JP2007516869A - マイクロコンタクトプリンティングの方法および装置 - Google Patents
マイクロコンタクトプリンティングの方法および装置 Download PDFInfo
- Publication number
- JP2007516869A JP2007516869A JP2006545865A JP2006545865A JP2007516869A JP 2007516869 A JP2007516869 A JP 2007516869A JP 2006545865 A JP2006545865 A JP 2006545865A JP 2006545865 A JP2006545865 A JP 2006545865A JP 2007516869 A JP2007516869 A JP 2007516869A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- substrate
- creating
- support member
- stamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 22
- 238000000813 microcontact printing Methods 0.000 title description 9
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 239000000463 material Substances 0.000 claims abstract description 26
- 238000007639 printing Methods 0.000 claims abstract description 14
- 239000012530 fluid Substances 0.000 claims abstract description 13
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 10
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 10
- 230000000704 physical effect Effects 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 239000012491 analyte Substances 0.000 claims description 3
- -1 polydimethylsiloxane Polymers 0.000 claims description 3
- 244000043261 Hevea brasiliensis Species 0.000 claims description 2
- 238000004891 communication Methods 0.000 claims description 2
- 229920003052 natural elastomer Polymers 0.000 claims description 2
- 229920001194 natural rubber Polymers 0.000 claims description 2
- 229920000098 polyolefin Polymers 0.000 claims description 2
- 229920003051 synthetic elastomer Polymers 0.000 claims description 2
- 239000005061 synthetic rubber Substances 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 241000894007 species Species 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 229920000642 polymer Polymers 0.000 description 11
- 238000013459 approach Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003909 pattern recognition Methods 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
- B41F17/006—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for for printing on curved surfaces not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
- B41K1/00—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
- B41K1/00—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor
- B41K1/26—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor with stamping surfaces adapted for application to non-flat surfaces
- B41K1/28—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor with stamping surfaces adapted for application to non-flat surfaces flexible
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Landscapes
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Micromachines (AREA)
- Printing Methods (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/744,949 US6981445B2 (en) | 2003-12-24 | 2003-12-24 | Method and apparatus for micro-contact printing |
| PCT/CA2004/002175 WO2005061237A1 (en) | 2003-12-24 | 2004-12-22 | Method and apparatus for micro-contact printing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007516869A true JP2007516869A (ja) | 2007-06-28 |
| JP2007516869A5 JP2007516869A5 (enExample) | 2007-10-25 |
Family
ID=34700532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006545865A Pending JP2007516869A (ja) | 2003-12-24 | 2004-12-22 | マイクロコンタクトプリンティングの方法および装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6981445B2 (enExample) |
| EP (1) | EP1701849A1 (enExample) |
| JP (1) | JP2007516869A (enExample) |
| KR (1) | KR101198500B1 (enExample) |
| CN (1) | CN100540320C (enExample) |
| CA (1) | CA2541239C (enExample) |
| MX (1) | MXPA06007383A (enExample) |
| WO (1) | WO2005061237A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6939120B1 (en) * | 2002-09-12 | 2005-09-06 | Komag, Inc. | Disk alignment apparatus and method for patterned media production |
| US7114448B2 (en) * | 2003-11-06 | 2006-10-03 | Palo Alto Research Center, Incorporated | Method for large-area patterning dissolved polymers by making use of an active stamp |
| DE602004014002D1 (de) * | 2004-12-10 | 2008-07-03 | Essilor Int | Stempel zum Auftragen eines Motivs, Verfahren zur Stempelherstellung und Verfahren zur Herstellung eines Objekts anhand von diesem Stempel |
| US7491423B1 (en) | 2005-05-02 | 2009-02-17 | Sandia Corporation | Directed spatial organization of zinc oxide nanostructures |
| JP5180820B2 (ja) * | 2005-05-03 | 2013-04-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | スタンプから基板にパターンを転写する方法及び装置 |
| JP4449949B2 (ja) * | 2006-07-18 | 2010-04-14 | セイコーエプソン株式会社 | 表面エネルギー差バンクの形成方法、パターンの形成方法、バンク構造、電子回路、電子デバイス、電子機器、及びスタンプ |
| US20080083484A1 (en) * | 2006-09-28 | 2008-04-10 | Graciela Beatriz Blanchet | Method to form a pattern of functional material on a substrate |
| EP2092340B1 (en) | 2006-10-18 | 2014-07-09 | Axela Inc. | Measuring multiple analytes over a broad range of concentrations using optical diffraction |
| WO2008115530A2 (en) * | 2007-03-20 | 2008-09-25 | Nano Terra Inc. | Polymer composition for preparing electronic devices by microcontact printing processes and products prepared by the processes |
| WO2008154907A2 (de) * | 2007-06-21 | 2008-12-24 | GeSIM Gesellschaft für Silizium-Mikrosysteme mbH | Verfahren und vorrichtung zur übertragung von mikro- oder nanostrukturen durch kontaktstempeln |
| WO2009014717A1 (en) * | 2007-07-25 | 2009-01-29 | Nano Terra Inc. | Contact printing method using an elastomeric stamp having a variable surface area and variable shape |
| EP2217694A4 (en) | 2007-11-13 | 2011-08-31 | Univ California | METHODS FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVICES THEREFOR |
| EP2265950B1 (en) | 2008-03-05 | 2019-01-23 | Axela Inc. | Detection of biomarkers and biomarker complexes |
| US20110052549A1 (en) * | 2009-08-27 | 2011-03-03 | The Regents Of The University Of California | Cell culture device to differentiate stem cells in a specific orientation |
| CN102666103B (zh) | 2009-12-22 | 2016-04-06 | 3M创新有限公司 | 用于使用增压辊的微接触印刷的装置及方法 |
| GB201009621D0 (en) * | 2010-06-09 | 2010-07-21 | Laja Materials Ltd | Stamping apparatus |
| US8449285B2 (en) * | 2011-01-21 | 2013-05-28 | Hepregen Corporation | Systems and methods for micro-contact stamping |
| US8911582B2 (en) * | 2011-09-16 | 2014-12-16 | 3M Innovative Properties Company | Method and apparatus for applying a stamp for micro-contact printing to a stamping roll |
| US9149958B2 (en) | 2011-11-14 | 2015-10-06 | Massachusetts Institute Of Technology | Stamp for microcontact printing |
| US9266260B2 (en) | 2011-12-20 | 2016-02-23 | Massachusetts Institute Of Technology | Precision continuous stamp casting method for roll-based soft lithography |
| CN102616031B (zh) * | 2012-03-29 | 2014-01-29 | 浙江大学 | 一种磁力控制的墨水渗透式微接触印刷装置 |
| KR101955335B1 (ko) | 2012-11-14 | 2019-03-07 | 삼성전자주식회사 | 스탬프 구조체 및 이를 이용한 전사 방법 |
| US11472171B2 (en) * | 2014-07-20 | 2022-10-18 | X Display Company Technology Limited | Apparatus and methods for micro-transfer-printing |
| CN107215111B (zh) * | 2017-06-14 | 2023-03-28 | 浙江大学 | 一种磁控转印印章及磁控转移印刷方法 |
| KR102094005B1 (ko) * | 2018-05-29 | 2020-03-27 | 한밭대학교 산학협력단 | 롤투롤 방식을 통한 마이크로컨택 프린팅 시스템 |
| US10748793B1 (en) | 2019-02-13 | 2020-08-18 | X Display Company Technology Limited | Printing component arrays with different orientations |
| CN113433062B (zh) * | 2021-06-15 | 2022-07-08 | 清华大学 | 印章单元与样品之间的接合力的测试方法及测试装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389503A (en) * | 1977-01-17 | 1978-08-07 | Honda Motor Co Ltd | Method of and device for printing on curved surface |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3756165A (en) | 1972-05-22 | 1973-09-04 | Interpace Corp | Method for printing on ceramic tableware |
| US5512131A (en) | 1993-10-04 | 1996-04-30 | President And Fellows Of Harvard College | Formation of microstamped patterns on surfaces and derivative articles |
| US6180239B1 (en) | 1993-10-04 | 2001-01-30 | President And Fellows Of Harvard College | Microcontact printing on surfaces and derivative articles |
| US5669303A (en) | 1996-03-04 | 1997-09-23 | Motorola | Apparatus and method for stamping a surface |
| US5731152A (en) * | 1996-05-13 | 1998-03-24 | Motorola, Inc. | Methods and systems for biological reagent placement |
| US5937758A (en) * | 1997-11-26 | 1999-08-17 | Motorola, Inc. | Micro-contact printing stamp |
| US5947027A (en) | 1998-09-08 | 1999-09-07 | Motorola, Inc. | Printing apparatus with inflatable means for advancing a substrate towards the stamping surface |
| US6221579B1 (en) * | 1998-12-11 | 2001-04-24 | Kimberly-Clark Worldwide, Inc. | Patterned binding of functionalized microspheres for optical diffraction-based biosensors |
| AU2001271799A1 (en) | 2000-06-30 | 2002-01-14 | President And Fellows Of Harvard College | Electric microcontact printing method and apparatus |
| WO2002014078A2 (en) * | 2000-08-14 | 2002-02-21 | Surface Logix, Inc. | Deformable stamp for patterning three-dimensional surfaces |
| US20020130444A1 (en) | 2001-03-15 | 2002-09-19 | Gareth Hougham | Post cure hardening of siloxane stamps for microcontact printing |
| US7338613B2 (en) | 2001-09-10 | 2008-03-04 | Surface Logix, Inc. | System and process for automated microcontact printing |
| WO2003065120A2 (en) | 2002-01-11 | 2003-08-07 | Massachusetts Institute Of Technology | Microcontact printing |
| WO2003099463A2 (en) * | 2002-05-27 | 2003-12-04 | Koninklijke Philips Electronics N.V. | Method and device for transferring a pattern from a stamp to a substrate |
-
2003
- 2003-12-24 US US10/744,949 patent/US6981445B2/en not_active Expired - Fee Related
-
2004
- 2004-12-22 JP JP2006545865A patent/JP2007516869A/ja active Pending
- 2004-12-22 MX MXPA06007383A patent/MXPA06007383A/es active IP Right Grant
- 2004-12-22 CN CNB2004800387574A patent/CN100540320C/zh not_active Expired - Fee Related
- 2004-12-22 KR KR1020067014463A patent/KR101198500B1/ko not_active Expired - Fee Related
- 2004-12-22 WO PCT/CA2004/002175 patent/WO2005061237A1/en not_active Ceased
- 2004-12-22 EP EP04802350A patent/EP1701849A1/en not_active Withdrawn
- 2004-12-22 CA CA002541239A patent/CA2541239C/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389503A (en) * | 1977-01-17 | 1978-08-07 | Honda Motor Co Ltd | Method of and device for printing on curved surface |
Also Published As
| Publication number | Publication date |
|---|---|
| MXPA06007383A (es) | 2007-01-26 |
| CA2541239C (en) | 2009-06-09 |
| US20050139103A1 (en) | 2005-06-30 |
| US6981445B2 (en) | 2006-01-03 |
| KR101198500B1 (ko) | 2012-11-06 |
| EP1701849A1 (en) | 2006-09-20 |
| KR20070019969A (ko) | 2007-02-16 |
| CN1898091A (zh) | 2007-01-17 |
| WO2005061237A1 (en) | 2005-07-07 |
| CN100540320C (zh) | 2009-09-16 |
| CA2541239A1 (en) | 2005-07-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070904 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070904 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110104 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20111213 |