JP2008006437A5 - - Google Patents
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- Publication number
- JP2008006437A5 JP2008006437A5 JP2007166103A JP2007166103A JP2008006437A5 JP 2008006437 A5 JP2008006437 A5 JP 2008006437A5 JP 2007166103 A JP2007166103 A JP 2007166103A JP 2007166103 A JP2007166103 A JP 2007166103A JP 2008006437 A5 JP2008006437 A5 JP 2008006437A5
- Authority
- JP
- Japan
- Prior art keywords
- door member
- chamber
- sealing surface
- ball
- lever arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 20
- 239000000758 substrate Substances 0.000 claims 13
- 238000000034 method Methods 0.000 claims 4
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000026058 directional locomotion Effects 0.000 claims 1
- 210000004907 gland Anatomy 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US80606606P | 2006-06-28 | 2006-06-28 | |
| US60/806,066 | 2006-06-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008006437A JP2008006437A (ja) | 2008-01-17 |
| JP2008006437A5 true JP2008006437A5 (cg-RX-API-DMAC10.html) | 2010-08-12 |
| JP5519099B2 JP5519099B2 (ja) | 2014-06-11 |
Family
ID=39035470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007166103A Active JP5519099B2 (ja) | 2006-06-28 | 2007-06-25 | ボール継手を有するバルブドア |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5519099B2 (cg-RX-API-DMAC10.html) |
| KR (2) | KR100929718B1 (cg-RX-API-DMAC10.html) |
| CN (1) | CN101101066B (cg-RX-API-DMAC10.html) |
| TW (1) | TWI360614B (cg-RX-API-DMAC10.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101007711B1 (ko) * | 2008-05-19 | 2011-01-13 | 주식회사 에스에프에이 | 플라즈마 처리장치 |
| JP5490435B2 (ja) * | 2009-03-31 | 2014-05-14 | 東京エレクトロン株式会社 | ゲートバルブ装置 |
| KR101105671B1 (ko) | 2010-03-12 | 2012-01-18 | (주)동광 | 방폭 도어용 로커 핀의 가이드구조 |
| TWM476362U (en) * | 2012-09-07 | 2014-04-11 | Applied Materials Inc | Load lock chamber with slit valve doors |
| KR101327251B1 (ko) * | 2012-11-15 | 2013-11-13 | 주식회사 선익시스템 | 회전형 챔버도어 |
| USD755153S1 (en) * | 2014-06-20 | 2016-05-03 | Zuna Designz, Llc | Cell phone case with resilient suspension hook |
| US11530751B2 (en) * | 2017-09-29 | 2022-12-20 | Applied Materials, Inc. | Closure mechanism vacuum chamber isolation device and sub-system |
| CN108531871A (zh) * | 2018-07-09 | 2018-09-14 | 山东三齐能源有限公司 | 一种连续镀膜溅镀系统 |
| KR200498912Y1 (ko) * | 2022-06-27 | 2025-03-12 | 김영수 | 믹서트럭 수거통의 개폐장치 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| LU74745A1 (cg-RX-API-DMAC10.html) * | 1976-04-12 | 1976-11-11 | ||
| DE3047295A1 (de) * | 1980-12-16 | 1982-07-29 | Basf Ag, 6700 Ludwigshafen | Verfahren zur kontinuierlichen herstellung alterungsbestaendiger aes-polymerisate |
| US5259881A (en) * | 1991-05-17 | 1993-11-09 | Materials Research Corporation | Wafer processing cluster tool batch preheating and degassing apparatus |
| US4785962A (en) * | 1987-04-20 | 1988-11-22 | Applied Materials, Inc. | Vacuum chamber slit valve |
| KR930009811A (ko) * | 1991-11-08 | 1993-06-21 | 원본미기재 | 볼조인트(ball joint) 조립체와 만드는 방법 |
| US7575220B2 (en) * | 2004-06-14 | 2009-08-18 | Applied Materials, Inc. | Curved slit valve door |
| CN2709730Y (zh) * | 2004-06-16 | 2005-07-13 | 锦州电炉有限责任公司 | 高真空转阀 |
| US8061920B2 (en) | 2006-11-29 | 2011-11-22 | Wimberley, Inc. | Pivoting ball mount having four equally spaced contact points |
-
2007
- 2007-06-25 JP JP2007166103A patent/JP5519099B2/ja active Active
- 2007-06-27 TW TW096123367A patent/TWI360614B/zh not_active IP Right Cessation
- 2007-06-28 KR KR1020070064271A patent/KR100929718B1/ko not_active Expired - Fee Related
- 2007-06-28 CN CN2007101275567A patent/CN101101066B/zh not_active Expired - Fee Related
-
2009
- 2009-05-22 KR KR1020090045004A patent/KR101274963B1/ko not_active Expired - Fee Related
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