JP2007508542A5 - - Google Patents

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Publication number
JP2007508542A5
JP2007508542A5 JP2006533851A JP2006533851A JP2007508542A5 JP 2007508542 A5 JP2007508542 A5 JP 2007508542A5 JP 2006533851 A JP2006533851 A JP 2006533851A JP 2006533851 A JP2006533851 A JP 2006533851A JP 2007508542 A5 JP2007508542 A5 JP 2007508542A5
Authority
JP
Japan
Prior art keywords
processing chamber
cover sheet
control layer
processing apparatus
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006533851A
Other languages
English (en)
Japanese (ja)
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JP2007508542A (ja
Filing date
Publication date
Priority claimed from US10/682,597 external-priority patent/US7718133B2/en
Application filed filed Critical
Publication of JP2007508542A publication Critical patent/JP2007508542A/ja
Publication of JP2007508542A5 publication Critical patent/JP2007508542A5/ja
Pending legal-status Critical Current

Links

JP2006533851A 2003-10-09 2004-08-16 多層試料処理装置および方法 Pending JP2007508542A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/682,597 US7718133B2 (en) 2003-10-09 2003-10-09 Multilayer processing devices and methods
PCT/US2004/026546 WO2005039769A1 (en) 2003-10-09 2004-08-16 Multilayer sample processing devices and methods

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010022869A Division JP5086381B2 (ja) 2003-10-09 2010-02-04 多層試料処理装置

Publications (2)

Publication Number Publication Date
JP2007508542A JP2007508542A (ja) 2007-04-05
JP2007508542A5 true JP2007508542A5 (https=) 2007-09-06

Family

ID=34422558

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006533851A Pending JP2007508542A (ja) 2003-10-09 2004-08-16 多層試料処理装置および方法
JP2010022869A Expired - Fee Related JP5086381B2 (ja) 2003-10-09 2010-02-04 多層試料処理装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010022869A Expired - Fee Related JP5086381B2 (ja) 2003-10-09 2010-02-04 多層試料処理装置

Country Status (9)

Country Link
US (2) US7718133B2 (https=)
EP (2) EP1682271B1 (https=)
JP (2) JP2007508542A (https=)
CN (1) CN1867406B (https=)
AT (1) ATE448876T1 (https=)
AU (1) AU2004283174B2 (https=)
CA (1) CA2541900A1 (https=)
DE (1) DE602004024229D1 (https=)
WO (1) WO2005039769A1 (https=)

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