CA2541239C - Method and apparatus for micro-contact printing - Google Patents

Method and apparatus for micro-contact printing Download PDF

Info

Publication number
CA2541239C
CA2541239C CA002541239A CA2541239A CA2541239C CA 2541239 C CA2541239 C CA 2541239C CA 002541239 A CA002541239 A CA 002541239A CA 2541239 A CA2541239 A CA 2541239A CA 2541239 C CA2541239 C CA 2541239C
Authority
CA
Canada
Prior art keywords
substrate
support member
pattern
rigid support
diaphragm portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002541239A
Other languages
English (en)
French (fr)
Other versions
CA2541239A1 (en
Inventor
Raymond Francis Cracauer
Rocky Ganske
M. Cynthia Goh
Jane B. Goh
Adam Brian Liederman
Richard Loo
Pui Tam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Axela Inc
Original Assignee
Axela Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axela Inc filed Critical Axela Inc
Publication of CA2541239A1 publication Critical patent/CA2541239A1/en
Application granted granted Critical
Publication of CA2541239C publication Critical patent/CA2541239C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
    • B41F17/006—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for for printing on curved surfaces not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K1/00—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K1/00—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor
    • B41K1/26—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor with stamping surfaces adapted for application to non-flat surfaces
    • B41K1/28—Portable hand-operated devices without means for supporting or locating the articles to be stamped, i.e. hand stamps; Inking devices or other accessories therefor with stamping surfaces adapted for application to non-flat surfaces flexible
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Micromachines (AREA)
  • Printing Methods (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA002541239A 2003-12-24 2004-12-22 Method and apparatus for micro-contact printing Expired - Fee Related CA2541239C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/744,949 US6981445B2 (en) 2003-12-24 2003-12-24 Method and apparatus for micro-contact printing
US10/744,949 2003-12-24
PCT/CA2004/002175 WO2005061237A1 (en) 2003-12-24 2004-12-22 Method and apparatus for micro-contact printing

Publications (2)

Publication Number Publication Date
CA2541239A1 CA2541239A1 (en) 2005-07-07
CA2541239C true CA2541239C (en) 2009-06-09

Family

ID=34700532

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002541239A Expired - Fee Related CA2541239C (en) 2003-12-24 2004-12-22 Method and apparatus for micro-contact printing

Country Status (8)

Country Link
US (1) US6981445B2 (enExample)
EP (1) EP1701849A1 (enExample)
JP (1) JP2007516869A (enExample)
KR (1) KR101198500B1 (enExample)
CN (1) CN100540320C (enExample)
CA (1) CA2541239C (enExample)
MX (1) MXPA06007383A (enExample)
WO (1) WO2005061237A1 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6939120B1 (en) * 2002-09-12 2005-09-06 Komag, Inc. Disk alignment apparatus and method for patterned media production
US7114448B2 (en) * 2003-11-06 2006-10-03 Palo Alto Research Center, Incorporated Method for large-area patterning dissolved polymers by making use of an active stamp
DE602004014002D1 (de) * 2004-12-10 2008-07-03 Essilor Int Stempel zum Auftragen eines Motivs, Verfahren zur Stempelherstellung und Verfahren zur Herstellung eines Objekts anhand von diesem Stempel
US7491423B1 (en) 2005-05-02 2009-02-17 Sandia Corporation Directed spatial organization of zinc oxide nanostructures
JP5180820B2 (ja) * 2005-05-03 2013-04-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ スタンプから基板にパターンを転写する方法及び装置
JP4449949B2 (ja) * 2006-07-18 2010-04-14 セイコーエプソン株式会社 表面エネルギー差バンクの形成方法、パターンの形成方法、バンク構造、電子回路、電子デバイス、電子機器、及びスタンプ
US20080083484A1 (en) * 2006-09-28 2008-04-10 Graciela Beatriz Blanchet Method to form a pattern of functional material on a substrate
EP2092340B1 (en) 2006-10-18 2014-07-09 Axela Inc. Measuring multiple analytes over a broad range of concentrations using optical diffraction
WO2008115530A2 (en) * 2007-03-20 2008-09-25 Nano Terra Inc. Polymer composition for preparing electronic devices by microcontact printing processes and products prepared by the processes
WO2008154907A2 (de) * 2007-06-21 2008-12-24 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Verfahren und vorrichtung zur übertragung von mikro- oder nanostrukturen durch kontaktstempeln
WO2009014717A1 (en) * 2007-07-25 2009-01-29 Nano Terra Inc. Contact printing method using an elastomeric stamp having a variable surface area and variable shape
EP2217694A4 (en) 2007-11-13 2011-08-31 Univ California METHODS FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVICES THEREFOR
EP2265950B1 (en) 2008-03-05 2019-01-23 Axela Inc. Detection of biomarkers and biomarker complexes
US20110052549A1 (en) * 2009-08-27 2011-03-03 The Regents Of The University Of California Cell culture device to differentiate stem cells in a specific orientation
CN102666103B (zh) 2009-12-22 2016-04-06 3M创新有限公司 用于使用增压辊的微接触印刷的装置及方法
GB201009621D0 (en) * 2010-06-09 2010-07-21 Laja Materials Ltd Stamping apparatus
US8449285B2 (en) * 2011-01-21 2013-05-28 Hepregen Corporation Systems and methods for micro-contact stamping
US8911582B2 (en) * 2011-09-16 2014-12-16 3M Innovative Properties Company Method and apparatus for applying a stamp for micro-contact printing to a stamping roll
US9149958B2 (en) 2011-11-14 2015-10-06 Massachusetts Institute Of Technology Stamp for microcontact printing
US9266260B2 (en) 2011-12-20 2016-02-23 Massachusetts Institute Of Technology Precision continuous stamp casting method for roll-based soft lithography
CN102616031B (zh) * 2012-03-29 2014-01-29 浙江大学 一种磁力控制的墨水渗透式微接触印刷装置
KR101955335B1 (ko) 2012-11-14 2019-03-07 삼성전자주식회사 스탬프 구조체 및 이를 이용한 전사 방법
US11472171B2 (en) * 2014-07-20 2022-10-18 X Display Company Technology Limited Apparatus and methods for micro-transfer-printing
CN107215111B (zh) * 2017-06-14 2023-03-28 浙江大学 一种磁控转印印章及磁控转移印刷方法
KR102094005B1 (ko) * 2018-05-29 2020-03-27 한밭대학교 산학협력단 롤투롤 방식을 통한 마이크로컨택 프린팅 시스템
US10748793B1 (en) 2019-02-13 2020-08-18 X Display Company Technology Limited Printing component arrays with different orientations
CN113433062B (zh) * 2021-06-15 2022-07-08 清华大学 印章单元与样品之间的接合力的测试方法及测试装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756165A (en) 1972-05-22 1973-09-04 Interpace Corp Method for printing on ceramic tableware
JPS5937234B2 (ja) * 1977-01-17 1984-09-08 本田技研工業株式会社 曲面印刷方法及び印刷装置
US5512131A (en) 1993-10-04 1996-04-30 President And Fellows Of Harvard College Formation of microstamped patterns on surfaces and derivative articles
US6180239B1 (en) 1993-10-04 2001-01-30 President And Fellows Of Harvard College Microcontact printing on surfaces and derivative articles
US5669303A (en) 1996-03-04 1997-09-23 Motorola Apparatus and method for stamping a surface
US5731152A (en) * 1996-05-13 1998-03-24 Motorola, Inc. Methods and systems for biological reagent placement
US5937758A (en) * 1997-11-26 1999-08-17 Motorola, Inc. Micro-contact printing stamp
US5947027A (en) 1998-09-08 1999-09-07 Motorola, Inc. Printing apparatus with inflatable means for advancing a substrate towards the stamping surface
US6221579B1 (en) * 1998-12-11 2001-04-24 Kimberly-Clark Worldwide, Inc. Patterned binding of functionalized microspheres for optical diffraction-based biosensors
AU2001271799A1 (en) 2000-06-30 2002-01-14 President And Fellows Of Harvard College Electric microcontact printing method and apparatus
WO2002014078A2 (en) * 2000-08-14 2002-02-21 Surface Logix, Inc. Deformable stamp for patterning three-dimensional surfaces
US20020130444A1 (en) 2001-03-15 2002-09-19 Gareth Hougham Post cure hardening of siloxane stamps for microcontact printing
US7338613B2 (en) 2001-09-10 2008-03-04 Surface Logix, Inc. System and process for automated microcontact printing
WO2003065120A2 (en) 2002-01-11 2003-08-07 Massachusetts Institute Of Technology Microcontact printing
WO2003099463A2 (en) * 2002-05-27 2003-12-04 Koninklijke Philips Electronics N.V. Method and device for transferring a pattern from a stamp to a substrate

Also Published As

Publication number Publication date
MXPA06007383A (es) 2007-01-26
JP2007516869A (ja) 2007-06-28
US20050139103A1 (en) 2005-06-30
US6981445B2 (en) 2006-01-03
KR101198500B1 (ko) 2012-11-06
EP1701849A1 (en) 2006-09-20
KR20070019969A (ko) 2007-02-16
CN1898091A (zh) 2007-01-17
WO2005061237A1 (en) 2005-07-07
CN100540320C (zh) 2009-09-16
CA2541239A1 (en) 2005-07-07

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