JP2007532916A - プローブベース機器を用いて定量的測定を獲得する方法および装置 - Google Patents

プローブベース機器を用いて定量的測定を獲得する方法および装置 Download PDF

Info

Publication number
JP2007532916A
JP2007532916A JP2007508584A JP2007508584A JP2007532916A JP 2007532916 A JP2007532916 A JP 2007532916A JP 2007508584 A JP2007508584 A JP 2007508584A JP 2007508584 A JP2007508584 A JP 2007508584A JP 2007532916 A JP2007532916 A JP 2007532916A
Authority
JP
Japan
Prior art keywords
probe
sample
cantilever
indentation
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007508584A
Other languages
English (en)
Japanese (ja)
Inventor
スー、シャンミン
ファン、ニー
Original Assignee
ビーコ インストルメンツ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ビーコ インストルメンツ インコーポレイテッド filed Critical ビーコ インストルメンツ インコーポレイテッド
Publication of JP2007532916A publication Critical patent/JP2007532916A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/366—Nanoindenters, i.e. wherein the indenting force is measured

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2007508584A 2004-04-14 2005-04-14 プローブベース機器を用いて定量的測定を獲得する方法および装置 Pending JP2007532916A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US56211604P 2004-04-14 2004-04-14
PCT/US2005/012925 WO2005104138A1 (fr) 2004-04-14 2005-04-14 Procede et appareil d'obtention de mesures quantitatives utilisant un instrument dote d'une sonde

Publications (1)

Publication Number Publication Date
JP2007532916A true JP2007532916A (ja) 2007-11-15

Family

ID=34965906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007508584A Pending JP2007532916A (ja) 2004-04-14 2005-04-14 プローブベース機器を用いて定量的測定を獲得する方法および装置

Country Status (5)

Country Link
US (2) US7596990B2 (fr)
EP (2) EP1756835B1 (fr)
JP (1) JP2007532916A (fr)
KR (1) KR101206555B1 (fr)
WO (1) WO2005104138A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021122770A (ja) * 2020-02-04 2021-08-30 国立研究開発法人産業技術総合研究所 自励発振装置、切削装置、自励発振装置の制御方法及び切削方法
JP2022089945A (ja) * 2018-08-06 2022-06-16 ブルカー ナノ， インク． 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4448099B2 (ja) * 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
US7607342B2 (en) * 2006-04-26 2009-10-27 Vecco Instruments, Inc. Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument
WO2008007547A1 (fr) * 2006-07-13 2008-01-17 Konica Minolta Opto, Inc. Procédé pour fabriquer un substrat de verre, procédé pour fabriquer un disque magnétique et disque magnétique
US7555940B2 (en) * 2006-07-25 2009-07-07 Veeco Instruments, Inc. Cantilever free-decay measurement system with coherent averaging
GB0615277D0 (en) * 2006-08-01 2006-09-06 Ionscope Ltd Method
US7797757B2 (en) * 2006-08-15 2010-09-14 Georgia Tech Research Corporation Cantilevers with integrated actuators for probe microscopy
US8505110B2 (en) * 2007-10-10 2013-08-06 Eloret Corporation Apparatus and process for controlled nanomanufacturing using catalyst retaining structures
JP2009150696A (ja) * 2007-12-19 2009-07-09 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
US20120047610A1 (en) * 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
JP5707839B2 (ja) * 2010-10-13 2015-04-30 セイコーエプソン株式会社 圧電型発電機および圧電型発電機の製造方法
EP2643658A4 (fr) * 2010-11-24 2014-05-21 Hysitron Inc Instruments d'essais mécaniques comprenant des données embarquées
US8621661B2 (en) * 2011-01-10 2013-12-31 Korea Research Institute Of Standards And Science Electrical-mechanical complex sensor for nanomaterials
TW201237421A (en) * 2011-03-15 2012-09-16 Mpi Corp Probing force monitoring method for probe
US9417170B2 (en) * 2011-07-15 2016-08-16 Clarkson University High resolution, high speed multi-frequency dynamic study of visco-elastic properites
KR20130022500A (ko) * 2011-08-24 2013-03-07 삼성전자주식회사 표적 세포를 분별하는 장치 및 방법
JP6104667B2 (ja) * 2013-03-28 2017-03-29 株式会社日立ハイテクサイエンス アクチュエータの位置算出装置、位置算出方法及び位置算出プログラム
US9110092B1 (en) * 2013-04-09 2015-08-18 NT-MDT Development Inc. Scanning probe based apparatus and methods for low-force profiling of sample surfaces and detection and mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode
KR102104059B1 (ko) 2014-07-31 2020-04-23 삼성전자 주식회사 전도성 원자힘 현미경 장치 및 전도성 원자힘 현미경 장치의 동작 방법
US9541575B2 (en) * 2014-11-26 2017-01-10 Tufts University Exploitation of second-order effects in atomic force microscopy
JP2017181135A (ja) * 2016-03-29 2017-10-05 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びそのプローブ接触検出方法
US10527397B2 (en) 2017-12-27 2020-01-07 Mitutoyo Corporation Cooperative measurement gauge system for multiple axis position measurement
CN112567252B (zh) * 2018-08-09 2024-03-08 株式会社岛津制作所 扫描探针显微镜以及使用扫描探针显微镜的物理性质测定方法
WO2021003483A1 (fr) * 2019-07-03 2021-01-07 Massachusetts Institute Of Technology Sondes actives revêtues destinées à être utilisées en imagerie topographique dans des environnements liquides opaques et procédés de mise en œuvre d'imagerie topographique
KR102680385B1 (ko) 2019-10-30 2024-07-02 삼성전자주식회사 멀티 렌즈 영상 복원 장치 및 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06307851A (ja) * 1993-04-27 1994-11-04 Yotaro Hatamura カンチレバーおよびこのカンチレバーを用いた微細加工装置
US5866807A (en) * 1997-02-04 1999-02-02 Digital Instruments Method and apparatus for measuring mechanical properties on a small scale
JP2002540436A (ja) * 1999-03-29 2002-11-26 ナノデバイシィズ インコーポレイテッド 原子間力顕微鏡用能動型探針及びその使用方法
JP2002350323A (ja) * 2001-05-24 2002-12-04 Tohoku Techno Arch Co Ltd 走査型プローブ顕微鏡用プローブ
JP2003240699A (ja) * 2002-02-15 2003-08-27 Sumitomo Rubber Ind Ltd ポリマーアロイの界面厚み測定方法、及びポリマーアロイの界面厚み測定装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4699000A (en) 1986-04-17 1987-10-13 Micro Properties Inc. Automated device for determining and evaluating the mechanical properties of materials
US4906840A (en) 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
US4935634A (en) 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
US5266801A (en) 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5193383A (en) 1990-07-11 1993-03-16 The United States Of America As Represented By The Secretary Of The Navy Mechanical and surface force nanoprobe
US5077473A (en) * 1990-07-26 1991-12-31 Digital Instruments, Inc. Drift compensation for scanning probe microscopes using an enhanced probe positioning system
US5412980A (en) 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
US5519212A (en) 1992-08-07 1996-05-21 Digital Instruments, Incorporated Tapping atomic force microscope with phase or frequency detection
US5226801A (en) 1992-08-17 1993-07-13 Cobile Alfredo P Shock absorber type compressor
US5400647A (en) * 1992-11-12 1995-03-28 Digital Instruments, Inc. Methods of operating atomic force microscopes to measure friction
US5553486A (en) 1993-10-01 1996-09-10 Hysitron Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
US6026677A (en) 1993-10-01 2000-02-22 Hysitron, Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
US5576483A (en) 1993-10-01 1996-11-19 Hysitron Incorporated Capacitive transducer with electrostatic actuation
US5515719A (en) 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5959200A (en) * 1997-08-27 1999-09-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
JP2879679B1 (ja) * 1998-03-26 1999-04-05 科学技術庁金属材料技術研究所長 微小領域の硬さ試験方法
AU2870700A (en) 1999-02-05 2000-08-25 Xidex Corporation System and method of multi-dimensional force sensing for atomic force microscopy
US6666075B2 (en) * 1999-02-05 2003-12-23 Xidex Corporation System and method of multi-dimensional force sensing for scanning probe microscopy
US6672144B2 (en) 1999-03-29 2004-01-06 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US6349591B1 (en) 2000-01-13 2002-02-26 Universite Pierre & Marie Curie Device and method for controlling the interaction of a tip and a sample, notably for atomic force microscopy and nano-indentation
JP4008176B2 (ja) 2000-02-10 2007-11-14 独立行政法人科学技術振興機構 超微小押し込み試験装置
US6945099B1 (en) 2002-07-02 2005-09-20 Veeco Instruments Inc. Torsional resonance mode probe-based instrument and method
US7168301B2 (en) 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
US6993959B2 (en) * 2003-10-17 2006-02-07 National Institutes Of Health System and method for the analysis of atomic force microscopy data
KR100612595B1 (ko) * 2004-01-05 2006-08-17 한국기계연구원 나노 압입 시험 기능을 갖는 ａｆｍ 캔틸레버

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06307851A (ja) * 1993-04-27 1994-11-04 Yotaro Hatamura カンチレバーおよびこのカンチレバーを用いた微細加工装置
US5866807A (en) * 1997-02-04 1999-02-02 Digital Instruments Method and apparatus for measuring mechanical properties on a small scale
JP2002540436A (ja) * 1999-03-29 2002-11-26 ナノデバイシィズ インコーポレイテッド 原子間力顕微鏡用能動型探針及びその使用方法
JP2002350323A (ja) * 2001-05-24 2002-12-04 Tohoku Techno Arch Co Ltd 走査型プローブ顕微鏡用プローブ
JP2003240699A (ja) * 2002-02-15 2003-08-27 Sumitomo Rubber Ind Ltd ポリマーアロイの界面厚み測定方法、及びポリマーアロイの界面厚み測定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022089945A (ja) * 2018-08-06 2022-06-16 ブルカー ナノ， インク． 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP7349529B2 (ja) 2018-08-06 2023-09-22 ブルカー ナノ， インク． 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2021122770A (ja) * 2020-02-04 2021-08-30 国立研究開発法人産業技術総合研究所 自励発振装置、切削装置、自励発振装置の制御方法及び切削方法

Also Published As

Publication number Publication date
EP2040265A3 (fr) 2010-03-03
KR101206555B1 (ko) 2012-11-29
WO2005104138A1 (fr) 2005-11-03
US20060000263A1 (en) 2006-01-05
US8161805B2 (en) 2012-04-24
KR20120004537A (ko) 2012-01-12
US7596990B2 (en) 2009-10-06
EP1756835A1 (fr) 2007-02-28
EP2040265B1 (fr) 2014-11-05
EP1756835B1 (fr) 2012-08-29
EP2040265A2 (fr) 2009-03-25
US20090222958A1 (en) 2009-09-03

Similar Documents

Publication Publication Date Title
JP2007532916A (ja) プローブベース機器を用いて定量的測定を獲得する方法および装置
US11002757B2 (en) Method and apparatus of operating a scanning probe microscope
US5866807A (en) Method and apparatus for measuring mechanical properties on a small scale
US7044007B2 (en) Force scanning probe microscope
EP0587459B1 (fr) Microscope à forces atomiques très faibles
US7658097B2 (en) Method and apparatus of high speed property mapping
JPH10507000A (ja) 位相または周波数の検出を用いる軽打原子間力顕微鏡
US5804708A (en) Atomic force microscope and method of analyzing frictions in atomic force microscope
WO2012057723A1 (fr) Mesures thermiques utilisant une microscopie à force atomique à fréquences multiples
US7607342B2 (en) Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument
JP4502122B2 (ja) 走査型プローブ顕微鏡及び走査方法
US9977050B2 (en) Wear-less operation of a material surface with a scanning probe microscope
KR20070022267A (ko) 프로브 기반 기기를 사용하는 정량 측정을 위한 방법 및장치
Chasiotis Atomic Force
Snitka et al. Materials surface topography and composition imaging using dynamic atomic force microscopy

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080408

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100817

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20101115

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20101122

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110329

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110913

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20111213

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20111220

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20120215

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120313

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20120529