조의 초고속 리뷰 검사장치
JP6803254B2 (ja) * 2017-02-08 2020-12-23 株式会社アマダ 光学センサ設置構造及びワーク搬入システム
KR102274053B1 (ko) * 2019-09-03 2021-07-08 주식회사 에이치비테크놀러지 신속한 검사가 가능한 기판 리뷰 검사장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0448248A (ja) * 1990-06-18 1992-02-18 Hitachi Ltd クリームはんだ印刷検査装置
JP3929285B2 (ja) * 2001-11-05 2007-06-13 オリンパス株式会社 基板検査装置
JP2003270155A (ja) * 2002-03-15 2003-09-25 Olympus Optical Co Ltd 基板保持装置及び検査装置
JP4307872B2 (ja) * 2003-03-18 2009-08-05 オリンパス株式会社 基板検査装置
JP4238201B2 (ja) * 2004-11-29 2009-03-18 大日本印刷株式会社 検査方法および検査装置

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