JP2008010893A5 - - Google Patents

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Publication number
JP2008010893A5
JP2008010893A5 JP2007248076A JP2007248076A JP2008010893A5 JP 2008010893 A5 JP2008010893 A5 JP 2008010893A5 JP 2007248076 A JP2007248076 A JP 2007248076A JP 2007248076 A JP2007248076 A JP 2007248076A JP 2008010893 A5 JP2008010893 A5 JP 2008010893A5
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JP
Japan
Prior art keywords
substrate
exposure apparatus
optical system
projection optical
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007248076A
Other languages
English (en)
Japanese (ja)
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JP4533416B2 (ja
JP2008010893A (ja
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Publication date
Application filed filed Critical
Priority to JP2007248076A priority Critical patent/JP4533416B2/ja
Priority claimed from JP2007248076A external-priority patent/JP4533416B2/ja
Publication of JP2008010893A publication Critical patent/JP2008010893A/ja
Publication of JP2008010893A5 publication Critical patent/JP2008010893A5/ja
Application granted granted Critical
Publication of JP4533416B2 publication Critical patent/JP4533416B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007248076A 2007-09-25 2007-09-25 露光装置およびデバイス製造方法 Expired - Fee Related JP4533416B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007248076A JP4533416B2 (ja) 2007-09-25 2007-09-25 露光装置およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007248076A JP4533416B2 (ja) 2007-09-25 2007-09-25 露光装置およびデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005291809A Division JP4164508B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008010893A JP2008010893A (ja) 2008-01-17
JP2008010893A5 true JP2008010893A5 (https=) 2009-11-19
JP4533416B2 JP4533416B2 (ja) 2010-09-01

Family

ID=39068748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007248076A Expired - Fee Related JP4533416B2 (ja) 2007-09-25 2007-09-25 露光装置およびデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4533416B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2005951A (en) * 2010-02-02 2011-08-03 Asml Netherlands Bv Lithographic apparatus and a device manufacturing method.
WO2013100114A1 (ja) * 2011-12-28 2013-07-04 株式会社ニコン 露光装置、露光方法、デバイス製造方法、液体回収方法、プログラム、及び記録媒体
CN113176711B (zh) * 2021-04-25 2024-08-16 上海图双精密装备有限公司 一种浸没式光刻机浸没流场维持装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100585476B1 (ko) * 2002-11-12 2006-06-07 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조방법
CN101872135B (zh) * 2002-12-10 2013-07-31 株式会社尼康 曝光设备和器件制造法
ATE424026T1 (de) * 2002-12-13 2009-03-15 Koninkl Philips Electronics Nv Flüssigkeitsentfernung in einem verfahren und einer einrichtung zum bestrahlen von flecken auf einer schicht
JP4352930B2 (ja) * 2003-02-26 2009-10-28 株式会社ニコン 露光装置、露光方法及びデバイス製造方法
WO2004093159A2 (en) * 2003-04-09 2004-10-28 Nikon Corporation Immersion lithography fluid control system
WO2004090634A2 (en) * 2003-04-10 2004-10-21 Nikon Corporation Environmental system including vaccum scavange for an immersion lithography apparatus
KR101177330B1 (ko) * 2003-04-10 2012-08-30 가부시키가이샤 니콘 액침 리소그래피 장치
JP2004320016A (ja) * 2003-04-11 2004-11-11 Nikon Corp 液浸リソグラフィシステム
US7213963B2 (en) * 2003-06-09 2007-05-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
KR101520591B1 (ko) * 2003-06-13 2015-05-14 가부시키가이샤 니콘 노광 방법, 기판 스테이지, 노광 장치, 및 디바이스 제조 방법
US6867844B2 (en) * 2003-06-19 2005-03-15 Asml Holding N.V. Immersion photolithography system and method using microchannel nozzles
TWI515770B (zh) * 2003-06-19 2016-01-01 尼康股份有限公司 An exposure apparatus, an exposure method, and an element manufacturing method

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