JP2007517258A5 - - Google Patents

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Publication number
JP2007517258A5
JP2007517258A5 JP2006547070A JP2006547070A JP2007517258A5 JP 2007517258 A5 JP2007517258 A5 JP 2007517258A5 JP 2006547070 A JP2006547070 A JP 2006547070A JP 2006547070 A JP2006547070 A JP 2006547070A JP 2007517258 A5 JP2007517258 A5 JP 2007517258A5
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JP
Japan
Prior art keywords
film
layer
individual layers
repeating units
axis
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006547070A
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English (en)
Japanese (ja)
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JP2007517258A (ja
JP4564016B2 (ja
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Publication date
Priority claimed from US10/748,396 external-priority patent/US7019905B2/en
Application filed filed Critical
Publication of JP2007517258A publication Critical patent/JP2007517258A/ja
Publication of JP2007517258A5 publication Critical patent/JP2007517258A5/ja
Application granted granted Critical
Publication of JP4564016B2 publication Critical patent/JP4564016B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006547070A 2003-12-30 2004-12-09 高次反射を抑制した多層反射体 Expired - Fee Related JP4564016B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/748,396 US7019905B2 (en) 2003-12-30 2003-12-30 Multilayer reflector with suppression of high order reflections
PCT/US2004/041214 WO2005066668A1 (en) 2003-12-30 2004-12-09 Multilayer reflector with suppression of high order reflections

Publications (3)

Publication Number Publication Date
JP2007517258A JP2007517258A (ja) 2007-06-28
JP2007517258A5 true JP2007517258A5 (enrdf_load_stackoverflow) 2008-01-31
JP4564016B2 JP4564016B2 (ja) 2010-10-20

Family

ID=34700886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006547070A Expired - Fee Related JP4564016B2 (ja) 2003-12-30 2004-12-09 高次反射を抑制した多層反射体

Country Status (12)

Country Link
US (1) US7019905B2 (enrdf_load_stackoverflow)
EP (1) EP1700143B1 (enrdf_load_stackoverflow)
JP (1) JP4564016B2 (enrdf_load_stackoverflow)
KR (1) KR101063993B1 (enrdf_load_stackoverflow)
CN (1) CN100454051C (enrdf_load_stackoverflow)
AT (1) ATE371201T1 (enrdf_load_stackoverflow)
AU (1) AU2004312786B2 (enrdf_load_stackoverflow)
BR (1) BRPI0418298B1 (enrdf_load_stackoverflow)
CA (1) CA2551632A1 (enrdf_load_stackoverflow)
DE (1) DE602004008515T2 (enrdf_load_stackoverflow)
MX (1) MXPA06007472A (enrdf_load_stackoverflow)
WO (1) WO2005066668A1 (enrdf_load_stackoverflow)

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