JP2007537436A5 - - Google Patents

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Publication number
JP2007537436A5
JP2007537436A5 JP2007512332A JP2007512332A JP2007537436A5 JP 2007537436 A5 JP2007537436 A5 JP 2007537436A5 JP 2007512332 A JP2007512332 A JP 2007512332A JP 2007512332 A JP2007512332 A JP 2007512332A JP 2007537436 A5 JP2007537436 A5 JP 2007537436A5
Authority
JP
Japan
Prior art keywords
measurement
error
arm
interferometer
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007512332A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007537436A (ja
Filing date
Publication date
Priority claimed from GB0410430A external-priority patent/GB0410430D0/en
Priority claimed from GB0426351A external-priority patent/GB0426351D0/en
Application filed filed Critical
Priority claimed from PCT/GB2005/001785 external-priority patent/WO2005108913A1/en
Publication of JP2007537436A publication Critical patent/JP2007537436A/ja
Publication of JP2007537436A5 publication Critical patent/JP2007537436A5/ja
Pending legal-status Critical Current

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JP2007512332A 2004-05-11 2005-05-11 偏光漏れによって生じるエラービームの除去または分離機能付きの偏光干渉計 Pending JP2007537436A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0410430A GB0410430D0 (en) 2004-05-11 2004-05-11 Polarising mirror interferometers
GB0426351A GB0426351D0 (en) 2004-12-01 2004-12-01 Polarising interferometers
PCT/GB2005/001785 WO2005108913A1 (en) 2004-05-11 2005-05-11 Polarising interferometer with removal or separation of error beam caused by leakage of polarised light

Publications (2)

Publication Number Publication Date
JP2007537436A JP2007537436A (ja) 2007-12-20
JP2007537436A5 true JP2007537436A5 (enExample) 2008-06-26

Family

ID=34968749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007512332A Pending JP2007537436A (ja) 2004-05-11 2005-05-11 偏光漏れによって生じるエラービームの除去または分離機能付きの偏光干渉計

Country Status (4)

Country Link
US (1) US7525665B2 (enExample)
EP (1) EP1751491B1 (enExample)
JP (1) JP2007537436A (enExample)
WO (1) WO2005108913A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7365857B2 (en) * 2004-10-22 2008-04-29 Zygo Corporation Precompensation of polarization errors in heterodyne interferometry
US7652771B2 (en) * 2007-10-31 2010-01-26 Agilent Technologies, Inc. Interferometer with Double Polarizing Beam Splitter
JP5305732B2 (ja) * 2008-05-13 2013-10-02 キヤノン株式会社 干渉計
JP5933190B2 (ja) * 2010-06-30 2016-06-08 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学式距離測定機器
WO2012106246A2 (en) * 2011-02-01 2012-08-09 Zygo Corporation Interferometric heterodyne optical encoder system
GB201313751D0 (en) 2013-08-01 2013-09-18 Renishaw Plc Rotation Detection Apparatus
US10378933B2 (en) * 2013-10-18 2019-08-13 Nikon Corporation Encoder head designs
EP3410076A1 (en) * 2017-05-29 2018-12-05 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method and system to detect rotational movement
CN118583063B (zh) * 2024-08-05 2024-09-27 中国科学院长春光学精密机械与物理研究所 一种利特罗光栅干涉测量装置及其使用方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4417816A (en) 1980-08-11 1983-11-29 Colt Industries Operating Corp. Laser measuring system and method for turning machine
US4334778A (en) 1980-09-12 1982-06-15 The United States Of America As Represented By The United States Department Of Energy Dual surface interferometer
US4711574A (en) 1984-04-27 1987-12-08 Hewlett-Packard Company Minimum deadpath interferometer and dilatometer
US4688940A (en) * 1985-03-12 1987-08-25 Zygo Corporation Heterodyne interferometer system
US4784490A (en) 1987-03-02 1988-11-15 Hewlett-Packard Company High thermal stability plane mirror interferometer
JP2807965B2 (ja) * 1994-04-11 1998-10-08 登 中谷 ヘテロダイン干渉計用微小角交差ビーム型直交２周波数光源
DE19522262C2 (de) * 1995-06-20 1997-05-22 Zeiss Carl Jena Gmbh Heterodyn-Interferometer-Anordnung
JP3653827B2 (ja) * 1995-10-20 2005-06-02 株式会社ニコン 干渉計
US5757491A (en) * 1996-08-19 1998-05-26 The Hong Kong University Of Science & Technology Laser interferometer system for straightness measurements
JPH11125503A (ja) * 1997-10-22 1999-05-11 Nikon Corp ヘテロダイン干渉計
DE19933290A1 (de) * 1999-04-09 2001-03-08 Campus Technologies Ag Zug Vorrichtung und Verfahren zur optischen Spektroskopie
US6483593B1 (en) * 1999-08-10 2002-11-19 The Boeing Company Hetrodyne interferometer and associated interferometric method
US6778280B2 (en) * 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
JP2003042710A (ja) 2001-07-26 2003-02-13 Canon Inc 光ヘテロダイン干渉計装置
JP2005501240A (ja) * 2001-08-23 2005-01-13 ザイゴ コーポレイション 傾斜干渉計
US6757066B2 (en) * 2002-01-28 2004-06-29 Zygo Corporation Multiple degree of freedom interferometer
US6819434B2 (en) * 2002-01-28 2004-11-16 Zygo Corporation Multi-axis interferometer
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
JP2005249794A (ja) * 2004-03-03 2005-09-15 Zygo Corp 干渉計および干渉計を使用するシステム
US7342641B2 (en) * 2005-02-22 2008-03-11 Nikon Corporation Autofocus methods and devices for lithography

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